Electrostatic chuck

- Applied Materials, Inc.
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Description

The patent or application file contains at least one drawing executed in color. Copies of this patent or patent application publication with color drawing(s) will be provided by the Office upon request and payment of the necessary fee.

FIG. 1 is a perspective view of an electrostatic chuck.

FIG. 2 is a top plan view of the electrostatic chuck of FIG. 1.

FIG. 3 is a front side view of the electrostatic chuck of FIG. 1, the other sides being identical.

FIG. 4 is a bottom plan view of the electrostatic chuck of FIG. 1.

FIG. 5 is a cross-sectional view of the electrostatic chuck of FIG. 1 taken along section line 5-5 of FIG. 4.

FIG. 6 is an enlarged partial view of FIG. 5.

FIG. 7 is an enlarged partial view of FIG. 1.

FIG. 8 is a color photograph illustrating the electrostatic chuck of FIG. 2 from a top view; and,

FIG. 9 is color photograph illustrating the electrostatic chuck of FIG. 1 from a perspective view.

The broken lines in the figures form no part of the claimed design.

The drawings are lined for color. The pattern on the surface of the claimed design represents the color copper.

Claims

The ornamental design for an electrostatic chuck, as shown and described.

Referenced Cited
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5822171 October 13, 1998 Shamouilian et al.
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6028762 February 22, 2000 Kamitani
6215642 April 10, 2001 Sogard
6583980 June 24, 2003 Wang et al.
D490827 June 1, 2004 Okugawa
D497171 October 12, 2004 Okugawa
D534135 December 26, 2006 Monique
D561206 February 5, 2008 Kitabayashi
20030198004 October 23, 2003 Hiramatsu et al.
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Patent History
Patent number: D708651
Type: Grant
Filed: Nov 22, 2011
Date of Patent: Jul 8, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Daniel Martin (Cupertino, CA), Monika Agarwal (Fremont, CA)
Primary Examiner: Patricia Palasik
Application Number: 29/407,085
Classifications
Current U.S. Class: Tool Or Work Holder (D15/140)