Heater for semiconductor manufacturing apparatus
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Description
Claims
The ornamental design for a heater for semiconductor manufacturing apparatus, as illustrated and described.
Referenced Cited
U.S. Patent Documents
Other references
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Patent History
Patent number: D797690
Type: Grant
Filed: Sep 15, 2015
Date of Patent: Sep 19, 2017
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroshi Furutani (Kanagawa-ken), Yuusuke Sato (Tokyo)
Primary Examiner: Thomas Johannes
Assistant Examiner: Shawn T Gingrich
Application Number: 29/539,509
Type: Grant
Filed: Sep 15, 2015
Date of Patent: Sep 19, 2017
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroshi Furutani (Kanagawa-ken), Yuusuke Sato (Tokyo)
Primary Examiner: Thomas Johannes
Assistant Examiner: Shawn T Gingrich
Application Number: 29/539,509
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)