Cassette displacement prevention jig of semiconductor manufacturing apparatus
Latest KOKUSAI ELECTRIC CORPORATION Patents:
- SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
- PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
- SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR PROCESSING APPARATUS, AND RECORDING MEDIUM
Description
The broken lines in
Claims
The ornamental design for a cassette displacement prevention jig of semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
3534862 | October 1970 | Shambelan |
3766046 | October 1973 | Flint |
4762353 | August 9, 1988 | Molinaro |
5827396 | October 27, 1998 | Ko |
6270307 | August 7, 2001 | Sinha |
6595841 | July 22, 2003 | Lai |
D496339 | September 21, 2004 | Stanley |
D665759 | August 21, 2012 | Sato |
8291858 | October 23, 2012 | Hu |
D674365 | January 15, 2013 | Kajiwara |
D695240 | December 10, 2013 | Iida |
D701498 | March 25, 2014 | Iida |
8676375 | March 18, 2014 | Kraus |
9643303 | May 9, 2017 | Motomura |
10249524 | April 2, 2019 | den Hartog Besselink |
Patent History
Patent number: D877706
Type: Grant
Filed: Jul 17, 2017
Date of Patent: Mar 10, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Tadayoshi Karasawa (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/610,851
Type: Grant
Filed: Jul 17, 2017
Date of Patent: Mar 10, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Tadayoshi Karasawa (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/610,851
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)