Abstract: A filter element comprising an annular filtering media defining first and second axial ends and surrounding an interior area having a central axis, a first end cap sealing attached to said first axial end of said filter media, a second annular end cap sealing attached to said second axial end of said filter media, said second end cap defining a central opening, and a central tube extending from the opening of the second end cap, wherein the central tube includes an actuator exclusive of keys, free ends, or projections.

Abstract: Tangential flow filtration device is provided wherein liners are provided between the filtration element and the top and bottom holders or manifolds. The liners incorporate the flow channels and inlet and outlet ports that were previously present in the manifolds. The liners are made of an inexpensive material and therefore are disposable after a single use, making it more cost effective to dispose of them than to clean the conventional manifolds. In addition, the liners can be pre-sterilized.

Abstract: A multi-use two-reservoir bucket that combines various separate tasks and methods to make available more options. More specifically, the multi-use two-reservoir bucket is a two-reservoir system to supply liquid or material to a pump/sprayer, tools and accessories.

Abstract: A composition is formed by blending a vinylidene fluoride resin having a relatively high molecular weight and an improved crystallinity represented by a difference Tm2?Tc of at most 32° C. between an inherent melting point Tm2 and a crystallization temperature Tc of the resin with a plasticizer and a good solvent for vinylidene fluoride resin, and the composition is melt-extruded into a hollow fiber-form. The hollow fiber-form extrudate is then cooled to be solidified from an outside thereof by introduction into cooling medium and subjected to extraction of the plasticizer and stretching, thereby forming a hollow fiber porous membrane of vinylidene fluoride resin characterized by co-presence of crystal oriented portion and crystal non-oriented portion recognizable by X-ray diffraction method.

Abstract: The invention relates to filtration media having nanocrystals of metal oxides, encapsulated in or impregnated into a binder matrix, which binds together particles of activated carbon. The filtration media can be compressed into a filtration block, has low pressure drop, and has excellent microbial removal properties.

Abstract: A storm water interceptor comprises an input conduit connected to a first treatment tank for delivering storm water to the first treatment tank and having an obvert elevation. Also, the interceptor comprises a lower conduit having an invert elevation, a substantially horizontal orifice at a first end connected to the first treatment tank and an exit orifice at an opposite end connected to a second treatment tank, whereby the substantially horizontal orifice at the first end of the lower conduit is below the invert elevation of the lower conduit. The interceptor further comprises an overflow conduit connecting the first treatment tank to the second treatment tank, whereby the overflow conduit is connected to the first treatment tank at a location above the obvert elevation of the input conduit.

Abstract: A method of treating organic matter-containing waste liquid, which is formed as a byproduct in a plant for the production of oxygen-containing compounds or liquid hydrocarbons (including liquid fuel oil and chemicals, which are produced from natural gas through a synthetic gas), having the step of: treating the waste liquid at a high temperature of 40° C. or higher, while being aerated, by using a membrane bioreactor (2) that is equipped with a separation membrane (7b).

Abstract: The present invention is affinity particles that are characterized by having phosphorylcholine groups represented by the following formula (1) covalently bonded onto the surface of organic particles and also by having ligands having specific affinity with a certain target substance covalently bonded or adsorbed onto the surface of organic particles. The object of the present invention is to provide an affinity separation method that uses affinity particles utilizing organic particles and is capable of separating the target substance easily and with high accuracy.

Abstract: A crossflow membrane device that receives a feedstock at a feed end face and separates the feedstock into permeate and retentate. The device has a membrane support containing at least one monolith of porous material defining a plurality of passageways extending longitudinally from the feed end face of the monolith to a retentate end face of the monolith through which the feedstock flows to pass retentate from the device. A permselective membrane coating of finer pore size than that of the porous material is applied to the passageway wall surfaces of the monolith. At least one permeate conduit is formed within the monolith, the conduit containing a plurality of longitudinal permeate chambers communicating with a means of permeate introduction at or near the feed end face and permeate withdrawal at or near the retentate end face.

