Patents Issued in January 30, 2007
-
Patent number: 7170093Abstract: A dielectric material prepared from a siloxy/metal oxide hybrid composition, and electronic devices such as thin film transistors comprising such dielectric material are provided herein. The siloxy/metal oxide hybrid composition comprises a siloxy component such as, for example, a siloxane or silsesquioxane. The siloxy/metal oxide hybrid composition is useful for the preparation of dielectric layers for thin film transistors using solution deposition techniques.Type: GrantFiled: November 5, 2004Date of Patent: January 30, 2007Assignee: Xerox CorporationInventors: Yiliang Wu, Beng S. Ong, Ping Liu
-
Patent number: 7170094Abstract: By controlling the luminance of light emitting element not by means of a voltage to be impressed to the TFT but by means of controlling a current that flows to the TFT in a signal line drive circuit, the current that flows to the light emitting element is held to a desired value without depending on the characteristics of the TFT. Further, a voltage of inverted bias is impressed to the light emitting element every predetermined period. Since a multiplier effect is given by the two configurations described above, it is possible to prevent the luminance from deteriorating due to a deterioration of the organic luminescent layer, and further, it is possible to maintain the current that flows to the light emitting element to a desired value without depending on the characteristics of the TFT.Type: GrantFiled: November 9, 2004Date of Patent: January 30, 2007Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Mai Akiba, Jun Koyama
-
Patent number: 7170095Abstract: Large-area, single crystal semi-insulating gallium nitride that is usefully employed to form substrates for fabricating GaN devices for electronic and/or optoelectronic applications. The large-area, semi-insulating gallium nitride is readily formed by doping the growing gallium nitride material during growth thereof with a deep acceptor dopant species, e.g., Mn, Fe, Co, Ni, Cu, etc., to compensate donor species in the gallium nitride, and impart semi-insulating character to the gallium nitride.Type: GrantFiled: July 11, 2003Date of Patent: January 30, 2007Assignee: Cree Inc.Inventors: Robert P. Vaudo, Xueping Xu, George R. Brandes
-
Patent number: 7170096Abstract: An optical device includes an antimonide-containing substrate, and an antimonide-containing n-doped layer provided on the substrate. The optical device further includes an antimonide-containing i-doped layer provided on the n-doped layer, an antimonide-containing p-doped layer provided on the i-doped layer, and an antimonide-containing p+-doped layer provided on the p-doped layer.Type: GrantFiled: January 21, 2005Date of Patent: January 30, 2007Assignee: The University of DelawareInventors: Saurabh Lohokare, Dennis W. Prather
-
Patent number: 7170097Abstract: An electronic device includes a conductive n-type substrate, a Group III nitride active region, an n-type Group III-nitride layer in vertical relationship to the substrate and the active layer, at least one p-type layer, and means for providing a non-rectifying conductive path between the p-type layer and the n-type layer or the substrate. The non-rectifying conduction means may include a degenerate junction structure or a patterned metal layer.Type: GrantFiled: February 14, 2003Date of Patent: January 30, 2007Assignee: Cree, Inc.Inventors: John Adam Edmond, Kathleen Marie Doverspike, Michael John Bergmann, Hua-Shuang Kong
-
Patent number: 7170098Abstract: Processes are described whereby a wafer is manufactured, a die from the wafer, and an electronic assembly including the die. The die has a diamond layer which primarily serves to spread heat from hot spots of an integrated circuit in the die.Type: GrantFiled: February 3, 2005Date of Patent: January 30, 2007Assignee: Intel CorporationInventors: Gregory M. Chrysler, Abhay A. Watwe, Sairam Agraharam, Kramadhati V. Ravi, Michael C. Garner
-
Patent number: 7170099Abstract: An optical semiconductor device includes a first set of lead frames having a first set of element mounting beds, a second set of lead frames having a second set of element mounting beds, which are arranged substantially on a same plane as the first set of element mounting beds. A light-emitting element is mounted on one of the first set of element mounting beds and having a pair of electrodes connected to the first set of lead frames respectively. A light-receiving element is arranged at a position facing to the light-emitting element and having a pair of electrodes connected to the second set of lead frames respectively. A supporting means is mounted on the second set of element mounting beds for supporting the light-receiving element at the position facing to the light-emitting element and for receiving a light emitted from the light-emitting element.Type: GrantFiled: March 31, 2005Date of Patent: January 30, 2007Assignee: Kabushiki Kaisha ToshibaInventor: Yoshio Noguchi
-
