Patents Issued in August 9, 2007
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Publication number: 20070181794Abstract: A reflectometer calibration technique is provided that may include the use of two calibration samples in the calibration process. Further, the technique allows for calibration even in the presence of variations between the actual and assumed properties of at least one or more of the calibration samples. In addition, the technique utilizes a ratio of the measurements from the first and second calibration samples to determine the actual properties of at least one of the calibration samples. The ratio may be a ratio of the intensity reflected from the first and second calibration samples. The samples may exhibit relatively different reflective properties at the desired wavelengths. In such a technique the reflectance data of each sample may then be considered relatively decoupled from the other and actual properties of one or more of the calibration samples may be calculated. The determined actual properties may then be utilized to assist calibration of the reflectometer.Type: ApplicationFiled: May 5, 2006Publication date: August 9, 2007Inventors: Phillip Walsh, Dale Harrison
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Publication number: 20070181795Abstract: A reflectometer calibration technique is provided that may include the use of two calibration samples in the calibration process. Further, the technique allows for calibration even in the presence of variations between the actual and assumed properties of at least one or more of the calibration samples. In addition, the technique utilizes a ratio of the measurements from the first and second calibration samples to determine the actual properties of at least one of the calibration samples. The ratio may be a ratio of the intensity reflected from the first and second calibration samples. The samples may exhibit relatively different reflective properties at the desired wavelengths. In such a technique the reflectance data of each sample may then be considered relatively decoupled from the other and actual properties of one or more of the calibration samples may be calculated. The determined actual properties may then be utilized to assist calibration of the reflectometer.Type: ApplicationFiled: May 5, 2006Publication date: August 9, 2007Inventors: Phillip Walsh, Dale Harrison
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Publication number: 20070181796Abstract: The present invention is devoted to an analytical method for directly determining carbon number and molecular weight distributions of isoparaffin mixtures. The analytical means uses low in-scan emitter-current field-ionization mass spectroscopy to substantially reduced or eliminated molecular ion fragmentation for isoparaffins, which allows direct measurement of isoparaffin molecular ions for their distributions. The analytical means is capable of directly characterizing isobutane to C50+ isoparaffins, covering naphtha to gas oil ranges.Type: ApplicationFiled: February 6, 2007Publication date: August 9, 2007Inventors: Chang Hsu, Gary Dechert, Haven Aldrich, Gerald Dupre
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Publication number: 20070181797Abstract: There are provided a mass spectrum analysis device, a mass spectrum analysis method, and a mass spectrum analysis program capable of accurately analyzing a mass spectrum. The mass spectrum device analyzes a mass spectrum measured for a plurality of samples. The mass spectrum device includes peak position detection means 14 for detecting a peak position where the mass spectrum is at its peak, and coincidence degree calculation means 15 for calculating the coincidence degree of peaks according to the number of peak positions detected in a plurality of mass spectra that is contained in a window having a width for a mass number.Type: ApplicationFiled: June 8, 2005Publication date: August 9, 2007Applicants: MCBI, INC., YAMATAKE CORPORATIONInventors: Kazuhiko Uchida, Masami Sato, Junya Nishiguchi, Shinsuke Yamasaki
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Publication number: 20070181798Abstract: A method and system for rapid determination of a composition, such as crude oils and fractions thereof, and s obtaining the information necessary to assess the yield of commercially valuable fuel and lube oil fractions in a single process, variations of the method and system use Gas Chromatography—FID/Mass Spectrometry and other features, including an auto sampler, a wall coated capillary column, a temperature programmable injector, and a data processing system for compiling and processing the experimental data. The system and method further include a computer system with application software or other processing mechanism and optionally a communication network. One variation provides a graphical user interface for the entry of data and for displaying information, such as in a graphical manner, to show the relationship of various determined outputs and results.Type: ApplicationFiled: October 18, 2006Publication date: August 9, 2007Inventors: Joaquin Lubkowitz, Aaron Mendez, Roberto Meneghini
