Arrangement for analysis of substances at the surface of an optical sensor
Arrangement for analysis of substances at or near the surface of an optical sensor with at least one wave-guiding film and at least one multidiffraction grating coupler for in-coupling and out-coupling of light beams, in which at least two light beams enclosing an angle .alpha. relative to one another are coupled in and by which at least two light beams enclosing an angle .phi. relative to one another are coupled out, and with a detection system for detecting the out-coupled light beams, wherein in-coupling and out-coupling are effected on one and the same side of the sensor and the in-couple beams and out-couple beams lie in different quadrants of the plane of incident light, and the angle .alpha. between the in-couple beams is greater than the angle .phi. between the out-couple beams. The arrangement has multiple uses for determining physical or chemical measured quantities based on the interaction of the guided light waves with the medium at or near the sensor surface.
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Claims
1. An arrangement for analysis of substances at or near the surface of an optical sensor, comprising:
- at least one wave-guiding film and at least one multidiffraction grating coupler for in-coupling and out-coupling of light beams;
- wherein at least two separate light beams enclosing an angle.alpha. relative to one another are coupled in and by which at least two light beams enclosing an angle.phi. relative to one another are coupled out;
- a detection system for detecting the out-coupled light beams; and
- wherein in-coupling and out-coupling are effected on one and the same side of the sensor and all the in-couple beams lie in a first quadrant of the plane of incident light and all the out-couple beams lie in a second quadrant of the plane of incident light, said first quadrant being different from said second quadrant, and the angle.alpha. between the in-couple beams is greater than the angle.phi. between the out-couple beams.
2. The arrangement according to claim 1, wherein the in-coupled light beams are polarized orthogonally relative to one another.
3. The arrangement according to claim 2, wherein the angular region of the out-couple beams lies within the angular region determined by the in-couple beams reflected at the sensor.
4. The arrangement according to claim 1, wherein the angular region of the out-couple beams lies within the angular region determined by the in-couple beams reflected at the sensor.
5. The arrangement according to claim 1, with the use of a position-resolving detection system, wherein an angle.alpha. of more than 6 degrees exists between the in-couple beams.
6. The arrangement according to claim 5, wherein an angle.alpha. between the in-couple beams lies in a range of approximately 26 degrees plus/minus 20 degrees.
7. The arrangement according to claim 5, wherein an angle.phi. between the out-coupled beams is than 6 degrees.
8. The arrangement according to claim 7, wherein an angle.phi. between the out-coupled beams lies in the range of approximately 0.2 to 3 degrees.
9. The arrangement according to claim 1, including means for independent adjustment of the in-couple angles of the in-coupled light bundles.
10. The arrangement according to claim 1, with the use of a position-resolving detection system, wherein an angle.alpha. of greater than 3 degrees lies between the in-couple beams.
11. The arrangement for analysis of substances according to claim 1, wherein the in-couple beams are adjustable with respect to their in-coupling angle and are also slightly convergent.
12. The arrangement according to claim 11, wherein the angles for the two in-couple beams are adjusted at the same time by a common element.
13. The arrangement according to claim 11, wherein the diameter of the in-couple beams in the sensor plane lies in the range of 10.mu.m to 1 mm.
14. The arrangement according to claim 1, wherein the optical arrangement for in-coupling and out-coupling is contained in a common housing.
15. The arrangement according to claim 14, wherein an arrangement of the light source outside a housing containing the rest of the measuring arrangement, wherein the light source is a laser or spectral lamp, and the light of the light source reaches the optical arrangement via a lightguide unit.
16. The arrangement according to claim 15, wherein a beam shaping system is arranged downstream of the light source for adapting the beam parameters, said beam shaping system having different characteristics parallel to and vertically to the plane of incidence.
17. The arrangement according to claim 16, wherein the beam shaping system is formed of holographic elements.
18. The arrangement according to claim 14, wherein components with adapted thermal expansion are used for optical elements and support elements for a temperature-stable image scale.
19. The arrangement according to claim 1, wherein components with adapted thermal expansion are used for optical elements and support elements for a temperature-stable image scale.
20. The arrangement according to claim 1, including means for photoelectric detection of the interference pattern generated by the overlapping of the out-coupled beams.
21. The arrangement according to claim 20, wherein the imaging of the interference pattern by at least one imaging element on a position-resolving detector which is connected with an evaluating unit.
22. The arrangement according to claim 21, wherein the position-resolving detector is a CCD element.
23. The arrangement according to claim 21, wherein the imaging element is at least one lens.
24. The arrangement according to claim 21, wherein the imaging element is at least one mirror.
25. The arrangement according to claim 1, wherein the out-coupled beam components are focussed on at least one receiver connected with an evaluating unit in order to determine the position and the angle.phi. of the out-coupled beams.
26. The arrangement according to claim 25, wherein the receiver is a PSD.
27. The arrangement according to claim 25, including an imaging beam path which is folded by means of mirrors.
28. The arrangement according to claim 25, including an alternating focussing out of the out-coupled radiation components on a position-resolving receiver.
29. The arrangement according to claim 28, wherein the in-coupling angles of the in-coupled beams are adjusted in phase synchronization relative to one another for time-offset out-coupling of the beam components.
30. The arrangement according to claim 1, wherein at least a portion of the optical elements are arranged in a common support block.
31. The arrangement according to claim 30, wherein the construction of at least a portion of the optical beam paths as bore holes is provided in the support block.