Patent number: 7170100Abstract: Light-emitting devices, and related components, processes, systems and methods are disclosed.Type: GrantFiled: August 23, 2005Date of Patent: January 30, 2007Assignee: Luminus Devices, Inc.Inventors: Alexei A. Erchak, Paul Panaccione, Robert F. Karlicek, Jr., Michael Lim, Elefterios Lidorikis, Jo A. Venezia, Christian Hoepfner
-
Patent number: 7170101Abstract: A nitride-based semiconductor light-emitting device includes a light-emitting element having an n-GaN substrate and a nitride-based semiconductor multilayer film formed on the n-GaN substrate. The n-GaN substrate of the light-emitting element is fixed to a mount surface. The n-GaN substrate has one surface with the nitride-based semiconductor multilayer film formed thereon and an opposite surface with a metal layer and an ohmic electrode formed thereon. The metal layer contains a first metal and a second metal and the ohmic electrode is formed of the second metal. The adhesion between the ohmic electrode and the n-GaN substrate is thus improved. Accordingly, the semiconductor light-emitting device which is highly reliable with respect to the thermal strain from the mount surface can be provided.Type: GrantFiled: May 14, 2002Date of Patent: January 30, 2007Assignee: Sharp Kabushiki KaishaInventors: Masaki Tatsumi, Toshio Hata, Mayuko Fudeta
-
Patent number: 7170102Abstract: A semiconductor laser device aimed to be reduced in size and that can maintain high position accuracy, and a fabrication method of such a semiconductor laser device are achieved. A semiconductor laser device includes a stem as a base member, and a cap member. The stem includes a main unit having a reference plane, and a heat sink platform as an element mount unit, located on the reference plane for mounting a laser element. The cap member is set on the reference plane of the stem so as to cover the heat sink platform. A hole is formed at the sidewall of the cap member facing the heat sink platform. Fixation between the cap member and the stem is established by fixedly attaching the portion at the inner side of the sidewall of the cap member adjacent the hole to the outer circumferential plane of a heat sink platform.Type: GrantFiled: May 14, 2004Date of Patent: January 30, 2007Assignee: Sharp Kabushiki KaishaInventor: Makoto Tsuji
-
Patent number: 7170103Abstract: A method of making a vertical diode is provided, the vertical diode having associated therewith a diode opening extending through an insulation layer and contacting an active region on a silicon wafer. A titanium silicide layer covers the interior surface of the diode opening and contacts the active region. The diode opening is initially filled with an amorphous silicon plug that is doped during deposition and subsequently recrystallized to form large grain polysilicon. The silicon plug has a top portion that is heavily doped with a first type dopant and a bottom portion that is lightly doped with a second type dopant. The top portion is bounded by the bottom portion so as not to contact the titanium silicide layer. For one embodiment of the vertical diode, a programmable resistor contacts the top portion of the silicon plug and a metal line contacts the programmable resistor.Type: GrantFiled: August 24, 2005Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventors: Fernando Gonzalez, Tyler A. Lowrey, Trung Tri Doan, Raymond A. Turi, Graham R. Wolstenholme
-
Patent number: 7170104Abstract: An arrangement having p-doped semiconductor layers and n-doped semiconductor layers which exhibits transitions between the p-doped semiconductor layers and n-doped semiconductor layers, the transitions displaying a Zener breakdown upon application of a voltage characteristic of a transition, a plurality of transitions between p-doped semiconductor layers and n-doped semiconductor layers being present, and the characteristic voltages additively make up the breakdown voltage of the entire arrangement. Also described is a method for manufacturing the arrangement.Type: GrantFiled: June 22, 2001Date of Patent: January 30, 2007Assignee: Robert Bosch GmbHInventors: Richard Spitz, Alfred Goerlach
-
Patent number: 7170105Abstract: A semiconductor device exhibiting interband tunneling with a first layer with a first conduction band edge with an energy above a first valence band edge, with the difference a first band-gap. A second layer with second conduction band edge with an energy above a second valence band edge, with the difference a second band-gap, and the second layer formed permitting electron carrier tunneling transport. The second layer is between the first and a third layer, with the difference between the third valence band edge and the third conduction band edge a third band-gap. A Fermi level is nearer the first conduction band edge than the first valence band edge. The second valence band edge is beneath the first conduction band edge. The second conduction band edge is above the third valence band edge. The Fermi level is nearer the third valence band edge than to the third conduction band edge.Type: GrantFiled: October 20, 2004Date of Patent: January 30, 2007Assignee: HRL Laboratories, LLCInventors: Joel N. Schulman, David H. Chow, Chanh Nguyen
