Abstract: A method for controlling a process on a substrate. The method comprising: providing the substrate, the substrate having an upper surface, an opposite lower surface and an edge between the upper and lower surfaces; processing the upper surface of the substrate with a first fluid; directing a second fluid against a portion of the lower surface proximate to the edge of the substrate, wherein the second fluid flows adjacent to the edge of the substrate; and controlling the temperature of the second fluid in order to affect a processing of an edge region of the upper side of the substrate.

Abstract: After forming a resist film made from a chemically amplified resist material, pattern exposure is carried out by selectively irradiating the resist film with exposing light while supplying, onto the resist film, water that includes triphenylsulfonium nonaflate, that is, an acid generator, and is circulated and temporarily stored in a solution storage. After the pattern exposure, the resist film is subjected to post-exposure bake and is then developed with an alkaline developer. Thus, a resist pattern made of an unexposed portion of the resist film can be formed in a good shape.

Abstract: Air trapped in a blind hole during processing of the blind hole with a liquid is eliminated by circulating the liquid along a surface-to-be-processed in substantially a single direction at all times and by setting a velocity gradient of the liquid over the surface to at least 300/second.

Abstract: A process for cleaning a silicon surface. First, a silicon surface is cleaned with an oxidant solution. Next, the silicon surface is rinsed with HF vapor or liquid and then with the silicon surface with hydrogen water or deionized water under megasonic agitation. Finally, the silicon surface is cleaned with an oxidant solution a second time. The present inventive cleaning process can be applied in thin film transistor (TFT) fabrication and the TFT obtained has higher electron mobility.

Abstract: Methods are described for depositing a film or discontinuous layer of discrete clusters, of material (e.g., metals, metal mixtures or alloys, metal oxides, or semiconductors) on the surface of a substrate, e.g., a patterned silicon wafer, by i) dissolving a precursor of the material into a supercritical or near-supercritical solvent to form a supercritical or near-supercritical solution; ii) exposing the substrate to the solution, under conditions at which the precursor is stable in the solution; and iii) mixing a reaction reagent into the solution under conditions that initiate a chemical reaction involving the precursor, thereby depositing the material onto the solid substrate, while maintaining supercritical or near-supercritical conditions. The invention also includes similar methods for depositing material particles into porous solids, and films of materials on substrates or porous solids having material particles deposited in them.

Abstract: Improved methods are disclosed for catalyst-assisted atomic layer deposition (ALD) to form a silicon dioxide layer having superior properties on a semiconductor substrate by using a first reactant component consisting of a silicon compound having at least two silicon atoms, or using a tertiary aliphatic amine as the catalyst component, or both in combination, together with related purging methods and sequencing.

Abstract: A semiconductor device of this invention includes a silicon nitride film formed on a semiconductor substrate and having a density of 2.2 g/cm3 or less, and a silicon oxide film formed on the silicon nitride film in an ambient atmosphere containing TEOS and O3.

Abstract: A method of forming a silicon nitride layer. The method comprises providing a substrate having a silicon surface thereon, performing an ion implant process on the silicon surface, implanting nitrogen atoms into the silicon surface, and performing a thermal nitridation process and forming a silicon nitride layer on the substrate, wherein the silicon nitride layer comprises the silicon nitride formed on the silicon surface by reaction of the silicon surface with the nitrogen atoms contained therein.

Abstract: A process for forming the lower and upper electrodes of a high dielectric constant capacitor in a semiconductor device from an organoruthenium compound by chemical vapor deposition. This chemical vapor deposition technique employs an organoruthenium compound, an oxidizing gas, and a gas (such as argon) which is hardly adsorbed to the ruthenium surface or a gas (such as ethylene) which is readily adsorbed to the ruthenium surface. This process efficiently forms a ruthenium film with good conformality in a semiconductor device.

Abstract: The invention provides methods and apparatus for drying the backside of semiconductor wafers in a spin-coating environment. Solvent is evaporatively dried from a semiconductor wafer held in a spin mechanism. The undried wafer is sprayed with one or more jets of pressurized gas from gas ports disposed about the spin mechanism.

Abstract: A method of filling a plurality of trenches etched in a substrate. In one embodiment the method includes depositing a layer of spin-on glass material over the substrate and into the plurality of trenches; exposing the layer of spin-on glass material to a solvent; curing the layer of spin-on glass material; and depositing a layer of silica glass over the cured spin-on glass layer using a chemical vapor deposition technique.

