Middle plate for the shower head
Latest Tokyo Electron Limited Patents:
- Method of transporting workpiece and processing apparatus
- Apparatus and methods for beam processing of substrates
- Purification processing apparatus, substrate processing system, and processing method
- Plasma processing apparatus, analysis apparatus, and storage medium
- Etching method and etching apparatus
The broken lines shown in the drawings are for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a middle plate for the shower head, as shown and described.
Type: Grant
Filed: Mar 24, 2005
Date of Patent: Nov 18, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Hachishiro Iizuka (Yamanashi), Koichiro Kimura (Yamanashi), Akira Yasumuro (Yamanashi)
Primary Examiner: Robin V Webster
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/226,149