-
Patent number: 7170106Abstract: A power semiconductor device includes trenches disposed in a first base layer of a first conductivity type at intervals to partition main and dummy cells, at a position remote from a collector layer of a second conductivity type. In the main cell, a second base layer of the second conductivity type, and an emitter layer of the first conductivity type are disposed. In the dummy cell, a buffer layer of the second conductivity type is disposed. A gate electrode is disposed, through a gate insulating film, in a trench adjacent to the main cell. A buffer resistor having an infinitely large resistance value is inserted between the buffer layer and emitter electrode. The dummy cell is provided with an inhibiting structure to reduce carriers of the second conductivity type to flow to and accumulate in the buffer layer from the collector layer.Type: GrantFiled: September 9, 2005Date of Patent: January 30, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Masakazu Yamaguchi, Hideaki Ninomiya, Ichiro Omura, Tomoki Inoue
-
Patent number: 7170107Abstract: An IC chip having a protective structure that is distributed over the semiconductor chip in such a manner that it is not possible to trigger a malfunction in the circuit by means of irradiation without the protective structure also being affected by the irradiation. To this end, redundant conductors are provided or connections having radiation-dependent conductivity or dielectric constant are provided or the test lines of a memory are arranged between the bit lines.Type: GrantFiled: February 17, 2004Date of Patent: January 30, 2007Assignee: Infineon Technologies AGInventors: Christian Aumuller, Marcus Janke
-
Patent number: 7170108Abstract: An n-type buffer layer composed of n-type GaN, an n-type cladding layer composed of n-type AlGaN, an n-type optical confinement layer composed of n-type GaN, a single quantum well active layer composed of undoped GaInN, a p-type optical confinement layer composed of p-type GaN, a p-type cladding layer composed of p-type AlGaN, and a p-type contact layer composed of p-type GaN are formed on a substrate composed of sapphire. A current blocking layer formed in an upper portion of the p-type cladding layer and on both sides of the p-type contact layer to define a ridge portion is composed of a dielectric material obtained by replacing some of nitrogen atoms composing a Group III–V nitride semiconductor with oxygen atoms.Type: GrantFiled: April 6, 2004Date of Patent: January 30, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Daisuke Ueda, Shinichi Takigawa
-
Patent number: 7170109Abstract: A technique enabling to improve element isolation characteristic of a semiconductor device is provided. An element isolation structure is provided in a semiconductor substrate in which a silicon layer, a compound semiconductor layer and a semiconductor layer are laminated in this order. The element isolation structure is composed of a trench, a semiconductor film, and first and second insulating films. The trench extends through the semiconductor layer and extends to the inside of the compound semiconductor layer. The semiconductor film is provided on the surface of the trench, and the first insulating film is provided on the semiconductor film. The second insulting film is provided on the first insulating film and fills the trench.Type: GrantFiled: June 10, 2004Date of Patent: January 30, 2007Assignee: Renesas Technology Corp.Inventors: Kohei Sugihara, Kazunobu Ota, Hidekazu Oda, Takahashi Hayashi
-
Patent number: 7170110Abstract: A silicon oxide film 102, a Pt film 103x, a Ti film 104x and a PZT film 105x are deposited in this order over a Si substrate 101. The Si substrate 101 is placed in a chamber 106 so that the PZT film 105x is irradiated with an EHF wave 108. The irradiation with the EHF wave locally heats a dielectric film such as the PZT film. As a result, it is possible to improve, for example, the leakage property of the dielectric film without adversely affecting a device formed on the Si substrate 101.Type: GrantFiled: November 9, 2004Date of Patent: January 30, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Akira Inoue, Takeshi Takagi, Yoshihiro Hara, Minoru Kubo
-
Patent number: 7170111Abstract: A nitride-based field effect transistor includes a substrate, a channel layer comprising InAlGaN formed on the substrate, source and drain ohmic contacts in electrical communication with the channel layer, and a gate contact formed on the channel layer. At least one energy barrier opposes movement of carriers away from the channel layer. The energy barrier may comprise an electron source layer in proximity with a hole source layer which generate an associated electric field directed away from the channel. An energy barrier according to some embodiments may provide a built-in potential barrier in excess of about 0.5 eV. Method embodiments are also disclosed.Type: GrantFiled: February 5, 2004Date of Patent: January 30, 2007Assignee: Cree, Inc.Inventor: Adam William Saxler
