Middle plate for the shower head
Latest Tokyo Electron Limited Patents:
- SUBSTRATE PROCESSING METHOD
- SUBSTRATE PROCESSING APPARATUS AND COOLING METHOD
- SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL DEVICE, AND TEMPERATURE CONTROL METHOD
- SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM
- LOCALIZED WAFER PRE-COOLING FOR HYPERSPECTRAL IMAGING SYSTEM AND METHOD FOR THREE-DIMENSION (3D) DEFECT ANALYSIS IN WAFERS
The broken lines shown in the drawings are for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a middle plate for the shower head, as shown and described.
Type: Grant
Filed: Mar 24, 2005
Date of Patent: Nov 18, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Hachishiro Iizuka (Yamanashi), Koichiro Kimura (Yamanashi), Akira Yasumuro (Yamanashi)
Primary Examiner: Robin V Webster
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/226,149