Roller shaft for substrate cleaning

- Ebara Corporation
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Description

FIG. 1 is a front view of a roller shaft for substrate cleaning showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a plane view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is an enlarged front view thereof;

FIG. 6 is an enlarged perspective view thereof;

FIG. 7 is another front view, showing the cross-sectional cut line thereof;

FIG. 8 is a cross-section view taken along the line 8-8 of FIG. 1 thereof;

FIG. 9 is an enlarged plane view of portion 9 of FIG. 3 thereof;

FIG. 10 is an enlarged right side view of portion 10 of FIG. 4 thereof; and,

FIG. 11 is a cross-section view taken along the line 11-11 of FIG. 7 thereof.

The internal material revealed by the cross-sectional slice, illustrated in FIGS. 8 and 11, forms no part of the claimed design.

The particular cross-hatching patterns in FIGS. 8 and 11 do not represent any particular materials.

The broken lines in the drawings illustrate portions of the roller shaft for substrate cleaning. the broken lines form no part of the claimed design.

Claims

The ornamental design for a roller shaft for substrate cleaning, as shown and described.

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Patent History
Patent number: D728177
Type: Grant
Filed: Jul 18, 2013
Date of Patent: Apr 28, 2015
Assignee: Ebara Corporation (Tokyo)
Inventors: Tomoatsu Ishibashi (Tokyo), Hiroshi Kojima (Tokyo)
Primary Examiner: Jeffrey D Asch
Assistant Examiner: Natasha Vujcic
Application Number: 29/461,043