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Publication number: 20070181799Abstract: A membrane introduction mass spectrometry (MIMS) sampling interface is presented that demonstrates improved online performance for the direct, real-time measurement of semi-volatile organic compounds (SVOCs) in samples such as air and water, at parts-per-billion and parts-per-trillion levels. The device is based upon a capillary hollow fiber silicone (polydimethylsiloxane) membrane in a ‘flow-over’ configuration that is resistively heated on the membrane interior. One embodiment resistively heats using a coaxial nichrome wire, establishing a thermal gradient counter to the analyte concentration gradient. This arrangement allows for continuous and/or pulsed heating modes, affording excellent sensitivity for the online measurement of SVOCs while retaining sensitivity for volatile organic compounds (VOCs). In addition, the signal response time for SVOCs is reduced substantially over conventional MIMS methods.Type: ApplicationFiled: January 9, 2007Publication date: August 9, 2007Inventors: Erik Krogh, Christopher Gill
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Publication number: 20070181800Abstract: An interface for mass spectrometers. The interface uses non coaxial sampling pathways of the analyte ion beam prior to entering the entrance of a mass spectrometer for decreasing chemical background, and can be done in such a way as to permit multiple sprayers, increasing sample throughput and sensitivity for LC/MS (liquid chromatography/MS). The interface includes an ion source having an exit from which a beam of analyte ions are emitted, a curtain plate and an aperture in the curtain plate member, an orifice plate having an orifice therein. The orifice plate is being spaced from the curtain plate member defining a flow passageway therebetween, and the aperture in the orifice plate is aligned with a sample entrance to a first vacuum stage of a mass spectrometer maintained substantially lower than atmospheric pressure.Type: ApplicationFiled: January 12, 2007Publication date: August 9, 2007Inventors: Charles Jolliffe, Gholamreza Javahery, Lisa Cousins, Ilia Tomski
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Publication number: 20070181801Abstract: A mass spectrometer capable of measuring under switching two ion sources at different pressure levels in which a sample gas separated by GC column is branched, and separately introduced to a first ion source (for example, APCI ion source) and a second ion source (for example, EI ion source) at a pressure level lower than that of the first ion source respectively. Preferably, the flow rate of the sample gas introduced to the APCI ion source is made more than the flow rate of the sample gas introduced to the EI ion source, so that the pressure for each of the ion sources can be maintained and analysis can be conducted by each ionization at a good balance in view of the sensitivity.Type: ApplicationFiled: January 30, 2007Publication date: August 9, 2007Inventors: Masuyoshi Yamada, Masao Suga, Izumi Waki
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Publication number: 20070181802Abstract: A mass spectrometer capable of measuring under switching two ion sources at different pressure levels in which a sample gas separated by GC column is branched, and separately introduced to a first ion source (for example, APCI ion source) and a second ion source (for example, EI ion source) at a pressure level lower than that of the first ion source respectively. Preferably, the flow rate of the sample gas introduced to the APCI ion source is made more than the flow rate of the sample gas introduced to the EI ion source, so that the pressure for each of the ion sources can be maintained and analysis can be conducted by each ionization at a good balance in view of the sensitivity.Type: ApplicationFiled: March 2, 2007Publication date: August 9, 2007Inventors: Masuyoshi Yamada, Masao Suga, Izumi Waki
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Publication number: 20070181803Abstract: In a mass spectrometer in which a high ion dissociation efficiency is possible, inserted electrodes are arranged with a form divided into two or more in the axial direction of the ion trap, an electric static harmonic potential is formed from a DC voltage applied to the inserted electrodes, and with an Supplemental AC voltage applied, ions in the ion trap are oscillated between the divided inserted electrodes in the axial direction of the ion trap by resonance excitation, and the ion with a mass/charge ratio within a specific range is mass-selectively dissociated. Thus, a high ion dissociation efficiency is realized by the use of ion trap of the present invention.Type: ApplicationFiled: January 17, 2007Publication date: August 9, 2007Inventors: Hideki Hasegawa, Yuichiro Hashimoto, Izumi Waki
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Publication number: 20070181804Abstract: A mass spectrometry device includes an ion source for ionizing a sample, an ion trap for trapping ions ionized by the ion source. A control unit for controlling voltages applied to lenses forming part of the ion trap, and a detection unit for detecting the ions trapped by said ion trap. The control unit causes a trap potential to be generated on a central axis of quadrupole rods forming part of the ion trap, causes part of the trapped ions to be oscillated in an intermediate direction between the quadrupole rods which are mutually adjacent to each other, and applies a voltage for ejecting the oscillated ions in a central-axis direction of the quadrupole rods by generating an extraction field.Type: ApplicationFiled: March 12, 2007Publication date: August 9, 2007Inventors: Yuichiro Hashimoto, Hideki Hasegawa, Takashi Baba, Izumi Waki
