Abstract: The invention aims to provide a resin primer which can stick an insulator layer to a conductor foil whereof the surface is not much roughened with sufficient adhesive force, a conductor foil with resin, a laminated sheet and a method of manufacturing same. The resin primer of the invention comprises a resin having film-forming ability and a breaking energy of 0.15 J or more. The conductor foil with resin of the invention comprises a resin layer comprising a conductor foil and the aforesaid resin primer. Further, the laminated sheet of the invention comprises the conductor foil, an insulating layer disposed facing the conductor foil, and a resin layer comprising the aforesaid resin primer disposed between the conductor foil and insulating layer so that it is in contact therewith. This laminated sheet can be manufactured by heating and pressurizing a laminate comprising the aforesaid conductor foil with resin, and a prepreg laminated on this resin layer.

Abstract: A blended composition of unsaturated block copolymer with improved thermal stability and processing behavior includes at least one unsaturated block copolymer; and a compatibilizer selected from the group consisting of (1) high melt flow rate homopolymers or copolymers; (2) styrene-ethylenepropylene-styrene (SEPS); (3) ethylene vinyl acetate (EVA); (4) styrene-butadiene-styrene (SBS), or styrene-isoprene-styrene (SIS) block copolymers; (5) single site catalyzed polyolefins, such as metallocene catalyzed and constrained geometry polyolefins; (6) amorphous poly alpha olefin homopolymer and copolymers; and (7) a combination of such.

Abstract: A sheet of cellulose based material having enhanced strength, particularly the dry strength, substantially unaffected repulpability is disclosed. The sheet of cellulose based materials generally includes a first cellulose based material connected with a second cellulose base material element. The first cellulose based material is formed by separating a portion of the fiber from a furnish, treating the separated portion with a cationic wet strength resin which is allowed to bond to the fiber. The treated fiber is them mixed with the untreated balance of the fiber at some point before the paper machine. The fiber that is separated may be secondary fiber, virgin fiber or combinations thereof. The second cellulose base material element is substantially free from any treatment. The second cellulose base material element may be include substantially all untreated fibers.

Abstract: To provide a thermal spray membrane contact material, contact member and contact part and an apparatus to which they are applied, showing excellent seizure resistance and wear resistance even under high surface pressure/low speed sliding, high speed/high temperature sliding, or high surface pressure/high speed sliding.

Abstract: An electromagnetic noise suppressor including a ferrite film is formed by regularly arranging constituents such as magnetized grains or one analogous to that. In the ferrite film, the constituents have at least one of the uniaxial anisotropy and the multiaxial anisotropy. The ferrite film has the magnetic anisotropy or the magnetic isotropy. The ferrite film is formed by a plating method in the presence of a magnetic field.

Abstract: A ceramic substrate comprising a metallic layer on its surface, wherein said metallic layer includes: a silver layer containing silver; a gold layer containing gold; and a nickel layer containing nickel, in this order from an outermost layer of said metallic layer.

Abstract: A multi-layered brazing sheet with improved long life corrosion resistance achieved by balancing the Zn, Cu, Mn, Si and Mg content of the core and interliner alloy. The brazing sheet has a core of a 3xxx alloy, an inner braze cladding of a 4xxx alloy, and between core and inner braze cladding an interliner of a 3xxx alloy. The 3xxx alloy of the core has 0.55-1.0 wt % Cu, 0.7-1.8 wt % Mn, <0.3 wt % Mg, <0.4 wt % Zn. The 3xxx alloy of the interliner has <0.25 wt % Cu, 0.5-1.5 wt % Mn, <0.3 wt % Mg, 0.1-5.0 wt % Zn. A 1xxx or 7xxx alloy could be used for the interliner instead of the 3xxx alloy.

Abstract: An organic electroluminescent compound and an organic electroluminescent device using the same. The organic electroluminescent compound having Formula 1 can be used as blue electroluminescent compound. The organic electroluminescent device using the organic electroluminescent compound having Formula 1 has improved luminous efficiency and color purity.

