Wafer attracting plate
Latest Tokyo Electron Limited Patents:
The ornamental design for wafer attracting plate, as shown and described.
Filed: Jan 22, 2009
Date of Patent: Feb 9, 2010
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Munetoshi Nagasaka (Nirasaki), Ikuo Ogasawara (Nirasaki), Eiichi Shinohara (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/331,222