Abstract: The present invention relates to the use of amphoteric ion exchangers for adsorbing oxo anions, preferably to the use of iron oxide/iron oxyhydroxide-containing amphoteric ion exchangers for removing oxo anions from water and aqueous solutions, and to the preparation of these amphoteric iron oxide/iron oxyhydroxide-containing ion exchangers.

Abstract: The present invention relates to a process for the preparation of iron oxide/iron oxyhydroxide-containing weakly basic anion exchangers prepared according to the phthalimide process and their use for removing oxo anions and their thio analogues, preferably of arsenic, from water and aqueous solutions and to a regeneration process.

Abstract: A method of filtering a fluid wherein after filtering a contaminated fluid, which causes the formation of a filter cake, a substantially non-contaminated fluid is fed through the filter cake and filter at varying flux or at varying driving force. At the same time the necessary driving force or the obtained flux, respectively, are measured. The measured value and the respective value setting are compared with at least one standard set of data and on the basis of this comparison the fouling status of the fluid to be filtered, the filter and the filter cake is determined. The method makes it possible to accurately determine characteristics of a fluid to be filtered. This may be realized by simply varying the flux and measuring the driving force at different flux values, or vice versa.

Abstract: Method for treatment of oil on a solid or liquid surface to facilitate subsequent removal of the oil from the surface. A fat-soluble metal containing substance comprising an organic anion and a metallic cation is added to the oil. The metal containing substance may be prepared by allowing a metal salt to react with an acidic organic compound in a process in which a suitable oxidation agent ensures that all the metal in the end product is present at its highest stable oxidation state while at least one volatile compound is formed during the preparation. A polymeric material with a high specific surface area may optionally be added or a prepolymer for allowing subsequent formation of such a polymeric material.

Abstract: The invention relates to a method, wherein agglomerates found in sludge suspensions of sewage purification are destroyed in a first step, whereby the agglomerates are broken up by means of particle-particle and particle-wall collisions by deflecting at least once the sludge suspension. In another step, all components found in the sludge suspension are mixed due to high wall shear stress owing to a high rate of wetting area with respect to the crossflown surface.

Abstract: A microfluidic device that comprises a microchannel structure in which there are one, two or more flow paths (101;201a,b;301a,a?,b) all of which comprises a porous bed I (104,204,304) that is common for all of the flow paths and exposes an immobilized reactant R that is capable of interacting with a solute S that passes through the bed. The characteristics are that at least one of the flow paths comprises/comprise a second porous bed II (105,205,305) that is placed upstream of porous bed I (104,204,304) and is dummy with respect to interaction with solute S but capable of interacting with a substance DS that is present in a liquid aliquot together with solute S and is capable of disturbing the result of the interaction between solute S and said immobilized reactant R. There is also disclosed a method utilizing the device and variant of the device in which the immobilized R is replaced with a generic affinity ligand LI and/or porous bed II exposes a generic ligand LII that may be different from LI.

Abstract: A synergistic composition and method is provided for controlling odor from waste products. The composition comprises a combination of magnesium hydroxide and a sulfide-consuming compound. The method includes adding a sufficient amount of the composition to a waste stream to provide sufficient sulfide-consuming compound to effect immediate removal of sulfide. The composition incorporates a pH elevating and buffering compound, which both increases and buffers the pH. The increased pH serves to reduce both the volatile sulfide species and the volatile fatty acid (VFAs) species. The elevated pH also promotes the growth of naturally occurring bacteria which metabolize the sulfide to an innocuous form. Finally, addition of the composition drives the pH into a range where the growth of sulfide producing bacteria is inhibited.

Abstract: A process for treating contaminated water in which water contaminated with a volatile organic compound is placed within a volume of iron powder granules which have been water atomized by striking a stream of molten iron with water jets and drying the resulting iron powder. The iron powder granules contain iron, carbon and oxygen, wherein carbon is contained from 0.25 to 4 wt. % and oxygen is contained from 1 to 6 wt. %. The contaminated water is passed through or contacts the iron powder granules, whereby the contaminant is remediated.

