Apparatus for manufacturing a semiconductor for a liquid crystal display
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Description
FIG. 1 is a front elevational view of apparatus for manufacturing a semiconductor for a liquid crystal display, showing our new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof; and,
FIG. 6 is a bottom plan view thereof.
Referenced Cited
Patent History
Patent number: D415184
Type: Grant
Filed: Jul 1, 1998
Date of Patent: Oct 12, 1999
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Noriyuki Anai (Goushimachi), Tsutae Omori (Yamanashi-ken), Shinkou Matsumoto (Kumamoto)
Primary Examiner: Antoine Duval Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 0/90,228
Type: Grant
Filed: Jul 1, 1998
Date of Patent: Oct 12, 1999
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Noriyuki Anai (Goushimachi), Tsutae Omori (Yamanashi-ken), Shinkou Matsumoto (Kumamoto)
Primary Examiner: Antoine Duval Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 0/90,228
Classifications
