Patents Issued in November 1, 2007
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Publication number: 20070252927Abstract: A novel liquid crystal display is disclosed. The liquid crystal display comprises a backlight, a pair of substrates, a liquid crystal layer disposed between the pair of substrates, a color filter, reflective portions, transmissive portions, and a retardation layer disposed between the pair of substrates in each of the transmissive portions. The retardation layer comprises a liquid crystal material fixed in a hybrid state, and the retardation layer has a retardation which varies depending on a wavelength of the color filter.Type: ApplicationFiled: March 8, 2007Publication date: November 1, 2007Applicant: FUJIFILM CorporationInventors: Mitsuyoshi Ichihashi, Hisashi Okamura, Morimasa Sato, Shinichi Morishima
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Publication number: 20070252928Abstract: A method of manufacturing a transmission type liquid crystal display is disclosed including preparing a color filter; forming a substantially transparent semiconductor circuit on a surface of the color filter while position adjustment between the color filter and the semiconductor circuit is performed; and forming a transmission type liquid crystal display element on one side of the substantially transparent semiconductor circuit, wherein there is no color filter on the one side.Type: ApplicationFiled: April 11, 2007Publication date: November 1, 2007Applicant: Toppan Printing Co., Ltd.Inventors: Manabu Ito, Norimasa Sekine, Mamoru Ishizaki, Osamu Kina, Ryohei Matsubara
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Publication number: 20070252929Abstract: The present invention provides a retardation element capable of ensuring that, even when the retardation element is incorporated into a display element having pixels, each pixel being a triad of red, green and blue display sections, the display element shows excellent display characteristics. A retardation film includes a glass substrate, and a liquid crystal layer made from a polymerizable liquid crystalline material, formed on an alignment layer that has been formed on top of the glass substrate. The retardation film is for use in a liquid crystal display element having pixels, each pixel being a triad of red, green and blue display sections, and the liquid crystal layer has a plurality of fine areas that have been created, by patterning, correspondingly to the display sections of the pixels in the three colors.Type: ApplicationFiled: July 2, 2007Publication date: November 1, 2007Applicant: DAI NIPPON PRINTING CO., LTD.Inventor: Koji Ishizaki
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Publication number: 20070252930Abstract: The liquid crystal display comprises a first substrate 2 including a gate bus line 12a, a data bus line 28, a thin film transistor 18 formed near an intersection between the gate bus line 12a and the data bus line 28, and a pixel electrode 52 including a transmission electrode 32a electrically connected to the thin film transistor 18 and a reflection electrode 48b electrically connected to the transmission electrode 32a; a second substrate 4 opposed to the first substrate 2 and including an opposed electrode 68 opposed to the pixel electrode 52; and a liquid crystal layer 6 sealed between the first substrate 2 and the second substrate 4. The reflection electrode 48b is formed over another gate bus line 12b which is different from the gate bus line 12a, with an insulation layer 40 formed therebetween. The decrease of a voltage applied between the reflection electrode 48b and the opposed electrode 68 can be prevented while the space which can be not used as the transmission region can be utilized.Type: ApplicationFiled: April 9, 2007Publication date: November 1, 2007Inventors: Kunihiro Tashiro, Yasutoshi Tasaka, Katsufumi Ohmuro, Hidefumi Yoshida, Yoshinori Tanaka, Norio Sugiura, Seiji Doi, Manabu Sawasaki, Tomonori Tanose, Isao Tsushima, Tetsuya Fujikawa, Tomoshige Oda
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Publication number: 20070252931Abstract: A transflective liquid crystal display device mainly includes a single-cell gap panel, and the bottom surface of the single-cell gap panel has a reflective device. A first liquid crystal (LC) film is installed at the top side of the single-cell gap panel, and a first polarizer is equipped at the top side of the first LC film, a second LC film is equipped at the bottom side of the single-cell gap panel, and a second polarizer is equipped at the bottom side of the second LC film. By way of this optical structure compensation, the present invention which collocates the LC films with the transflective structure of a common single-cell gap panel can complete the transflective optic mode and obtain better reflective contrast ratio, transmissive contrast ratio and higher transmittance for liquid crystal display devices.Type: ApplicationFiled: May 1, 2006Publication date: November 1, 2007Inventors: Yi-Chun Wu, Chin-Chang Liu, Wen-Jui Liao, Chun-Chi Chi
