Abstract: A liquid crystal display substrate capable of providing good reflection display characteristics, a method of manufacturing the same, and a liquid crystal display device having the same are provided. The liquid crystal display substrate contains a plurality of pixel areas each having a reflection area reflecting light incident from a front surface side of the substrate and a transmission area transmitting light incident from a back surface side of the substrate; a wrinkled resin layer formed with a positive light-sensitive resin in the reflection area and having at least a portion thereof a wrinkled surface; a reflection electrode formed with a light reflection material on the wrinkled resin layer and having a wrinkled surface following the surface of the wrinkled resin layer; and light shielding portions formed as an underlayer of the wrinkled resin layer and shielding light incident from the back surface of the substrate.

Abstract: A matrix display device, for example an AMLCD, has first and second spaced substrates (22, 23) carrying opposed display pixel electrode structures (14, 32, 38) defining a pixel array/display area (20) with the first substrate (22) further carrying outside the display area auxiliary circuitry, for example, comprising row and column drive circuits (40, 42) a signal processing circuit (45) a memory circuit (47), or control logic circuit (46). At least a part of the auxiliary circuitry is electrical shielded to prevent electrical interference problems by an electrically conductive shielding layer(s) (60) carried on a part (50) of the first substrate (23) that extends over the auxiliary circuitry. The shielding layer may conveniently comprise part of an electrode layer (32) deposited on the second substrate and used for the pixel electrode structure.

Abstract: Disclosed is a semitransparent reflector having a whole light transmittance (T) of 10-80%, a whole light reflectance (R) of 20-90%, (T+R) of 80-100%, and (R?Rd) of 8-30% in which Rd is the whole light diffusion reflectance. When installed in a display device, the semitransparent reflector ensures efficient light transmission and reflection, and attains a high transmittance and a high reflectance of the display device, therefore significantly improving the letter visibility of the device.

Abstract: A liquid crystal device 1 includes a transparent first substrate 10 having first transparent electrodes 11 on the surface thereof, a transparent second substrate 20 having second transparent electrodes 21, and a liquid crystal layer 50. Pixel regions 3 have a light-reflecting layer 4 defining reflective display regions 31 and transmissive display regions 32. A thickness-adjusting layer 6 having opening 61 defining the transmissive display regions 32 is formed on the light-reflecting layer 4. The thickness-adjusting layer 6 forms slopes 60 at the boundaries between the reflective display regions 31 and the transmissive display regions 32. The top edges 65 of the slopes are aligned with the edges 45 of the light-reflecting layer 4.

Abstract: A semitransmissive hometropic liquid crystal display device includes: an active matrix substrate; a counter substrate; a liquid crystal layer interposed between the substrates; and a plurality of pixels. Each pixel is comprised of a reflection section (that performs display in a reflection mode) and a transmission section (that performs display in a transmission mode). The liquid crystal display device further includes an electrode covering (13, 14) configured whereby voltage applied to the liquid crystal layer in the reflection section approximates the voltage applied to the transmission section. The electrode covering film (13, 14) comprises a transparent conductive film which functions as applied voltage adjusting means by compensating for a difference in a work function between the reflecting electrode (5) and the transparent electrode (6).

Abstract: An LCD device (20) includes a first substrate (210) and a second substrate (250), a liquid crystal layer (230) interposed between the substrates. Each pixel regions of the LCD device includes a reflection region and a transmission region. A pre-tilt angle of liquid crystal molecules adjacent to one of the substrates is in a range of 0° to 15°, and a pre-tilt angle of liquid crystal molecules adjacent to another substrate is in a range of 75° to 90°. This structure ensures the LCD device has a fast response time.

Abstract: An optical body includes a) first particles comprising a first cholesteric liquid crystal material and b) a second cholesteric liquid crystal material. The first particles and the second cholesteric liquid crystal material form a structure where the first cholesteric liquid crystal material has a pitch that is different than the second cholesteric liquid crystal material. In one example, the second cholesteric liquid crystal material is in the form of second particles. In another example, the first particles are dispersed in a matrix of the second cholesteric liquid crystal material. In other examples, the optical body has more than one layer. In addition, one or more additional cholesteric liquid crystal materials can be used in the optical body. These optical bodies can be used as a reflective polarizer and can be used in a display.

Abstract: An optical compensating film using a norbornene-based resin film in which the durability at an interface surface of the adhesive of a LCD is improved, a polarizing plate, and a liquid crystal display using the same is provided. The optical compensating film of the present invention is formed by coating an adhesive on a stretched norbornene-based resin film. In the optical compensating film, the adhesive force between the optical compensating film and the adhesive layer is 10 N/20 mm or more.