Abstract: The invention provides a method for the reduction of the volume of solid liquid dispersion or suspension, the method comprising the steps of: (a) providing a receptacle comprising at least one permeate a or semi-permeable membrane; (b) introducing the solid/liquid dispersion or suspension into the receptacle; and (c) applying a mechanical force so as to substantially expel the liquid and compact the solid residue; characterised in that the application of the mechanical force comprises the application of pressure to the solid/liquid dispersion or suspension by means of at least one solid mechanical member, the magnitude of the pressure being increased during the process. The receptacle generally comprises a barrel (1), the permeable or semi-permeable membrane is most preferably a filter (2), and the mechanical force is typically applied by means of a source of an inflatable air bag (4) or a hydraulic ram.

Abstract: A method for extracting at least one alkaloid from opium that includes dissolving opium in a solvent, heating the dissolved opium solution, cooling the dissolved opium solution, adjusting the pH of the dissolved opium solution with at least one first weak acid, filtering the dissolved opium solution to recover a filtrate; and then separating and purifying at least one alkaloid in the filtrate. Preferably, this includes an additional step of chilling the opium solution after adjusting the pH of the dissolved opium solution with at least one first acid. The preferred method for separating and purifying at least one alkaloid in the filtrate includes utilizing preparative liquid chromatography, however, solvent extraction and filtration can also be utilized.

Abstract: Apparatus and method for increasing the concentration of a chemical substance in a fluid comprise a micro-fluidic elongated channel formed in a substrate, with the channel being in fluid-flow communication with an ambient region along its elongated dimension. In general, the fluid includes first and second chemical substances having different vapor pressures. The apparatus includes an evaporation controller for increasing the evaporation rate of the fluid from the channel into the ambient region, thereby increasing the concentration of the higher vapor pressure (HVP) substance in the portion of the fluid remaining in the channel and increasing the concentration of the lower vapor pressure (LVP) substance in the portion of the fluid evaporated into the ambient region.

Abstract: The present invention provides a method for purifying bacterial minicells that involves subjecting a sample containing minicells to density gradient centrifugation in a biologically compatible medium. The method optionally includes a preliminary differential centrifugation step and one or more filtration steps. The invention also provides a method for purifying bacterial minicells in which a sample containing minicells is subjected to a condition that induces parent bacterial cells to adopt a filamentous form, followed by filtration of the sample to separate minicells from parent bacterial cells. The inventive methods optionally include one or more steps to remove endotoxin from purified minicell preparations, and/or treatment of purified minicell preparations with an antibiotic. Additionally, the invention provides purified minicell preparations, prepared according to the foregoing methods, and containing fewer than about 1 contaminating parent bacterial cell per 107, 108, 109, 1010, or 1011 minicells.

Abstract: The present invention relates to droplet-based washing. According to one embodiment, a method of providing a droplet in contact with a surface with a reduced concentration of a substance is provided, wherein the method includes: (a) providing a surface in contact with a droplet comprising a starting concentration and starting quantity of the substance and having a starting volume; (b) conducting one or more droplet operations to merge a wash droplet with the droplet provided in step (a) to yield a combined droplet; and (c) conducting one or more droplet operations to divide the combined droplet to yield a set of droplets comprising: (i) a droplet in contact with the surface having a decreased concentration of the substance relative to the starting concentration; and (ii) a droplet which is separated from the surface.

Abstract: A merchandise display hook for mounting on a display structure includes a one-piece elongated U-shaped rigid member having a pair of spaced parallel rods and a connecting base. A sleeve is secured to the base and telescopically receives a shaft therethrough forming a pivot. A pair of lugs are fixed to outer ends of the shaft and have L-shaped ends which extend through openings in the display structure. Downward movement of the base along the support structure while the rods remain in a horizontal position pivotally move the lugs through and behind the support structure to a securely mounted position on the support structure eliminating the need for any upward angled movement of the display hook to install the hook, enabling the hook to be installed in a confined area.