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Publication number: 20070252932Abstract: An exemplary liquid crystal display device (1) includes: a first substrate (11); a second substrate (12) opposite to the first substrate, the second substrate including a bottom surface having a plurality of recesses (125) defined thereat, a plurality of reflection layers (126) filled in the recesses; a liquid crystal layer (14) between the first and second substrates; a plurality of pixel regions (13) adjacent each other and each spanning through the first substrate, the liquid crystal layer, and the second substrate, each pixel region including a reflection region (133) and a transmission region (134); and a backlight module (17) disposed adjacent to the second substrate. In each pixel region, the reflection regions correspond to portions of the bottom surface of the second substrate having the reflection layers. The transmission regions correspond to portions of the bottom surface of the second substrate that do not have the reflection layers.Type: ApplicationFiled: April 30, 2007Publication date: November 1, 2007Inventors: Yuan Li, Guo-Hua Yu
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Publication number: 20070252933Abstract: A liquid crystal display (LCD) is disclosed including a first cholesteric liquid crystal (LC) layer between a first and second substrate containing a plurality of adjacent alternately arranged pixels of a first and second primary color. A second cholesteric LC layer between the second substrate and a third substrate contains a plurality of adjacent alternately arranged pixels of the first and a third primary color. The first primary color pixels in the first and second LC layer, and the second primary color pixels in the first LC layer and the primary color pixels of the third primary color in the second LC layer, are arranged behind one another. Two first primary color pixels in the first and second LC layer interact with an adjacent second primary color pixel in the first LC layer and an adjacent third primary color pixel in the second LC layer for representing a display pixel.Type: ApplicationFiled: April 13, 2007Publication date: November 1, 2007Applicant: AEG Gesellschaft fur moderne Informationssysteme mbHInventors: Reiner Bayrle, Thomas Bitter, Otto Bader
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Publication number: 20070252934Abstract: An organic TFT array substrate and a fabricating method thereof are disclosed. In the organic TFT array substrate, a data line is disposed on a substrate and a gate line crosses the data line. A source electrode is connected to the data line. A drain electrode is disposed a predetermined distance from the source electrode. An organic semiconductor layer forms a channel between the source electrode and the drain electrode. An organic gate insulating film is disposed on the organic semiconductor layer with the same pattern as the organic semiconductor layer. A gate electrode overlies the organic semiconductor layer on the organic gate insulating film. A gate photo-resist pattern disposed on the gate electrode is used to form the gate electrode. A pixel electrode is connected to the drain electrode.Type: ApplicationFiled: November 14, 2006Publication date: November 1, 2007Inventors: Hyun Sik Seo, Nack Bong Choi
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Publication number: 20070252935Abstract: An LCD panel for a multi-display includes main electrodes disposed on an image display region and include liquid crystals that react to a voltage applied between the main electrodes, and dummy electrodes disposed on regions outside the image display region to prevent the distortion of electric fields of adjacent main electrodes. The dummy electrodes have a width of approximately 5 to 50% of a width of the main electrodes. The dummy electrodes are disposed along edges of the main electrodes in a single row.Type: ApplicationFiled: October 6, 2006Publication date: November 1, 2007Inventors: In-seo Kee, Ho-nyeon Lee, Sung-kee Kang
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Publication number: 20070252936Abstract: A liquid crystal display device with a planar counter electrode formed on the first substrate in each pixel region, a pixel electrode formed on the counter electrode by way of an insulation layer, the pixel electrode formed of a first pixel electrode and a second pixel electrode in the pixel region, the first pixel electrode and the second pixel electrode have a large number of slits which are arranged in parallel in the electrodes and the extending direction of the slits is different from both extending directions of the gate lines and the drain lines, and the neighboring sides of the first and the second pixel electrodes are arranged to be parallel to each other, and a portion between the neighboring sides of the first and the second pixel electrodes is positioned above the counter electrode.Type: ApplicationFiled: June 29, 2007Publication date: November 1, 2007Inventors: Kikuo Ono, Ikuko Mori, Ryutaro Oke, Hiroyuki Yarita
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Publication number: 20070252937Abstract: A lateral electric field type liquid crystal display device prevents the generation of the reverse rotation domain when the reverse-rotation domain preventing structure using the floating electrodes is adopted. A first liquid-crystal driving electrode (e.g., pixel electrode) and a second liquid-crystal driving electrode (e.g., common electrode) comprise comb-tooth-like parts extending approximately parallel to each other and being meshed with each other, respectively, in a region where images are displayed by applying a liquid-crystal driving electric field to liquid crystal. An electrically isolated first floating electrode is provided in the vicinity of the top end of the comb-tooth-like part of the first liquid-crystal driving electrode, where the first floating electrode comprises an overlapped part which is overlapped with the top end by way of an insulating film.Type: ApplicationFiled: April 12, 2007Publication date: November 1, 2007Applicant: NEC LCD TECHNOLOGIES, LTD.Inventors: Teruaki Suzuki, Takayuki Konno