-
Patent number: 7170112Abstract: A bipolar transistor structure and process technology is described incorporating a emitter, a base, and a collector, with most of the intrinsic base adjacent the collector having a graded energy bandgap and a layer of the intrinsic base adjacent the emitter having a substantially constant energy bandgap. The invention has a smaller base transit time than a conventional graded-base-bandgap bipolar transistor.Type: GrantFiled: October 30, 2002Date of Patent: January 30, 2007Assignee: International Business Machines CorporationInventor: Tak Hung Ning
-
Patent number: 7170113Abstract: An aspect of a semiconductor device includes: a collector layer of first conductive type formed on a semiconductor substrate; a graft base layer of second conductive type formed in a surface region of the collector layer; a first base leading-out region of second conductive type formed on the graft base layer; a second base leading-out region of second conductive type formed on an upper surface and a side surface of the first base leading-out region; a base layer of second conductive type formed on the collector layer; an emitter layer of first conductive type formed in a surface region of the base layer; and an emitter leading-out region formed on the emitter layer.Type: GrantFiled: March 31, 2004Date of Patent: January 30, 2007Assignee: Kabushiki Kaisha ToshibaInventor: Noboru Noda
-
Patent number: 7170114Abstract: A chip size is remarkably reduced by providing effective layout of the I/O buffers. Since a large capacity non-volatile memory is arranged, bonding pads are arranged at the area near each side of the rectangular shape semiconductor chip and the I/O buffers are arranged in the side of the internal circuit area of these bonding pads. In this semiconductor chip, the number of I/O buffers in the side of the longer sides is larger than that in the side of the shorter sides of the semiconductor chip. For example, the n I/O buffers are arranged respectively in the side of two longer sides, while (n?2) I/O buffers are arranged respectively in the side of two shorter sides. Accordingly, the I/O buffers can be arranged without unnecessary increase in the chip area.Type: GrantFiled: October 4, 2004Date of Patent: January 30, 2007Assignee: Renesas Technology Corp.Inventor: Takeshi Shimanuki
-
Patent number: 7170115Abstract: A semiconductor integrated circuit device has a plurality of CMOS-type base cells arranged on a semiconductor substrate and m wiring layers, and gate array type logic cells are composed of the base cells and the wiring layers. Wiring within and between the logic cells is constituted by using only upper n (n<m) wiring layers. It becomes possible to shorten a development period and reduce a development cost when a gate array type semiconductor integrated circuit device becomes large in scale.Type: GrantFiled: October 5, 2001Date of Patent: January 30, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Shinya Tokunaga, Shigeki Furuya, Yuuji Hinatsu
-
Patent number: 7170116Abstract: Well bias circuitry for selectively biasing the voltages of the well areas of an integrated circuit. In one embodiment, the well bias circuitry includes a switching cell located in a row of cells of the integrated circuit for selectively coupling a voltage supply line to a well bias line. The switching cell may include two level shifters, each for providing a voltage to a gate of a coupling transistor to make the coupling transistor non conductive in response to an enable signal. The switching cells may be sequentially coupled such that the coupling transistors of each of the switching cells are not made conductive at the same time so as to reduce inrush current due to changing the well bias from a well bias voltage to a supply voltage. In one example, the switching cells may include delay circuitry for delaying the change in state of the enable signal before being provided to the next switching cell.Type: GrantFiled: June 28, 2005Date of Patent: January 30, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Christopher K. Y. Chun, Der Yi Sheu
-
Patent number: 7170117Abstract: Embodiments of the invention provide an image sensor having an improved dynamic range. A pixel cell comprises at least one transistor structure. The transistor structure comprises at least one semiconductor channel region, at least one gate for controlling the channel region, and first and second leads respectively coupled to a source region on one side of the at least one channel region and a drain region on an opposite side of the at least one channel region. The transistor structure has at least two threshold voltages associated with the at least one channel region, and an I-V characteristic of the transistor structure is determined at least in part by the threshold voltages.Type: GrantFiled: August 25, 2004Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
-
