Roller shaft for substrate cleaning
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The internal material revealed by the cross-sectional slice, illustrated in
The particular cross-hatching patterns in
The broken lines in the drawings illustrate portions of the roller shaft for substrate cleaning. the broken lines form no part of the claimed design.
Claims
The ornamental design for a roller shaft for substrate cleaning, as shown and described.
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Type: Grant
Filed: Jul 18, 2013
Date of Patent: Apr 28, 2015
Assignee: Ebara Corporation (Tokyo)
Inventors: Tomoatsu Ishibashi (Tokyo), Hiroshi Kojima (Tokyo)
Primary Examiner: Jeffrey D Asch
Assistant Examiner: Natasha Vujcic
Application Number: 29/461,043