Semiconductor deposition reactor ring

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Description

FIG. 1 is a top perspective view of a semiconductor deposition reactor ring;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a back view thereof;

FIG. 5 is a left view thereof;

FIG. 6 is a right view thereof;

FIG. 7 is a top view thereof; and,

FIG. 8 is a bottom view thereof.

The broken lines in the drawings illustrate portions of the semiconductor deposition reactor ring that form no part of the claimed design.

Claims

The ornamental design for a semiconductor deposition reactor ring, as shown and described.

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Patent History
Patent number: D1028913
Type: Grant
Filed: Jun 30, 2021
Date of Patent: May 28, 2024
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Rutvij Naik (Tempe, AZ), Junwei Su (Tempe, AZ), Wentao Wang (Chandler, AZ), Chuqin Zhou (Tempe, AZ), Xing Lin (Chandler, AZ)
Primary Examiner: Shawn T Gingrich
Assistant Examiner: Caleb M Baker
Application Number: 29/797,476