Wafer boat

- Tokyo Electron Limited
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Description

FIG. 1 is a side sectional view of the wafer boat as viewed along line 1—1 in FIG. 6.

FIG. 2 is a cross sectional view of the wafer boat as viewed along line 2—2 in FIG. 9.

FIG. 3 is another side sectional view of the wafer boat.

FIG. 4 is another side sectional view of the wafer boat.

FIG. 5 is perspective view of the wafer boat.

FIG. 6 is a bottom view of the wafer boat.

FIG. 7 is an enlarged, side, isolated view of a portion of the wafer boat within the area 7—7 in FIG. 9.

FIG. 8 is a top view of the wafer boat; and,

FIG. 9 is another side view of the wafer boat with focus on the portion shown in FIG. 7.

The rear elevation appears symmetrical with an elevational view.

Broken lines are used throughout the drawings to disclose the environment related to the claimed design. Dash lines are used throughout the drawings to define the boundary of the claimed design.

Claims

The ornamental design for a wafer boat, as shown and described.

Referenced Cited
U.S. Patent Documents
5458688 October 17, 1995 Watanabe
D404371 January 19, 1999 Shimazu
D409158 May 4, 1999 Shimazu
6056123 May 2, 2000 Niemirowski et al.
6065615 May 23, 2000 Uchiyama et al.
6110285 August 29, 2000 Kitazawa et al.
6171400 January 9, 2001 Wingo
D551634 September 25, 2007 Sugawara
20020092815 July 18, 2002 Kim et al.
20020113027 August 22, 2002 Minami et al.
20020130061 September 19, 2002 Hengst
Patent History
Patent number: D580894
Type: Grant
Filed: Nov 1, 2006
Date of Patent: Nov 18, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Izumi Sato (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/268,190