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Publication number: 20070252938Abstract: An array substrate and method for an in-plane switching mode liquid crystal display device are provided. The array substrate according to an embodiment includes a pixel electrode in a pixel region; a common electrode in the pixel region, the common electrode being parallel to the pixel electrode; a first electrode in the pixel region and crossing the pixel and common electrodes; and a second electrode in the pixel region, the second electrode being parallel to the first electrode.Type: ApplicationFiled: April 26, 2007Publication date: November 1, 2007Inventors: Sang Ho Choi, Jong-Jin Park
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Publication number: 20070252939Abstract: An in-plane switching mode liquid crystal display device includes first and second substrates; a gate line and a data line arranged in a substantially horizontal and vertical direction, respectively, on the first substrate to define a pixel region; a switching device formed at a crossing of the gate line and the data line; a common line formed substantially parallel to the data line at a center of the pixel region; a pixel electrode line overlapping the common line; a plurality of common electrodes extended from the common line; pixel electrodes extended from the pixel electrode line, disposed substantially parallel to the common electrodes, wherein a lateral electric field is formed between the common electrodes and the pixel electrodes; and a liquid crystal layer formed between the first substrate and the second substrate.Type: ApplicationFiled: June 25, 2007Publication date: November 1, 2007Inventors: Do-Sung Kim, Byung-Koo Kang
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Publication number: 20070252940Abstract: The present invention discloses the display device module in which the first and second lines can be connected easily to a device-driving unit or a connecting means on which the device-driving unit is mounted, the display device module of the present invention comprises a pixel circuit section including at least one light emitting area, each light emitting area being formed at an overlying area of a substrate between a first electrode and a second electrode on a substrate; at least one first line being electrically connected to the first electrode in the pixel circuit section; at least one second line being electrically connected to the second electrode in the pixel circuit section, wherein each of the first lines and the second lines has a connecting portion formed thereon and the connecting portion is larger than the line in the width, the connecting portions are alternated with the connecting portion(s) of the neighbor line(s) so as to prevent two adjacent connecting portions from being contacted with eachType: ApplicationFiled: October 5, 2006Publication date: November 1, 2007Inventor: Il Ho Lee
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Publication number: 20070252941Abstract: A liquid crystal display device includes first substrate having an active region and a non-active region along a peripheral portion of the active region, a second substrate facing and spaced apart from the first substrate, and having an active region and a non-active region along a peripheral portion of the active region, a seal pattern between the first and second substrates disposed along a border of the active and non-active regions, a gate line on an interior surface of the first substrate and crossing the seal pattern, a data line crossing the gate line and the seal pattern, a thin film transistor connected to the gate line and the data line, a pixel electrode connected to the thin film transistor, a common electrode on an interior surface of the second surface, a first step-compensating pattern adjacent to the seal pattern and the gate line, a second step-compensating pattern adjacent to the seal pattern and the data line, and a liquid crystal material layer between the pixel electrode and the common elType: ApplicationFiled: July 9, 2007Publication date: November 1, 2007Inventors: Jin-Tae Kim, Jae-Seok Park
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Publication number: 20070252942Abstract: Eyewear includes an outer frame having a right temple arm and a left temple arm. An outer lens is secured to the outer frame. An inner frame is removably secured to the outer frame. An inner lens is positioned in the inner frame. A portion of the outer lens engages the inner frame to removably secure the inner frame to the outer frame.Type: ApplicationFiled: April 26, 2006Publication date: November 1, 2007Inventors: Michael Collier, Kyle Schepke
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Publication number: 20070252943Abstract: Eyewear having an enhanced air flow and/or absorption features which may be used for safety, sports, and the like. The eyewear may desirably provides features in design and/or function of the structure to enhance air flow and reduce moisture. Additional elements such as removable pads and/or cartridges may be used with the eyewear to enhanced airflow and reduce moisture adjacent a user's eyes and face as well.Type: ApplicationFiled: April 28, 2006Publication date: November 1, 2007Inventors: Debra Welchel, Megan Smith, Matrice Jackson, Andrew Beltz, Russell Kroll, Philip Palermo, Mark Londborg, Suzuko Hisata