Abstract: Transistors fabricated on SSOI (Strained Silicon On Insulator) substrate, which comprises a strained silicon layer disposed directly on an insulator layer, have enhanced device performance due to the strain-induced band modification of the strained silicon device channel and the limited silicon volume because of the insulator layer. The present invention discloses a SSOI substrate fabrication process comprising various novel approaches. One is the use of a thin relaxed SiGe layer as the strain-induced seed layer to facilitate integration and reduce processing cost. Another is the formation of split implant microcracks deep in the silicon substrate to reduce the number of threading dislocations reaching the strained silicon layer. And lastly is the two step annealing/thinning process for the strained silicon/SiGe multilayer film transfer without blister or flaking formation.

Abstract: A laser beam machining method and a laser beam machining device capable of cutting a work without producing a fusing and a cracking out of a predetermined cutting line on the surface of the work, wherein a pulse laser beam is radiated on the predetermined cut line on the surface of the work under the conditions causing a multiple photon absorption and with a condensed point aligned to the inside of the work, and a modified area is formed inside the work along the predetermined determined cut line by moving the condensed point along the predetermined cut line, whereby the work can be cut with a rather small force by cracking the work along the predetermined cut line starting from the modified area and, because the pulse laser beam radiated is not almost absorbed onto the surface of the work, the surface is not fused even if the modified area is formed.

Abstract: A fire resistant laminate for application to a core structure (12) to form a sandwich panel (10) having fire resistant face sheets (14 & 16). The laminate includes a fire protection (18) in which at least one layer of fibers (22) is embedded within a cured inorganic polymer matrix (24). The laminate further includes an adhesive layer (20) for bonding to the core structure.

Abstract: A nonwoven fabric includes a first composite layer that includes from about 50% to about 90% by weight non-thermoplastic absorbent staple fibers and from about 10% to about 50% by weight thermoplastic fibers. A preponderance of the fibers at a first outer surface of the first composite layer comprise non-thermoplastic absorbent staple fibers and a preponderance of the fibers at a second outer surface of the first composite layer comprise thermoplastic fibers. The nonwoven fabric further includes a second composite layer that includes from about 50% to about 90% by weight non-thermoplastic absorbent staple fibers and from about 10% to about 50% by weight thermoplastic fibers. The second composite layer is adjacent the second outer surface of the first composite layer.

Abstract: A woven fabric of composite material comprises a longitudinal thread system, a transverse thread system and a multitude of glittery threads. The transverse thread system is woven together with the longitudinal thread system in an interlaced fashion. The glittery threads, which can be colored plastic threads or threads of light-reflecting type, are woven into at least one of the longitudinal thread system and the transverse thread system, whereby a woven fabric thus made will have bright colors and a light reflecting effect. The threads of the longitudinal thread system and the transverse thread system are selected from para-Aramid fibers and glass fibers.

Abstract: Disclosed is a glass material essentially free of BaO and alkali oxide particularly suitable for the glass substrate of LCDs. The glass material consists essentially, expressed in mole percent on an oxide basis, of 70–80%, preferably 72–77% of SiO2, 3–9%, preferably 4–7% of Al2O3, 8–18%, preferably 10–16% B2O3, 3–10%, preferably 3–8% of CaO, 0–4%, preferably 0–3% RO, 0–0.2%, preferably 0–0.1% SnO, 0–1%, preferably 0 to 0.5% of XO, where RO represents, collectively, MgO, SrO and ZnO, XO represents, collectively, TiO2, ZrO2, Y2O3 and La2O3. The glass has a strain point in the range of over about 600° C., a coefficient of thermal expansion (CTE) in the range of about 23–35×10?7/° C., a density lower than about 2.35 g/cm3, a liquidus temperature lower than or equal to about 1200° C. and a durability in BHF less than or equal to 0.5 mg/cm2 weight loss.

Abstract: The invention relates to a method for producing aluminosilicate glass that is devoid of alkali and that has a B2O3 content of between 0 and <5 wt.-% and a BaO content in excess of 5.5 wt.-%. Said method is characterised by the addition of between 0.05 wt.-% and 1.0 wt.-% SnO2 during the preparation of the mixture.

Abstract: This invention provides catalyst compositions that are useful for polymerizing at least one monomer to produce a polymer. This invention also provides catalyst compositions that are useful for polymerizing at least one monomer to produce a polymer, wherein said catalyst composition comprises a post-contacted organometal compound, a post-contacted organoaluminum compound, and a post-contacted fluorided solid oxide compound.

