Patents Issued in October 21, 2008
  • Patent number: 7439489
    Abstract: In the photoelectric encoder of the invention, as a light passing zone PZ of a movable object 21 travels by one pitch P, an output signal OUT2 of a second logical operation unit 26b comes to be delayed in phase by 45° with respect to an output signal OUT1 of a first logical operation unit 26a. Therefore, an output having a resolution two times higher than that of the movable object having a phase difference of 90° can be obtained, where the width of each of light receiving elements 22a-22d is (¼)P. Accordingly, the width of each of the light receiving elements can be made two times larger, compared with the case where the width of each of the light receiving elements is (?)P as in conventional optical encoders. Thus, the output strength of the detection signal can be increased, so that the S/N ratio can be improved.
    Type: Grant
    Filed: August 29, 2007
    Date of Patent: October 21, 2008
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Masato Sasaki, Norikazu Okada
  • Patent number: 7439490
    Abstract: A reading-line adjusting device of an image scanner includes an image sensing module, a shaft, a bush member, and a fixing and adjusting member. The image sensing module has a reading line for sensing an electronic signal of an image. The shaft is arranged in a first direction. The bush member includes a base and a bushing body. The base is coupled with the image sensing module. The bushing body is sleeved around the shaft and moved along the shaft. The fixing and adjusting member is used for fixing the base of the bush member onto the image sensing module and adjusting an angle between the base and the image sensing module such that the reading line of the image sensing module is arranged in a second direction.
    Type: Grant
    Filed: April 4, 2005
    Date of Patent: October 21, 2008
    Assignee: Teco Image Systems Co., Ltd.
    Inventors: Ming Te Yeh, Yun Hsiu Ou
  • Patent number: 7439491
    Abstract: Aspects of the subject matter described herein relate to reducing error in images obtained from an image-acquiring system. An image-acquiring system may be modeled as light received from a primary path, light received from a secondary path, and light received from all other paths. Light received from the secondary and other paths may cause error in images captured by the image-acquiring system. By compensating for this light, the error may be reduced. Other aspects are described in the specification.
    Type: Grant
    Filed: July 3, 2006
    Date of Patent: October 21, 2008
    Assignee: Microvision, Inc.
    Inventors: Jianhua Xu, Frank Blaine Metting, III, Gregory T. Gibson, Richard A. James
  • Patent number: 7439492
    Abstract: This invention extends the Kirkpatrick-Baez (KB) mirror focusing geometry to allow nondispersive focusing of neutrons with a convergence on a sample much larger than is possible with existing KB optical schemes by establishing an array of at least three mirrors and focusing neutrons by appropriate multiple deflections via the array. The method may be utilized with supermirrors, multilayer mirrors, or total external reflection mirrors. Because high-energy x-rays behave like neutrons in their absorption and reflectivity rates, this method may be used with x-rays as well as neutrons.
    Type: Grant
    Filed: February 1, 2006
    Date of Patent: October 21, 2008
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventor: Gene E. Ice
  • Patent number: 7439493
    Abstract: A multimodality imaging phantom is disclosed which is useful for calibrating devices for imaging vascular conduits. The phantom is compatible with X-ray, ultrasound and magnetic resonance imaging techniques. It allows testing, calibration, and inter-modality comparative study of imaging devices, in static or dynamic flow conditions. It also provides a geometric reference for evaluation of accuracy of imaging devices. The tissue-mimicking material is preferably an agar-based solidified gel. A vessel of known desired geometry runs throughout the gel and is connected to an inlet and outlet at its extremities for generating a flow circulation in the vessel. Said phantom also contains fiducial markers detectable in the above-mentioned modalities. The markers are preferably made of glass and are embedded in a layer of agar gel containing a fat component.
    Type: Grant
    Filed: November 5, 2002
    Date of Patent: October 21, 2008
    Assignees: Institut de Recherches Cliniques, Centre Hospitalier de l'Universite, Universite de Montreal
    Inventors: Pierre Teppaz, Salah Dine Qanadli, Guy Cloutier, Gilles Soulez, Richard Cimon, Louis-Gilles Durand
  • Patent number: 7439494
    Abstract: Data acquired using a pulsed nuclear source are susceptible to two sources of error. One error is due to large statistical noise towards the end of an acquisition window. Another source of error is the contamination of the early portion of the data by borehole and other effects. The beginning of the processing window is adjusted based on the signal level at the end of the processing window for the preceding pulsing of the source. The end of the processing window is derived from statistical considerations.
