Abstract: A portable hand held device for weighing and measuring the size of a luggage item includes a handle designed to provide support yet comfort with respect to the use of the weighing device and further includes a mechanism which enables recordal of the weight of luggage placed upon a suspension hook of the device.

Abstract: A mobile hospital patient bed scale is contemplated which lifts the entire bed with patient in situ on a load platform with an aperture to accommodate the undercarriage of many hospital beds such as a motor. The scale minimizes both vertical and horizontal displacement. The platform has load cells which deliver data to a memory and display device. The invention is portable and partly foldable to aid in storage. It provides for recharging if desired, and for use of an auxiliary power source if desired. The driving force for lifting may be a hydraulic ram or an electrically powered screw drive.

Abstract: A scale (1) having a scale housing (3) serving to house the weighing mechanism and the weighing electronics, which stands on a support base on at least three support points (5,5?), is designed to be connectable to and disconnectable from a display and operating unit (6). A connection element (9) is provided to produce a mechanical coupling between the scale (1) and the display and operating unit (6), which can be attached to the bottom side of the scale housing (3) and is designed to be supported on at least two support points (5) of the scale (1) and can be engaged in a self-locating way in a third point on the bottom side of the scale housing (3).

Abstract: In a load transfer mechanism which transfers load to a load cell that constitutes a Roberval mechanism, a load transfer member has at least an area right above a load cell mounting section in the top surface thereof as a concave surface area formed to be lower than the remaining area of the top surface thereof so that it does not contact a cover member. Thus, if the barycentric position of the load of an object to be weighed placed on the cover member, regardless of whether the load is concentrated load or divided load, the load transfer mechanism can reduce the difference of the influence of deflection of the load transfer member or moment imposed on the load, transfer given load to the load cell through the load transfer member and decrease a span error produced by the load position of an object to be weighed.

Abstract: An linear motion compensator for translating a particular amount of linear movement produced by an input device into a particular amount of linear movement required to properly operate an output device, without causing damage to either the input device or the output device.

Abstract: A steering wheel horn contact unit has a metal contact sheet (40). The metal contact sheet (40) is embedded into a carrier part (52) of plastic and mounted therein and has at least one freely projecting horn contact tongue (46). Viewed in switching movement direction (X), the horn contact tongue (46) is surrounded by the carrier part (52).

Abstract: An open-door sensor for a refrigeration device contains a magnetically operated switch and a housing that surrounds the switch. Plug-in contacts for the switch are accessible from one side of the housing. The housing is equipped with detachable fixing elements for fixing the housing in a cavity. This results in a compact and inexpensive sensor for the refrigeration device.

Abstract: This portable device relates to an in-line illuminated switch. The switch has a soft glowing light which is visible in a darkened room. Elderly people remove their eyeglasses when resting, and the soft glowing light locates the switch when light is required at bedside.

Abstract: A keypad suitable for being disposed on a circuit board is provided. The keypad is in contact with the circuit board to generate an electrical signal. The keypad includes a flexible light guide plate, a key pattern, a passivation layer, a light source, and a reflector. Wherein, the key pattern and the passivation layer are both disposed on a first surface of the flexible light guide plate, and the passivation layer covers the key pattern. In addition, the light source and the reflector are both disposed at one side of the flexible light guide plate, and the reflector covers the light source. The keypad has better display brightness such that the user can easily recognize the patterns of the keys.

Abstract: A safety start switch for a pneumatic tool including a main body, a compression strip, a push knob, a coupling element, a spring, and a pivot pin. After a corresponding arrangement of the above-mentioned components, the compression strip is not compressible in the ordinary state since the coupling element rests on the blocking portion of the main body. Meanwhile, the compression strip is downwardly swiveled to move the piston in the same direction responsive to the removal of the coupling element from the blocking position of the coupling element when the push knob is shifted against the resilience of the spring.