Patent number: 7170118Abstract: Within both a field effect transistor (FET) device and a method for fabricating the field effect transistor (FET) device there is provided: (1) a semiconductor substrate; (2) a gate electrode formed over the semiconductor substrate and covering a channel region within the semiconductor substrate; and (3) a pair of source/drain regions formed within the semiconductor substrate and separated by the channel region within the semiconductor substrate. Within both the field effect transistor (FET) device and the method for fabricating the field effect transistor (FET) device, at least one of: (1) an interface of the channel region covered by the gate electrode; and (2) an upper surface of the gate electrode, is corrugated.Type: GrantFiled: August 1, 2003Date of Patent: January 30, 2007Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Fu-Liang Yang
-
Patent number: 7170119Abstract: In a vertical type MOSFET device having a super junction structure, in which a N conductive type column region and a P conductive type column region are alternately aligned, regarding to a distance between a terminal end of an active region and a terminal end of a column region, the terminal end of the column region is disposed at a position, which is separated from the active region terminal end by a distance obtained by subtracting a half of a width of the N conductive type column region from a distance corresponding to a depth of the column region. Thus, an electric field concentration at a specific portion in a region facing a narrow side of the column structure is prevented so that a breakdown voltage of the vertical type MOSFET is improved.Type: GrantFiled: August 20, 2004Date of Patent: January 30, 2007Assignee: Denso CorporationInventors: Shoichi Yamauchi, Hitoshi Yamaguchi, Takashi Suzuki, Kyoko Nakashima
-
Patent number: 7170120Abstract: A structure to form an energy well within a Carbon nanotube is described. The structure includes a doped semiconductor region and an undoped semiconductor region. The Carbon nanotube is between the doped semiconductor region and the undoped semiconductor region. The structure also includes a delta doped semiconductor region. The undoped semiconductor region is between the Carbon nanotube and the delta doped region. The delta doped semiconductor region is doped opposite that of the doped semiconductor region.Type: GrantFiled: March 31, 2005Date of Patent: January 30, 2007Assignee: Intel CorporationInventors: Suman Datta, Marko Radosavljevic, Brian Doyle, Jack Kavalieros, Justin Brask, Amlan Majumdar, Robert S. Chau
-
Patent number: 7170121Abstract: One embodiment of the present invention provides a proximity I/O switch, which is configured to transfer data between the components in a computer system. This proximity I/O switch is comprised of multiple switch chips, which are coupled together through capacitive coupling. This enables the multiple switch chips to communicate with each other without being constrained by the limitations of conventional non-capacitive communication mechanisms. The multiple switch chips in the proximity I/O switch are also configured to communicate with components in the computer system through conventional non-capacitive communication mechanisms.Type: GrantFiled: September 29, 2005Date of Patent: January 30, 2007Assignee: Sun Microsystems, Inc.Inventors: Gary R. Lauterbach, Robert J. Drost
-
Patent number: 7170122Abstract: According to one aspect of the invention, a memory array and a method of constructing a memory array are provided. An insulating layer is formed on a semiconductor substrate. A first metal stack is then formed on the insulating layer. The first metal stack is etched to form first metal lines. A polymeric layer is formed over the first metal lines and the insulating layer. The polymeric layer has a surface with a plurality of roughness formations. A second metal stack is formed on the polymeric layer with an interface layer, which is thicker than the heights of the roughness formations. Then the second metal stack is etched to form second metal lines. Memory cells are formed wherever a second metal line extends over a first metal line.Type: GrantFiled: September 30, 2003Date of Patent: January 30, 2007Assignee: Intel CorporationInventors: Mark R. Richards, Daniel C. Diana, Hitesh Windlass, Wayne K. Ford, Ebrahim Andideh
-
Patent number: 7170123Abstract: The invention relates to improving the switching reliability of a magnetic memory cell in a magnetic random access memory (MRAM). Embodiments of the invention add an antiferromagnet to a magnetic memory cell. An antiferromagnetic layer can be formed adjacent to a soft layer in the MRAM on a side of the soft layer that is opposite to a hard layer of the MRAM. One embodiment further includes an additional interlayer of non-antiferromagnetic material between the antiferromagnetic layer and the soft layer.Type: GrantFiled: June 7, 2005Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventors: Romney R. Katti, Joel A. Drewes, Timothy J. Vogt
-
Patent number: 7170124Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: GrantFiled: October 19, 2004Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
