Abstract: To facilitate counting of memory cells in failure analysis, without limiting the arrangement of memory cells or increasing the number of processes. A memory cell array region 3 in which memory cells 3a are formed in a repetitive pattern is formed on a semiconductor substrate 2. Power supply wirings 4a and ground wirings 4b in a predetermined layer formed on the memory cell array region 3 are vertically and horizontally arranged in the form of a gird to correspond to the arrangement of the memory cells 3a at least in the memory cell array region 3.

Abstract: A semiconductor device includes a single crystalline substrate and an active region defined in the single crystalline substrate, wherein a major axis direction of the active region is aligned with a <0,1,1> family direction.

Abstract: In a FET using a SiGe film as a channel region, dispersion of the Ge concentration in the SiGe film and dispersion of the film thickness of the SiGe film are suppressed. The FET includes: a substrate 101 having silicon as its main component; a trench 104 formed on a substrate 101 formed so as to surround an element region; a SiGe film 107 formed on the substrate 101 in the element region; and a silicon migration prevention layer 106 which is formed on a part 104a of a side wall of the trench 104 and which contains at least one of nitrogen and carbon.

Abstract: A backside illuminated image sensor comprises a sensor layer implementing a plurality of photosensitive elements of a pixel array, an oxide layer adjacent a backside surface of the sensor layer, and at least one dielectric layer adjacent a frontside surface of the sensor layer. The sensor layer further comprises a plurality of backside trenches formed in the backside surface of the sensor layer and arranged to provide isolation between respective pairs of the photosensitive elements. The backside trenches have corresponding backside field isolation implant regions formed in the sensor layer, and the resulting structure provides reductions in carrier recombination and crosstalk between adjacent photosensitive elements. The image sensor may be implemented in a digital camera or other type of digital imaging device.

Abstract: A backside illuminated image sensor includes a sensor layer comprising photosensitive elements of the pixel array, an epitaxial layer formed on a frontside surface of the sensor layer, and a color filter array formed on a backside surface of the sensor layer. The epitaxial layer comprises polysilicon color filter array alignment marks formed in locations corresponding to respective color filter array alignment mark openings in the frontside surface of the sensor layer. The color filter array is aligned to the color filter array alignment marks of the epitaxial layer. The image sensor may be implemented in a digital camera or other type of digital imaging device.

Abstract: An image sensor includes a photoelectric conversion portion generating signal charges, a voltage conversion portion for converting the signal charges to a voltage, a charge increasing portion for increasing the number of the signal charges stored in the photoelectric conversion portion, a first light shielding film formed to cover at least one part of the charge increasing portion and a second light shielding film provided separately from the first light shielding film and formed to cover the voltage conversion portion.

Abstract: Disclosed are a CMOS image sensor and a manufacturing method thereof.

Abstract: A complementary metal-oxide-semiconductor (CMOS) static random-access-memory (SRAM) element comprising a planar metal-insulator-metal (MIM) capacitor is disclosed, and the planar MIM capacitor is electrically connected to the transistors in the CMOS memory element to reduce the effects of charged particle radiation on the CMOS memory element. Methods for immunizing a CMOS SRAM element to the effects of charged particle radiation are also disclosed, along with methods for manufacturing CMOS SRAM including planar MIM capacitors as integrated circuits.

Abstract: A semiconductor device includes: a semiconductor substrate including a trench; a capacitor electrode formed in the trench; a first insulation film formed on a bottom of the trench and between the semiconductor substrate and the capacitor electrode; a second insulation film formed on a side wall of the trench and between the semiconductor substrate and the capacitor electrode; and a first metal oxide film formed at the bottom of the trench and between the capacitor electrode and the first insulation film.

Abstract: A nonvolatile semiconductor memory device includes a semiconductor substrate that includes a trench, a charge storage layer that is formed inside of the trench, a first gate that is formed above a side surface and a bottom surface of the trench, a second gate that is formed beside the first gate, and that is formed above the charge storage layer, a first diffusion region that is formed on the semiconductor substrate inside of the trench, and a second diffusion region that is formed on the semiconductor substrate outside of the trench.