Abstract: A reflective liquid crystal display disclosed herein includes a transistor substrate, a color filter substrate, a first lower electrode, a first upper electrode, a first transparent insulator, a second transparent insulator, a second lower electrode, a second upper electrode and a liquid crystal layer. The first lower electrode, the first transparent insulator and the second lower electrode are formed sequentially on the top surface of the transistor substrate. The first upper electrode, the second transparent insulator and the second upper electrode are fabricated sequentially on the bottom surface of the color filter substrate. The liquid crystal layer is sandwiched between the second lower electrode and the second upper electrode. One of the first lower electrode and the second lower electrode is electrically connected to a plurality of transistors and reflects the external light.

Abstract: A novel nematic liquid crystal (LC) mode is based on the Fringing-Field-Switching of Vertically-Aligned liquid crystals. The VA-FFS mode is capable of generating very fast optical modulation without the use of very thin cell gap. IA major feature of this LC mode is that it has unusual fast relaxation time compared with the conventional nematic LC modes that require a thin cell gap. This fast relaxation occurs even at very low applied voltages and the operation is very stable. The fast-response mechanism of this LC mode involves the confinement of liquid crystal molecular switching within self-imposed thin LC layers. The present invention provides a novel approach to overcome the fundamental problem of the long relaxation time of the conventional nematic liquid crystal modes.

Abstract: A liquid crystal display (LCD) cell for an LCD device is disclosed that can be manufactured under easy rework processing for reduced cost. The LCD cell comprises a first transparent substrate; a second transparent substrate; and a sealing member. The sealing member is sandwiched between and fixedly binds the first and second transparent substrates in a structural alignment for image displaying operation of the LCD cell. The sealing member forms a perimeter encircling a display area of the LCD cell and having a discharge port at a location on the perimeter thereof. The perimeter encloses an optimized amount of liquid crystal obtained after the excessive liquid crystal trapped within the perimeter during the manufacture of the LCD cell is discharged out of the LCD cell through the discharge port. The perimeter sealedly encloses the optimized amount of liquid crystal therein after the discharge port is plugged for defect-free implementation of the image displaying operation.

Abstract: A laminated spacer portion formed by laminating various thin films that constitute thin-film transistors is disposed in peripheral driver circuits. As a result, even in a structure in which part of a sealing member is disposed above the peripheral driver circuits, pressure exerted from spacers in the sealing member is concentrated on the laminated spacer portion, whereby destruction of a thin-film transistor of the peripheral driver circuits can be prevented caused by the pressure from the sealing portion.

Abstract: An LCD with a uniform common voltage and a method thereof. The present invention method includes providing a lower substrate, forming scan lines and data lines, then forming common electrodes and common electrode pads electrically connecting the common electrodes. The method also includes providing an upper substrate, forming photo spacers corresponding to each of the electrode pad, then forming a conductive material layer covering each photo spacer, combining the two substrates and connecting the conductive material layer on the photo spacers to the common electrode pads, and sealing the two substrates.

Abstract: A first transparent substrate and a second transparent substrate having such a plurality of protrusions on the liquid crystal layer side as to contact with the first transparent substrate are so fixed by means of a sealant that they bend convexly to the liquid crystal layer. Thus, it is possible to suppress the mura defect of a panel, which might otherwise be caused by the heat radiation from a back light when a liquid crystal display apparatus is driven.

Abstract: A liquid crystal display has spacers for maintaining a liquid crystal layer and a cell gap between a substrate and an opposite substrate and also has regions either within a single pixel or over two or more pixels. The spacers are of columnar shape elongated from the substrate to the opposite substrate or the other way round, and the columnar spacers are provided in regions in which the liquid crystal layer is thinnest among those regions in which the liquid crystal layer varies in thickness. The structure makes the liquid crystal display having two or more different cell gaps to stably maintain those cell gaps and produces good quality displays.

Abstract: A method for archiving a motion picture film can include capturing in a digital format at least one reference image set corresponding to at least one image from the motion picture film. At least one reference image set can be created which includes an unprocessed image captured, in the digital format, from an original camera negative. The image set can also include a processed image, stored in said digital format, that is a modified version of the unprocessed image. Subsequently, the reference image set can be recorded on a reference film medium to form a key frame reel. The key frame reel can thereafter be used to create monochrome color separations.