Abstract: Process for preparing a catalyst composition for ethylene polymerization or copolymerization, with the steps of: (a) treating at least one magnesium alkoxide compound with the effluent waste from a process for production of a polypropylene catalyst of the Ziegler-Natta type, the effluent waste being mainly composed of about 10 to about 20 wt.-% transition metal based compounds, about 20 to about 50 wt.-% solvents, about 0 to about 2 wt.-% electron donors and impurities; (b) washing the product of step (a) with an inert hydrocarbon solvent; and (c) drying the material for use as the catalyst composition.

Abstract: A solid catalyst component useful for the (co)-polymerization of olefins is disclosed. The catalyst component is prepared by reacting an activated magnesium halide composite support with a halogenized transition metal compound and a chelating diamide compound in the presence of organo-magnesium as a promoting agent and halogenized silicon or boron compounds as an activator. The catalyst component can be used with an organo-aluminum compound to provide a solid catalyst system that is compatible with slurry and gas phase polymerization processes. Linear low density polyethylene (LLDPE) produced using the catalyst component of the present invention displays a low molecular weight distribution, improved co-monomer incorporation, low content of the low molecular weight component, and excellent morphological properties such as spherical shape and high bulk density.

Abstract: Metallocene having two cyclic dienyl groups connected by a single carbon having an aryl substituent and a terminally unsaturated hydrocarbyl substituent, olefin polymerization catalyst systems prepared therefrom, and the use of such catalyst systems are disclosed.

Abstract: A polymerization catalyst system and process, which utilizes a Group 14 and Group 16 containing non-crystalline compound to solubilize or emulsify polymerization catalyst components, is disclosed.

Abstract: One aspect of the invention relates to catalyst composite containing a metal catalyst and a specifically defined carbon support containing a carbonaceous material. For example, the carbon support may have a total pore surface area of about 800 m2/g or more and about 2,000 m2/g or less where about 20% or less of the total pore surface area is micro pore surface area. Alternatively the carbon support may have a total pore volume of at least about 0.75 cc/g where about 15% or less of the total pore volume is micro pore volume. In yet another aspect of the invention, the carbon support may have a phosphorus content of about 0.75% by weight or less. In still yet another aspect of the invention, a methods of making and using the catalyst composite are disclosed.

Abstract: The present invention is to solve the problems caused by a conventional method for producing a zinc chloride-loaded support wherein zinc chloride is adsorbed on a solid support in an aqueous solution of zinc chloride. The problems include environmental destruction caused by the treatment of a used aqueous solution of zinc chloride, corrosion to a reactor, a threat to health for workers, deterioration of zinc chloride due to deliquescence thereof, and reduction of specific surface area.

Abstract: A method for uniformly dispersing noble metal particles on a porous carrier by first mixing an alkoxide product of aluminum or silicon and a noble metal precursor together; then mixing a surfactant into the mixture; then mixing ammonia solution into the mixture to form a hydroxide of aluminum or silicon; then mixing a reducing agent into the mixture to convert the noble metal precursor into noble metal nanoparticles dispersed on the hydroxide; then separating the noble metal nanoparticles and the hydroxide from the mixture before calcining the hydroxide into an oxide of aluminum or silicon.

Abstract: A process for preparing a shell-type catalyst which comprises applying to a substantially nonporous inorganic support material having a BET surface area of <80 m2/g, a catalytically active outer shell of a suspension containing at least one water soluble noble metal compound and a substantially water insoluble coating compound, drying the suspension onto the support material, and activating the coated support material in a reducing gas stream.

Abstract: A catalyst for deep desulfurization of a mineral oil corresponding to kerosene, having a nickel component of nickel and nickel oxide, zinc oxide, and aluminum oxide The contents of the nickel component, and the aluminum oxide and the zinc oxide are defined. The nitrogen monoxide adsorption of the catalyst and the specific surface area are defined. The catalyst is obtained by carrying out an activation treatment. A process for producing the catalyst is given and, method of deep desulfurization is given.

Abstract: Pyrogenically prepared titanium dioxide doped by means of an aerosol contains an oxide from the group zinc oxide, platinum oxide, magnesium oxide and/or aluminium oxide as the doping component. It is prepared as follows: in the pyrogenic preparation of titanium dioxide, a metal salt solution is atomised to form an aerosol and injected into the production stream. The titanium dioxide may be used as a photocatalyst or as a UV adsorber or in processes for purification of waste water or waste air/gases.