Abstract: A memory system is disclosed that includes a set of non-volatile storage elements. A given memory cell has a dielectric cap above the floating gate. In one embodiment, the dielectric cap resides between the floating gate and a conformal IPD layer. The dielectric cap reduces the leakage current between the floating gate and a control gate. The dielectric cap achieves this reduction by reducing the strength of the electric field at the top of the floating gate, which is where the electric field would be strongest without the dielectric cap for a floating gate having a narrow stem.

Abstract: Non-volatile memory is described. The non-volatile memory includes a substrate having a source region, a drain region and a channel region. The channel region separates the source region and the drain region. An electrically insulating layer is adjacent to the source region, drain region and channel region. A floating gate electrode is adjacent to the electrically insulating layer. The electrically insulating layer separates the floating gate electrode from the channel region. The floating gate electrode has a floating gate major surface. A control gate electrode has a control gate major surface and the control gate major surface opposes the floating gate major surface. A vacuum layer or gas layer at least partially separates the control gate major surface from the floating gate major surface.

Abstract: This semiconductor device comprises a semiconductor substrate, a gate insulating film formed thereon, and a gate electrode formed through the gate insulating film on the semiconductor substrate. The first silicon nitride film is formed on the upper surface of the gate electrode, and a protection insulating film is formed on the side thereof. The second silicon nitride film is formed on the side of the protection insulating film. The third silicon nitride film is formed on the upper surface of the protection insulating film, and the bottom thereof is formed on a higher position than the bottom of the first silicon nitride film.

Abstract: Embodiments of a dielectric layer containing a hafnium tantalum titanium oxide film structured as one or more monolayers include the dielectric layer disposed in an integrated circuit. Embodiments of methods of fabricating such a dielectric layer provide a dielectric layer for use in a variety of electronic devices. An embodiment may include forming hafnium tantalum titanium oxide film using atomic layer deposition.

Abstract: A nonvolatile memory device is provided that includes; a first semiconductor layer extending in a first direction, a second semiconductor layer extending in parallel with and separated from the first semiconductor layer, an isolation layer between the first semiconductor layer and second semiconductor layer, a first control gate electrode between the first semiconductor layer and the isolation layer, a second control gate electrode between the second semiconductor layer and the isolation layer, wherein the second control gate electrode and first control gate electrode are respectively disposed at opposite sides of the isolation layer, a first charge storing layer between the first control gate electrode and the first semiconductor layer, and a second charge storing layer between the second control gate electrode and the second semiconductor layer.

Abstract: A semiconductor memory device according to an embodiment may include a plurality of memory cells arranged on a semiconductor substrate includes a tunneling dielectric film on the semiconductor substrate; a floating gate formed on the tunneling dielectric film and corresponding to each of the memory cells; an inter-gate dielectric film on the floating gate; and a control gate on the inter-gate dielectric film, wherein the floating gate corresponding to a single memory cell has a first gate part, a second gate part, and the floating gate has a part that the tunneling dielectric film contacts the inter-gate dielectric film is provided between the first gate part and the second gate part within the memory cell.

Abstract: A semiconductor memory includes a composite floating structure where an insulation film is formed on a semiconductor substrate, Si-based quantum dots covered with an extremely thin Si oxide film is formed on the insulation film, silicide quantum dots covered with a high dielectric insulation film are formed on the extremely thin Si oxide film, and Si-based quantum dots covered with a high dielectric insulation film are formed on the high dielectric insulation film. Multivalued memory operations can be conducted at a high speed and with stability by applying a certain positive voltage to a gate electrode to accumulate electrons in the silicide quantum dots and by applying a certain negative voltage and weak light to the gate electrode to emit the electrons from the silicide quantum dots.

Abstract: The invention provides a nonvolatile semiconductor memory device comprising a plurality of memory strings each including a plurality of electrically programmable memory cells connected in series. The memory string includes a semiconductor pillar, an insulator formed around the circumference of the semiconductor pillar, and first through nth electrodes to be turned into gate electrodes (n denotes a natural number equal to 2 or more) formed around the circumference of the insulator. It also includes interlayer electrodes formed in regions between the first through nth electrodes around the circumference of the insulator.