Abstract: A merchandising system that is adaptable for displaying merchandise on a plurality of wall configurations including, but not limited to, varying pegboard and slatted wall configurations. The system includes one or more display modules that accept hooks for mounting displayed merchandise and one or more optional interlocking non-apertured display headers for displaying information about the mounted merchandise. The display modules and/or display headers define interlocking male and female members to connect adjacent display modules and headers. To mount the system to an adjacent wall, the system employs at least one universal mounting bracket adapted to insertedly mount between any two slats of a slatted wall, any aperture of a perforated wall, or any combination thereof.

Abstract: A customizable modular magnetic wall system is provided for displaying items while allowing a user to aesthetically configure and tailor the system to the user's needs. The system includes a magnetic backing plate and at least one module. The module includes a base portion and a utility member. The base portion of the module is magnetically securable at a plurality of positions on the backing plate. In addition, the utility member projects outwardly from the base portion and is sized and configured to receive the item. The module may include a shelf, hooks, and other various devices for displaying the item.

Abstract: A shelving system comprises a plurality of vertical supports, one or more horizontal supports attached to a respective vertical support, and a shelving substrate attached to the horizontal supports. The horizontal supports can be adapted to extend from a folded or partially extended position to a fully extended, horizontal position and can comprise a proximal support arm attached to a vertical support and a distal support arm pivotally attached to the proximal support arm. To retain the proximal support arm and the distal support arm in the fully extended, horizontal position, the horizontal supports can comprise a catch assembly. The shelving substrate can be a textile material, such as a weft inserted, warp knit textile material comprising elastomeric yarns.

Abstract: An organizer tray for articles for use on an elevated platform of a lifting apparatus to provide access to a variety of items while work tasks are being performed by one or more individuals. The tray has four upright walls, a bottom wall and an open top to provide one or more compartment therein. A rear ledge and pair of side ledges support the tray on the rails of the platform of the lifting apparatus.

Abstract: The pipelayer crane apparatus comprises a lower, the lower comprising a lower frame, a pedestal, a lower bearing portion, a telescoping axle, a track roller, and a track shoe, an upper, the upper comprising a frame, a body, a cab, a pedestal, a upper bearing portion, and a counterweight, a lifting assembly, the lifting assembly comprising an adjacent portion, a remote portion, a joint, and a cylinder and a weldment, the weldment comprising a body, an extension, a winch, and securing members.

Abstract: The present invention provides a dispensing closure and label system that provides a clear indication of prior opening directly at the point of application of force to open the closure. More specifically, the system includes a dispensing closure containing a closure body, a living hinge, and a lid. The closure body further includes a downwardly depending skirt. The lid includes a downwardly depending sidewall that is provided with a protruding thumb tab that extends downwardly beyond a parting line of the lid and the closure body. A label wraps around the skirt and container neck. The label also overlaps that portion of the thumb tab that extends downward below the parting line of the closure lid and closure body. In this regard, when the thumb tab is lifted to open the container, the paper label is ripped in the area of the thumb tab to evidence opening thereof.

Abstract: The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

Abstract: A process for producing an aluminum electrode foil for a capacitor, which includes a first step of preparing an emulsion from a mixture including a first phase of a liquid resin or a resin solution obtained by dissolving a resin in a solvent, a second phase of a liquid that is incompatible with the first phase, and an emulsifier; a second step of coating the emulsion on a surface of an aluminum foil; a third step of removing the second phase to form a resin film having a plurality of pores on its surface; a fourth step of etching the aluminum foil having the resin film formed thereon; and a fifth step of removing the resin film after etching. The production process can form high-density etching pits with high accuracy.

Abstract: Methods and apparatuses for releasably attaching support members to microfeature workpieces to support members are disclosed herein. In one embodiment, for example, a method for processing a microfeature workpiece including a plurality of microelectronic dies comprises forming discrete blocks of material at a first side of a support member. The blocks are arranged on the support member in a predetermined pattern. The method also includes depositing an adhesive material into gaps between the individual blocks of material and placing a first side of the workpiece in contact with the adhesive material and/or the blocks. The method further includes cutting through a second side of the workpiece to singulate the dies and to expose at least a portion of the adhesive material in the gaps. The method then includes removing at least approximately all the adhesive material from the support member and/or the workpiece with a solvent.