Abstract: A circuit breaker includes a shell, a movable press strip, a metal strip, a C-shaped plate spring, and three conductors. A first and a second conductor are inserted through the bottom of the shell, respectively have an upper end extending up in the shell, with a first contact point on its upper end of the first conductor, with an upper end of the second conductor connected with a metal strip, which has one end facing under a first press member of the press strip and an elastic contact strip with one end provided with a second contact point facing under the first contact point. A C-shaped plate spring has two lower ends connected with the metal strip, and a curved-up portion facing a second press member. The contact strip may disfigure by high heat caused by excessive current, curling upward to force the first contact point snap off the second contact point to cut off the circuit breaker.

Abstract: A line switch able to modulate light includes an upper cover, a lower cover and a rotary selector positioned between the upper and the lower cover. When the rotary selector is turned clockwise, the line switch can turn on and modulate light to be half bright, and when the rotary selector is further continuously turned clockwise, light can be modulated to be fully bright, but when the rotary selector is further turned clockwise again to return to the original position, the line switch will be under an OFF condition again. Thus the line switch has two stages of different lighting in addition to the function of turning on and off.

Abstract: A capacitive touch switch includes a sensor button which is disposed between a circuit board and a cover plate and which forms a terminal of a capacitor that is variable in its capacitance by an approach. The sensor button includes a body of a flexible material, which body can be adapted to the cover plate and is embraced by a conductive net.

Abstract: A welding head which can easily move the torch portion of the welding head in the circumferential direction and the vertical moving direction of the outer circumference of the to-be-welded tubes even in a narrow gap, includes a torch rotating ring that rotates on the outer circumferences of the tubes by matching with the central axis of the to-be-welded tubes and a torch vertical moving ring disposed concentrically with the ring inside the ring, provided with a torch base for supporting a torch on the front ends, a first gear group for driving and rotating the ring around the tubes, a second gear group that is disposed in parallel to the first gear group and drives and rotates the ring around the tubes, a drive shaft for driving the two gear groups, and a torch rotating motor for driving the drive shaft, and a third gear group that can drive the ring while rotating it in the same direction as or in reverse to that of the ring at a speed equal to or higher or lower than that of the first gear group for rotatin

Abstract: A plasma generator, reactor and associated systems and methods are provided in accordance with the present invention. A plasma reactor may include multiple sections or modules which are removably coupled together to form a chamber. Associated with each section is an electrode set including three electrodes with each electrode being coupled to a single phase of a three-phase alternating current (AC) power supply. The electrodes are disposed about a longitudinal centerline of the chamber and are arranged to provide and extended arc and generate an extended body of plasma. The electrodes are displaceable relative to the longitudinal centerline of the chamber. A control system may be utilized so as to automatically displace the electrodes and define an electrode gap responsive to measure voltage or current levels of the associated power supply.

Abstract: A mouse pad includes a body with planar top and bottom surfaces and a cavity intercalated therebetween that extends between opposed body ends. A rotatable flange has a dome shape for fitting within a user's palm. The flange is offset from a center of the body, has a bottom section conjoined to the body top surface, and is seated adjacent to a proximal body edge. The flange has a top section rotatably conjoined to the bottom section. The bottom section has a greater diameter than the top section for effectively. A mechanism is included for heating the flange that is connected to the flange top section and includes a controller conjoined to the body. A mechanism is included for oscillating the flange so that the flange tilts side-to-side and against a bottom surface of an operator wrist. The heating mechanism and the oscillating mechanism are independently and simultaneously operable.

Abstract: Disclosed herein is an induction heating type fusing device for fixing toner image on a transfer material. The fusing device includes an exciting coil that induces induction magnetic field by applying AC current; a hollow heating member installed near the exciting coil; multiple magnetic members mounted inside the heating member in the longitudinal direction; and a drive section that moves the multiple magnetic members in accordance with the width of transfer material to be fixed.