    Type: Grant
    Filed: January 9, 2007
    Date of Patent: October 21, 2008
    Assignee: Baker Hughes Incorporated
    Inventors: W. Allen Gilchrist, Randolph J. Walser
  • Patent number: 7439495
    Abstract: A nuclear imaging probe 1 for measuring the density of a subsurface formation GF in a limited zone surrounding a well-bore hole WBH. The probe comprises: a pad 2 having a face arranged so as to be positioned in contact with a well-bore wall WBW, at least one radioactive source 4 arranged within the pad for transmitting incident photons PI towards the well-bore wall, and at least one sensor 5 spaced away from the radioactive source and isolated from the radioactive source by a shield 6 arranged into the pad for receiving photons scattered PS by the limited zone.
    Type: Grant
    Filed: July 20, 2006
    Date of Patent: October 21, 2008
    Assignee: Schlumberger Technology Corporation
    Inventor: Richard Saenger
  • Patent number: 7439496
    Abstract: A method of detecting the presence of an analyte in an ion mobility spectrometer using an amide ionization reagent is provided. This method is particularly useful for the detection of peroxide-based explosives.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: October 21, 2008
    Assignee: Smiths Detection Inc.
    Inventors: William Ronald Stott, Sabatino Nacson, Gabriela Iulia Eustatiu
  • Patent number: 7439497
    Abstract: A control system and apparatus for use with laser ionization is provided. In another aspect of the present invention, the apparatus includes a laser, pulse shaper, detection device and control system. A further aspect of the present invention employs a femtosecond laser and a mass spectrometer in yet other aspects of the present invention, the control system and apparatus are used in MALDI, chemical bond cleaving, protein sequencing, photodynamic therapy, optical coherence tomography and optical communications processes.
    Type: Grant
    Filed: May 6, 2005
    Date of Patent: October 21, 2008
    Assignee: Board of Trustees of Michigan State University
    Inventors: Marcos Dantus, Vadim V. Lozovoy
  • Patent number: 7439498
    Abstract: This invention relates to a method and apparatus for separation of rare stable or radioactive isotopes from their atomic or molecular isobars in mass spectrometry (MS). In the present invention, the approach taken to removing atomic isobars utilizes a high transmission device for decelerating ions in combination with low energy reactions, such as ion-molecule reactions or near resonant electron transfer, in RF ion guides. The isobar is selectively depleted by electron transfer or other reactions between negative ions and gaseous targets in pressurized RF ion guides at low energies. The energy is controlled in such a way as to prevent reaction of the ion of interest while inducing reactions with the undesired isobar interference. The technique is of particular relevance to accelerator mass spectrometry (AMS) for which it allows substantial reductions in the necessary terminal voltage. The effect is to allow reductions in the size and cost of AMS installations.
    Type: Grant
    Filed: October 28, 2005
    Date of Patent: October 21, 2008
    Inventors: Albert Edward Litherland, Jonathan P. Doupe, William Edward Kieser, Xiao-Lei Zhao, Gholamreza Javahery, Lisa Cousins, Ilia Tomski, Charles Jolliffe
  • Patent number: 7439499
    Abstract: In one embodiment, an analytical apparatus is provided that includes a carriage; and a plurality of electrospray probes pivotably mounted on the carriage, wherein movement of the carriage engages a feature with a selected one of the electrospray probes whereby movement of the feature pivots the selected one of the electrospray probes with respect to the carriage.
    Type: Grant
    Filed: March 22, 2006
    Date of Patent: October 21, 2008
    Assignee: Metara, Inc.
    Inventors: Thomas H. Bailey, James E. Tappan
  • Patent number: 7439500
    Abstract: The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according to their energies into a low energy beam and a high energy beam; a front detector for detecting the high energy beam; and at least one reverse detector for detecting the low energy beam. The divider is positioned between the front detector and the at least one reverse detector and the front detector and/or the at least one reverse detector are segmented.
