Deposition ring for physical vapor deposition chamber
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Claims
The ornamental design for a deposition ring for a physical vapor deposition chamber, as shown and described.
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Type: Grant
Filed: Dec 17, 2018
Date of Patent: Jun 30, 2020
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: David Gunther (San Jose, CA), Cheng-Hsiung Tsai (Cupertino, CA), Kirankumar Neelasandra Savandaiah (Bangalore)
Primary Examiner: Amy C Wierenga
Application Number: 29/673,685