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Publication number: 20070252944Abstract: Eyewear having an enhanced fit which may be used for safety, sports, and the like. The eyewear may provide features which permit enhanced airflow and an enhanced fit to a user's face. Such features may include greater adjustability to provide greater comfort. Eyewear including an RFID tag which is activated to send or receive transmissions when the eyewear is unfolded and/or positioned in a position to be worn by a user.Type: ApplicationFiled: April 28, 2006Publication date: November 1, 2007Inventors: Debra Welchel, Ming Xie, Megan Smith, Herb Velazquez, Matrice Jackson, Lourdes Sheffield, Joseph Mitchell, Russell Kroll, Philip Palermo, Mark Londborg, Suzuko Hisata
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Publication number: 20070252945Abstract: Eyewear having heating elements therewith which may be used for safety, sports, and the like. The eyewear may provide features which reduce or eliminate fogging and condensation on the eyewear when a heating element in the lens is activated. The eyewear also includes adjustable features to provide greater comfort.Type: ApplicationFiled: April 28, 2006Publication date: November 1, 2007Inventors: Debra Welchel, Megan Smith, Herb Velazquez, Matrice Jackson, Russell Kroll, Philip Palermo
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Publication number: 20070252946Abstract: Eyewear having adapters and/or mask attachment features which permit the eyewear to attach to a mask, or a mask to attach to the eyewear. An adapter may be used which may provide a portion of the eyewear and/or mask. Alternatively, an adapter may be provided separately. Finally, a flap adapter may be used to extend facial protection for eyewear.Type: ApplicationFiled: April 28, 2006Publication date: November 1, 2007Inventors: Debra Welchel, Ming Xie, Megan Smith, Herb Velazquez, Matrice Jackson, Andrew Beltz, Ralph Solarski, Russell Kroll, Philip Palermo, Suzuko Hisata
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Publication number: 20070252947Abstract: An improved contact lens of the present invention, which keeps the eyes moist, avoids irritating the eyes, improves the comfort of fitting, and provides stabilization, comprises: a body with a circumference; at least one pattern located near the circumference, and a maximum width of the contact lens is less than a maximum value in such that the contact lens can avoid being restricted by eye muscles while fitting onto eyes.Type: ApplicationFiled: October 9, 2006Publication date: November 1, 2007Inventor: Wei-Pin Hsu
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Publication number: 20070252948Abstract: The invention relates to a magnifying glass for a person having limited vision in one or both eyes, said magnifying glass comprising a lens body having a front curve for focussing light rays incident upon the lens body onto the eye. The invention further relates to a spectacle frame provided with one or two magnifying glasses according to the invention. The object of the invention is to provide a magnifying glass specifically intended For use by, among others, the group of people who suffer from the above disorders and according to the invention the lens body is arranged for focussing light rays incident on the lens body onto the parafoveal part of the fovea of the eye. In this way the affected portion of the central part of the retina (the fovea) is spared and the patient's vision is obtained by using the outer region of the central part of the retina.Type: ApplicationFiled: October 17, 2005Publication date: November 1, 2007Inventor: Franciscus Oosterhof
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Publication number: 20070252949Abstract: A workplace screen lens, having a workplace screen lens optimized at the middle of the lens for the middle viewing distances of approximately 60 centimeters to approximately 90 centimeters, and the progressive channel at the middle of the lens is at least 4 millimeters wide. The effect increases from the middle of the lens toward the bottom with the vertical coordinate y equal to approximately 0, reaching a near vision zone with an essentially constant effect at y equal to approximately ?12 millimeters. The progressive channel has a width of least 15 millimeters in the near vision zone, preferably at the near-reference point, the effect decreases from the middle of the lens up to y equal to approximately +10 millimeters to approximately +12 millimeters above the middle of the lens.Type: ApplicationFiled: October 25, 2004Publication date: November 1, 2007Applicant: Rodenstock GmbHInventors: Helmut Altheimer, Gregor Esser, Walter Haimerl, Edda Wehner, Andrea Welk
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Publication number: 20070252950Abstract: A reflectometry instrument includes a light source, a spectrometer, and a first and second lens. The light source emits an illumination beam to the macula. The spectrometer measures a detection beam that is a portion of the illumination beam reflected from the eye and is indicative of the eye characteristics (e.g. macular pigment). The first and second lenses transmit the illumination beam to the macula and transmit the detection beam from the macula to the spectrometer. The instrument is used on an undilated pupil and minimizes unwanted reflections by at least one of the following: the first and second lenses include anti-reflection coatings; the illumination and detection beams pass through the first and second lenses at locations offset from their centers; and the illumination and the detection beams remain separated when passing through the first and second lenses. Zeaxanthin, lutein, and the total macular pigment levels are measured by the instrument.Type: ApplicationFiled: April 27, 2006Publication date: November 1, 2007Inventors: Jan Kraats, Dirk Norren, Tos Berendschot
