Boat of substrate processing apparatus

Description

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 2 thereof;

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof;

FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 2 thereof;

FIG. 11 is a perspective view of the claimed portion indicated by the solid line FIG thereof;

FIG. 12 is a front elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 13 is a left side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 14 is a right side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 15 is a top plan view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 16 is a bottom plan elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof; and,

FIG. 17 is a rear elevational view of the claimed portion indicated by the solid line in FIG. 8.

The broken lines shown represent environmental subject matter and form no part of the claimed design. The dashed-dot-dashed broken lines define the bounds of the claim and form no part thereof.

Claims

I claim the ornamental design for a boat of substrate processing apparatus, as shown and described.