Gas distribution plate

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a perspective view of a gas distribution plate showing my new design;

FIG. 2 is a top plan view thereof, the bottom plan view being a mirror image of the top plan view;

FIG. 3 is a front elevational view thereof, and the left side elevational view, the right side elevational view, and the rear elevational view being a mirror image of the front elevational view;

FIG. 4A is an enlarged cross-sectional view taken along line 4A-4A of FIG. 2;

FIG. 4B is an enlarged cross-sectional view taken along line 4B-4B of FIG. 2;

FIG. 4C is an enlarged cross-sectional view taken along line 4C-4C of FIG. 2;

FIG. 4D is an enlarged cross-sectional view taken along line 4D-4D of FIG. 2;

FIG. 5 is a top plan view of a gas distribution plate showing a broken line where one or more rows of apertures/holes with different sizes may be located. The one or more rows of apertures/holes may be arranged in a pattern of increasing diameter with radial distance as the pattern shown in FIG. 1; and,

FIG. 6 is a top plan view of a gas distribution plate according to another embodiment of FIG. 1 thereof, the bottom plan view being a mirror image of the top plan view.

The broken away symbols in the drawings indicate the appearance of any portion of the article between the break lines forms no part of the claimed design.

Claims

The ornamental design for a gas distribution plate, as shown and described.

Referenced Cited
U.S. Patent Documents
2643024 June 1953 Cronheim
D397275 August 25, 1998 DuBay, Sr.
6035766 March 14, 2000 Schirmer
D548705 August 14, 2007 Hayashi
D552308 October 2, 2007 Farr
D567597 April 29, 2008 Shamoon
D573466 July 22, 2008 White
D627193 November 16, 2010 Marin
D653990 February 14, 2012 Cherry
D663582 July 17, 2012 Moulin
D664000 July 24, 2012 Moulin
D752202 March 22, 2016 Berkman
9447499 September 20, 2016 Roy et al.
D797494 September 19, 2017 Mirchandani
10100408 October 16, 2018 Ha et al.
20060011298 January 19, 2006 Lim et al.
Patent History
Patent number: D858192
Type: Grant
Filed: Apr 27, 2018
Date of Patent: Sep 3, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventor: Kin Pong Lo (Fremont, CA)
Primary Examiner: Ricky Pham
Application Number: 29/645,683
Classifications
Current U.S. Class: D7/409