Abstract: A semiconductor device includes a tunnel insulating film formed on a surface of a semiconductor region, a charge storage insulating film formed on a surface of the tunnel insulating film, a block insulating film formed on a surface of the charge storage insulating film, and a control gate electrode formed on a surface of the block insulating film, wherein the block insulating film includes a first insulating film containing a metal element and oxygen as main components, a second insulating film containing silicon and oxygen as main components, and an interface layer formed between the first insulating film and the second insulating film and containing the metal element, silicon, and oxygen as main components.

Abstract: A one-time programmable read-only memory (OTP-ROM) including a substrate, a first doped region, a second doped region, a third doped region, a first dielectric layer, a select gate, a second dielectric layer, a first channel, a second channel and a silicide layer is provided. The first doped region, the second doped region and the third doped region are disposed apart in a substrate. The first dielectric layer is disposed on the substrate between the first doped region and the second doped region. The select gate is disposed on the first dielectric layer. The second dielectric layer is disposed on the substrate between the second doped region and the third doped region. The silicide layer is disposed on the first doped region, the second doped region and the third doped region. The OTP-ROM stores data by a punch-through effect occurring between the second doped region and the third doped region.

Abstract: The invention relates to a nonvolatile two-transistor semiconductor memory cell and an associated fabrication method, source and drain regions (2) for a selection transistor (AT) and a memory transistor (ST) being formed in a substrate (1). The memory transistor (ST) has a first insulation layer (3), a charge storage layer (4), a second insulation layer (5) and a memory transistor control layer (6), while the selection transistor (AT) has a first insulation layer (3?) and a selection transistor control layer (4*). By using different materials for the charge storage layer (4) and the selection transistor control layer (4*), it is possible to significantly improve the charge retention properties of the memory cell by adapting the substrate doping with electrical properties remaining the same.

Abstract: Methods for forming high performance gates in MOSFETs and structures thereof are disclosed. One embodiment includes a method including providing a substrate including a first short channel active region, a second short channel active region and a long channel active region, each active region separated from another by a shallow trench isolation (STI); and forming a field effect transistor (FET) with a polysilicon gate over the long channel active region, a first dual metal gate FET having a first work function adjusting material over the first short channel active region and a second dual metal gate FET having a second work function adjusting material over the second short channel active region, wherein the first and second work function adjusting materials are different.

Abstract: A vertically-conducting charge balance semiconductor power device includes an active area comprising a plurality of cells capable of conducting current along a vertical dimension when biased in a conducting state, and a non-active perimeter region surrounding the active area. No current flows along the vertical dimension through the non-active perimeter region when the plurality of cells is biased in the conducting state. Strips of p pillars and strips of n pillars are arranged in an alternating manner. The strips of p pillars have a depth extending along the vertical dimension, a width, and a length. The strips of p and n pillars extend through both the active area and the non-active perimeter region along a length of a die that contains the semiconductor power device. The length of the die extends parallel to the length of the strips of p pillars. Each of the strips of p pillars includes a plurality of discontinuities forming portions of a plurality of strips of n regions.

Abstract: A shielded gate trench field effect transistor (FET) comprises trenches extending into a semiconductor region. A shield electrode is disposed in a bottom portion of each trench. The shield electrode is insulated from the semiconductor region by a shield dielectric. A gate electrode is disposed in each trench over the shield electrode, and an inter-electrode dielectric (IED) comprising a low-k dielectric extends between the shield electrode and the gate electrode.

Abstract: A semiconductor device contains a semiconductor substrate having a p-type semiconductor layer and an n-type channel layer formed thereon; gate trenches extended through the channel layer so as to reach the p-type semiconductor layer; oxide films formed over the bottom and inner wall of the gate trenches, the oxide films being formed thicker over the bottom of the gate trenches than over the inner wall; gate electrodes formed so as to fill the gate trenches; n-type regions formed at the bottom of the gate trenches, and containing arsenic as a major n-type impurity component; low concentration p-type regions formed under the n-type regions, and having a low p-type impurity concentration; and a drain electrode formed on the back surface of the substrate.