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Publication number: 20070252951Abstract: A system provides an optical image of an object. A first module tracks a reference feature of the object. A second module includes a source for an imaging beam, a scanning device to move the imaging beam along a portion of the object and a detection device receives a signal associated with an image of the portion of the object. The first module controls the position of the imaging beam relative to the reference feature to correct for the motion of the object. A third module detects a distortion of the object and compensates for the distortion.Type: ApplicationFiled: April 24, 2007Publication date: November 1, 2007Inventors: Daniel Hammer, R. Ferguson, Nicusor Iftimia, Teoman Ustun
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Publication number: 20070252952Abstract: A computer method for providing optimal dynamic techniques for custom-fit eye optics. The method includes steps of mounting pressure and motion sensors in a eye-enclosing device, transmitting data produced by said sensors during actual operation of said eye-enclosing device worn by a specific individual, receiving said sensor signals for subsequent analysis by a computer, creating a stress-and-motion map based on said sensor-based data, and creating a virtual optic (model) for optimal support and comfort based on step iv stress-and-motion map.Type: ApplicationFiled: April 27, 2006Publication date: November 1, 2007Inventors: Jerome Kurtzberg, Menachem Levanoni
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Publication number: 20070252953Abstract: An apparatus (10) for stereoscopic viewing has a first and second optical channel with a first and second display (12l, 12r) generating a first and second image and a first and second viewing lens assembly (22l, 22r) producing a virtual image, with at least one optical component of the first and second viewing lens assembly truncated (26l, 26r) along a first and second side. A reflective folding surface is disposed between the second display and second viewing lens assembly to fold a substantial portion of the light within the second optical channel. An edge portion of the reflective folding surface blocks a portion of the light in the first optical channel.Type: ApplicationFiled: April 27, 2006Publication date: November 1, 2007Inventors: Robert Metzger, David Kessler, Joseph Bietry
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Publication number: 20070252954Abstract: Various embodiments involving structures and methods for illumination can be employed, for example, in projectors, head-mounted displays, helmet-mounted displays, back projection TVs, flat panel displays as well as other optical systems. Certain embodiments may include prism elements for illuminating, for example, a spatial light modulator. Light may be coupled to the prism in some cases using fiber optics or lightpipes. The optical system may also include a diffuser having scatter features arranged to scatter light appropriately to produce a desired luminance profile. Other embodiments are possible as well.Type: ApplicationFiled: May 24, 2004Publication date: November 1, 2007Inventors: James McGuire, William Cassarly, John Rogers, Douglas Nutter
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Publication number: 20070252955Abstract: An image projection apparatus is disclosed which is capable of correcting defocusing due to changes of the temperature of a projection lens, which are caused by various factors. The image projection apparatus includes an image-forming element which is illuminated with light from a light source, a projection lens which includes a focus lens and projects light from the image-forming element onto a projection surface, plural temperature detectors which are provided at positions different from each other in the image projection apparatus. The apparatus further includes a controller which controls the position of the focus lens on the basis of the detection results by the plural temperature detectors.Type: ApplicationFiled: April 23, 2007Publication date: November 1, 2007Inventor: Hiromi ASAI
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Publication number: 20070252956Abstract: In a projection type display apparatus includes an illumination device (including a light source), a light modulation element, a projection optical system that projects a modulated light from the light modulation element, and a screen onto which a projected light is projected. The projection optical system includes a refraction type optical system that refracts the modulated light from the light modulation element, and a hologram element disposed on a position remote from the screen and shifted in a direction parallel to the screen from a center of the screen. The hologram element projects the modulated light having passed through the refraction type optical system onto the screen so that a light ray of the center of the modulated light is inclined with respect to a normal line of the screen.Type: ApplicationFiled: April 24, 2007Publication date: November 1, 2007Applicant: Mitsubishi Electric CorporationInventors: Muneharu Kuwata, Tomohiro Sasagawa