Abstract: An organic electroluminescent element comprises: a pair of electrodes; and at least one organic compound layer between the pair of electrodes, said at least one organic compound layer comprising a light-emitting layer, wherein the organic luminescent element comprises at least one complex represented by formula (1): wherein M11 represents a hexacoordinate transition metal ion, Y11 represents a nitrogen atom or a substituted or unsubstituted carbon atom, L11 represents a ligand, Q11 and Q12 each represents an atomic group for forming a nitrogen-containing heterocyclic ring, n11 represents an integer of 1 to 3, n12 represents an integer of 0 to 4, X11 represents a counter ion, and n13 represents an integer of 0 to 3.

Abstract: Disclosed are organic electroluminescent devices employing materials of a low reduction potential in a layer functioning hole-injection. The organic electroluminescent devices may employ an anode material having a relatively low work function. Aluminum may be used in anode. During the operation, the organic electroluminescent devices may form a virtual electrode in their internal area, which enhances injection of carriers from a nearby electrode. Use of aluminum in the anode helps construction of cathode-emission organic electroluminescent devices.

Abstract: Disclosed are organic electroluminescent devices employing materials of a low reduction potential in a layer functioning hole-injection. The organic electroluminescent devices may employ an anode material having a relatively low work function. Aluminum may be used in anode. During the operation, the organic electroluminescent devices may form a virtual electrode in their internal area, which enhances injection of carriers from a nearby electrode. Use of aluminum in the anode helps construction of cathode-emission organic electroluminescent devices.

Abstract: For superior wear resistance to conventional TiN hard films and TiAlN hard films, a hard film contains (Zr1-a, Hfa) (C1-xNx), wherein “a” and “x” are the atomic ratios of Hf and N, respectively, and satisfy the following conditions: 0.05?a?0.4 and 0?x?1. Another hard film contains (Zr1-a-b, Hfa, Mb) (C1-xNx), wherein M is at least one of W and Mo; and “a”, “b”, and “x” are the atomic ratios of Hf, M, and N, respectively, and satisfy the following conditions: 0?1?a?b, 0?a, 0.03?b?0.35, and 0?x?1.

Abstract: Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract: A cadmium tin oxide (Cd1?xSnxO) multi-layer laminate is disclosed. The laminate comprises: a substrate; and a layer of Cd1?xSnxO which is not an epitaxial structure; wherein, the composition of Sn/(Cd+Sn) is 1˜20%. The method for producing the Cd1?xSnxO multi-layer laminate is also described here. The method comprises steps of: (a) providing metal or oxide targets for sputtering films of Cd1?xSnxO; and (b) sputtering films of Cd1?xSnxO from the targets onto the substrate; wherein the composition of Sn/(Cd+Sn) is 1˜20%.

Abstract: A fuel cell APU system comprising a plurality of fuel cell modules connected in parallel. Each module includes a local controller connected to a master controller that coordinates the modules to achieve a desired power output at any given time. Each module is operated within an output range to maximize efficiency of the system. When load demand on a first module exceeds the desired output range of the module, an additional module is brought online in parallel with the first. As the load increases further, additional modules are brought online in cascade fashion to permit all modules to be operated efficiently. If a module is disabled, it is automatically switched out of service and replaced by a standby module. The master controller keeps track of the total operating time of each module and varies the sequence in which different modules are brought into service to balance deterioration among the modules.

Abstract: One aspect of the invention relates to a clean power generation system in which an internal combustion engine is operated to produce shaft power and an exhaust stream. The exhaust stream is processed by a fuel cell. Fluctuations in power demand are met, at least in part, by increasing or decreasing power output from the fuel cell and/or power uptake or output from a power storage device. The engine can operate at a relatively constant rate, providing a steady exhaust stream, which facilitates pollution control and fuel cell operation. According to another aspect of the invention, the exhaust of an engine is treated with a fuel cell having an electrolyte that conducts protons. In addition to removing pollutants from the exhaust while generating useful power, the fuel cell can provide a supply of low acidity water. The water can be used in the fuel reformer.