    Type: Grant
    Filed: March 17, 2006
    Date of Patent: October 21, 2008
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Juergen Frosien, Stefan Lanio
  • Patent number: 7439501
    Abstract: A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively heats the probe tip to a preselected temperature that is sufficient to cause a portion of the substrate in contact with the probe tip to decompose.
    Type: Grant
    Filed: August 30, 2006
    Date of Patent: October 21, 2008
    Assignee: Georgia Tech Reasearch Corporation
    Inventors: William P. King, Clifford L. Henderson
  • Patent number: 7439502
    Abstract: The purpose of the invention is to provide an improved electron beam apparatus with improvements in throughput, accuracy, etc. One of the characterizing features of the electron beam apparatus of the present invention is that it has a plurality of optical systems, each of which comprises a primary electron optical system for scanning and irradiating a sample with a plurality of primary electron beams; a detector device for detecting a plurality of secondary beams emitted by irradiating the sample with the primary electron beams; and a secondary electron optical system for guiding the secondary electron beams from the sample to the detector device; all configured so that the plurality of optical systems scan different regions of the sample with their primary electron beams, and detect the respective secondary electron beams emitted from each of the respective regions. This is what makes higher throughput possible.
    Type: Grant
    Filed: June 11, 2007
    Date of Patent: October 21, 2008
    Assignee: Ebara Corporation
    Inventors: Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata, Shoji Yoshikawa, Toshifumi Kimba, Shin Oowada, Mutsumi Saito, Muneki Hamashima, Yoshiaki Kohama, Yukiharu Okubo
  • Patent number: 7439503
    Abstract: A charged particle beam irradiation method includes: obtaining shape information of an edge of a pattern to be inspected that is formed on a subject; creating a first line group substantially perpendicular to the pattern edge; creating a second line group substantially parallel with the pattern edge; specifying areas defined by the first line group and the second line group as a lattice group including irradiation positions of a charged particle beam; deciding an order to irradiate the areas with the charged particle beam so that the lattice group is sequentially scanned in a direction of the first or second line group; and scanning the subject with the charged particle beam in accordance with the irradiation order.
    Type: Grant
    Filed: October 7, 2004
    Date of Patent: October 21, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hideaki Abe
  • Patent number: 7439504
    Abstract: A pattern inspection method and apparatus in which a charged particle beam is irradiated onto a surface of a specimen on which a pattern is formed, plural sensors simultaneously detect secondary particles emanated from the surface of the specimen by the irradiation, signals outputted from each sensor of the plural sensors which simultaneously detect the secondary particles are added, an image of the surface of the specimen on which the pattern is obtained from the added signals, and the image is processed to detect a defect of the pattern.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: October 21, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji, Atsuko Takafuji
  • Patent number: 7439505
    Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
    Type: Grant
    Filed: December 2, 2005
    Date of Patent: October 21, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima, Yasuhiko Ozawa
  • Patent number: 7439506
    Abstract: Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer. The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.
    Type: Grant
    Filed: May 11, 2007
    Date of Patent: October 21, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi, Satoru Fukuhara, Hiroyuki Shinada, Yutaka Kaneko, Katsuya Sugiyama, Atsuko Takafuji, Hiroshi Toyama
  • Patent number: 7439507
    Abstract: A detecting device for a vehicle and method thereof is provided. The device includes a first infrared detector, a second infared detector, and a controller. The first infrared detector is configured to repeatedly measure a temperature of a first target area by receiving infrared radiation of the first target area over a sampling period. The second infrared detector is configured to repeatedly measure a temperature of a second target area by receiving infrared radiation of the second target area over the sampling period. The controller is configured to receive and store the plurality of first and second signals, wherein the controller repeatedly compares a plurality of correlation values to a predetermined tolerance range above a minimum threshold value, wherein the correlation values are determined by repeatedly comparing a plurality of time delayed signals of the second plurality of signals to a real time signal of the plurality of first signals.
    Type: Grant
    Filed: December 12, 2006
    Date of Patent: October 21, 2008
    Assignee: Delphi Technologies, Inc.