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Publication number: 20070252957Abstract: Prism elements having TIR surfaces placed in close proximity to the active area of a SLM device 302 to separate unwanted off-state 324 and/or flat-state 326 light from the projection ON-light bundle 322. The TIR critical angle of these prisms is selected to affect either the off-state light or additionally, any portion of flat-state light reflected from the SLM. These TIR surfaces are placed to immediately reflect the unwanted light as it comes off the SLM, thereby preventing the contamination of light along the projection path, which tends to degrade the system contrast. To further improve the optical performance of the system, these TIR prism can be attached directly to the SLM package 300, completely eliminating the package window.Type: ApplicationFiled: April 24, 2007Publication date: November 1, 2007Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Steven Penn
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Publication number: 20070252958Abstract: A projector having a focusing lens comprises a position detector for detecting the position of the focusing lens, an image forming element for modulating light based on a video signal to form an image, a data recording unit having stored therein a correlation table indicative of a relationship between the position of the focusing lens and the amplitude of the video signal applied to the image forming element, a processing unit for calculating the amplitude of the video signal that corresponds to the position of the focusing lens detected by the position detector with reference to the correlation table stored in the data recording unit, and an image control unit for adjusting the amplitude of the applied video signal to the amplitude calculated by the processing unit, and supplying the adjusted amplitude to the image forming element.Type: ApplicationFiled: April 24, 2007Publication date: November 1, 2007Applicant: NEC Display Solutions, Ltd.Inventor: Michitaka Naitou
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Publication number: 20070252959Abstract: The invention relates to a device for adjusting the temperature of elements, especially adjusting the temperature of a projection lens (1) or of parts of a projection lens (1) for use in semiconductor lithography. Said device comprises a temperature-adjusting jacket (18) which is provided with at least one temperature-adjusting line (19). Said at least one temperature-adjusting line (19) is formed into the temperature-adjusting jacket (18).Type: ApplicationFiled: September 24, 2005Publication date: November 1, 2007Inventors: Tilmann Schwertner, Ulrich Bingel, Klaus Zimmer
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Publication number: 20070252960Abstract: An exposure apparatus is provided with a measuring unit which measures at least one of property and components of a liquid in a state that a liquid immersion area is formed on an object different from a substrate P to be exposed. There is provided an exposure apparatus which can accurately perform exposure process and measurement process through the liquid by judging the state of the liquid in advance and by performing a procedure as appropriate.Type: ApplicationFiled: December 9, 2005Publication date: November 1, 2007Applicant: NIKON CORPORATIONInventor: Yoshiki Kida
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Publication number: 20070252961Abstract: A lithographic projection apparatus that is arranged to project a pattern from a patterning device onto a substrate using a projection system has a liquid supply system arranged to supply a liquid to a space between the projection system and the substrate. The apparatus also includes a liquid collecting system having a liquid collection member having a liquid-permeable member through which a liquid is collected from a surface of an object opposite to the liquid collection member.Type: ApplicationFiled: June 27, 2007Publication date: November 1, 2007Applicant: NIKON CORPORATIONInventors: W. Novak, Andrew Hazelton, Douglas Watson
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Publication number: 20070252962Abstract: A lithographic projection apparatus that is arranged to project a pattern from a patterning device onto a substrate using a projection system has a liquid supply system arranged to supply a liquid to a space between the projection system and the substrate. The apparatus also includes a liquid collecting system that includes a liquid collection member having a mesh member through which a liquid is collected from a surface of an object opposite to the liquid collection member.Type: ApplicationFiled: June 27, 2007Publication date: November 1, 2007Applicant: NIKON CORPORATIONInventors: W. Novak, Andrew Hazelton, Douglas Watson
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Publication number: 20070252963Abstract: A method of exposing a substrate (e.g. in a lithographic apparatus comprising a substrate table to support a substrate) according to one embodiment of the invention includes performing first and a second height measurement of a part of at least one substrate with a first and second sensor, generating and storing an offset error map based on a difference between the measurements; generating and storing a height map of portions of the substrate (or another substrate that has had a similar processing as the part) by performing height measurements with the first sensor and correcting this height map by means of the offset error map; and exposing the substrate (or the other substrate).Type: ApplicationFiled: December 22, 2004Publication date: November 1, 2007Applicant: ASML Netherlands B.V.Inventors: Theodorus Modderman, Nicolaas Antonius Allegondus Van Asten, Johan Van Boxmeer, Gerrit Nijmeijer