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Publication number: 20070181805Abstract: A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron microscope having a monochromator is equipped with, between an electron source and the monochromator, a first focusing lens for adjusting focusing of the electron beam entering the monochromator and a first astigmatism correcting lens for correcting astigmatism of the electron beam entering the monochromator. The microscope further includes a means of obtaining an image of an electron-beam adjustment sample disposed where the electron beam in the monochromator is focused, and based on the obtained image, driving the first focusing lens and the first astigmatism correcting lens so that the focusing and astigmatism of the electron beam entering the monochromator are adjusted.Type: ApplicationFiled: January 5, 2007Publication date: August 9, 2007Inventors: Wataru Mori, Makoto Ezumi, Yoichi Ose
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Publication number: 20070181806Abstract: When an accelerating voltage and operating distance are changed, an excitation current and a pole voltage of an aberration corrector must also be changed. Moreover, different multipole voltages or currents must be added individually for each pole in order to superpose multipoles.Type: ApplicationFiled: January 29, 2007Publication date: August 9, 2007Inventors: Tomonori Nakano, Takaho Yoshida
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Publication number: 20070181807Abstract: An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a plurality of inspection recipes on the GUI. An inspection recipe includes settings for controlling charged particle columns which irradiate charged particles on samples with a plurality of characteristics. Plural inspection recipes are arranged and displayed on a coordinate system which is specified by a plurality of axes having characteristic values (robustness variable of charge up, throughput of defect inspection, and accuracy of defect inspection) which have mutually trade-off relationships.Type: ApplicationFiled: February 1, 2007Publication date: August 9, 2007Inventors: Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada, Noritsugu Takahashi
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Publication number: 20070181808Abstract: While an image obtained by a general electron microscope is affected by the shape and material of an object specimen, an image obtained from mirror electrons is affected by the shape of an equipotential surface on which the mirror electrons are reflected, thereby the image interpretation is complicated. A mirror electron microscope of the present invention is provided with the following means for controlling a reflecting plane of the mirror electrons according to the structure of an object pattern to be measured or a concerned defect. 1) Means for controlling a potential difference between a specimen and an electron source equivalent to a height of a reflecting plane of a mirror electron beam according to a type, an operation condition of an electron source, and a type of a pattern on a specimen. 2) Means for controlling an energy distribution of an illuminating beam with an energy filter 9 disposed in an illuminating system.Type: ApplicationFiled: February 2, 2007Publication date: August 9, 2007Inventors: Hisaya Murakoshi, Hideo Todokoro, Hiroyuki Shinada, Masaki Hasegawa, Momoyo Enyama
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Publication number: 20070181809Abstract: A technique for providing high-contrast images of defects in semiconductor devices and arrays of such devices, by illuminating each semiconductor device under inspection with broadband infrared radiation, and then forming an image of radiation that is specularly reflected from the semiconductor device. Many semiconductor devices and arrays of such devices have a metal backing layer that specularly reflects the illumination back into an appropriately positioned and aligned camera, selected to be sensitive to infrared wavelengths at which the semiconductor device materials are relatively transparent.Type: ApplicationFiled: February 6, 2006Publication date: August 9, 2007Inventors: Mau-Song Chou, Jonathan Arenberg, Mark Menard, Thomas Chung
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Publication number: 20070181810Abstract: Vehicle-based lidar systems and methods are disclosed using multiple lasers to provide more compact and cost-effective lidar functionality. Each laser in an array of lasers can be sequentially activated so that a corresponding optical element mounted with respect to the array of lasers produces respective interrogation beams in substantially different directions. Light from these beams is reflected by objects in a vehicle's environment, and detected so as to provide information about the objects to vehicle operators and/or passengers.Type: ApplicationFiled: February 6, 2006Publication date: August 9, 2007Inventors: Michael Tan, William Trutna, Georgios Panotopoulos
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Publication number: 20070181811Abstract: A T-ray imaging system employing an optical resonator that is adapted to be (i) positioned in the near-field proximity to a surface of a sample and (ii) pumped with pump light such that the pump light traverses a relatively thin layer of an electro-optically responsive material (EORM) located in the resonator's cavity. The imaging system has an optical detector that is adapted to detect at least a portion of the pump light reflected from the resonator, while the sample is illuminated with terahertz (THz) radiation such that the EORM is exposed to that radiation resulting in a detectable phase shift in the reflected pump light.Type: ApplicationFiled: February 9, 2006Publication date: August 9, 2007Inventor: Oleg Mitrofanov
