Boat of wafer processing apparatus
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The broken line showing of the boat of a wafer processing apparatus is for the purpose of illustrating environmental structure and forms no part of the claimed design.
Claims
The ornamental design for a boat of a wafer processing apparatus, as shown and described.
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Type: Grant
Filed: Oct 28, 2010
Date of Patent: Mar 6, 2012
Assignee: Hitachi Kokusai Electric Inc. (Tokyo)
Inventors: Yuji Takebayashi (Toyama), Tatsuyuki Saito (Toyama), Tetsuo Yamamoto (Toyama), Tsutomu Kato (Toyama), Satoshi Okada (Toyama)
Primary Examiner: Selina Sikder
Attorney: Volpe and Koenig, P.C.
Application Number: 29/378,016