Wafer boat

- Tokyo Electron Limited
Description

FIG. 1 is a front view of a wafer boat showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a left side view thereof, the right side view being a mirror image and, therefore, not shown;

FIG. 6 is a cross sectional view thereof on the section line 6--6 in FIG. 1;

FIG. 7 is a cross sectional view thereof on the section line 7--7 in FIG. 3; and,

FIG. 8 is a front/top/right side perspective view thereof.

Referenced Cited
U.S. Patent Documents
D361752 August 29, 1995 Yamaga
D366868 February 6, 1996 Ohsawa
5482559 January 9, 1996 Imai et al.
5510146 April 23, 1996 Miyasaka
Patent History
Patent number: D378823
Type: Grant
Filed: Nov 30, 1995
Date of Patent: Apr 15, 1997
Assignee: Tokyo Electron Limited (Tokyo-to)
Inventors: Shingo Watanabe (Kanagawa-Ken), Hirofumi Kitayama (Kanagawa-Ken)
Primary Examiner: Antoine Duval Davis
Law Firm: Ladas & Parry
Application Number: 0/47,277