Gas supply nozzle for substrate processing apparatus
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Description
Claims
We claim the ornamental design for a gas supply nozzle for substrate processing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D890572
Type: Grant
Filed: Dec 7, 2018
Date of Patent: Jul 21, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Koji Saiki (Toyama), Makoto Tsuri (Toyama)
Primary Examiner: Derrick E Holland
Assistant Examiner: Andrew Kerr
Application Number: 29/672,652
Type: Grant
Filed: Dec 7, 2018
Date of Patent: Jul 21, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Koji Saiki (Toyama), Makoto Tsuri (Toyama)
Primary Examiner: Derrick E Holland
Assistant Examiner: Andrew Kerr
Application Number: 29/672,652
Classifications
Current U.S. Class:
D7/407;
Dispersal (i.e., Sprayer, Fogger, Nozzle, Aerator, Etc.) (4) (D23/213)