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Publication number: 20070252964Abstract: A lithographic projection apparatus projects a pattern from a patterning device onto a substrate using a projection system. The apparatus has a liquid supply system to supply a liquid to a space between the projection system and the substrate. The apparatus also has a fluid removal system including a chamber to hold liquid and having an open end adjacent to a volume in which fluid will be present. The open end removes, through a pressure differential across-the open end when liquid is present in the chamber, substantially only liquid from the volume when liquid in the volume is adjacent to the open end but not gas from the volume when gas in the volume is adjacent to the open end.Type: ApplicationFiled: April 27, 2007Publication date: November 1, 2007Applicants: NIKON CORPORATION, NIKON ENGINEERING CO., LTD.Inventors: Hirotaka Kohno, Takeshi Okuyama, Hiroyuki Nagasaka, Katsushi Nakano
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Publication number: 20070252965Abstract: An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.Type: ApplicationFiled: July 10, 2007Publication date: November 1, 2007Applicant: NIKON CORPORATIONInventor: Michael Binnard
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Publication number: 20070252966Abstract: An exposure apparatus is equipped with a main controller that decides an operation of the exposure apparatus based on information on maintenance from a C/D. Therefore, the main controller can decide to perform a specific operation, which is necessary for maintaining performance of the exposure apparatus and requires stop of the primary operation of the exposure apparatus, during maintenance of the C/D, that is, when the primary operation of the exposure apparatus has to be stopped by necessity, in parallel with the maintenance of the C/D. As a consequence, downtime of the exposure apparatus necessary for performing the specific operation can be decreased as a whole, which makes it possible to improve the operating rate without lowering apparatus performance of the exposure apparatus that is inline connected to a substrate processing apparatus.Type: ApplicationFiled: August 29, 2005Publication date: November 1, 2007Inventor: Yousuke Shirata
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Publication number: 20070252967Abstract: Lithographic apparatus using an array of individually controllable elements in which a fraction of the intensity of the beam of radiation patterned by the array of individually controllable elements is diverted to an image sensor for verifying the quality of the image generated.Type: ApplicationFiled: February 8, 2007Publication date: November 1, 2007Applicant: ASML Netherlands B.V.Inventors: Arno Bleeker, Kars Troost
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Publication number: 20070252968Abstract: An exposure apparatus that exposes a pattern of an original onto a substrate includes a condenser optical system configured to split light from a light source into plural rays, to condense the plural rays at different positions on the original, and to make a central part of each of the plural rays that illuminate the original darker than a periphery at the Fourier transform plane with respect to the original, and a projection optical system configured to project the pattern of the original onto the substrate.Type: ApplicationFiled: April 30, 2007Publication date: November 1, 2007Inventors: Akinori Ohkubo, Akiyoshi Suzuki
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Publication number: 20070252969Abstract: A stage apparatus for driving and moving a target object comprises: a movable slider for mounting and moving the target object; a movable-slider driving unit for driving the movable slider; a feedforward compensator for calculating the driving amount to be generated by the movable slider driving unit over the period of time during the movement of the movable slider from the start position up to the target position to which the movable slider is to be moved, based upon the start position and the target position; a movable-slider position sensor for detecting the position of the movable slider; a feedback compensator for calculating the driving amount to be generated by the movable slider driving unit over the period of time during the movement of the movable slider from the start position up to the target position, based upon the target position to which the movable slider is to be moved, and the position of the movable slider detected by the movable-slider position sensor.Type: ApplicationFiled: October 14, 2005Publication date: November 1, 2007Applicant: Advantest CorporationInventor: Masashi Ueno
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Publication number: 20070252970Abstract: An object of the invention is to hold a substrate with satisfactory flatness, even at a circumferential edge part that surrounds a suction space. The invention is equipped with a circumferential edge part (33) that surrounds a suction space (38), and a first support part (34) that is provided in the suction space (38) and that supports a substrate. Furthermore, the invention is equipped with a second support part (7) that extends from the circumferential edge part (33) to the first support part (34) and that supports the substrate.Type: ApplicationFiled: August 29, 2005Publication date: November 1, 2007Applicant: nikon CorporationInventor: Yuichi Shibazaki
