Baffle plate for manufacturing semiconductor
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The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for a baffle plate for manufacturing semiconductor, as shown and described.
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Type: Grant
Filed: Mar 19, 2012
Date of Patent: Dec 3, 2013
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Naoki Matsumoto (Sendai), Jun Yoshikawa (Sendai)
Primary Examiner: Patricia Palasik
Application Number: 29/416,088