    Inventors: Kevin M. Deasy, Ronald M. Taylor, Siddharth S. Rege, Adil Ansari
  • Patent number: 7439508
    Abstract: Hybrid microantennas and improved sensor structures incorporating hybrid microantenna embodiments are described herein. A hybrid long-wave infrared (LWIR) microantenna includes four inner pie-shaped arms in which the four inner pie-shaped arms are in a double bow-tie configuration and a plurality of outer pie-shaped arms in which a subset of the outer pie-shaped arms is connected to the four inner pie-shaped arms and the pie-shaped arms are sensitive to electric fields and absorb radiation.
    Type: Grant
    Filed: September 15, 2006
    Date of Patent: October 21, 2008
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Nathan Bluzer, Glenn Boreman, Brian Lail, Peter Martin Krenz
  • Patent number: 7439509
    Abstract: Dual channel silicon photomultipliers (SiPMs) can replace PMTs and APDs for use in PET and other radiation detectors. The devices are compact, have high gain, high QE and low noise. Due to their timing performance, these devices can be used in time-of-flight PET applications. By dividing the device into two separate channels, one for timing resolution and one for energy resolution, both can be optimized simultaneously.
    Type: Grant
    Filed: May 23, 2007
    Date of Patent: October 21, 2008
    Assignee: Siemens Medical Solutions USA, Inc.
    Inventors: Ronald Grazioso, Nan Zhang
  • Patent number: 7439510
    Abstract: A hand-held, fleet deployable infrared camera with integrated hardware and software providing real time processing of infrared images. The camera senses variable temperature images over a selected object of interest and senses variable emissivities over the object. The camera also measures and corrects for reflected environmental radiation as well as corrections for the atmospheric path through which the object is viewed. A calibrated reference patch having known emissivity and reflectance is attached to an object of interest and viewed through the camera. The calibrated patch is used to provide correction for the environmental radiation reflected off the object. Once the environmental radiation correction is known, it can be used to correct measurements taken from the rest of the object of interest.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: October 21, 2008
    Assignee: Millenium Engineering and Integration Company
    Inventors: Edward James Bevan, Max Michael Briggs, John Didomenico, Robert W. Gedridge
  • Patent number: 7439511
    Abstract: An apparatus for analyzing, identifying or imaging an target including a source of pulsed signals in the range of frequencies from 100 GHz to over 2 THz focused on or transmitted through the target; and a detector for acquiring spectral information from signals reflected from the target and using a multi-spectral heterodyning process to generate an electrical signal representative of some characteristics of the target. The source of pulse signals and the detector are photoconductive switches activated by a pulsed laser beam from a single mode-locked laser.
    Type: Grant
    Filed: April 26, 2007
    Date of Patent: October 21, 2008
    Assignee: Emcore Corporation
    Inventor: Joseph R. Demers
  • Patent number: 7439512
    Abstract: A device can be made operable to distinguish between materials impinging on a predefined area based at least in part on differentials within sets of data indicative of measurable characteristics of the materials impinging on the defined area. Such a device can trigger a protection mechanism based at least in part on identification of such differentials.
    Type: Grant
    Filed: June 26, 2006
    Date of Patent: October 21, 2008
    Assignee: QuaLex Manufacturing LLC
    Inventor: Russell S. Garland
  • Patent number: 7439513
    Abstract: Fast microbolometer pixels integrating micro-optical focusing elements are provided. Each microbolometer pixel includes a focusing element located between the pixel body and a substrate, this focusing element preferably sending radiation back towards the central portion of the microbolometer. There is also provided a microbolometer array having a plurality of such microbolometer pixels. Advantageously, to increase the pixel speed, the present microbolometers may be built smaller than the detector and no additional structures need to be attached to said detector.