Abstract: A method for controlling a delta-T cooking process includes (a) selecting of a set core temperature KTs and a delta-T value for the food to be cooked, (b) introducing the food to be cooked into the cooking space at an initial core temperature KT0; (c) increasing the actual cooking space temperature GTa as a function of the actual core temperature KTa over the course of at least one first time interval in such a way that an essentially constant difference approximately on the order of magnitude of the delta-T value is maintained between GTa and KTa until KTa=KTs+A and thus corresponds to a maximum value GTa-r, where A is a temperature value smaller than delta-T; and finally (d) stepwise and/or continuously decreasing the actual cooking space temperature GTa during a second time interval to a final cooking space temperature of GTe=KTs+B, where B is a temperature value of 0?B<A, in such a way that, when GTa becomes essentially the same as GTe, KTa reaches KTs more-or-less simultaneously.

Abstract: A microwave oven liner 11 is an injection moulding having a roof 12, a floor 14, a back 15 and two sides 16. The moulding is of food grade polypropylene, such that the liner can be washed in a commercial dishwasher. The liner is sized to be a sliding fit in a microwave oven. The roof is shorter 17 at the front than the floor to allow air circulation. Further, the roof is apertured, also for air circulation, with a series of small c. 4 mm bores 18 registering with the roof aperture 8. A lip 19 is provided across the front of the floor to retain split liquid. The external corners 20 are chamfered to clear the silicone seal 9 for instance. The floor has regularly pitched, 2 mm high ridges 21 running front to back. The ridges allow circulation of air beneath a container of food being heated in the oven having the liner.

Abstract: A microscope system comprises a light guiding optical system 20 containing an objective lens 21 and a beam splitter 25 for splitting an optical image of a sample S to a first optical path and a second optical path, a photodetector 31 disposed on the first optical path used to acquire an image of the sample S, and a CCD camera 32 disposed on the second optical path for acquiring a two-dimensional image for focus control. The camera 32 is disposed being inclined at an angle of ? with respect to the optical path so that the optical path length in the light guiding optical system 20 varies along the z-axis direction. The image acquired by the camera 32 is analyzed by a focus controller 37, and the focal point for image pickup with respect to the sample S is controlled on the basis of the analysis result. Accordingly, there can be implemented a microscope system in which image acquisition of the sample and focus control for image pickup can be simultaneously performed.

Abstract: A system for displaying an image captured by a sensor array reduces physical movement of the camera. The system includes means for displaying an image corresponding to an output from a plurality of sensors within a first area of a sensor array and means for changing the image displayed by translating the first area within the sensor array as by changing the grouping of the sensors whose image data is displayed.

Abstract: A laser crystallization apparatus and method for crystallizing a semiconductor thin film while monitoring at a high spatial and temporal resolution in real time. In a laser crystallization apparatus comprising a crystallizing optical system which irradiates a semiconductor thin film with a pulse laser light having an intensity distribution to melt and to crystallize the thin film in a manner to grow grains laterally, the apparatus comprises an illumination light source provided out of an optical path of the laser, an illumination optical system including annular optical elements which provides the optical path of the laser light in a central portion and guides the illumination light to the thin film, and an observing optical system which magnifies the illumination light transmitted through the thin film, picks up an image of the grains growing laterally, and displays the image.

Abstract: In order to further develop a circuit arrangement (100) for electronic data communication, comprising—at least a non-volatile memory module (10) for storing data, and—at least an interface logic (20) associated with the memory module (10)—for addressing the memory module (10) and—for writing data to the memory module (10) or—for reading data from the memory module (10), together with a related method for registering light attacks on the non-volatile memory module (10), in such a way that, firstly, the light attack is recognized immediately and reliably regardless of whether an access, in particular a read access, to the memory module (10) is taking place or not and, secondly, the entire address space of the memory module (10) is covered as uniformly as possible in this regard, it is proposed that at least a monitoring arrangement (22) provided for monitoring the memory module (10) is associated with the interface logic (20), by means of which monitoring arrangement (22) an irradiation of the memory module (10

Abstract: A method of calibrating a sensor such as a photodetector, and device capable of employing that method, are disclosed. The method includes shining light upon a photosensitive device of the photodetector, receiving a first signal from an operator, and increasing a gain of the photodetector. The method also includes discontinuing the shining of the light upon the photosensitive device after the gain has been increased, receiving a second signal from an operator, and decreasing the gain so that the gain is not excessive.

