Wafer boat
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Description
FIG. 1 is a front view of a wafer boat showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a left side view thereof, the right side view being a mirror image and, therefore, not shown;
FIG. 6 is a cross sectional view thereof on the section line 6--6 in FIG. 1;
FIG. 7 is a cross sectional view thereof on the section line 7--7 in FIG. 3; and,
FIG. 8 is a front/top/right side perspective view thereof.
Referenced Cited
Patent History
Patent number: D378823
Type: Grant
Filed: Nov 30, 1995
Date of Patent: Apr 15, 1997
Assignee: Tokyo Electron Limited (Tokyo-to)
Inventors: Shingo Watanabe (Kanagawa-Ken), Hirofumi Kitayama (Kanagawa-Ken)
Primary Examiner: Antoine Duval Davis
Law Firm: Ladas & Parry
Application Number: 0/47,277
Type: Grant
Filed: Nov 30, 1995
Date of Patent: Apr 15, 1997
Assignee: Tokyo Electron Limited (Tokyo-to)
Inventors: Shingo Watanabe (Kanagawa-Ken), Hirofumi Kitayama (Kanagawa-Ken)
Primary Examiner: Antoine Duval Davis
Law Firm: Ladas & Parry
Application Number: 0/47,277
Classifications