    Type: Grant
    Filed: August 16, 2005
    Date of Patent: October 21, 2008
    Assignee: Institut National D'Optique
    Inventors: Timothy Pope, Bruno Tremblay, Francis Picard
  • Patent number: 7439514
    Abstract: Embodiments relate to pinhole collimator assemblies having one or more adjustable size pinhole apertures therein. The pinhole collimator assembly is configured so that gamma rays can pass through the collimator assembly, but the remainder of the collimator assembly is substantially gamma ray absorbent. Embodiments also relate to imaging systems and methods of adjusting pinhole collimator performance.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: October 21, 2008
    Assignee: General Electric Company
    Inventors: Jorge Uribe, James William Hugg, Floribertus P. M. Heukensfeldt Jansen
  • Patent number: 7439515
    Abstract: Correction of scintillation event data from a nuclear medicine imaging system for effects of pulse pile-up is carried out by separating event data packets into total energy and individual detector energy data packets, executing pile-up correction algorithms on each of the separated packets simultaneously using a pipeline processing architecture, and reassembling the corrected data packets into corrected scintillation event data packets. Pulse tail correction information for each individual detector is stored in a storage medium for a present event and immediately preceding event for which correction information exists, which allows individual detector correction information to be retrieved by using a look-up procedure, thereby enabling correction to be performed within a single processor cycle.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: October 21, 2008
    Assignee: Siemens Medical Solutions USA, Inc.
    Inventor: Donald Bak
  • Patent number: 7439516
    Abstract: A computerized tomography imaging scanner module includes a plurality of scintillators, a plurality of back-illuminated photodiodes optically coupled with the scintillators, a multi-layer substrate having a plurality of substrate electrical conductors to which the photodiodes are electrically coupled, wherein each of the plurality of substrate conductors is connected to a different one of the back-illuminated photodiodes, and a flexible cable having a plurality of flex electrical conductors to which the substrate is electrically coupled, wherein each of the plurality of flex electrical conductors is connected to a different output of the multi-layer substrate.
    Type: Grant
    Filed: October 1, 2004
    Date of Patent: October 21, 2008
    Assignee: General Electric Company
    Inventors: Gregory Scott Zeman, Baiju Zacharia Babu, Mahesh Raman Narayanaswamy, David Michael Hoffman, Brian Joseph Graves
  • Patent number: 7439517
    Abstract: In a solid state radiation detector which includes an electrostatic recording section having a photoconductive layer that shows conductivity when exposed to recording light, and is constructed to receive recording light representing image information to record the image information in the detector, and to output image signals representing the recorded image information, the photoconductive layer is swept by an amount of major carrier greater than or equal to an amount of current that flows through the photoconductive layer at the time of recording to facilitate the recombination of minor carriers (residual charges) accumulated in the photoconductive layer.
    Type: Grant
    Filed: November 1, 2006
    Date of Patent: October 21, 2008
    Assignee: FUJIFILM Corporation
    Inventor: Shinji Imai
  • Patent number: 7439518
    Abstract: A method and apparatus for detecting gamma-rays is provided, wherein the gamma-ray detector apparatus includes a plurality of detector elements arranged in a stacked configuration. Each of the plurality of detector elements may include, a detector wafer having at least one anode separated from a cathode via a wafer material, wherein the wafer material includes a wafer material thickness d, and a wafer interface, wherein the wafer interface is electrically connected to the at least one anode.
    Type: Grant
    Filed: April 4, 2007
    Date of Patent: October 21, 2008
    Assignee: Raytheon Company
    Inventors: David R. Rhiger, Leonard P. Chen
  • Patent number: 7439519
    Abstract: A method includes detecting a neutron based on a time proximity of a first signal and a second signal. The first signal indicates detection of at least one of a neutron and a gamma ray. The second signal indicates detection of a gamma ray.
    Type: Grant
    Filed: September 18, 2006
    Date of Patent: October 21, 2008
    Assignee: Nova Scientific, Inc.
    Inventors: W. Bruce Feller, Paul L. White, Adrian Martin, P. Brian White, Oswald H. Siegmund
  • Patent number: 7439520
    Abstract: In various embodiments, provided are ion optics systems comprising two or more pairs of ion condensers arranged where the first member and second member of each pair are disposed on opposite sides of a first plane such that the first member of the pair has a position that is substantially mirror-symmetric about the first plane relative to the position of the second member of the pair and wherein the deflection angle of each of the ion condensers is less than or equal to about ? radians.
    Type: Grant
    Filed: January 24, 2005
    Date of Patent: October 21, 2008
    Assignee: Applied Biosystems Inc.
    Inventor: Marvin L. Vestal
  • Patent number: 7439521
    Abstract: An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: October 21, 2008
    Assignee: Veeco Instruments, Inc.