Abstract: A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

Abstract: An apparatus for detecting a pointer within a region of interest includes at least one pair of imaging devices. The imaging devices have overlapping fields of view encompassing the region of interest. At least one light source provides illumination across the region of interest and is within the field of view of at least one of the imaging device. A filter is associated with the at least one imaging device whose field of view sees the light source. The filter blocks light projected by the light source to inhibit the imaging device from being blinded by the projected light.

Abstract: The present invention is an accumulated light meter that generates data concerning the quantity of photosynthetically active radiation available over a measured period of time. The device can calculate a daily light integral (DLI) that corresponds to the amount of light required by certain plants in order to optimize photosynthesis. The device also possesses the ability to filter out the effect that wavelengths of unproductive light have on the calculated values since not all light is conducive to photosynthesis and different species of plants can utilize different wavelengths of light in dissimilar ways.

Abstract: An auto darkening eye protection device comprising a shutter assembly adjustable between a clear state and a dark state and a control circuit. The control circuit is provided with a microcontroller, a delivery circuit, a sensing circuit and a weld detect circuit. The microcontroller is switchable between a sleep mode and a wake-up mode. The delivery circuit outputs a dark state drive signal to the shutter assembly to switch the shutter assembly from the clear state to the dark state upon enablement of the delivery circuit. The sensing circuit senses the occurrence of a welding arc and provides an output indicative of the occurrence of the welding arc. The weld detect circuit receives the output of the sensing circuit.

Abstract: A method and system for generating modulated optical vortices. Optical vortices can be used for a variety of applications, such as applying controlled torque or controlled force patterns to objects from a few nanometers to hundreds of micrometers in size. Numerous optical modes of optical vortices can be created to meet virtually any desired need in manipulating of objects. Furthermore, one can modify the wavefront of a beam of light in a specific way to create a new type of optical trap useful for manipulating mesoscopic materials. When the modified beam is brought to a focus, the resulting optical trap exerts forces transverse to the optical axis that can be used to transport mesoscopic matter such as nanoclusters, colloidal particles, and biological cells.

Abstract: Point source responses of pinhole apertures in a non-uniform grid mask used to spatially calibrate a gamma camera can be modeled as a two-dimensional Gaussian function with a set of seven parameters. The Gaussian parameters can be measured using a surface-fitting algorithm that seeks minimum error in the least squares sense. The process is repeated for data from each pinhole location and the data are added together to generate a complete model of the flood image from the mask, which then can be used in a peak detection process for clinical images.

Abstract: In the mass spectrometer of the present invention, first the length of flight time of a known ion is measured at every turn of the loop orbit. Ideally, the length of flight time at every turn is equal to one calculated based on the speed of the ion and the path length of the loop orbit, but an actual length of flight time deviates from it in a reproducible fashion. Thus, in the present invention, the deviation information is stored in the correction memory at every turn. In measuring an unknown ion, the unknown ion is made to fly the loop orbit a predetermined number of times. Then the flight time of the unknown ion that has flown the loop orbit a predetermined number of turns is measured, and the deviations of the flight time at the turns are corrected using the correction data stored in the correction memory. The mass to charge ratio of the unknown ion is calculated based on the corrected flight time.

Abstract: Charged droplet spray is formed from a solution with all or a portion of the charged droplet spray current generated from reduction or oxidation (redox) reactions occurring on surfaces removed from the first or sample solution flow path. In one embodiment of the invention, two solution flow channels are separated by a semipermeable membrane. A first or sample solution flowing through the first solution flow channel exchanges cation or anion charged species through the semipermeable membrane with a second solution or gas flowing through the second flow channel. Charge exchange is driven by the electric field applied at the charged droplet sprayer sample solution outlet. Redox reactions occur at an electrode surface in contact with the second solution. The invention increases the control and range of the Electrospray ionization process during ES/MS operation.