Abstract: A flexible substrate, which has a photosensitive agent applied thereon, is continuously supplied from a supply unit to a guide unit where light is irradiated from a light source on a section of the substrate. A mask is positioned between the substrate and the light source so that the light from the light source selectively subjects the section of the substrate to exposure. Hence, it is possible to form a pattern having a continuous slanted structure for a large-area display panel.

Abstract: A method and apparatus for exposing a radiation-sensitive material of a microlithographic substrate to a selected radiation. The method can include directing the radiation along a radiation path in a first direction toward a reticle, passing the radiation from the reticle and to the microlithographic substrate along the radiation path in a second direction, and moving the reticle relative to the radiation path along a reticle path generally normal to the first direction. The microlithographic substrate can move relative to the radiation path along a substrate path having a first component generally parallel to the second direction, and a second component generally perpendicular to the second direction. The microlithographic substrate can move generally parallel to and generally perpendicular to the second direction in a periodic manner while the reticle moves along the reticle path to change a relative position of a focal plane of the radiation.

Abstract: The present invention provides a lithographic apparatus, including: a substrate table constructed to hold a substrate; a projection system configured to project a radiation beam through an exposure slit area onto a target portion of the substrate; a patterning device configured to import the radiation beam with a pattern in its cross-section to form a patterned radiation beam, the patterned radiation beam at the target portion of the substrate being in focus over a depth of focus; and a measurement system that is arranged to measure a surface topography of at least part of the target portion, wherein the projection system is arranged to adjust a dimension of the exposure slit area to form an adjusted exposure slit area over which surface topography variations are equal to or smaller than the depth of focus.

Abstract: The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting Forces sensed by the substrate chuck generated in response to the compressive forces.

Abstract: An alignment apparatus includes driving means having a movable element and a stator, a measurement unit which measures a position of a moving member moved by the driving means using measurement light, and a discharging unit to discharge gas existing in an optical path of the measurement light. The discharging unit is provided to the stator.

Abstract: Provided are systems and methods for overcoming optical errors occurring from reticle and other hardware usage in a semiconductor fabrication apparatus. The systems and methods minimize optical errors, such as those resulting from gravitational sag on a reticle or mask, for a pattern being projected onto a wafer. The reduced errors allow larger reticles and masks to be used—while maintaining optical accuracy; and also improve optical budget management.

Abstract: A method utilizing a lithography system comprises a lithography patterning chamber, a wafer exchange chamber separated from the lithography patterning chamber by a first gate valve, and at least one alignment load-lock separated from the wafer exchange chamber by a second gate valve. The alignment load-lock includes an alignment stage that aligns a wafer during pump-down. The alignment load-lock can be uni-directional or bi-directional. The lithography system can include one or multiple alignment load-locks.

Abstract: A method is provided for determining motion of an optical sensor including a periodic photo-diode array relative to a surface. The method includes steps of (i) generating sets of quasi-sinusoidal signals responsive to motion along first and second directions; (ii) combining the sets of signals to generate a wrapped phase angle value for each direction at a first time; (iii) combining the sets of signals at a second time to generate a second wrapped phase angle value for each direction; (iv) computing wrapped phase angle changes for each direction between the first time and the second time; (v) computing velocity predictors for each direction using corrected average phase angle changes from a number of preceding successive frames; (vi) calculating the number of full 27? rotations needed to unwrap the phase angle changes for each direction using the velocity predictors; and (vii) computing the unwrapped or corrected phase angle changes.

Abstract: The present invention relates to a far field light microscopical method, respectively a system and a computer program product for analysing at least one object having a subwavelength size in at least one spatial direction to obtain spatial information of the object, in particular size and topology thereof, comprising the steps of:—labelling the object(s) with one or more suitable optical markers;—providing suitably structured illumination light to at least partially illuminate the object(s);—subjecting the object(s) to the structured illumination light;—detecting an optical response of the object(s);—obtaining the spatial information of the object(s) by comparing the obtained response with simulation data of an optical response of object(s) having known spatial information.

Abstract: A method for mobile on- and off-line monitoring of coloured and high-gloss automobile component surfaces includes a camera-supported optical scanning of the automobile surface by means of an angle-dependent spectrophotometer, connected to and initialising an optical neuro-fuzzy structured image data bank, which permits a preparation of the measured signal coming from the detector by means of a computer-aided optical quality data bank and allows an evaluation of the measured automobile surfaces. The data link occurs via a neuronal network to a control unit for surface measurement systems, connected to a production planning system, a customer information system and the product unit for automobile painting/coating.