    Inventors: David M. Burtner, Scott A. Townsend, Daniel E. Siegfried
  • Patent number: 7439522
    Abstract: Single molecule measurement is conducted by propagating a laser light under multiple reflection between two substrates constituting a flow channel for flowing a sample solution, exciting target molecules in the sample, detecting one-dimensional images of generated fluorescence by a one-dimensional detection portion, synthesizing two-dimensional images from the obtained one-dimensional images by a data synthesizing portion and measuring the concentration of target molecules in the sample solution by counting the number of target molecules based on the two-dimensional images, thereby measuring the concentration of the target molecules in the sample solution. These constitutions for single molecule measurement lead to high precision determination of a micro-amount of a biological material.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: October 21, 2008
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Masataka Shirai, Tsuyoshi Sonehara, Takashi Anazawa, Chifumi Gouda, Chihiro Uematsu
  • Patent number: 7439523
    Abstract: A radiation image storage panel composed of a substrate and a layer of stimulable phosphor is prepared in an evaporation chamber kept at a pressure of 0.1 to 10 Pa by the steps of heating a source of the stimulable phosphor in the chamber so that the source is evaporated to give a gaseous product and depositing the gaseous product on the substrate which is arranged above the source to form the layer of stimulable phosphor on the substrate, in which the evaporation chamber has a diffusion preventing wall member surrounding a space between the source and the substrate, a top of which is positioned in the vicinity of a periphery of the substrate and a bottom of which is positioned in the vicinity of the source; and the diffusion preventing wall member is maintained at a temperature lower than a temperature of the source and higher than a temperature of the substrate.
    Type: Grant
    Filed: September 1, 2006
    Date of Patent: October 21, 2008
    Assignee: FUJIFILM Corporation
    Inventors: Yuichi Hosoi, Satoshi Arakawa
  • Patent number: 7439524
    Abstract: A thermoluminescence (TL) dosimetry (TLD) system comprises at least one TLD element that is controllably heated and which temperature is monitored in real time using an infrared (IR) radiometry subsystem that provides respective IR radiation inputs to a control subsystem. The control subsystem uses the inputs to effect the heating control. The TLD system further comprises a TL measuring subsystem for measuring TL emission data from each heated TLD element, the TL data used in obtaining a does curve indicative of the total radiation to which the TLD element has been exposed.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: October 21, 2008
    Inventors: Abraham Katzir, Ofer Gayer
  • Patent number: 7439525
    Abstract: A method for measuring a demagnification of a charged particle beam exposure apparatus includes measuring a first stage position of a mask stage in accordance with a mask stage coordinate system, irradiating a first charged particle beam to a first irradiation position on a specimen through the opening portion of the mask, measuring the first irradiation position in accordance with a specimen stage coordinate system, moving the mask stage to a second stage position, measuring the second stage position of the mask stage, irradiating a second charged particle beam to a second irradiation position on the specimen through the opening portion of the mask measuring the second irradiation position in accordance with the specimen stage coordinate system, and calculating a demagnification of the charged particle beam exposure apparatus from the first and second stage positions and the first and second irradiation positions.
    Type: Grant
    Filed: August 10, 2006
    Date of Patent: October 21, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Shinsuke Nishimura
  • Patent number: 7439526
    Abstract: The fabrication of modern semiconducting integrated circuits often requires implantation steps that involve high currents of low-energy charged dopant atoms. When employing such beams, the addition of electrons or negative ions for neutralizing the effects of space charge is often crucial for achieving success. Without this supplement, ion beams can ‘blow-up’ causing loss of intensity and disruption of beam focusing. In the present disclosure, methods are presented for introducing and constraining neutralizing low-energy electrons and negative ions within the boundaries of ribbon beams within regions of magnetic field deflection. Apparatus is described for maintaining neutralization based upon a reduction of electron losses, plasma bridge connections and secondary electron production. As part of plasma introduction to the deflection region a novel cryogenic pumping apparatus selectively removes neutral atoms from a plasma stream.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: October 21, 2008
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Kenneth H. Purser, Norman L. Turner
  • Patent number: 7439527
    Abstract: Three axes that are orthogonal to each other at one point are taken as an X-axis, a Y-axis and a Z-axis. An irradiation angle setting motor holds a holder, and sets an irradiation angle ? of an ion beam by rotating this holder around a center axis that is parallel to the X-axis. A Y-axis linear motor causes the holder and the irradiation angle setting motor to ascend and descent in the direction of the Y-axis. A Z-axis linear motor moves the holder, the irradiation angle setting motor and the Y-axis linear motor in the direction of the Z-axis. A control unit operation-controls synchronously the Y-axis linear motor and the Z-axis linear motor so that a substrate holding surface of the holder reciprocates and scans linearly along an S-axis that is parallel to the substrate holding surface and orthogonal to the X-axis.
