Semiconductor deposition reactor support
Description
The broken lines depict portions of the semiconductor deposition reactor support that form no part of the claimed design.
Claims
The ornamental design for a semiconductor deposition reactor support, as shown and described.
Referenced Cited
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Patent History
Patent number: D1151519
Type: Grant
Filed: Mar 25, 2024
Date of Patent: Oct 6, 2026
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Rutvij Naik (Tempe, AZ), Junwei Su (Chandler, AZ), Wentao Wang (Chandler, AZ), Chuqin Zhou (Tempe, AZ), Xing Lin (Chandler, AZ)
Primary Examiner: Richard Edgar
Assistant Examiner: Caleb M Baker
Application Number: 29/934,264
Type: Grant
Filed: Mar 25, 2024
Date of Patent: Oct 6, 2026
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Rutvij Naik (Tempe, AZ), Junwei Su (Chandler, AZ), Wentao Wang (Chandler, AZ), Chuqin Zhou (Tempe, AZ), Xing Lin (Chandler, AZ)
Primary Examiner: Richard Edgar
Assistant Examiner: Caleb M Baker
Application Number: 29/934,264
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)