Wafer carrying-in/out apparatus

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of a wafer carrying-in/out apparatus showing our design;

FIG. 2 is a left side elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a top, front and right side perspective view thereof; and,

FIG. 8 is a top, front and right side perspective view thereof shown with the doors thereof in an open position.

Claims

The ornamental design for a wafer carrying-in/out apparatus or the like, as shown and described.

Referenced Cited
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Patent History
Patent number: D602882
Type: Grant
Filed: Aug 4, 2008
Date of Patent: Oct 27, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Hiroki Hosaka (Nirasaki), Shuji Akiyama (Nirasaki), Tadashi Obikane (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/322,398
Classifications
Current U.S. Class: Electron Or Vacuum Tube (23) (D13/180)