    Type: Grant
    Filed: May 8, 2006
    Date of Patent: October 21, 2008
    Assignee: Nissin Ion Equipment Co., Ltd.
    Inventor: Makoto Nakaya
  • Patent number: 7439528
    Abstract: A particle therapy system capable of confirming energy of an accelerated charged particle beam before the charged particle beam is irradiated to an irradiation target. A beam position monitor is disposed in a synchrotron, and a cavity voltage monitor is associated with an RF cavity for acceleration. An ion beam orbiting within the synchrotron is accelerated with application of an RF voltage applied to the RF cavity and is extracted from the synchrotron with application of an RF voltage applied to an RF knockout electrode. Based on a cavity voltage signal detected by the cavity voltage monitor, a frequency counter measures the frequency of the RF voltage applied to the RF cavity. Based on a voltage detected by the beam position monitor, a beam signal processing unit measures the position of a beam orbit.
    Type: Grant
    Filed: November 5, 2004
    Date of Patent: October 21, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Hideaki Nishiuchi, Katsuhisa Ike, Masumi Umezawa, Koji Matsuda
  • Patent number: 7439529
    Abstract: A high current density ion beam source includes a plasma source for generating plasma, a vacuum chamber coupled to the plasma source for extracting an ion beam from the plasma generated by the plasma source, a microwave field source configured to produce a microwave field that causes an ionization of gas within the plasma source, and a direct current voltage source configured to initiate an avalanche multiplication within the plasma source. The avalanche multiplication increases the ionization of gas in the plasma source and causes an increase in a current density of the ion beam.
    Type: Grant
    Filed: February 11, 2005
    Date of Patent: October 21, 2008
    Assignee: The Thailand Research Fund
    Inventors: Wirojana Tantraporn, Surawut Kitsumpun
  • Patent number: 7439530
    Abstract: An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam; a drive laser beam first path having a first axis; a drive laser redirecting mechanism transferring the drive laser beam from the first path to a second path, the second path having a second axis; an EUV collector optical element having a centrally located aperture; and a focusing mirror in the second path and positioned within the aperture and focusing the drive laser beam onto a plasma initiation site located along the second axis. The apparatus and method may comprise the drive laser beam is produced by a drive laser having a wavelength such that focusing on an EUV target droplet of less than about 100 ?m at an effective plasma producing energy if not practical in the constraints of the geometries involved utilizing a focusing lens. The drive laser may comprise a CO2 laser. The drive laser redirecting mechanism may comprise a mirror.
    Type: Grant
    Filed: June 29, 2005
    Date of Patent: October 21, 2008
    Assignee: Cymer, Inc.
    Inventors: Alexander I. Ershov, Alexander N. Bykanov, Oleh Khodykin, Igor V. Fomenkov
  • Patent number: 7439531
    Abstract: An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determining unit is constructed to process information from said first and second detector channels in a combination to determine a position of an alignment mark on a work piece, the combination taking into account a manufacturing process of the work piece. A lithographic apparatus has the above mentioned alignment system. Methods of alignment and manufacturing devices with a lithographic apparatus use the above alignment system and lithographic apparatus, respectively.
    Type: Grant
    Filed: December 22, 2006
    Date of Patent: October 21, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse, Andre Bernardus Jeunink, Henry Megens, Ramon Navarro Y Koren, Hoite Pieter Theodoor Tolsma, Hubertus Johannes Gertrudus Simons, Johny Rutger Schuurhuis, Sicco Ian Schets, Brian Young Bok Lee, Allan Reuben Dunbar
  • Patent number: 7439532
    Abstract: A light-receiving element for receiving a signal light from a light-emitting element and a load-controlling power element are mounted on an output-side lead frame of a solid state relay. A first electrode of the light-receiving element is connected to a first control terminal and a second electrode of the light-receiving element is connected inside a resin sealing portion to a gate electrode of the load-controlling power element. A first electrode of the load-controlling power element is connected to a first output terminal and a second electrode of the load-controlling power element is connected to a second output terminal. The first control terminal, the first output terminal, and the second output terminal each individually lead out to the exterior of the resin sealing portion as lead terminals.