Abstract: A system and method for bit error rate testing optical components comprises providing an optical testing unit, which measures a bit error rate of an optical device under test (DUT) over an operating range of the DUT. The optical testing unit includes an optical transmitter, which transmits an optical test signal that is transmitted to the DUT; an optical receiver, which receives an input signal from the DUT; a graphical user interface, which provides an interface with a user; and a controller, selectively coupled to the transmitter, the receiver and the graphical user interface, wherein the controller provides a central control of the transmitter, the receiver and the graphical user interface.

Abstract: A method for determining the phase noise of a fiber optic cable includes a step of transmitting a reference signal and a test signal over the fiber optic cable to be tested. The reference and test signal are provided with different wavelengths. The phase noise of the fiber optic cable is calculated by comparing the reference signal and the test signal output from the fiber optic cable.

Abstract: Temporal phase shifts induced by cross-phase modulation in an optical fiber are directly characterized with a spectral equivalent of the Foucault technique used to spatially resolve wavefronts. The temporal phase induced by a high power pulsed pump on a monochromatic probe via cross-phase modulation is converted in a temporal intensity modulation via spectral filtering. A measurement of the modulated instantaneous power of the filtered signal allows to directly determine the time-resolved nonlinear phase shift. Additionally, an equivalent of the transport-of-intensity equation, which links the evolution of the instantaneous power of the electric field in a dispersive medium to the instantaneous values of the power and phase of the field. This derivation permits the measurement of temporal phase shifts using only intensity information in a direct, non-interferometric manner.

Abstract: The proposed solution to the problems associated with assembling optical components introduces an angular alignment step and the use of collimated optical beams to the assembly process. One embodiment of a method for aligning optical components includes the steps of angularly aligning a fiber subassembly and a laser subassembly to achieve a desired angular position of the fiber subassembly relative to the laser subassembly, transversely aligning the fiber subassembly and the laser subassembly to achieve a desired linear position of the fiber subassembly relative to the laser subassembly, while maintaining the desired angular position, and installing an intermediate part configured to accommodate the desired angular position and the desired linear position. The method also includes the step of permanently assembling the fiber subassembly, the laser subassembly and the intermediate part, while maintaining the desired angular position and the desired linear position.

Abstract: The invention provides a method of determining a horizontal profile line defined by walls that are essentially vertical, by using a pointer having two calibrated reference points, the method comprising the following successive steps: a) placing the pointer horizontally in contact with a point on the profile line to be determined; b) from an origin point, measuring in succession the lengths of segments joining the origin point to each reference point, and also the angle between the two segments; c) deducing by calculation the coordinates of the contact point in the associated horizontal plane, and storing said coordinates; and reiterating steps a), b), c) for a plurality of points on the profile line to be determined, including at least the angle points situated at the intersections between said essentially vertical walls. The invention also provides apparatus for implementing the above method.

Abstract: The invention relates to a method for the contactless measurement of angles or angle modifications, distances or lateral displacements in objects. According to said method, an aperture is transilluminated by means of a ray bundle and after being reflected by a distant reflective element, which generates or is subjected to the angles, angle modifications or lateral displacements that are to be measured, is projected onto a detector surface by an optical system. The image of the aperture on the detector surface is captured, the position of the aperture image is determined in relation to a reference point on the detector surface and the measured value of the angle modification or lateral displacement is calculated using the distance of the centre of the image from the reference point. The invention also relates to an angle or height measuring device.

Abstract: An object is placed at a particular distance away from the nonreflecting side of a mirror, such that the gravitational force of the object affects the mirror. A laser is then pointed at the opposite, reflecting side of the mirror, thereby itself reflecting off the mirror and going back in to the cavity of the laser, creating a mode-hopping effect. The mirror will be affected by three forces, the force of a spring (FS), the force of a modulating signal (FMS), created by an electro mechanical device attached to the mirror, and the gravitational force of objects as they approach and recede away from the mirror.

Abstract: A defect inspection device for metal ring end faces of a Continuously Variable Transmission (CVT) V-belt which enables automated inspection of end face defects in the metal rings along with acquiring improved efficiency, superb precision and reproducibility. When end face defects in the metal ring are inspected by an inspection section, this task is accomplished by an angle modification portion which performs an angle modification operation continuously in a predetermined range (?1˜?5) relative to an inspectable surface for at least a first light guiding path and a second light guiding path included in the defect inspection section. Because this automated modification operation corresponds to processing by manual visual inspection and applies a common practice detection method used in labor-intensive visual inspections by changing the viewing angle to detect defects, such as a gloss mark, the object of the present invention can be achieved.

Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: A fluid analysis apparatus for containing and analyzing a fluid sample includes a cell body assembly having a plurality of distinct portions in fluid communication with one another and with the distinct portions being hydraulically sealed to one another through the use of one or more resilient gaskets interposed between adjacent ones of the plurality of distinct portions of the cell body assembly. The one or more resilient gaskets enable both hydraulic sealing of adjacent distinct portions, as well as fluid coupling and routing through the fluid analysis apparatus.

Abstract: A spectroscopy cell has a body with a central outer sample chamber (6). Within this chamber (6) is a sample cavity (25) as part of a temperature controlled sample probe (23). At one end this sample cavity (25) is delimited by a movable gas connection insert (20) which extends outwardly to a temperature-controlled (e.g. cooled) end plate (8). Gas inlet and outlet tubes (29,30) also extend from the end plate to the sample cavity (25). In use the sample cavity (25) may be at a high temperature so that (a) it is difficult to provide seals for the gas connection insert (20) and gas tubes (29,30); and (b) they are subject to considerable thermal expansion and contraction. Similar problems occur with very low cavity temperatures. Therefore compressible seals (21,31,32) are provided in the end plate (8), remote from the chamber.

Abstract: Instruments for molecular detection at the nano-molar to femto-molar concentration level include a longitudinal capillary column (10) of known wall thickness and diameter. The column (10) contains a medium (24) including a target molecule (30) and a plurality of optically interactive dielectric beads (26) on the order of about 10?6 meters up to about 10?3 meters and/or metal nanoparticles (31) on the order of 1-500 nm. A flow inducer (34) causes longitudinal movement of the target molecule within the column (10). A laser (14) introduces energy laterally with respect to the column (10) at a wavelength and in a direction selected to have a resonant mode within the capillary column wall (12) and couple to the medium (24). A detector (40) is positioned to detect Raman scattering occurring along the column (10) due to the presence of the target molecule.

Abstract: A method, suitable for stand off analysis of a sample (2), comprising: (i) using an excitation means (6) to vaporise the sample (2) thereby producing a vapour plume (10) of molecular species; and (ii) using an analytical means (12) to analyse molecular species within the vapour plume (10) wherein the analytical means (12) analyses the molecular emission spectra of the vapour plume (10). The invention also relates to a kit and an apparatus for use with the same.

Abstract: The bio-sample (e.g., a live cell) is labeled with a proper number of nanoparticles. Each nanoparticle is pre-co-doped with a controlled ratio of fluorophore donors and acceptors. Two laser pulses are applied to the bio-sample. The first laser pulse has a center wavelength near the peak of absorption spectrum of acceptors. The intensity of first laser pulse is adjusted such that FRET saturation occurs near the center of the focal spot. The focal spot of the first laser pulse is a diffraction-limited Airy disk that has the highest laser intensity in the center of the focal spot. The second laser has a center wavelength in the emission spectrum of acceptors and with a uniform intensity distribution throughout the focal spot. The fluorescence emission from acceptors after two laser pulses is from an area that is smaller than the diffraction-limited focal spot. Hence, a higher than diffraction-limit resolution is achieved.

Abstract: Method and apparatus for detecting biomolecular interactions. The use of labels is not required and the methods may be performed in a high-throughput manner. An apparatus for detecting biochemical interactions occurring on the surface of a biosensor includes a light source. A first optical fiber is coupled to the light source and illuminates the biosensor. A second optical fiber detects a wavelength reflected from the biosensor. A spectrometer determines spectra of a reflected signal from the biosensor.

Abstract: An optical system for acquiring fast spectra from spatially channel arrays includes a light source for producing a light beam that passes through the microfluidic chip or the channel to be monitored, one or more lenses or optical fibers for capturing the light from the light source after interaction with the particles or chemicals in the microfluidic channels, and one or more detectors. The detectors, which may include light amplifying elements, detect each light signal and transducer the light signal into an electronic signal. The electronic signals, each representing the intensity of an optical signal, pass from each detector to an electronic data acquisition system for analysis. The light amplifying element or elements may comprise an array of phototubes, a multianode phototube, or a multichannel plate based image intensifier coupled to an array of photodiode detectors.