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Publication number: 20070181812Abstract: A radiation source is disclosed for an optical sensor arrangement having an incandescent lamp being switched by a semiconductor switch. The incandescent lamp emits a broadband light spectrum. The semiconductor switch has a control terminal driven by a control signal to switch a connection of the incandescent lamp to a supply voltage. The semiconductor switch has a first terminal which is connected to the incandescent lamp, and a second terminal which is connected to a reference potential. When the semiconductor switch is in an on state, a current path is formed between the first and second terminals. A capacitor is connected between the control terminal and the first terminal. A first resistor connects the control terminal to the control signal and a second resistor or capacitor connects the control terminal to the reference potential.Type: ApplicationFiled: February 2, 2007Publication date: August 9, 2007Inventors: Kuno Straub, Thomas Tille
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Publication number: 20070181813Abstract: Variable-Resolution X-ray (VRX) techniques boost spatial resolution of a Computed Tomographic (CT) scanner in the scan plane by two or more orders of magnitude by reducing the angle of incidence of the x-ray beam with respect to the detector surface. The invention provides a multi-arm multi-angle VRX detector for targeted CT scanning. The detector allows for “target imaging” in which an area of interest is scanned at higher resolution than the remainder of the subject, yielding even higher resolution for the target area than that obtained from prior VRX techniques. In one embodiment, the VRX-CT detector comprises four quasi-identical arms, each containing six 24-cell modules are made of individual custom CdWO4 scintillators optically-coupled to custom photodiode arrays. The maximum scan field is 40 cm for a magnification of 1.4. A significant advantage of the four-arm geometry is that it can transform quickly to a two-arm or single-arm geometry for comparison studies and other applications.Type: ApplicationFiled: February 7, 2007Publication date: August 9, 2007Inventors: Frank A. DiBianca, Lawrence M. Jordan
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Publication number: 20070181814Abstract: The present invention is directed to a system and method for efficiently and cost effectively determining an accurate depth of interaction for a crystal that may be used for correcting parallax error and repositioning LORs for more clear and accurate imaging. The present invention is directed to a detector assembly having a thin sensor (e.g., APD) deployed in front of the detector (the side where the radioactive source is located and the photon is arriving to hit the detector) and a second sensor (APD or photomultiplier) on the opposite side of the detector. The light captured by the two interior and exterior sensors which is proportional to the energy of the incident photon and to the distance where the photon was absorbed by the detector with respect to the location of the two sensors, is converted into an electrical signal and interpolated for finding the distance from the two sensors which is proportional to the location where the photon hit the detector.Type: ApplicationFiled: March 20, 2007Publication date: August 9, 2007Inventor: Darlo Crosetto
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Publication number: 20070181815Abstract: A method and apparatus for monitoring a scanning beam of penetrating radiation, such as a scanning proton beam used to irradiate tissue. The position of the beam is tracked in real time by interposing a scintillator film between a source and an object of irradiation. An imaging detector, in optical communication with the scintillator, provides an output that is indicative of the position of the radiation and its variation with time. The accumulated dose over a scan may also be monitored.Type: ApplicationFiled: June 30, 2005Publication date: August 9, 2007Inventor: Steven Ebstein
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Publication number: 20070181816Abstract: An anisotropic conductive film includes: an insulating material; and a plurality of conductive particles dispersed in the insulating material, the conductive particles provided in a plurality of lines in a first direction along the thickness of the insulating material, the conductive particles in the lines disposed electrically connectable to each other, and the conductive particles in different lines disposed apart from each other in a second direction perpendicular to the first direction.Type: ApplicationFiled: January 31, 2007Publication date: August 9, 2007Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Mitsushi Ikeda, Toshiyuki Oka
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Publication number: 20070181817Abstract: The present invention provides a system and method for retrieving ionospheric parameters from dayside disk-viewing measurements of an ultraviolet emission within the upper atmospheric airglow. The invention may provide nowcasting and forecasting information of the ionosphere, which is important for ultraviolet communications.Type: ApplicationFiled: December 4, 2006Publication date: August 9, 2007Inventor: J. Picone
