Wafer carrying-in/out apparatus
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The features shown in broken lines in the drawings form no part of the claimed design.
Claims
The ornamental design for a wafer carrying-in/out apparatus or the like, as shown and described.
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Type: Grant
Filed: Oct 2, 2006
Date of Patent: Jan 5, 2010
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Hiroki Hosaka (Nirasaki), Shuji Akiyama (Nirasaki), Tadashi Obikane (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/266,907