Abstract: A circuit breaker assembly includes a puffer chamber having a nozzle extending from an end, a vent located at or near the end of the puffer chamber, and a vent seal movably positioned over the vent. The vent seal prevents gas from escaping through the vent when the puffer chamber is under pressure, and it permits gas to enter the puffer chamber when the puffer chamber is not under pressure.

Abstract: Insulated vacuum switchgear and active switchgear elements therefor are provided with a composite overwrap for mechanically isolating a vacuum insulator from axial loads in use without reinforcing or insulating encapsulations. A dielectric buffer layer is provided to fill voids or discontinuities in the overwrap.

Abstract: A circuit breaker includes fixed and movable contacts, an operating mechanism including a movable arm carrying the movable contact, an arc chute including a plurality of spaced apart first and second arc plates, and a slot motor. A slot motor structure is disposed about the contacts and a portion of the movable arm. An insulative housing at least substantially covers and insulates the slot motor structure from the movable arm and contacts. The insulative housing includes a base and a pair of arms disposed therefrom. Each of the arms includes a first portion disposed proximate the first arc plates and a second smaller portion disposed proximate the second arc plates. A space extending from the first portion, not occupied by the second portion, is generally occupied by a portion of the second arc plates. The second portion forms a debris shield between the second arc plates and the operating mechanism.

Abstract: Methods of arc welding and an arc welding assembly comprise a power source configured to provide a welding current, and a single weld housing. The weld housing comprises a welding torch, which comprises a consumable electrode wire. The welding torch defining an elongated member configured to utilize the welding current to melt at least part of the consumable electrode wire and provide welding current to the work piece. The weld housing further comprises a bypass torch defining an elongated member configured to divert a portion of the welding current away from the work piece while allowing other portions of the current to flow to the work piece.

Abstract: A hybrid thermal cutting apparatus has both a laser head and a plasma torch, both of which can be controlled independently, can perform both laser processing and plasma processing, thus reducing the running costs. A large number of cutting lines for cutting out various types of manufactured products from plate materials are classified into a laser cutting type and a plasma cutting type, according to the cutting length, whether they are the external periphery of manufactured products or apertures, the size of the manufactured products or the apertures, the required process accuracy, the plate thickness, or the like. The lines of the laser cutting type are cut by laser processing, while the lines of the plasma cutting type are cut by plasma processing.

Abstract: A method of removing unwanted coating material from cooling passages of a turbine component includes determining coordinates of the position and orientation of cooling passages at the surface of the turbine component and determining reference points in the region of the cooling passages. After coating of the turbine component, the reference points are measured once again and the thickness of the coating is calculated. In a basic processing program, the data for the position, passage orientation and coating thicknesses and also CAD data for the cooling passages are interlinked and a laser processing program is automatically adapted for each individual cooling passage. Using the laser processing program, a pulsed laser is guided over disk-shaped volume segments of the unwanted coating material and the material is removed in the process.

Abstract: To provide a laser cutting method that is capable of cutting the substrates high accurately with high throughput at a low cost. It is a laser cutting method for cutting a laminated substrate that is formed by laminating at least a pair of substrates. The method comprises the steps of: providing a pattern member with a characteristic of absorbing light of a wavelength that transmits each of the substrates, between each of the substrates along a cutting position of the laminated substrate; and irradiating a laser of the wavelength that transmits the substrates along the pattern member, whereby the laminated substrate is cut along the pattern member.

Abstract: A technique to control segregation of impurities when reforming crystallinity and crystallization of a semiconductor film by using a laser beam irradiation is provided. The present invention is to irradiate the substrate with applying ultrasonic vibration while keeping the end portion of the substrate in space. The substrate on which a semiconductor film is formed is kept onto the stage provided with opening pores, and floated by spouting gas from opening pores. Supersonic vibration can be efficiently provided to the substrate by irradiating with a laser beam with ultrasonic vibration while keeping the end portion of the substrate.