Abstract: A semiconductor device manufacturing method includes steps of: etching a semiconductor substrate 2 by using hard masks 71, 72 and 73; forming a sidewall insulating film 38 on side surfaces of these hard masks 71, 72 and 73; selectively removing the sidewall insulating film 38 formed on the side surfaces of the hard masks 71, 72; further etching the semiconductor substrate 2 by using the hard masks 71, 72 and 73 and the sidewall insulating film 38; simultaneously forming gate trenches 12, 22 and 32 at a part of the semiconductor substrate 2 covered by the hard masks 71, 72 and 73; and forming gate electrodes 13, 23 and 33 inside the gate trenches 12, 22 and 32. Accordingly, plural recess channel transistors having different heights of fin-shaped regions 21f, 31f can be formed simultaneously.

Abstract: A vertical drain extended metal-oxide semiconductor field effect (MOSFET) transistor or a vertical double diffused metal-oxide semiconductor (VDMOS) transistor includes: a buried layer having a first conductivity type in a semiconductor backgate having a second conductivity type; an epitaxial (EPI) layer having the first conductivity type and formed above the buried layer; a deep well having the first conductivity type in the EPI layer extending down to the buried layer; at least one shallow well having the second conductivity type in the EPI layer; a shallow implant region having the first conductivity type and formed in the shallow well; a gate electrode having a lateral component extending over an edge of the shallow well and stopping at some spacing from an edge of the shallow implant and having a vertical trench field plate extending vertically into the EPI layer.

Abstract: A semiconductor device, including: a first transistor formed on a substrate and including an Hf contained film as its gate insulating film; and a second transistor formed on said substrate and having the same conductive type as that of said first transistor, said second transistor including a silicon oxide film and not including an Hf contained film as its gate insulating film is provided.

Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity type; a pre-high-voltage well (pre-HVW) in the semiconductor substrate, wherein the pre-HVW is of a second conductivity type opposite the first conductivity type; a high-voltage well (HVW) over the pre-HVW, wherein the HVW is of the second conductivity type; a field ring of the first conductivity type occupying a top portion of the HVW; and a tunnel of the first conductivity type in the pre-HVW and the HVW, and electrically connecting the field ring and the semiconductor substrate.

Abstract: A semiconductor structure includes a semiconductor substrate; a first high-voltage well (HVW) region of a first conductivity type overlying the semiconductor substrate; a second well region of a second conductivity type opposite the first conductivity type overlying the semiconductor substrate and laterally adjoining the first well region; a gate dielectric extending from over the first well region to over the second well region; a drain region in the second well region; a source region on an opposite side of the gate dielectric than the drain region; and a gate electrode on the gate dielectric. The gate electrode includes a first portion directly over the second well region, and a second portion directly over the first well region. The first portion has a first impurity concentration lower than a second impurity concentration of the second portion.

Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity type; a pre-high-voltage well (pre-HVW) in the semiconductor substrate, wherein the pre-HVW is of a second conductivity type opposite the first conductivity type; a high-voltage well (HVW) over the pre-HVW, wherein the HVW is of the second conductivity type; a field ring of the first conductivity type occupying a top portion of the HVW, wherein at least one of the pre-HVW, the HVW, and the field ring comprises at least two tunnels; an insulation region over the field ring and a portion of the HVW; a drain region in the HVW and adjacent the insulation region; a gate electrode over a portion the insulation region; and a source region on an opposite side of the gate electrode than the drain region.

Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type; a deep well of a second conductivity type formed in a portion of an upper layer portion of the semiconductor layer; a well of the first conductivity type formed in a portion of an upper layer portion of the deep well; a source layer of the second conductivity type formed in the well; a drain layer of the second conductivity type formed in the well apart from the source layer; and a contact layer of the second conductivity type formed outside the well in an upper layer portion of the deep well and connected to the drain layer. The drain layer is electrically connected to the deep well via the well by applying a driving voltage between the source layer and the drain layer.

