Boat for substrate processing apparatus
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The broken lines in the drawing views are included for the purpose of illustrating the unclaimed portions of the boat for substrate processing apparatus and form no part of the claimed design.
Claims
The ornamental design for a boat for substrate processing apparatus, as shown and described.
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Type: Grant
Filed: Sep 20, 2013
Date of Patent: Oct 13, 2015
Assignee: HITACHI KOKUSAI ELECTRIC INC.
Inventors: Kosuke Takagi (Toyama), Kiyohiko Maeda (Toyama), Yuji Urano (Toyama), Naoki Matsumoto (Toyama), Yasuaki Komae (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/467,526