Boat for substrate processing apparatus
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The broken lines in the drawing views are included for the purpose of illustrating the unclaimed portions of the boat for substrate processing apparatus and form no part of the claimed design.
Claims
The ornamental design for a boat for substrate processing apparatus, as shown and described.
| D229028 | November 1973 | Mestre |
| D361752 | August 29, 1995 | Yamaga |
| D366868 | February 6, 1996 | Ohsawa |
| D378675 | April 1, 1997 | Iwai |
| D378823 | April 15, 1997 | Watanabe et al. |
| D380454 | July 1, 1997 | Iwai et al. |
| 5752609 | May 19, 1998 | Kato et al. |
| D404015 | January 12, 1999 | Honma |
| D404371 | January 19, 1999 | Shimazu |
| 5897311 | April 27, 1999 | Nishi |
| D409158 | May 4, 1999 | Shimazu |
| D411176 | June 22, 1999 | Shimazu |
| 6062853 | May 16, 2000 | Shimazu et al. |
| 6065615 | May 23, 2000 | Uchiyama et al. |
| 6095806 | August 1, 2000 | Suzuki et al. |
| 6099054 | August 8, 2000 | Glass et al. |
| 6099302 | August 8, 2000 | Hong et al. |
| 6099645 | August 8, 2000 | Easley et al. |
| D433931 | November 21, 2000 | Poplin |
| 6287112 | September 11, 2001 | Van Voorst Vader et al. |
| 6341935 | January 29, 2002 | Tseng |
| D534056 | December 26, 2006 | Mokashi et al. |
| D570308 | June 3, 2008 | Sato |
| D570309 | June 3, 2008 | Sato et al. |
| D580894 | November 18, 2008 | Sato |
| 7484958 | February 3, 2009 | Kobayashi |
| D600221 | September 15, 2009 | Sato |
| D600222 | September 15, 2009 | Sato |
| D616394 | May 25, 2010 | Sato |
| D616395 | May 25, 2010 | Sato |
| D616396 | May 25, 2010 | Sato |
| 7730580 | June 8, 2010 | Mokashi et al. |
| D655255 | March 6, 2012 | Takebayashi et al. |
| D655682 | March 13, 2012 | Takebayashi et al. |
| 20020092815 | July 18, 2002 | Kim et al. |
| 20020113027 | August 22, 2002 | Minami et al. |
| 20020130061 | September 19, 2002 | Hengst |
| 20020187023 | December 12, 2002 | Araki |
| 20030024888 | February 6, 2003 | Payne et al. |
| 20050145584 | July 7, 2005 | Buckley et al. |
| 20090250005 | October 8, 2009 | Kaneko et al. |
Type: Grant
Filed: Sep 20, 2013
Date of Patent: Oct 13, 2015
Assignee: HITACHI KOKUSAI ELECTRIC INC.
Inventors: Kosuke Takagi (Toyama), Kiyohiko Maeda (Toyama), Yuji Urano (Toyama), Naoki Matsumoto (Toyama), Yasuaki Komae (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/467,526