Ion shield plate for semiconductor manufacturing apparatus
Description
Claims
The ornamental design for an ion shield plate for semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D900760
Type: Grant
Filed: Jan 23, 2019
Date of Patent: Nov 3, 2020
Assignee: Hitachi High-Tech Corporation (Tokyo)
Inventors: Yutaka Kouzuma (Tokyo), Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Kohei Kawamura (Tokyo), Nobuya Miyoshi (Tokyo), Hiroyuki Kobayashi (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/677,753
Type: Grant
Filed: Jan 23, 2019
Date of Patent: Nov 3, 2020
Assignee: Hitachi High-Tech Corporation (Tokyo)
Inventors: Yutaka Kouzuma (Tokyo), Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Kohei Kawamura (Tokyo), Nobuya Miyoshi (Tokyo), Hiroyuki Kobayashi (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/677,753
Classifications