Segmented electroplating anode and anode segment

- Novellus Systems, Inc.
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Description

FIG. 1 is a top perspective view of a segmented electroplating anode and anode segment showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a right side elevation view thereof;

FIG. 7 is a top perspective view shown in environmental use; and,

FIG. 8 is a bottom perspective view shown in environmental use.

The broken lines shown represent unclaimed subject matter and form no part of the claimed design.

Claims

We claim the ornamental design for a segmented electroplating anode and anode segment, as shown and described.

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Other references
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Patent History
Patent number: D668211
Type: Grant
Filed: Sep 10, 2010
Date of Patent: Oct 2, 2012
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Jingbin Feng (Lake Oswego, OR), Marshall Stowell (Wilsonville, OR)
Primary Examiner: Derrick Holland
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/369,658
Classifications