Abstract: A method for manufacturing a lateral double diffused metal oxide semiconductor (LDMOS) device includes forming an oxide layer on a semiconductor substrate, forming first and second trenches by partially etching the oxide layer and the semiconductor substrate, forming a small trench overlapping with the second trench so that the second trench has a stepped structure, and depositing one or more dielectric layers so that the first trench forms a device isolation layer defining a semiconductor device region and the second trench having a stepped structure forms a drain extension device isolation layer. The breakdown voltage of the LDMOS device may be improved while reducing the on-resistance, thereby improving the operational reliability of the device.

Abstract: Disclosed herein is a semiconductor memory device including plural unit cells, each constituted with a floating body transistor without any capacitor, to prevent data distortion and data crash in the unit cell. A semiconductor memory device comprises plural active regions and a device isolation layer for separating each active region from each others, wherein the plural active regions stand in row and column lines.

Abstract: A method for manufacturing a semiconductor device comprises including a insulating pattern and a silicon film over a SOI substrate, thereby increasing a reduced volume of a floating body after forming a floating body fin transistor so as to secure a data storage space. The method comprises: forming a insulating pattern and a first silicon film over an upper silicon film of a SOI substrate; and forming a fin structure in the first silicon film.

Abstract: An object is to provide an SOI substrate provided with a semiconductor layer which can be used practically even when a glass substrate is used as a base substrate. Another object is to provide a semiconductor device having high reliability using such an SOI substrate. An altered layer is formed on at least one surface of a glass substrate used as a base substrate of an SOI substrate to form the SOI substrate. The altered layer is formed on at least the one surface of the glass substrate by cleaning the glass substrate with solution including hydrochloric acid, sulfuric acid or nitric acid. The altered layer has a higher proportion of silicon oxide in its composition and a lower density than the glass substrate.

Abstract: A method and the resultant memory is described for forming an array of floating body memory cells and logic transistors on an SOI substrate. The floating bodies for the cells are formed over the buried oxide, the transistors in the logic section are formed in the bulk silicon.

Abstract: An interconnection structure and an electronic device employing the same are provided. The interconnection structure for an integrated structure includes first and second contact plugs disposed on a substrate, and a connection pattern interposed between sidewalls of the first and second contact plugs and configured to electrically connect the first and second contact plugs.

Abstract: An electrostatic discharge (ESD) protection device for providing an ESD path between two circuitries is provided. Each circuitry has a power supply terminal and a ground terminal. The protection device comprises an equivalent MOS, a first terminal, and a second terminal. The equivalent MOS comprises a source, a drain and a gate, wherein the drain is connected to the gate. The first terminal is connected to the gate, while the second terminal is connected to the source. The first terminal is connected to one power supply terminal and ground terminal, whereas the second terminal is connected to the other the power supply terminal and ground terminal.

Abstract: An input/output (I/O) mixed-voltage drive circuit and electrostatic discharge protection device for coupling to an I/O pad. The device includes an NFET device having a gate, a drain, a source and body, the gate adapted for coupling to a pre-drive circuit, the source and the body being coupled to one another and to ground. The device also includes a bipolar junction transistor having a collector, an emitter and a base, the emitter being coupled to the drain of the NFET and the collector being coupled to the I/O pad.

Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.

Abstract: A semiconductor device includes a plurality of first MOS transistors has a first gate electrode formed on a first gate insulating film provided in a first transistor region on a semiconductor substrate, a plurality of second MOS transistors has a second gate electrode formed on a second gate insulating film which is provided in a second transistor region on the semiconductor substrate and which is smaller in thickness than the first gate insulating film, a first element isolation region in the first transistor region, the first element isolation region provided between the plurality of first MOS transistors, and a second element isolation region in the second transistor region, the second element isolation region provided between the plurality of second MOS transistors. The upper surface of the second element isolation region is lower than the upper surface of the first element isolation region.

Abstract: A semiconductor device includes a substrate portion that includes a plurality of diffusion regions that include at least one p-type diffusion region and at least one n-type diffusion region. A gate electrode level region is formed above the substrate portion to include a number of conductive features defined to extend in only a first parallel direction. Each of the conductive features within the gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature. Each of the conductive features within the gate electrode level region has a width less than a wavelength of light used in a photolithography process to fabricate the conductive features. Conductive features within the gate electrode level region form respective PMOS transistor devices and respective NMOS transistor devices. A total number of the PMOS transistor devices and the NMOS transistor devices in the gate electrode level region is greater than or equal to eight.

