Heater for heating semiconductor wafer

- TOKYO ELECTRON LIMITED
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a perspective view of a heater for heating semiconductor wafer, showing my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a top view thereof; and,

FIG. 7 is a bottom view thereof.

The broken lines shown represent the portions of the heater for heating semiconductor wafer that form no part of the claimed design.

Claims

The ornamental design for a heater for heating semiconductor wafer, as shown and described.

Referenced Cited
U.S. Patent Documents
D402156 December 8, 1998 Meyer
D410438 June 1, 1999 Ishii
D423028 April 18, 2000 Okura
6080970 June 27, 2000 Yoshida
8610034 December 17, 2013 Suzuki
D706714 June 10, 2014 Laurino
D797690 September 19, 2017 Furutani
D839224 January 29, 2019 Yamaki
20060096972 May 11, 2006 Nakamura
Patent History
Patent number: D913230
Type: Grant
Filed: Oct 15, 2019
Date of Patent: Mar 16, 2021
Assignee: TOKYO ELECTRON LIMITED (Tokyo)
Inventor: Toshiki Kobayashi (Tokyo)
Primary Examiner: Derrick E Holland
Application Number: 29/709,589
Classifications