-
Patent number: 7170125Abstract: A method for patterning layers made of ruthenium or ruthenium(IV) oxide and a capacitor comprising at least one electrode which is constructed from ruthenium or ruthenium(IV) oxide at least in sections. A layer made of ruthenium or ruthenium(IV) oxide is deposited on a substrate and said layer is subsequently covered with a covering layer at least in sections. Through heat treatment of the construction thus obtained in an oxygen atmosphere, the ruthenium is converted into RuO4 in the uncovered sections and removed by sublimation. The method enables the simple patterning of layers made of ruthenium or ruthenium(IV) oxide and the construction of complex structures, such as trench capacitors, for example.Type: GrantFiled: December 1, 2003Date of Patent: January 30, 2007Assignee: Infineon Technologies AGInventors: Harald Seidl, Martin Gutsche
-
Patent number: 7170126Abstract: A trench capacitor vertical-transistor DRAM cell in a SiGe wafer compensates for overhang of the pad nitride by forming an epitaxial strained silicon layer on the trench walls that improves transistor mobility, removes voids from the poly trench fill and reduces resistance on the bitline contact.Type: GrantFiled: September 16, 2003Date of Patent: January 30, 2007Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Dureseti Chidambarrao, Rama Divakaruni, Oleg G. Gluschenkov
-
Patent number: 7170127Abstract: The present invention provides a semiconductor device and fabricating method thereof, by which capacitance is enhanced by increasing an effective area of a lower electrode of a capacitor. The present invention includes a first lower electrode on a semiconductor substrate to have a plate shape, a second lower electrode on the first electrode to have a type (or “wing”-type) cross-section, a dielectric layer covering surfaces of the first and second lower electrodes, and an upper electrode on the dielectric layer.Type: GrantFiled: December 29, 2004Date of Patent: January 30, 2007Assignee: Dongbu Electronics Co., Ltd.Inventor: Hee Sung Shim
-
Patent number: 7170128Abstract: An improved memory cell having a pair of non-volatile memory transistors with each transistor using a nanocrystal gate structure, the transistor pair constructed between a pair of bit line polysilicon depositions. Between the pair of non-volatile memory transistors, a word line device is interposed, allowing serial linkage of the pair of non-volatile memory transistors.Type: GrantFiled: December 2, 2004Date of Patent: January 30, 2007Assignee: Atmel CorporationInventor: Bohumil Lojek
-
Patent number: 7170129Abstract: A method of fabrication a non-volatile memory is provided. A stacked structure is formed on a substrate, the stacked structure including a gate dielectric layer and a control gate. Then, a first dielectric layer, a second dielectric layer and a third dielectric layer are respectively formed on the top and sidewalls of the stacked structure and the exposed substrate. Thereafter, a pair of charge storage layers are formed over the substrate to respectively cover a portion of the top and sidewalls of the stacked structure, and a gap exists between each of the charge storage layers.Type: GrantFiled: July 7, 2005Date of Patent: January 30, 2007Assignee: MACRONIX International Co., Ltd.Inventor: Ming-Chang Kuo
-
Patent number: 7170130Abstract: According to one exemplary embodiment, a method for fabricating a floating gate memory cell on substrate comprises a step of forming a spacer adjacent to a source sidewall of a stacked gate structure, where the stacked gate structure is situated over a channel region in substrate. The method further comprises forming a high energy implant doped region adjacent to the spacer in the source region of substrate. The method further comprises forming a recess in a source region of the substrate, where the recess has a sidewall, a bottom, and a depth, and where the sidewall of the recess is situated adjacent to a source of the floating gate memory cell. According to this exemplary embodiment, the spacer causes the source to have a reduced lateral straggle and diffusion in the channel region, which causes a reduction in drain induced barrier lowering (DIBL) in the floating gate memory cell.Type: GrantFiled: August 11, 2004Date of Patent: January 30, 2007Assignee: Spansion LLCInventors: Shenqing Fang, Kuo-Tung Chang, Pavel Fastenko, Zhigang Wang
-
Patent number: 7170131Abstract: Floating gate structures are disclosed which have a base field coupled with the substrate and a narrow projection extending from the base away from the substrate. In one form, surfaces of a relatively large projection provide an increased surface area for a control gate that wraps around it, thereby increasing the coupling between the two. In another form, an erase gate wraps around a relatively small projection in order to take advantage of sharp edges of the projection to promote tunneling of electrons from the floating to the erase gate. In each case, the control or floating gate is positioned within the area of the floating gate in one direction, thereby not requiring additional substrate area for such memory cells.Type: GrantFiled: May 18, 2005Date of Patent: January 30, 2007Assignee: SanDisk CorporationInventor: Jack H. Yuan
