Ion shield plate for semiconductor manufacturing apparatus
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Description
Claims
The ornamental design for an ion shield plate for semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
1009027 | November 1911 | Troutman |
1168374 | January 1916 | Barker |
2094286 | September 1937 | Vogt |
D191184 | August 1961 | Scholz |
3778609 | December 1973 | Liberman |
D241875 | October 1976 | Insalaco |
D263776 | April 13, 1982 | Ashley |
4655913 | April 7, 1987 | Boersma |
D299522 | January 24, 1989 | Chalberg |
4910811 | March 27, 1990 | Izzi, Sr. |
D308419 | June 5, 1990 | Mason |
D419652 | January 25, 2000 | Hall |
D552308 | October 2, 2007 | Farr |
D563529 | March 4, 2008 | Labonte |
D577159 | September 16, 2008 | Hasapoglou |
D629875 | December 28, 2010 | Sears |
D670794 | November 13, 2012 | Antoniello |
D687471 | August 6, 2013 | Fu |
D694359 | November 26, 2013 | Schoenherr |
D701181 | March 18, 2014 | Meyer |
D701249 | March 18, 2014 | Fritsch |
D706407 | June 3, 2014 | Wang |
D712443 | September 2, 2014 | Simon |
D723153 | February 24, 2015 | Borkholder |
D726367 | April 7, 2015 | Dukat |
D732644 | June 23, 2015 | Yamagishi |
D746955 | January 5, 2016 | Corder |
D754829 | April 26, 2016 | Krombein |
D764205 | August 23, 2016 | Macari |
D779045 | February 14, 2017 | Johansen |
D787023 | May 16, 2017 | Ball |
D808248 | January 23, 2018 | Krombein |
D809094 | January 30, 2018 | Naslund |
D812519 | March 13, 2018 | Macari |
D816132 | April 24, 2018 | Nymark |
D830981 | October 16, 2018 | Jeong |
10101015 | October 16, 2018 | Benghozi et al. |
D851224 | June 11, 2019 | Krombein |
D858192 | September 3, 2019 | Lo |
D860498 | September 17, 2019 | Engle et al. |
D861129 | September 24, 2019 | Logar |
D861447 | October 1, 2019 | Strickland |
D868947 | December 3, 2019 | Cherng |
D874617 | February 4, 2020 | Chen |
D874870 | February 11, 2020 | Parker |
D881338 | April 14, 2020 | Chen |
D884873 | May 19, 2020 | Bortnick |
D886957 | June 9, 2020 | Song |
20040072510 | April 15, 2004 | Kinoshita |
20040093666 | May 20, 2004 | Zars |
20060285310 | December 21, 2006 | Shyu |
20080081546 | April 3, 2008 | Takinami |
20110069501 | March 24, 2011 | Chou et al. |
20120223208 | September 6, 2012 | Tehensky |
20130056142 | March 7, 2013 | Fiore |
20130152298 | June 20, 2013 | Lyristakis |
20160122995 | May 5, 2016 | Corder |
- U.S. Appl. No. 29/677,728, filed Jan. 23, 2019.
- U.S. Appl. No. 29/677,764, filed Jan. 23, 2019.
- Notice of Allowance issued in related U.S. Appl. No. 29/677,764, dated Jun. 26, 2020.
Patent History
Patent number: D900760
Type: Grant
Filed: Jan 23, 2019
Date of Patent: Nov 3, 2020
Assignee: Hitachi High-Tech Corporation (Tokyo)
Inventors: Yutaka Kouzuma (Tokyo), Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Kohei Kawamura (Tokyo), Nobuya Miyoshi (Tokyo), Hiroyuki Kobayashi (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/677,753
Type: Grant
Filed: Jan 23, 2019
Date of Patent: Nov 3, 2020
Assignee: Hitachi High-Tech Corporation (Tokyo)
Inventors: Yutaka Kouzuma (Tokyo), Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Kohei Kawamura (Tokyo), Nobuya Miyoshi (Tokyo), Hiroyuki Kobayashi (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/677,753
Classifications