Heat retaining tube for use in a semiconductor wafer heat processing apparatus

Description

FIG. 1 a perspective view of a heat retaining tube for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a top plan view thereof;

FIG. 3 a front elevational view thereof;

FIG. 4 a cross sectional view taken along line IV--IV in FIG. 3;

FIG. 5 a cross sectional view taken along line V--V in FIG. 3;

FIG. 6 a rear elevational view thereof;

FIG. 7 a left side view thereof, the right side view being a mirror image of the left view; and,

FIG. 8 a bottom plan view thereof.