-
Patent number: 7170132Abstract: The invention proposes am improved twin MONOS memory device and its fabrication. The ONO layer is self-aligned to the control gate horizontally. The vertical insulator between the control gate and the word gate does not include a nitride layer. This prevents the problem of electron trapping. The device can be fabricated to pull the electrons out through either the top or the bottom oxide layer of the ONO insulator. The device also incorporates a raised memory bit diffusion between the control gates to reduce bit resistance. The twin MONOS memory array can be embedded into a standard CMOS circuit by the process of the present invention.Type: GrantFiled: February 16, 2005Date of Patent: January 30, 2007Assignee: Halo LSI, Inc.Inventors: Seiki Ogura, Kimihiro Satoh, Tomoya Saito
-
Patent number: 7170133Abstract: A transistor and a method of fabricating the same: The transistor includes an isolation layer disposed in a semiconductor substrate to define an active region. A pair of source/drain regions is disposed in the active region, spaced apart from each other. A channel region is interposed between the pair of the source/drain regions. The active region has a mesa disposed across the channel region. The mesa extends to the source/drain regions. A gate electrode is disposed to cross the active region along the direction across the mesa.Type: GrantFiled: October 28, 2004Date of Patent: January 30, 2007Assignee: Samsung Electronics Co.Inventors: Young-Chul Jang, Won-Seok Cho, Soon-Moon Jung
-
Patent number: 7170134Abstract: P-type buried regions 104a and 104b are formed in an extended drain region 102 formed in a P-type semiconductor substrate 110. An N-type buried region 113 is formed between the P-type buried regions 104a and 104b. An N-type impurity concentration of the N-type buried region 113 along a G–G? plane is low in the vicinity of boundaries between the N-type buried region 113 and the P-type buried regions 104a and 104b and is increased from the boundaries to an inside of the N-type buried region 113.Type: GrantFiled: November 23, 2004Date of Patent: January 30, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yasuhiro Takehana, Toshihiko Uno
-
Patent number: 7170135Abstract: An arrangement (200) and method for scalable ESD protection of a semiconductor structure (140), a protection structure (120) providing a discharge transistor (110) path from an input/output node (130) to ground or another node if a threshold voltage is reached, wherein the discharge transistor is a self-triggered transistor having collector/drain (220) and emitter/source (210) regions, and a base/bulk region (260) having one or more floating regions (240) between the collector/drain (220) and emitter/source (210) regions. The floating region (N or P) modulates the threshold voltage Vtl for ESD protection. Vtl can be adjusted by shifting the floating region location. Splitting of the electric field into two parts reduces the maximum of the electric field. Vt1 can be adjusted volt-by-volt to suit application needs. ESD capability is increased by better current distribution in the silicon. This provides the advantages of reduced die size, faster time-to-market, less redesign cost, and better ESD performance.Type: GrantFiled: August 28, 2003Date of Patent: January 30, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Michel Zecri, Patrice Besse, Nicolas Nolhier
-
Patent number: 7170136Abstract: A high voltage ESD-protection structure is used to protect delicate transistor circuits connected to an input or output of an integrated circuit bond pad from destructive high voltage ESD events by conducting at a controlled breakdown voltage that is less than a voltage that may cause destructive breakdown of the input and/or output circuits. The ESD-protection structure is able to absorb high current from these ESD events without snapback that would compromise operation of the higher voltage inputs and/or outputs of the integrated circuit. The ESD-protection structure will conduct when an ESD event occurs at a voltage above a controlled breakdown voltage of an electronic device, e.g., diode, in the ESD protection structure. Conduction of current from an ESD event having a voltage above the electronic device controlled breakdown voltage may be through another electronic device, e.g.Type: GrantFiled: August 10, 2005Date of Patent: January 30, 2007Assignee: Microchip Technology IncorporatedInventors: Randy L. Yach, Greg Dix
-
Patent number: 7170137Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type. A pair of source/drain areas having a second conductivity type is formed on a surface of the semiconductor substrate. A gate insulating film is provided on a channel area between the source/drain areas. A gate electrode having the first conductivity type is provided on the gate insulating film. The gate electrode has a first portion located above a channel area and second portions located above the source/drain area. The concentration of majority carriers in the second portion is lower than that in the first portion.Type: GrantFiled: November 16, 2004Date of Patent: January 30, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Hitomi Yasutake, Hideaki Aochi