Abstract: A system is disclosed to generate electric power from a chemical hydride. A fuel cartridge produces hydrogen by reacting a liquid with a chemical hydride. A fuel cell stack generates electric power using an oxygen source and the produced hydrogen. An electric power storage device is coupled with the fuel cell stack. The electric power storage device stores and supplies electric power. One or more liquid sources inject the liquid into the fuel cartridge at a variable rate. A controller calculates a liquid injection rate for the one or more liquid sources based on power demands of an electric load.

Abstract: In a fuel cell system (100), the amount of fuel gas supplied through an fuel gas supply passage (24) and the amount of fuel gas consumed by a fuel cell (10) are detected. A difference between the amount of supplied fuel gas and the amount of consumed fuel gas is calculated by subtracting the amount of consumed fuel gas from the amount of supplied fuel gas. The pressure of the fuel gas in a leak detection passage (Cx), the change in the pressure of the detected fuel gas can be detected, and the change in the amount of fuel gas in the gas leak detection passage (Cx) due to the change in the pressure of the fuel gas can thus be detected. The difference is corrected by subtracting the change in the amount of fuel gas in the gas leak detection passage from the difference. When the corrected difference is equal to or greater than a predetermined value, a fuel gas leak is detected in the leak detection passage (Cx).

Abstract: The present invention provides a membrane-electrode assembly for a fuel cell, having improved durability for repeated start-stop operation. The present invention provides; A membrane-electrode assembly for a fuel cell having: a cathode catalyst layer containing a cathode catalyst comprising platinum or a platinum alloy, conductive carbon material supporting said cathode catalyst, and a proton conductive polymer electrolyte; a solid polymer electrolyte membrane; and an anode catalyst layer containing an anode catalyst, conductive carbon material supporting said anode catalyst, and a proton conductive polymer electrolyte; wherein average thickness (Ya) of said anode catalyst layer is smaller than average thickness (Yc) of said cathode catalyst layer.

Abstract: A fuel cell gas separator (212) for use between two solid oxide fuel cells (210) and having a separator body with an anode-facing side and a cathode-facing side and with paths (234) of electrically conductive material therethrough in an electrode-contacting zone (236). In a first aspect, the electrically conductive material comprises a silver-glass composite, preferably containing 15 to 30 wt % glass. In this aspect the material of the separator body is preferably zirconia and the silver is commercially pure, a silver mixture or a silver alloy. In another aspect, the material of the separator body is zirconia, the electrically conductive material comprises silver or a silver-based material, a coating of nickel is formed on the electrode-contacting zone (236) on the anode-facing side preferably with an undercoating of Ag, and a coating of Ag—Sn alloy is formed on the electrode-contacting zone (236) on the cathode side.

Abstract: An electrolyte for a fuel cell comprising a proton conducting resin comprising a backbone comprising a polyurea resin and side chains that comprise an active hydrogen group at a terminal and a fuel cell employing the same are provided. The electrolyte has improved proton conductivity, heat resistance, and mechanical strength.

Abstract: A fuel cell has a unit cell in which a membrane electrode assembly, in which a pair of electrodes are provided on either side of an electrolyte membrane, is provided between a first separator and a second separator. Pin insertion holes are respectively provided in a plurality of portions in an outer periphery of each of the first and the second separators, and the pin insertion holes of the first separators are respectively coaxial with those of the second separator. A leg portion of a cell fastening pin made of resin is inserted through each pair of the coaxial pin insertion holes of the first and the second separators. The unit cell is fastened by fitting a flange portion formed at an end of the leg portion to the first separator, and fitting a hook portion formed at the other end of the leg portion to the second separator.

Abstract: A portable cartridge that stores a fuel for use with a fuel cell system includes one or more disposable components for use by the fuel cell system. The disposable component may be included on a fuel cartridge, but used by a fuel cell system when the cartridge and a package that includes the system are coupled together. The disposable component may include: an inlet filter that regulates passage of gases and liquids into the fuel system, an outlet filter that cleans fuel cell system exhaust gases, a sensor on the inlet air stream to the fuel cell system; a sensor on the exhaust; a desiccant that sinks moisture from within the fuel cell system package; or a fuel absorbent that soaks fuel between connectors on the fuel cartridge and the fuel cell system.