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Publication number: 20070181818Abstract: A device for detecting impurities in a noble gas includes a detection chamber and a source of pulsed ultraviolet light. The pulse of the ultraviolet light is transferred into the detection chamber and onto a photocathode, thereby emitting a cloud of free electrons into the noble gas within the detection chamber. The cloud of electrons is attracted to the opposite end of the detection chamber by a high positive voltage potential at that end and focused onto a sensing anode. If there are impurities in the noble gas, some or all of the electrons within the cloud will bond with the impurity molecules and not reach the sensing anode. Therefore, measuring a lower signal at the sensing anode indicates a higher level of impurities while sensing a higher signal indicates fewer impurities. Impurities in the range of one part per billion can be measured by this device.Type: ApplicationFiled: February 8, 2006Publication date: August 9, 2007Inventor: Robert Austin
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Publication number: 20070181819Abstract: A deflector for an equipment of electron beam lithography, the deflector including a plurality of control electrodes arranged symmetrically relative to the center axis of an irradiated electron beam, the electrodes configured to control the electron beam by applying voltages respectively, a plurality of molding substrates arranged symmetrically relative to the center axis of the electron beam configured to face outer peripheral surfaces of the plurality of control electrodes and a plurality of earth electrodes arranged respectively at the plurality of molding substrates. The deflector can suppress generation of cross talks with an improved accuracy of controlling an electron beam.Type: ApplicationFiled: February 5, 2007Publication date: August 9, 2007Applicant: NuFlare Technology, Inc.Inventors: Yoshimasa SANMIYA, Kenji Ohtoshi, Tetsuro Nishiyama
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Publication number: 20070181820Abstract: An apparatus and/or method for controlling an ion beam may be provided, and/or a method for preparing an extraction electrode for the same may be provided. In the apparatus, a plurality of extraction electrodes may be disposed in a path of an ion beam. At least one extraction electrode may include a plurality of sub-grids.Type: ApplicationFiled: February 7, 2007Publication date: August 9, 2007Inventors: Sung-Wook Hwang, Do-Haing Lee, Chul-Ho Shin, Jong-Woo Sun
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Publication number: 20070181821Abstract: A collimator that formed from a plurality of metal layers that are shaped by use of lithographic techniques in specific shapes. The formed metal layers are stacked and aligned together and then connected together to form the collimator.Type: ApplicationFiled: April 3, 2007Publication date: August 9, 2007Inventor: James Pinchot
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Publication number: 20070181822Abstract: The invention includes a method and apparatus for viewing fluorescent indicating materials for performing fluorescent magnetic particle testing and fluorescent liquid penetrant testing. In this method of nondestructive testing, the invention replaces ultraviolet light with the combination of a source of blue light that is substantially or entirely devoid of ultraviolet radiation and a yellow barrier filter. The method uses fluorescent indicating materials currently commercially available and originally designed for use with ultraviolet light sources.Type: ApplicationFiled: February 5, 2007Publication date: August 9, 2007Inventors: Charles Harris Mazel, Lawrence Goldberg
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Publication number: 20070181823Abstract: A device (60) for irradiating blood is provided, the device including a chamber (62) having an elongate configuration defining a hollow interior, the chamber formed of reflective material, a tubular cassette (74) sized and shaped to be received in the interior (70) of the chamber, the tubular cassette (74) having an inside diameter sized and shaped to receive a reflective core (78) having an elongate configuration with an exterior diameter smaller than the interior diameter of the cassette to provide a space (75) for receiving and holding blood stationary, and an array of light-emitting members (80) arranged on the chamber for emitting light of at least one wavelength into the interior (70) of the chamber (62) for irradiating and treating the blood inside the cassette (74).Type: ApplicationFiled: August 27, 2004Publication date: August 9, 2007Applicant: Prism Biotech, IncInventor: Todd Baumeister
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Publication number: 20070181824Abstract: In a radiation image storage panel, as a layer arrangement of consecutive layers, a support, a sublayer and a stimulable phosphor layer having needle-shaped stimulable phosphor crystals is comprised, said sublayer is a binderless non-vapor deposited layer, at least comprising as a halide compound an inorganic alkali halide salt selected from the group consisting of sodium fluoride, sodium chloride, sodium bromide, potassium fluoride, potassium chloride, potassium bromide, rubidium fluoride, rubidium chloride, rubidium bromide, cesium fluoride, cesium chloride and cesium bromide, thereby providing good adhesiveness between phosphor layer and support.Type: ApplicationFiled: January 8, 2007Publication date: August 9, 2007Inventors: Jean-Pierre Tahon, Carlo Uyttendaele, Paul Leblans