Abstract: A method and apparatus of forming a root bead in a gap between spaced ends of at least one workpiece. The gap includes an open root. A metal cored electrode having a metal sheath and core materials is used to for the root bead in the open root. The core materials include little or no flux agents. The metal cored electrode is advanced at a given wire feed rate toward the open root to weld the ends together by at least partially filling the open root in a first weld pass. A welding current having a controlled waveform is used. The waveform includes a succession of welding cycles each having a short circuit portion and a metal the metal cored electrode and to cause the metal cored electrode to melt and transfer to the ends in the open root to form a root bead. The formed root bead has little or no slag on the upper surface of the root bead. A shielding gas is used to at least partially protect the molten metal in the open root from the atmosphere.

Abstract: A heating line pattern structure is provided, in which the effect of the heating lines of a defogger on an antenna for a TV broadcast especially for a digital TV broadcast may be decreased. The defogger is structured by arranging heating lines between bus bars on both sides. The portion of an uppermost heating line in proximity to the monopole antenna are folded rectangularly at a regular interval to form a meander shape. One lateral heating line is extended under the meander-shaped heating line portion, and is connected to a vertical heating line to which four lateral heating lines are connected together.

Abstract: Provided is a printing device comprising a hot roller having an inside surface and an outside surface. A heating element is present within the hot roller. The inside surface has a first region, wherein the first region is coated with a first type of material. The inside surface has a second region, wherein the second region is coated with the first type of material, and wherein second region is of a different dimension than the first region. The inside surface has a third region, wherein the third region is coated with a second type of material.

Abstract: A new and improved hot melt adhesive hose assembly comprises a hot melt adhesive hose core, a pair of heater circuits wrapped around the external peripheral surface of the hose core, and a pair of temperature sensors also disposed in contact with the external peripheral surface of the hose core. A first one of the heater circuits is initially electrically connected to the hot melt adhesive hose assembly electrical circuitry, and in a similar manner, a first one of the temperature sensors is electrically connected to the hot melt adhesive hose assembly electrical circuitry.

Abstract: A small size, light weight crafter's iron and electrically powered heating stand for the iron, in combination. The stand comprising a base with a plurality of short legs spaced about a bottom portion of the base. The stand is provided with resistive electric heating elements for heating a substantially flat top plate. The top plate sized and configured to receive and conductively heat a cordless substantially wedge-shaped crafter's iron. The crafter's iron provided with a thermally insulating handle to be grasped by the user when manipulating the iron.

Abstract: An O-ring for a glow plug has a transverse cross section of an elliptical contour and is disposed between a tapered surface of an axial hole of a metallic shell and a sealing portion of a center shaft. The O-ring is pressed on from the rear by an end surface of a press member. Because the longer side surfaces of the O-ring, as viewed in cross section, contact the tapered surface and the outer circumferential surface of the sealing portion, the contact areas between the O-ring and the tapered surface and the outer circumferential surface of the seal portion are increased. In addition, because the amount of deformation is small, internal stress is controlled, and the degree of contact is increased, so that the axial hole is reliably maintained airtight.

Abstract: The flow sensor comprises a heater arranged between two sensing thermopiles. In addition, at least one monitoring thermocouple is provided for measuring the temperature of the heater. The signal from the monitoring thermocouple can be used to improve the accuracy of the device in several ways. In particular, the signal from the monitoring thermocouple depends on changes of the Seeback constant and other inherent properties of the thermopiles in the same way as the signal from the sensing thermopiles, which allows a compensation of such effects. The signal from the monitoring thermocouple can also be used as a reference voltage to an A/D converter for converting the signals from the sensing thermopiles.

Abstract: A food heating or cooking appliance has at least one electrical heating element within its interior that is adjustable in position so as to be able to be moved close to thin or small food items under the control of a manually actuated control. A separator plate that extends across the interior chamber of the appliance from side to side and from front to back is movable with the heating element to enable adjustment of the volumetric size of the cooking chamber containing the heating element and the food to be heated or cooked. A manual actuator, a knob or lever, for example, moves the heating element and the separator plate through a motion transfer bar that extends across the width of the appliance and is attached to a linkage on each side of the appliance to communicate movement to a pair of movable supports supporting the rod-like heating element at each of its ends and the separator plate at opposite edges.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10?2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.