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Publication number: 20070252971Abstract: A substrate holding apparatus includes a first holding member for attracting a first surface of a substrate, a second holding member which contacts a second surface, opposite to the first surface, of the substrate; and a forcing member for forcing the first holding member toward said second holding member.Type: ApplicationFiled: June 27, 2007Publication date: November 1, 2007Applicant: CANON KABUSHIKI KAISHAInventor: Kiyohito YAMAMOTO
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Publication number: 20070252972Abstract: A method of inspecting a lateral pipe extending from a manhole, the method comprising: (a) extending an imaging head into the manhole using a positioning system, the imaging head comprising an imaging device and at least one lamp capable of producing a light beam, the positioning system comprising an elongated member and a targeting fixture operatively connected thereto, the imaging head being attached to one end of the elongated member, the targeting fixture having a distal end biased outwardly from the imaging head; (b) placing the distal end on a rigid surface proximate to the lateral pipe; (c) pushing down on the elongated member such that the distal end resiliently moves toward the imaging head, thereby allowing the light beam to be centered approximately in the lateral pipe; and (d) imaging a target located within the lateral pipe.Type: ApplicationFiled: March 6, 2006Publication date: November 1, 2007Applicant: Envirosight LLCInventor: Richard Lindner
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Publication number: 20070252973Abstract: Position detecting device, comprising a photo detection element array having n segments and a parallel arithmetic processing portion that is arranged to identify the segment having maximum intensity by comparing the output values (OV) from the segments of the photo detection element array. The parallel arithmetic processing portion comprises at least one comparing stage that is arranged to successively select/deselect the segments, until the segment having maximum intensity is selected, the first stage receiving the output values OV from respective photo detection element segments as input segments (IS) and any additional stage receiving the output values OV from the preceding stage as input segments IS. There is also provided a rangefinder comprising the position detecting device.Type: ApplicationFiled: February 13, 2006Publication date: November 1, 2007Inventor: Ulf Guldevall
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Publication number: 20070252974Abstract: A system and method of imaging an object. An array of detectors is mounted in an image plane. Each detector in the array of detectors is connected to a timing circuit having an interpolator, wherein the interpolator includes a first circuit which charges a first capacitor at a different rate than it discharges. An optical pulse is transmitted toward an object so that a portion of the optical pulse is reflected from the object as a reflected pulse and a first value representative of when the optical pulse was transmitted toward the object is recorded. The reflected pulse is detected at one or more detectors and a pulse characteristic of the pulse and a second value representative of when the reflected pulse arrived at the detector are recorded. Range to the object is then calculated as a function of the first and second values and the reflected pulse characteristic.Type: ApplicationFiled: March 26, 2007Publication date: November 1, 2007Inventor: Jerry Dimsdale
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Publication number: 20070252975Abstract: An optical system representing the configuration of a tested element disposed therein is provided. The optical system comprises a light source emitting a spatial-incoherent light having a phase shifting scheme toward the tested element and then forming an image with a transverse ray aberration on the image plane of the tested element; a spatial filter on the image plane to spatially filter the image formed by the tested element; and a detection module comprising a detector for receiving the spatially filtered image.Type: ApplicationFiled: April 26, 2007Publication date: November 1, 2007Inventor: Chao-Wen Liang
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Publication number: 20070252976Abstract: In one aspect, an optical sensor is used to detect defects, which can appear on smooth surfaces, is provided. The sensor includes a telecentric laser scanner and a detection unit. The scanner includes a laser for the approximately perpendicular illumination of a smooth surface, a scanning mirror, and a telecentric optical system for guiding illumination and detection beams the detection unit includes an optical detector system, a central diaphragm, which is concentrically positioned in the vicinity of the optical detector system in the direction toward the telecentric laser scanner, a highly sensitive photomultiplier for detecting scattered light, which emanates from defects on smooth surfaces, and a slit diaphragm arranged upstream of the photomultiplier.Type: ApplicationFiled: April 24, 2007Publication date: November 1, 2007Inventors: Wolfgang Heine, Dieter Spriegel, Michael Stockmann, Martin Weber