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Publication number: 20070181825Abstract: Exposure is performed with a reticle installed in an exposure apparatus, and a measurement mark on the reticle is transferred onto a wafer so as to form a first transferred image of the measurement mark (step 212). Then, the wafer is rotated (step 218), and then the measurement mark is transferred onto the wafer that has been rotated and a second transferred image of the measurement mark is formed (step 224). In this manner, the first transferred image and the second transferred image of the measurement mark each formed on the wafer are respectively imported by an SEM, according to a direction of the wafer with respect to the reticle during transfer of the measurement mark. Image processing having a common measurement direction is applied to each of the images that are imported without having to rotate the images, and the size of the first transferred image and the second transferred image in the measurement directions is measured.Type: ApplicationFiled: January 12, 2005Publication date: August 9, 2007Inventor: Iori Yoshikawa
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Publication number: 20070181826Abstract: A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and/or the counter electrode may be charged to some boost voltage and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.Type: ApplicationFiled: August 19, 2004Publication date: August 9, 2007Applicant: Imago Scientific Instruments CorporationInventors: Joseph Bunton, Jesse Olson
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Lithographic apparatus, calibration method, device manufacturing method and computer program product
Publication number: 20070181827Abstract: Calibration of spot height offsets in a level sensor is performed on a resist-coated substrate to eliminate process dependencies of substrate position measurements obtained by the level sensor.Type: ApplicationFiled: February 7, 2006Publication date: August 9, 2007Applicant: ASML NETHERLANDS B.V.Inventors: Jeffrey Godefridus Tempelaars, Gerardus Carolus Hofmans, Rene Oesterholt, Jan Hauschild, Hans Kattouw -
Publication number: 20070181828Abstract: Disclosed is an E-beam lithography system for synchronously irradiating surfaces of a plurality of substrates. The E-beam lithography system may include a loading unit loading and unloading substrates, an alignment chamber aligning the substrates, a transfer chamber transferring the substrates from the loading unit or chambers, a lithography chamber radiating one or more electron beams onto the substrates, and a vacuum chamber creating a vacuum in the chambers. A stage may be installed in the lithography chamber such that the substrates may be mounted on the stage and radiated with one or more electron beams.Type: ApplicationFiled: January 23, 2007Publication date: August 9, 2007Inventors: Je-bum Yoon, Cha-won Koh, Myoung-ho Jung, Gi-sung Yeo, Sang-jin Kim
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Publication number: 20070181829Abstract: An electron-beam exposure system includes: an electron gun; a first mask having a first opening for shaping a beam of electrons; a second mask having a second opening for shaping the beam of electrons; a stencil mask disposed below the first mask and the second mask, the stencil mask having a plurality of collective figured openings each for shaping the beam of electrons; a paralleling lens for causing the beam of electrons, which has been transmitted in, and come out of, the stencil mask, to turn into a beam of electrons which travels approximately in parallel to the optical axis; and a swing-back mask deflector for swinging back the beam of electrons which has passed through the stencil mask. N2>N1 may be satisfied where 1/N1 denotes the reduction ratio of a pattern in the stencil mask to a pattern on the surface of the workpiece, and 1/N2 denotes the reduction ratio of a pattern in the first mask and a pattern in the second mask to a pattern on the surface of the workpiece.Type: ApplicationFiled: January 5, 2007Publication date: August 9, 2007Inventors: Hitoshi Tanaka, Akio Yamada, Hiroshi Yasuda, Yoshihisa Ooae
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Publication number: 20070181830Abstract: An ion implantation device and a method of manufacturing a semiconductor device is described, wherein ionized boron hydride molecular clusters are implanted to form P-type transistor structures. The molecular cluster ions have the chemical form BnHx+ and BnHx?, where 10<n<100 and 0?x?n+4. The use of such boron hydride clusters results in a dramatic increase in wafer throughput, as well as improved device yields through the reduction of wafer charging. A method of manufacturing a semiconductor device is further described, comprising the steps of: providing a supply of molecules containing a plurality of dopant atoms into an ionization chamber, ionizing said molecules into dopant cluster ions, extracting and accelerating the dopant cluster ions with an electric field, selecting the desired cluster ions by mass analysis, modifying the final implant energy of the cluster ion through post-analysis ion optics, and implanting the dopant cluster ions into a semiconductor substrate.Type: ApplicationFiled: December 29, 2006Publication date: August 9, 2007Inventors: Thomas Horsky, Dale Jacobson
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Publication number: 20070181831Abstract: An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.Type: ApplicationFiled: April 5, 2007Publication date: August 9, 2007Inventors: Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi, Hideo Kashima, Kaoru Umemura