Abstract: A semiconductor device includes a substrate portion that includes a plurality of diffusion regions that include at least one p-type diffusion region and at least one n-type diffusion region. A gate electrode level region is formed above the substrate portion to include a number of conductive features defined to extend in only a first parallel direction. Each of the conductive features within the gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature. Within a five wavelength photolithographic interaction radius within the gate electrode level region, a width size of the conductive features is less than 193 nanometers, which is the wavelength of light used in a photolithography process to fabricate the conductive features. A total number of the PMOS transistor devices and the NMOS transistor devices in the gate electrode level region is greater than or equal to eight.

Abstract: A CMOS device and method of fabrication are disclosed. The present invention utilizes Schottky barrier contacts for source and/or drain contact fabrication within the context of a CMOS device and CMOS integrated circuits, to eliminate the requirement for halo/pocket implants, shallow source/drain extensions to control short channel effects, well implant steps, and complex device isolation steps. Additionally, the present invention eliminates the parasitic bipolar gain associated with CMOS device operation, reduces manufacturing costs, tightens control of device performance parameters, and provides for superior device characteristics as compared to the prior art. The present invention, in one embodiment, uses a silicide exclusion mask process to form the dual silicide Schottky barrier source and/or drain contact for the complimentary PMOS and NMOS devices forming the CMOS device.

Abstract: A semiconductor device includes a substrate portion that includes a plurality of diffusion regions that include at least one p-type diffusion region and at least one n-type diffusion region. A gate electrode level region is formed above the substrate portion to include a number of conductive features defined to extend in only a first parallel direction. Each of the conductive features within the gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature. Some of the conductive features within the gate electrode level region extend over the p-type diffusion regions to form respective PMOS transistor devices. Also, some of the conductive features within the gate electrode level region extend over the n-type diffusion regions to form respective NMOS transistor devices. A total number of the PMOS transistor devices and the NMOS transistor devices in the gate electrode level region is greater than or equal to eight.

Abstract: A semiconductor device is disclosed as having a substrate portion that includes a plurality of diffusion regions that include at least one p-type diffusion region and at least one n-type diffusion region. A gate electrode level region is formed above the substrate portion to include a number of conductive features defined to extend in only a first parallel direction. Each of the conductive features within the gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature. Within a five wavelength photolithographic interaction radius within the gate electrode level region, a width size of the conductive features is less than 193 nanometers, which is the wavelength of light used in a photolithography process to fabricate the conductive features. The conductive features within the gate electrode level region form an equal number of PMOS and NMOS transistor devices.

Abstract: An FET and method of fabricating an FET. The method includes forming a gate dielectric layer on a top surface of a silicon region of a substrate and forming a gate electrode on a top surface of the gate dielectric layer; forming a source and a drain in the silicon region of and separated by a channel region under the gate electrode, the source having a source extension extending under the gate electrode and the drain having a drain extension extending under the gate electrode, the source, source extension, drain and drain extension doped a first type; and forming a source delta region contained entirely within the source and forming a drain delta region contained entirely within the drain, the delta source region and the delta drain region doped a second dopant type, the second dopant type opposite from the first dopant type.

Abstract: An integrated circuit including a dielectric layer and a method for manufacturing. One embodiment provides a substrate having a first side and a second side and at least one dielectric layer. The dielectric layer includes a zirconium oxide and at least one dopant selected from the group consisting of hafnium and titanium and having a first side and a second side. The first side of the dielectric layer is arranged at least on a subarea of the first side of the semiconductor substrate.

Abstract: A transistor device includes a semiconductor substrate, a source doping region and a drain doping region in the semiconductor, a channel region between the source doping region and the drain doping region, a gate stack on the channel region, wherein the gate stack includes an amorphous interfacial layer, a crystalline metal oxide gate dielectric layer and a gate conductor.