Abstract: In ridding fluids, including hydrocarbon fluids, both gaseous and liquid, of sulfur compounds including hydrogen sulfide, oxides of sulfur, and thiols, the present invention uses a small quantity of an activator, generally a noble metal oxide, preferably a copper species, along with a known oxide product, such as iron oxide or zinc oxide, to thoroughly remove sulfur contaminants in a short amount of time. The activator allows for the use of smaller reactor vessels and the production of hydrocarbon fluids substantially free of sulfur products.

Abstract: The invention relates to novel substituted phenyl uracils of the formula (I) in which R1 represents hydrogen, amino or in each case optionally substituted alkyl, alkenyl or alkynyl, R2 represents cyano, carboxy, carbamoyl, thiocarbamoyl or optionally substituted alkyl or alkoxycarbonyl, R3 represents hydrogen, halogen or optionally substituted alkyl, R4 represents hydrogen, nitro, cyano, alkoxy or halogen, R5 represents cyano, thiocarbamoyl, halogen or optionally substituted alkyl or alkoxy and R6 represents an optionally substituted nitrogen-containing heterocyclic group which is attached to R6 via N, to processes for their preparation, to their use as crop treatment agents, and to intermediates and processes for their preparation.

Abstract: Pesticidal concentrate and spray compositions are described which exhibit enhanced efficacy due to the addition thereto of a compound which increases cell membrane permeability, suppresses oxidative burst, or increases expression of hydroxyproline-rich glycoproteins.

Abstract: The present invention concerns an aqueous phytopathological formulation comprising a hydrosoluble salt of at least one aminophosphate or aminophosphonate type herbicide; at least one principal surfactant selected from alkylbetaines and alkyl(amidoalkyl)betaines, and at least one additive selected from at least one of the following compounds: (i) amines or etheramines comprising at least one hydrocarbon radical containing 2 to 24 carbon atoms, optionally polyalkoxylated; (ii) acid or non acid phosphate mon- or di-esters, optionally polyalkoxylated; (iii) alkali metal, alkaline-earth metal, ammonium, alkylammonium, alkanolammonium, iron, zinc or manganese salts of a mineral acid.

Abstract: A method of producing a controlled release form of an agricultural active material includes the provision of an organic liquid composition in which the active is present, but where the liquid composition is free from aromatic solvents and is maintained below the normal melting point of the active. The liquid composition is formed into small droplets and the droplets are enclosed by a non-water soluble shell to provide microcapsules, the shell of which is designed to release the agricultural active at a pre-selected controlled rate when the microcapsule is exposed to natural environmental conditions. Controlled release forms of agricultural actives are also provided.

Abstract: The present invention relates to methods of generating gas in and foaming well treating fluids during pumping of the treating fluids or after the treating fluids are placed in a subterranean zone, or both. A method of the present invention provides a method of making a foamed well fluid that comprises a gas comprising the steps of combining an aqueous fluid, a surfactant, an encapsulated activator, and a gas generating chemical, the gas generating chemical being present in an amount in the range of from about 0.1% to 100% of a water component in the aqueous well fluid; and allowing the gas generating chemical and the encapsulated activator to react so that gas is generated in the aqueous fluid to form a foamed well fluid. Methods of cementing, fracturing, cementing compositions, fracturing fluid compositions, and foamed well fluid compositions also are provided.

Abstract: The present invention provides a viscosity index improving lubricant additive which comprises an olefinic oligomer of about 2,000 to about 20,000 number average molecular weight having a viscosity of 75 to about 3,000 cSt at 100° C. and a hydrocarbyl aromatic which contains at least about 5% of its weight from aromatic moieties having a viscosity of about 3 to about 50 cSt at 100° C. where the weight ratio of hydrocarbyl aromatic component to olefin oligomer is from about 1:2 to about 50:1. In another aspect, the invention provides for a lubricating oil composition comprising a base oil and the instant viscosity index improving additive.

Abstract: A stripping composition comprising (a) an anticorrosive agent, (b) a stripping agent and (c) a solvent, wherein the anticorrosive agent (a) is a heterocyclic compound having a nitrogen atom-containing six-membered ring.

Abstract: A single step rub-on, rub-off combination cleaning and waxing composition particularly suited for automobiles, glass, plastics, fiberglass, tile, and floor coverings.

Abstract: A process for preparing in-situ water-soluble zinc salts for use in automatic dishwashing compositions is disclosed.