Abstract: In some embodiments, a tandem (MS/MS) mass spectrometry method includes selecting a collision-induced dissociation (CID) voltage amplitude and a q-parameter value for a quadrupole ion trap to optimize a daughter ion fragmentation process for a given parent ion mass-to-charge (m/z) ratio. The q and CID voltage values may be selected according to a look-up table and/or using approximate analytical expressions. The correspondence between m/z values and (q, CID) value pairs may be established by pre-measurement calibration. A fragmentation-optimized q value may be computed according to m/z, and a CID voltage value may be determined according to the computed q value. A user may also force q to another value, for example in order to facilitate trapping of a desired daughter ion mass range, and the controller computes a CID voltage value according to the forced q value.

Abstract: The present invention provides a standard test device used for testing a hole of a semiconductor device. The standard test device has a structure which comprises: at least a dummy film on a base surface; at least an insulating layer which has at least one opening penetrating through the insulating layer, so that a part of a top surface of the at least dummy film is shown through the at least one opening, wherein the at least dummy film has a predetermined constant thickness at least around the at least one opening. The standard test device makes it easily possible to determine or measure a thickness of a residual film on a bottom of the contact hole.

Abstract: The kind of a particle is determined by pressing a hard atomic force microscope stylus having a spring constant equal to or larger than 300 N/m onto a particle to be removed and detecting bending quantity relative to a press force and a kind of a stylus used for removing the particle is changed in accordance with the kind of the particle.

Abstract: Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer. The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.

Abstract: An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam (1, 2) of charged particles, a shielding element (10) having an opening (30) for the beam of charged particles to pass through, wherein the opening (30) is sufficiently small and the shielding element (10) sufficiently closely positioned to the surface (20) of the sample to reduce the influence of charge accumulation effects at the surface on the beam of charged particles.

Abstract: A bolometer-type infrared solid-state image sensor has a plurality of infrared detecting elements provided above the substrate, which has diaphragm spacing from the substrate and supported by beams. The diaphragm has a bolometer thin film, electrodes arranged on the both end of the bolometer thin film, an upper layer protective film and a lower layer protective film, which are formed so as to sandwich and cover said bolometer thin film and the electrodes, and concave or convex sections formed on said lower layer protective film. The bolometer thin film is formed on the sides of the concave or convex sections. The beams includes wiring material and insulating protective films surrounding the wiring material.

Abstract: The device and method of the present invention are useful for determining the characteristics of an infrared wavefront. The present invention involves positioning a beam of light containing the infrared wavefront to be characterized onto a distorted grating, using the grating to produce a plurality of images, determining the infrared wavefront from the plurality of images and analyzing the infrared wavefront for features that characterize the infrared wavefront.

Abstract: This invention provides a miniaturized silicon thermal flow sensor with improved characteristics, based on the use of two series of integrated thermocouples (6, 7) on each side of a heater (4), all integrated on a porous silicon membrane (2) on top of a cavity (3). Porous silicon (2) with the cavity (3) underneath provides very good thermal isolation for the sensor elements, so as the power needed to maintain the heater (4) at a given temperature is very low. The formation process of the porous silicon membrane (2) with the cavity (3) underneath is a two-step single electrochemical process. It is based on the fact that when the anodic current is relatively low, we are in a regime of porous silicon formation, while if this current exceeds a certain value we turn into a regime of electropolishing. The process starts at low current to form porous silicon (2) and it is then turned into electropolishing conditions to form the cavity (3) underneath.

Abstract: Methods and apparatus for measuring a phase fraction of a flow stream are disclosed. An infrared phase fraction meter includes a light source for emitting into a flow stream infrared radiation that includes first and second wavelength bands. The first wavelength band substantially transmits through first and second phases of the flow stream and is substantially absorbed by a third phase. In contrast, the second wavelength band is substantially absorbed by the second phase relative to the first and third phases. One or more detectors simultaneously detect attenuation of the first and second wavelength bands upon the infrared radiation passing through at least a portion of the flow stream, and a phase fraction of the second phase is determined based on the attenuation. As an example, the first, second and third phases are gas, water and oil, respectively, produced from a well.

