Electrostatic chuck
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The patent or application file contains at least one drawing executed in color. Copies of this patent or patent application publication with color drawing(s) will be provided by the Office upon request and payment of the necessary fee.
The broken lines in the figures form no part of the claimed design.
The drawings are lined for color. The pattern on the surface of the claimed design represents the color copper.
Claims
The ornamental design for an electrostatic chuck, as shown and described.
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Type: Grant
Filed: Nov 22, 2011
Date of Patent: Jul 8, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Daniel Martin (Cupertino, CA), Monika Agarwal (Fremont, CA)
Primary Examiner: Patricia Palasik
Application Number: 29/407,085