    Type: Grant
    Filed: January 4, 2006
    Date of Patent: October 21, 2008
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Hiroshi Yamaguchi
  • Patent number: 7439533
    Abstract: An optical module includes a light emitting element, a connector part that supports one end of an optical fiber and optically couples the optical fiber to the light emitting element, and a monitoring light receiving element that has a characteristic to increase photosensitivity with an increase in an ambient temperature, and receives a part of components of light emitted from the light emitting element.
    Type: Grant
    Filed: October 23, 2006
    Date of Patent: October 21, 2008
    Assignee: Seiko Epson Corporation
    Inventors: Satoshi Kito, Akira Miyamae, Kimio Nagasaka
  • Patent number: 7439534
    Abstract: A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally laid between support pins of the wafer holding part, and a calibration standard member for calibration is placed on an upper surface of the support table. When a semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the semiconductor wafer, and the reflection intensity of the light is measured. When no semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the calibration standard member, whereby the calibration can be done at any time.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: October 21, 2008
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventor: Hirotsugu Kaihori
  • Patent number: 7439535
    Abstract: A method by which a halogen atom of a halogen compound can be efficiently replaced with an electrophilic group. Also provided are: a reagent for converting a functional group through a halogen-metal exchange reaction, characterized by comprising either a mixture of a magnesium compound represented by the formula R1—Mg—X (I) (wherein R1 represents a halogen atom or an optionally substituted hydrocarbon residue; and X1 represents a halogen atom) and an organolithium compound represented by the formula R2—Li (II)(wherein R2 represents an optionally substituted hydrocarbon residue) or a product of the reaction of the magnesium compound with the organolithium compound; and a process for producing with the reagent a compound in which a halogen atom of a halogen compound has been replaced with an electrophilic group.
    Type: Grant
    Filed: March 11, 2005
    Date of Patent: October 21, 2008
    Assignee: Banyu Pharmaceutical Co., Ltd.
    Inventors: Takehiko Iida, Toshihiro Wada, Toshiaki Mase
  • Patent number: 7439536
    Abstract: A phase change memory cell includes a phase change region of a phase change material, a heating element of a resistive material, arranged in contact with the phase change region and a memory element formed in said phase change region at a contact area with the heating element. The contact area is in the form of a frame that has a width of sublithographic extent and, preferably, a sublithographic maximum external dimension. The heating element includes a hollow elongated portion which is arranged in contact with the phase change region.
    Type: Grant
    Filed: April 6, 2006
    Date of Patent: October 21, 2008
    Inventors: Fabio Pellizzer, Enrico Varesi, Agostino Pirovano
  • Patent number: 7439537
    Abstract: New divinylfluorene compounds according to one of formulae (II) or (III): a new synthetic route to divinylfluorene compounds; and the use of the new compounds as sensitizers, optical brighteners and electroluminescent materials.
    Type: Grant
    Filed: July 29, 2005
    Date of Patent: October 21, 2008
    Assignee: Agfa Graphics, N.V.
    Inventors: Alexander Williamson, Paul Callant
  • Patent number: 7439538
    Abstract: A test structure in accordance with the present invention allows for testing of both Vbd TDDB, and leakage current between adjacent gate features. The test structure comprises a plurality of parallel polysilicon gate structures overlying a substrate. Traces placing alternate gates in electrical communication with a polysilicon edge are connected by a fuse. In one embodiment, a potential difference is applied across all gates to trigger Vbd, and then the fuse is broken to allow individual probing of breakdown of the alternate groups of gates. In another embodiment, the fuse is broken and then force and sense voltages are applied to the edge polysilicon in communication with the alternate gate groupings, allowing detection of leakage current between the alternate groupings of gates that reveals the existence of an unwanted polysilicon extrusion or bridge.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: October 21, 2008
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Wen Shi, Wei Wei Ruan