Process tube for manufacturing semiconductor wafers

- Tokyo Electron Limited
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Description

FIG. 1 is a reference perspective view of the process tube for manufacturing semiconductor wafers;

FIG. 2 is a reference perspective view of the process tube as seen from another direction;

FIG. 3 is a front view of the process tube;

FIG. 4 is a back view thereof;

FIG. 5 is a left side view thereof. A right side view thereof is a mirror image thereto;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is a sectional view taken along line 8—8 in FIG. 6; and,

FIG. 9 is a sectional view taken along line 9—9 in FIG. 3.

Claims

The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.

Referenced Cited
U.S. Patent Documents
D222643 November 1971 Martin et al.
3786704 January 1974 Lachaussee et al.
4419076 December 6, 1983 Kirshman
4598665 July 8, 1986 Tanaka et al.
5025936 June 25, 1991 Lamoureaux
D331166 November 24, 1992 Ohadi
5505385 April 9, 1996 Gengler
5618349 April 8, 1997 Yuuki
D395210 June 16, 1998 Almsig
5948300 September 7, 1999 Gero et al.
6520348 February 18, 2003 Bulusu et al.
D471773 March 18, 2003 Weiss et al.
6634882 October 21, 2003 Goodman
6881295 April 19, 2005 Nagakura
D521465 May 23, 2006 Ishii et al.
D533413 December 12, 2006 Wax
20010050054 December 13, 2001 Kwag et al.
20020092815 July 18, 2002 Kim et al.
20030221779 December 4, 2003 Okuda et al.
Patent History
Patent number: D552047
Type: Grant
Filed: Aug 25, 2005
Date of Patent: Oct 2, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Kazuyuki Sugawara (Tokyo-to)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/236,992