Abstract: The sensitivity of scattered-light fire detectors for small particles can be increased substantially when blue light is introduced into the measuring volume in addition to an infrared radiation and the scattered radiation produced by the particles is measured and evaluated separately from each other in the infrared and blue region both in the forward scattering region as well as in the backward scattering region. This can be realized by a fire detector that includes two transmitter LEDs (2.1a, 2.1b) and two photodetectors (2.2a, 2.2b), with these components being arranged such that the photodetectors receive both the forward scattered radiations as well as the backward scattered radiations of the longer and shorter wavelengths separately from each other. A multi-channel evaluation circuit is provided downstream of the photodetectors.

Abstract: A broadband ellipsometer/polarimeter system for analyzing a sample includes an illumination source emitting a polychromatic light beam, a polarization state generator (PSG) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a sample holder, a polarization state analyser (PSA) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a primary detection system measuring the intensities at each wavelength of the light beam transmitted through the PSA, optics to collimate the beam into the PSG and into the PSA and to focus the beam into the sample surface and the detector. The linear polarizer and achromatic retarder in the PSA are identical to those of the PSG but mounted in a reverse order.

Abstract: Disclosed is a method of determining an overlay error between two layers of a multiple layer sample. For each of a plurality of periodic targets target that each have a first structure formed from a first layer and a second structure formed from a second layer of the sample, a plurality of optical signals are measured at a plurality of incident angles, wherein there are predefined offsets between the first and second structures. An overlay error is then determined between the first and second structures by analyzing the measured optical signals at the plurality of incident angles from the periodic targets using a scatterometry overlay technique based on the predefined offsets without using a calibration operation.

Abstract: An exposure apparatus for aligning a substrate and performing exposure using the aligned substrate. The apparatus includes a first alignment system, having a first stage and a first image sensing unit, to detect a position of a first mark on the substrate on the first stage using the first image sensing unit, a transfer system to transfer the substrate, on which the position of the first mark has been detected by the first alignment system, from the first stage onto a second stage, and a second alignment system, having the second stage and a second image sensing unit of which magnification is higher than that of the first image sensing unit, to detect a position of a second mark on the substrate on the second stage using the second image sensing unit, and to align the substrate based on the detection obtained by using the second image sensing unit.

Abstract: A miniaturized spectrometer/spectrophotometer system and methods are disclosed. A probe tip including one or more light sources and a plurality of light receivers is provided. A first spectrometer system receives light from a first set of the plurality of light receivers. A second spectrometer system receives light from a second set of the plurality of light receivers. A processor, wherein the processor receives data generated by the first spectrometer system and the second spectrometer system, wherein an optical measurement of a sample under test is produced based on the data generated by the first and second spectrometer systems.

Abstract: An imaging sensor system images in two different spectral bands a light beam traveling on a light path from a target. The sensor system includes an imaging sensor operable to image light of the two different spectral bands, a common optics having at least one reflective or refractive optical element, and a wavelength-selective beamsplitter on the light path between the target and the imaging sensor. The wavelength-selective beamsplitter splits the light beam into two subbeams, one subbeam for each of the two different spectral bands, that are respectively incident upon two different locations of the imaging sensor. The imaging sensor may be used to detect buried explosive mines.

Abstract: The device for measuring an optical absorption characteristic of a sample according to the present invention comprising a light source, a optical wave-guide having light input surface(s) and light output surface(s) that are opposite to each other, and a light reflecting surface on which a sample to be measured is disposed, through which the light passes and is reflected by a total reflection on the sample, one or more light transmitting means arranged between the light output surface of the optical wave-guide and the light input surface of the optical wave-guide so that the light is again entered into the optical wave-guide, and a processing device which receives the light re-exited from the optical wave-guide through the output surface and detects the optical absorption characteristics of the sample on the basis of the light received, whereby the light which passes through the optical wave-guide is conducted to the optical wave-guide again, the light is again entered the optical wave-guide, and the light is

Abstract: A device for measuring aerosol size distribution within a sample containing aerosol particles. The device generally includes a spectrometer housing defining an interior chamber and a camera for recording aerosol size streams exiting the chamber. The housing includes an inlet for introducing a flow medium into the chamber in a flow direction, an aerosol injection port adjacent the inlet for introducing a charged aerosol sample into the chamber, a separation section for applying an electric field to the aerosol sample across the flow direction and an outlet opposite the inlet. In the separation section, the aerosol sample becomes entrained in the flow medium and the aerosol particles within the aerosol sample are separated by size into a plurality of aerosol flow streams under the influence of the electric field.