Heater for semiconductor manufacturing apparatus

- NuFlare Technology, Inc.
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Description

FIG. 1 is a top plan view of a heater for semiconductor manufacturing apparatus according to our new design;

FIG. 2 is a bottom plan view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a back view thereof;

FIG. 5 is a left side view thereof; and,

FIG. 6 is a right side view thereof.

Claims

The ornamental design for a heater for semiconductor manufacturing apparatus, as illustrated and described.

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Patent History
Patent number: D797690
Type: Grant
Filed: Sep 15, 2015
Date of Patent: Sep 19, 2017
Assignee: NuFlare Technology, Inc. (Yokohama)
Inventors: Hiroshi Furutani (Kanagawa-ken), Yuusuke Sato (Tokyo)
Primary Examiner: Thomas Johannes
Assistant Examiner: Shawn T Gingrich
Application Number: 29/539,509