Heater for semiconductor manufacturing
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Description
The broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a heater for semiconductor manufacturing, as shown and described.
Referenced Cited
Patent History
Patent number: D604257
Type: Grant
Filed: Apr 27, 2006
Date of Patent: Nov 17, 2009
Assignees: Tokyo Electron Limited (Tokyo), Toshiba Ceramics Co., Ltd. (Tokyo)
Inventors: Yasuhiro Inatomi (Tokyo), Kenichi Yamaga (Tokyo), Hiroyuki Honma (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/258,749
Type: Grant
Filed: Apr 27, 2006
Date of Patent: Nov 17, 2009
Assignees: Tokyo Electron Limited (Tokyo), Toshiba Ceramics Co., Ltd. (Tokyo)
Inventors: Yasuhiro Inatomi (Tokyo), Kenichi Yamaga (Tokyo), Hiroyuki Honma (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/258,749
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)