Process tube for manufacturing semiconductor wafers
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Environmental structure, which forms no part of the claimed design, is illustrated in broken lines.
The design is a type of process tube for decompression (vacuum) equipment.
Claims
The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.
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Type: Grant
Filed: Nov 8, 2007
Date of Patent: Jul 13, 2010
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Hirofumi Kaneko (Iwate)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/290,247