-
Patent number: 7170138Abstract: A thin film transistor of the present invention has an active layer including at least source, drain and channel regions formed on an insulating surface. A high resistivity region is formed between the channel region and each of the source and drain regions. A film capable of trapping positive charges therein is provided on at least the high resistivity region so that N-type conductivity is induced in the high resistivity region. Accordingly, the reliability of N-channel type TFT against hot electrons can be improved.Type: GrantFiled: September 8, 2004Date of Patent: January 30, 2007Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yasuhiko Takemura, Satoshi Teramoto
-
Patent number: 7170139Abstract: A semiconductor processing method of forming a conductive gate or gate line over a substrate includes, a) forming a conductive gate over a gate dielectric layer on a substrate, the gate having sidewalls and an interface with the gate dielectric layer; b) electrically insulating the gate sidewalls; and c) after electrically insulating the gate sidewalls, exposing the substrate to oxidizing conditions effective to oxidize at least a portion of the gate interface with the gate dielectric layer. According to one aspect of the invention, the step of exposing the substrate to oxidizing conditions is conducted after provision of a first insulating material and subsequent anisotropic etch thereof to insulate the gate sidewalls. According to another aspect of the invention, the step of exposing the substrate to oxidizing conditions is conducted after provision of first and second insulating materials and subsequent anisotropic etch thereof to insulate the gate sidewalls.Type: GrantFiled: December 28, 2004Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventor: Pai-Hung Pan
-
Patent number: 7170140Abstract: Microelectromechanical system (MEMS) comprising: an active part (5) comprising an electromechanical device (28), at least one base (6) for fastening said microsystem on a support (8), at least one fastener (21, 21?) fastening said active part (5) to said at least one base (6) and allowing a displacement of said active part (5) relatively to said at least one base (6) along an axis (Z) more or less perpendicular to the plane of said support (8) when said microsystem is fastened onto said support (8), bumper elements (27, 27?, 37?) for limiting the amplitude of the displacements of said active part (5) relatively to said at least one base (6) along said perpendicular axis (Z). The active part (5) being capable of moving relatively to the base (6) to which it is fastened, it is isolated from any mechanical constraint that could be sustained by the base (6), in particular torsion or flexion due to it being fastened onto a support (8).Type: GrantFiled: March 2, 2005Date of Patent: January 30, 2007Assignee: Colibrys SAInventors: Bertrand Dutoit, Sophie Birling, Jean-Michel Stauffer, Yves Dupraz
-
Patent number: 7170141Abstract: A method of forming electronics and microelectromechanical on a silicon carbide substrate having a slow etch rate is performed by forming circuitry on the substrate. A protective layer is formed over the circuitry having a slower etch rate than the etch rate of the silicon carbide substrate. Microelectromechanical structures supported by the substrate are then formed. The circuitry comprises a field effect transistor in one embodiment, and the protective layer comprises a heavy metal layer.Type: GrantFiled: March 7, 2003Date of Patent: January 30, 2007Assignee: Cornell Research Foundation, Inc.Inventors: Kevin Kornegay, Andrew R. Atwell, Mihaela Balseanu, Jon Duster, Eskinder Hailu, Ce Li
-
Patent number: 7170142Abstract: A planar integrated circuit includes a semiconductor substrate having a substrate surface and a trench in the substrate, a waveguide medium in the trench having a top surface and a light propagation axis, the trench having a sufficient depth for the waveguide medium to be at or below said substrate surface, and at least one Schottky barrier electrode formed on the top surface of said waveguide medium and defining a Schottky barrier detector consisting of the electrode and the portion of the waveguide medium underlying the Schottky barrier electrode, at least the underlying portion of the waveguide medium being a semiconductor and defining an electrode-semiconductor interface parallel to the light propagation axis so that light of a predetermined wavelength from said waveguide medium propagates along the interface as a plasmon-polariton wave.Type: GrantFiled: May 26, 2004Date of Patent: January 30, 2007Assignee: Applied Materials, Inc.Inventors: Gregory L. Wojcik, Lawrence C. West, Thomas P. Pearsall