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Publication number: 20070181832Abstract: A method and apparatus satisfying growing demands for improving the precision of angle of incidence of implanting ions that impact a semiconductor wafer and the precision of ribbon ion beams for uniform doping of wafers as they pass under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes. The design of the optical elements makes possible: (1) Broad-range adjustment of the width of a ribbon beam at the work piece; (2) Correction of inaccuracies in the intensity distribution across the width of a ribbon beam; (3) Independent steering about both X and Y axes; (4) Angle of incidence correction at the work piece; and (5) Approximate compensation for the beam expansion effects arising from space charge. In a practical situation, combinations of the elements allow ribbon beam expansion between source and work piece to 350 millimeter, with good uniformity and angular accuracy.Type: ApplicationFiled: April 5, 2007Publication date: August 9, 2007Inventors: Kenneth Purser, Harald Enge, Norman Turner
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Publication number: 20070181833Abstract: An electron gun for generating an electron beam is provided, which includes a secondary emitter. The secondary emitter includes a non-contaminating negative-electron-affinity (NEA) material and emitting surface. The gun includes an accelerating region which accelerates the secondaries from the emitting surface. The secondaries are emitted in response to a primary beam generated external to the accelerating region. The accelerating region may include a superconducting radio frequency (RF) cavity, and the gun may be operated in a continuous wave (CW) mode. The secondary emitter includes hydrogenated diamond. A uniform electrically conductive layer is superposed on the emitter to replenish the extracted current, preventing charging of the emitter. An encapsulated secondary emission enhanced cathode device, useful in a superconducting RF cavity, includes a housing for maintaining vacuum, a cathode, e.g.Type: ApplicationFiled: April 12, 2007Publication date: August 9, 2007Applicant: Brookhaven Science Associates, LLCInventors: Triveni Srinivasan-Rao, Ilan Ben-Zvi
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Publication number: 20070181834Abstract: The invention is directed to an arrangement and a method for the generation of EUV radiation of high average output, preferably for the wavelength region of 13.5 nm for use in semiconductor lithography. It is the object of the invention to find a novel possibility for generating EUV radiation of high average output which permits a time-multiplexing of the radiation of a plurality of source modules in a simple manner without overloading the source modules and without requiring extremely high rotational speeds of optical-mechanical components. This object is met, according to the invention, in that a plurality of identically constructed source modules which are arranged so as to be distributed around a common optical axis are directed to a rotatably mounted reflector arrangement which successively couples in the beam bundles of the source modules along the optical axis.Type: ApplicationFiled: January 11, 2007Publication date: August 9, 2007Inventor: JUERGEN KLEINSCHMIDT
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Publication number: 20070181835Abstract: A valve includes a valve body (1, 2), a tube (3) made of an elastomer extending through the inside of the valve body, and a roller (23) and a pressing surface (14) disposed facing each other across the tube (3). The roller (23) can be brought close to the pressing surface (14) to collapse the tube (3) between the roller (23) and pressing surface (14) and close the flow passage in the tube (3), and the roller (23) can be moved along the tube (3) to make a collapsed position where the tube (3) is collapsed by the roller (23) and the pressing surface (14) move along the flow passage axis of the tube (3) while maintaining the flow passage in the closed state.Type: ApplicationFiled: December 15, 2004Publication date: August 9, 2007Applicant: ASAHI ORGANIC CHEMICALS INDUSTRY CO., LTD.Inventor: Toshihiro Hanada
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Publication number: 20070181836Abstract: A lever actuated pneumatic deadman valve for use in connection with pneumatic blasting equipment is ergonomically designed to reduce fatigue and strain on the operator. The valve is shaped to fit comfortably in the hand of the operator, with a spring biased lever hinged for action to fit the natural movement of the hand. A detent button is sized and positioned for easily accommodating single-handed operation. Another important feature of the deadman valve is the reconfiguration of the valve cartridge with an offset port to produce a cyclonic flow around the spool for reducing the wear on the spool.Type: ApplicationFiled: January 24, 2006Publication date: August 9, 2007Inventor: Phuong Taylor Nguyen
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Publication number: 20070181837Abstract: A needle valve with a hollow needle effective for permitting a portion of the fluid passing through the valve to flow throughout the valve and exit through any leaks in the valve, whereby any environmental fluid within the valve is displaced by the fluid passing through the valve.Type: ApplicationFiled: February 8, 2006Publication date: August 9, 2007Inventors: Daniel Mayer, Stephen Tuomela
