Heat retaining tube for use in a semiconductor wafer heat processing apparatus

Description

FIG. 1: a perspective view of a heat retaining tube for use in a semiconductor wafer heat processing apparatus;

FIG. 2: a top plan view thereof;

FIG. 3: a front elevational view thereof, the rear elevational view is identical with the front view;

FIG. 4: a right side view thereof, the left side view being a mirror image of the right view;

FIG. 5: a bottom plan view thereof; and,

FIG. 6: a cross sectional view thereof taken along line VI--VI in FIG. 3.