Arm for wafer transportation for manufacturing semiconductor

- Tokyo Electron Limited
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Description

FIG. 1 is perspective view of an arm for wafer transportation for manufacturing semiconductor showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a front view thereof;

FIG. 5 is a rear view thereof;

FIG. 6 is a left side view thereof, the right side view being a mirror image;

FIG. 7 is an enlarged sectional view taken along line 7-7 of FIG. 2; and,

FIG. 8 is an enlarged sectional view taken along line 8-8 of FIG. 2.

The broken lines shown in the drawings represent portions of the arm for wafer transportation for manufacturing semiconductor that form no part of the claimed design.

Claims

The ornamental design for arm for wafer transportation for manufacturing semiconductor, as shown and described.

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Patent History
Patent number: D701498
Type: Grant
Filed: Mar 2, 2012
Date of Patent: Mar 25, 2014
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventors: Naruaki Iida (Koshi), Hideki Kajiwara (Koshi)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/414,723