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Publication number: 20070181838Abstract: A valve drive device may include a motor, a rotational member rotated by the motor, a linearly moving member engaged with the rotary member, a converting mechanism for converting rotation of the rotational member into linear movement of the linearly moving member, a diaphragm valve for opening or closing an opening part by linearly moving member, and an urging member for closing the opening part through the diaphragm valve. The linearly moving member is linearly moved by the rotational member and the opening part is closed by the diaphragm valve in a state that the rotational member and the linearly moving member are in a non-engagement state. The valve drive device may be mounted on a pump having an inflow path and a plurality of outflow paths.Type: ApplicationFiled: December 8, 2006Publication date: August 9, 2007Inventor: Kenji Muramatsu
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Publication number: 20070181839Abstract: As shown in FIG. 3, a poppet 27 is formed by a valve body 19 and a supporting plate 28, to a front surface of which the valve body is firmly fixed and with a rear surface of which a tip surface of a plunger 18 contacts. A cap 29 has: a cylindrical portion 29a which is fitted to an outer circumference of the plunger 18; an inward projecting portion 29b which projects inwardly from this cylindrical portion 29a so as to abut on a surface outer circumferential portion 28a of the supporting plate 28; and an outward projecting portion 29c which projects outwardly from the cylindrical portion 29a so as to be engaged with a spring member.Type: ApplicationFiled: April 28, 2005Publication date: August 9, 2007Applicant: Koganei CorporationInventors: Toshiaki Tsuchizawa, Kouichi Teraki
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Publication number: 20070181840Abstract: A solenoid valve includes a coil, a stator core, a valve member, a coil spring, and a stopper. The coil provides a magnetic field when the coil is energized. The stator core includes a receiving bore, wherein the stator core generates a magnetic attractive force when the coil is energized. The valve member is attracted toward the stator core due to the magnetic attractive force generated by the stator core. The coil spring is received in the receiving bore of the stator core, wherein the coil spring biases the valve member in an opposite direction opposite from the stator core. The stopper positions the coil spring such that an outer peripheral surface of the coil spring is separated from an inner peripheral surface of the receiving bore.Type: ApplicationFiled: February 7, 2007Publication date: August 9, 2007Applicant: DENSO CORPORATIONInventors: Naoki Mitsumata, Fumiaki Murakami, Shigeru Nonoyama
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Publication number: 20070181841Abstract: This invention relates to an orifice valve having a moveable gate to control the flow of solids in a closed conveying system. The invention encompasses a valve housing with two complementary valve sections, each of a unitary construction. A single plate is laser cut and bent to present a first planar surface, two opposed sidewalls and an end wall. The sidewalls include an integral flange section which presents planar surfaces that are placed in facing relationship with the planar flange surfaces of a second housing member so that the two form a closed cavity. A blade is received in the cavity and is reciprocal between open and closed positions so as to accommodate the flow of material or to block the flow. Appropriate retainers hold the two sections in place. In the preferred embodiment a second end wall is also integral with the housing section and is formed from the same plate stock as the first planar section, the sidewalls and the first end wall.Type: ApplicationFiled: February 9, 2006Publication date: August 9, 2007Inventors: Shawn Werner, Lee Young, Eric Severson
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Publication number: 20070181842Abstract: A valve body capable of preventing a seat part from being deformed by a stress caused by nonuniform tightening and completely closing a valve in a closed state and the valve having the valve body. The body (12) of the valve (10) formed of a resin material comprises an inside port (23) and an outside port (25) formed on the outside of the inside port (23). A seat part (12a) in contact with the tip part of a valve element (14) is formed at one end part of the inside port (23). The body is characterized in that the outside port (25) is formed on the radial outer side of the seat part (12a) approximately all around the seat part.Type: ApplicationFiled: May 19, 2005Publication date: August 9, 2007Applicant: SURPASS INDUSTRY CO., LTD.Inventor: Hiroki Igarashi
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Publication number: 20070181843Abstract: A valve component for a faucet includes a substrate, a first layer of material provided above the substrate in an amount sufficient to improve abrasion resistance of the substrate, and a second layer of material provided above the first layer of material. The second layer of material includes amorphous diamond having sp3 bonding of at least about 40%, a hardness of at least about 45 GPa, and an elastic modulus of at least about 400 GPa.Type: ApplicationFiled: April 5, 2007Publication date: August 9, 2007Inventors: Richard Welty, Klaus Brondum, Douglas Richmond, Patrick Jonte