32. The arrangement according to claim 30, wherein a support block material is selected from the group consisting of invar, Zerodur or gray cast iron.
33. The arrangement according to claim 30, wherein the construction of a portion of the support block is made from a material whose thermal coefficient counteracts a thermal expansion of the rest of the support elements and/or the employed optics leading to measurement errors.
34. The arrangement according to claim 1, including means for using the angle conditions wherein an angle.alpha. of more than 6 degrees exists between the in-couple beams for the differential angle of in-coupling and out-coupling for absorption measurement.
35. The arrangement according to claim 1, including means for using the angle conditions wherein an angle.alpha. between the in-couple beams lies in a range of approximately 26 degrees plus/minus 20 degrees for the differential angle of in-coupling and out-coupling for absorption measurement.
36. The arrangement according to claim 1, including means for using the angle conditions wherein an angle.phi. between the out-coupled beams is less than 6 degrees for the differential angle of in-coupling and out-coupling for absorption measurement.
37. The arrangement according to claim 1, including means for using the angle conditions wherein an angle.phi. between the out-coupled beams lies in a range of approximately 0.2 to 3 degrees for the differential angle of in-coupling and out-coupling for absorption measurement.
38. The arrangement according to claim 1, including means for using the angle conditions wherein an angle of greater than 3 degrees lies between the in-couple beams for the differential angle of in-coupling and out-coupling for absorption measurement.
39. An arrangement for analysis of substances by measurement of light absorption at or near the surface of an optical sensor, comprising:
- at least one wave-guiding film and at least one multidiffraction grating coupler for in-coupling and out-coupling of light beams;
- wherein at least two separate light beams are coupled in and at least two light beams are coupled out, the in-couple beams lying at an in-coupling angle relative to one another;
- a detection system for detecting the out-coupled light beams; and
- wherein in-coupling and out-coupling are effected on one and the same side of the sensor, all the in-couple beams lie in a first quadrant of the plane of incident light and all the out-couple beams lie in a second quadrant of the plane of incident light, said first quadrant being different from said second quadrant, and the in-couple beams are adjustable with respect to the in-coupling angle and are also slightly convergent.
40. The arrangement according to claim 39, including means for using said angle conditions for the differential angle of in-coupling and out-coupling for absorption measurement.
41. An arrangement for analysis of substances at or near the surface of an optical sensor, comprising:
- at least one wave-guiding film and at least one multidiffraction grating coupler for in-coupling and out-coupling of light beams;
- wherein at least two light beams enclosing an angle.alpha. relative to one another are coupled in, said at least two light beams lying in one and the same quadrant of the plane of incident light; and
- wherein the light from a light source reaches at least one beam splitter which splits it into at least two partial beams and the partial beams are guided into the sensor surface via beam-deflecting optics and beam offsetting units and at least one imaging unit.
42. The arrangement according to claim 41, wherein the radiated light is split into two orthogonally polarized partial beams.
43. The arrangement according to claim 41, wherein a polygon prism is provided for beam splitting and for beam deflection, and wherein at least one surface of the polygon prism is provided with a partially or fully reflecting coating.
44. The arrangement according to claim 41, wherein the incident light beams are focussed on the sensor plane.
45. The arrangement according to claim 44, wherein focussing is effected by imaging mirrors and/or by at least one lens.
46. The arrangement according to claim 45, wherein the lens or lenses for focussing on the sensor plane is/are constructed as holographic elements.
47. The arrangement according to claim 45, wherein the lens or lenses for focussing on the sensor plane is/are constructed as Fresnel lenses.
48. The arrangement according to claim 41, wherein the incident light beams are imaged by a first imaging unit in an intermediate focus in the vicinity of a beam offsetting unit and are focussed on the sensor surface by a second beam offsetting unit.
49. The arrangement according to claim 41, wherein the beam offsetting units are rotatable glass parallelepipeds.
50. The arrangement according to claim 41, wherein the beam offsetting units are rotatable mirrors.
51. The arrangement according to claim 41, wherein the beam offsetting units are controllable slit diaphragms which open only a portion of the beam path.
52. The arrangement according to claim 51, wherein the slit diaphragms are constructed as LCD units, linearly mechanically adjustable diaphragms, or linearly mechanically adjustable filters with position-variable transmission characteristics.
53. The arrangement according to claim 41, wherein beam splitting is effected by a glass-fiber branching element.
54. The arrangement according to claim 41, wherein at least a portion of the optical elements are arranged in a common support block.
55. An arrangement according to claim 20, including means for imaging an interference pattern of radiation components coupled out of a waveguide via the multidiffraction grating coupler, said means for imaging being formed of a combination of folded beam path and imaging mirrors arranged downstream of an exit location and operating to image the interference pattern on a position-resolving receiver via a polarizer.
56. The arrangement according to claim 55, including a telescopic imaging beam path.
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Type: Grant
Filed: Jul 7, 1995
Date of Patent: Jan 27, 1998
Assignees: Carl Zeiss Jena GmbH (Jena), F. Hoffman-La Roche (Basel), Schott Glaswerke (Mainz)
Inventors: Christof Fattinger (Blauen), Burkhard Danielzik (Ingelheim), Dieter Graefe (Jena), Martin Heming (Saulheim), Frank-Thomas Lentes (Bingen)
Primary Examiner: Frank G. Font
Assistant Examiner: Robert Kim
Law Firm: McAulay Fisher Nissen Goldberg & Kiel, LLP
Application Number: 8/481,376
International Classification: G01B 902;