Abstract: The current invention presents designs of SPECT gamma cameras without the in-out mechanical motion of the detectors. The elimination of this motion is achieved by the implementation of iterative algorithms, such as Resolution Recovery and/or Wide Beam Reconstruction, which compensate for the Line Spread Function effect due to the collimator characteristics. The use of these methods enables construction of SPECT gamma cameras with a range of novel designs, having their gamma detector (or detectors) orbiting the patient in a predetermined orbit of fixed radius. For example, the radius might be chosen as such that the majority of all patients can be scanned by the system. The advantages of the invention are applicable for gamma cameras with any numbers of detectors.

Abstract: The radiation detector according to this invention has a common electrode for bias voltage application formed on a surface of an amorphous selenium semiconductor film (a-Se semiconductor film) sensitive to radiation. The common electrode is a gold thin film having a thickness in a range of 100 to 1,000 ?. The gold thin film acting as the common electrode may be formed on the surface of the a-Se semiconductor film at a relatively low vapor deposition temperature and in a reduced vapor deposition time. This feature suppresses a generation of defects in the a-Se semiconductor film due to formation of the common electrode. The gold thin film for the common electrode is not so thick as in the prior art, but is 1,000 ? or less. With the reduced thickness, the common electrode has improved boding property with respect to the a-Se semiconductor film.

Abstract: The invention relates to an arrangement which includes a radiation source (1) and a radiation sensor device (3) for forming image signals (Bn), the radiation sensor device (3) being associated with a read-out circuit arrangement (4) for the amplification/processing of image signals (Bn) read out, there also being provided at least one dosimeter (42) which is arranged to measure a radiation dose. The invention also relates to an X-ray examination apparatus and to a method for the processing of X-ray images. In order to realize an arrangement and a method whereby a high image quality can be achieved for the acquired images, it is proposed to apply a dose signal (Dn), produced by at least one dosimeter (42), to at least the read-out circuit arrangement (4).

Abstract: A flat panel x-ray imager exhibiting reduced ghosting effects and overvoltage protection by appropriate leakage current characteristics of the thin-film transistor array. A top electrode of a suitable material is directly on a non-insulating organic layer. The organic layer is directly on an amorphous selenium-based charge generator layer allowing charge transport across the layer, thereby reducing ghosting. The thin-film transistors have leakage current that rises relatively slowly with voltage across the transistor within a range that matches exposure through an object being imaged but rises at a sufficiently higher rate within a higher range to provide protection even when a corresponding region of the charge generator layer receives greater amounts of x-rays.

Abstract: The invention concerns an inorganic scintillator material of general composition M1-xCexCl3, wherein: M is selected among lanthanides or lanthanide mixtures, preferably among the elements or mixtures of elements of the group consisting of Y, La, Gd, Lu, in particular among the elements or mixtures of elements of the group consisting of La, Gd and Lu; and x is the molar rate of substitution of M with cerium, x being not less than 1 mol % and strictly less than 100 mol %. The invention also concerns a method for growing said monocrystalline scintillator material, and the use of said scintillator material as component of a scintillating detector in particular for industrial and medical purposes and in the oil industry.

Abstract: Radiation detectors, such as neutron detectors, and methods of detecting radiation, are described.

Abstract: A inspection system includes: a lens arrangement adapted to generate a substantially symmetrical electrostatic field about an optical axis and to direct a primary electron beam towards an object that is oriented in relation to the optical axis at a non-normal angle; and at least on additional electrode, positioned outside the lens arrangement such as to increase symmetry of an electromagnetic field in the vicinity of an interaction point between the primary electron beam and the object.

Abstract: A lithographic projection apparatus includes a grazing incidence collector. The grazing incidence collector is made up of several reflectors. In order to reduce the amount of heat on the collector, the reflectors are coated. The reflector at the exterior of the collector has an infrared radiating layer on the outside. The inner reflectors are coated with an EUV reflective layer on the outside.

Abstract: A radiation system for providing a projection beam of radiation in a lithographic apparatus is disclosed. The radiation system includes an EUV source for providing EUV radiation, and a contamination barrier that includes a plurality of foil plates for trapping contaminant material coming from the EUV source. The foil plates are arranged in an optically closed arrangement so that at least one of the foil plates reflects EUV radiation passing the contamination barrier at least one time.