Heater of substrate processing apparatus
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The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design. The dot-dash broken line arrows in the
Claims
We claim the ornamental design for a heater of substrate processing apparatus, as shown and described.
D310816 | September 25, 1990 | Sawato |
5872410 | February 16, 1999 | Sudoff |
D414503 | September 28, 1999 | Katoh |
D522456 | June 6, 2006 | Matsumoto |
D528573 | September 19, 2006 | Aoki |
D529058 | September 26, 2006 | Aoki |
D553569 | October 23, 2007 | Ciancanelli |
D578476 | October 14, 2008 | Takahashi |
D587648 | March 3, 2009 | Lannoch |
D633044 | February 22, 2011 | Bigler |
D694710 | December 3, 2013 | Unetich |
226478-0001 | February 2011 | IN |
- MIT News. <URL: http://news.mit.edu/2015/manufacture-continuous-rolls-graphene-0521.> May 21, 2015. Manufacturing Apparatus for continuous rolls.
Type: Grant
Filed: Aug 10, 2016
Date of Patent: Jul 31, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Motoya Takewaki (Toyami), Tetsuya Kosugi (Toyami)
Primary Examiner: Thomas Johannes
Assistant Examiner: Lauren McVey
Application Number: 29/573,941