Abstract: The present invention encompasses a composition, suitable for cleaning hard surfaces, comprising a bleaching agent and a silicone glycol.

Abstract: A disposable substantially damp cleansing article is disclosed having a cleansing composition impregnated onto a flexible substrate such as a non-woven cloth. The impregnated compositions include lathering surfactants and water, and a water-binding agent resulting in a composition having a water activity less than 0.977 but no lower than 0.001. Amounts of water range from greater than 15% to no higher than about 40% by weight of the total article. Speed of lather formation and foam volume increases within the window of the stated water activity and water range.

Abstract: A method for producing detergent granules, includes the step of dry-neutralizing a liquid acid precursor of a non-soap, anionic surfactant with a water-soluble, solid, alkali inorganic substance. In this method, a dry-neutralizing step is carried out in the presence of 0.1 to 1.0 mol of an inorganic acid per mol of the liquid acid precursor of a non-soap, anionic surfactant. The above detergent granules have the features of extremely low tackiness of the granules and containing larger number of micropores. By using the detergent granules, a high-bulk density detergent composition having a small particle size can be obtained at high yields.

Abstract: A process for preparing a detergent tablet having two or more regions comprises the steps of: (a) compressing a particulate composition comprising a detergent active component to form a compressed region of the tablet having a recess; (b) delivering to the recess a solution or melt comprising a mixture of at least one detergent active component and a fusible carrier material; and (c) solidifying the solution or melt.

Abstract: Novel fatty acids and derivatives thereof such as salts, new surfactant systems comprising one or more of these compounds, consumer products such as laundry products, personal care products, pharmaceutical compositions, industrial cleaners, and the like comprising said compounds or surfactant systems.

Abstract: The application relates to a medium viscosity, clear fabric softening composition, comprising (a) from about 1 to 20 wt. % of an oligomeric esterquat, derived from the reaction of an alkanol amine with (i) a polycarboxylic acid; and (ii) a fatty alcohol or a fatty acid; or (iii) a mixture of a fatty alcohol and a fatty acid, followed by partial quaternization (leading to a mixture of oligomeric esteramine and of esterquat); (b) at least about 0.2 wt. % dipropylene glycol, said fabric softening composition being free of isopropanol, ethylene glycol, propylene glycol and polyglycols; (c) an effective amount of a water insoluble perfume; and (d) an effective amount of a thickening agent to provide a viscosity of from 80 to 700 mPa.

Abstract: A fabric conditioning composition comprises from 7.5 to 80% by weight of a ester-linked quaternary ammonium fabric softening material comprising at lease one mono-ester linked component and at least one tri-ester linked component, from 0.01 to 10% by weight of a nonionic surfactant and greater than 1.5 to 15% by weight of a fatty complexing agent wherein the weight ratio of the mono-ester component of compound (a) to fatty completing agent (c) is from 5:1 to 1:5. The compositions have good viscosity profiles.

Abstract: Compositions and methods are provided for achieving in vivo islet cell regeneration in subjects with preexisting diabetes. The methods comprise short term treatment with a composition having a gastrin/cholecystokinin receptor ligand and an EGF receptor ligand. Treatment with such a composition for a short term resulted in a prolonged period of increased insulin release, decreased fasting blood glucose, and improved glucose tolerance, the prolonged efficacy, the period being considered from the time of cessation of treatment.

Abstract: The invention relates to a method of removing endotoxin from preparation of alpha-1-acid glycoprotein (orosomucoid) by contact with a finely divided non-toxic resin such as fumed silica. The invention also relates to a purification process for alpha-1-acid glycoprotein which includes this depyrogenation step, and to the depyrogenated product and its clinical uses.

Abstract: The invention provides a method of stimulating hair growth, comprising administering a therapeutic amount of a hydrogel matrix to an intradermal or subdermal site where hair growth is desired, the matrix composition comprising gelatin, such as denatured collagen, and a long chain carbohydrate, such as dextran. The matrix may further include polar amino acids, nitric oxide inhibitors and super oxide inhibitors. Injection is a preferred method of administration.

Abstract: Peptides and peptidomimetics capable of modulating apoptosis through their interaction with cellular IAPs (inhibitor of apoptosis proteins) are disclosed. The peptides and mimetics are based on the N-terminal tetrapeptide of IAP-binding proteins, such as Smac/DIABLO, Hid, Grim and Reaper, which interact with a specific surface groove of IAP. Also disclosed are methods of using these peptides and peptidomimetics for therapeutic purposes and for rational drug design.