Wafer carrying-in/out machine

- Tokyo Electron Limited
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Description

FIG. 1 is a top plan view of a wafer carrying-in/out machine or the like, showing our new design;

FIG. 2 is a left side elevational view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top, front and left side perspective view thereof;

FIG. 7 is a front elevational view thereof; and,

FIG. 8 is a left side elevation thereof showing the wafer carrying-in/out machine when ready for shipment.

The phantom line showing in the figures is hereby disclaimed and forms no part of the claimed invention.

Claims

The ornamental design for a wafer carrying-in/out machine, as shown and described.

Referenced Cited
U.S. Patent Documents
5645233 July 8, 1997 Chen
D388103 December 23, 1997 Gotou et al.
D405809 February 16, 1999 Mariotta et al.
D406155 February 23, 1999 Mariotta et al.
Foreign Patent Documents
000605431-0001 November 2006 EM
Other references
  • U.S. Appl. No. 29/266,907, filed Oct. 2, 2006, Hosaka, et al.
  • U.S. Appl. No. 29/297,744, filed Nov. 16, 2007, Hosaka, et al.
Patent History
Patent number: D592230
Type: Grant
Filed: Nov 16, 2007
Date of Patent: May 12, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Hiroki Hosaka (Nirasaki), Shuji Akiyama (Nirasaki), Tadashi Obikane (Nirasaki)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/297,744