Abstract: A fuel cell system includes first and second fuel cell stacks which are juxtaposed to each other. An assembly manifold is attached to the first and second fuel cell stacks. A connection block is provided at a central position of the assembly manifold. A fuel gas supply port and a fuel gas discharge port are provided on a front surface of the connection block, and an oxygen-containing gas supply port and an oxygen-containing gas discharge port are provided on a back surface of the connection block. A fuel gas and an oxygen-containing gas are equally supplied to each of the first and second fuel cell stacks.

Abstract: A cap assembly and a lithium secondary battery with the same, in which a shape of a safety vent of a cap plate is such that the safety vent is easily fracturable under low pressure even if the safety vent has a relatively large thickness, thereby improving reliability and safety of the lithium secondary battery. The cap assembly cap plate has a safety vent including at least one first directional weak component and at least one second directional weak component which is connected to the first directional weak component.

Abstract: An electronic apparatus includes: a case body having a battery storing portion formed of a concave portion whose shape is approximately corresponding to an external shape of a battery unit and a sliding member slidably supported on a surface of the case body on the opposite side to the battery storing portion. The battery storing portion has a width corresponding to that of the battery unit, a length corresponding to a length of the battery unit, and a body-side connection terminal connected to a connection terminal of the battery unit. The sliding member includes one or more engagement claws penetrating through the case body, projecting to the inside of the battery storing portion, capable of being engaged with engagement convex portions provided in the battery unit, and a biasing member causing the claws to be biased away from the body-side connection terminal and engaged with the engagement convex portions.

Abstract: The present invention provides a battery pack which is capable of enhancing a short-circuit prevention effect, and electronic equipment using this battery pack. The battery pack 31 has a battery built in the case 32 and an output terminal 47 which is electrically connected to the battery and provided in such a manner as directed towards the outside of the case 32. The battery pack 31 has an output section 34 that is provided in orthogonal to a virtual plane including a mount reference plane for the electronic equipment (under surface 33B) of the case 32, with a space between the virtual plane and the output section 34 . The output section 34 is provided with an output terminal 47.

Abstract: An integral cap assembly comprising a top cap mounted as a base plate to an opening of a battery can and a cap subassembly including a protective circuit module and the like integrally mounted on the top cap, a method for manufacturing a secondary battery comprising the same, and a secondary battery manufactured thereby are disclosed. The cap assembly is provided as an integral member comprising the top cap acting as the base plate, and the cap subassembly having the protective circuit module provided thereon, thereby simplifying a manufacturing process of the battery while minimizing frequency of defective products. Additionally, the integral cap assembly is manufactured through insert injection molding, thereby providing notable advantages over the conventional technology.

Abstract: A battery having an anode including an alkali metal as the active material, a cathode having, for example, iron disulfide as the active material, and an electrolyte including an organic solvent and an aluminum salt selected from the group consisting of aluminum iodide and aluminum tri(sec-butoxide).

Abstract: A silver-containing alkaline electrochemical cell and methods for producing the cell, wherein the cell includes a negative electrode, a positive electrode, a separator disposed between the electrodes, and an alkaline electrolyte, wherein the positive electrode is formed as a multi-layer composite including a silver-containing oxide layer and a barrier layer, initially free of silver-containing material, disposed between the silver-containing oxide layer and the separator for substantially reducing migration of silver ions to the separator and negative electrode.

Abstract: The present invention enables to obtain both of a cycle characteristic and a high load characteristic. The present invention discloses a positive electrode active material containing lithium composite manganese oxide having a spinel structure for a non-aqueous electrolyte cell and a non-aqueous electrolyte cell using this material. The lithium composite manganese oxide having spinel structure has its primary particle diameter not less than 0.05 ?m and not greater than 10 ?m, forming an aggregate, and a specific surface measured by the BET method in a range not less than 0.2 m2/g and not greater than 2 m2/g.

Abstract: A battery of series-connected rechargeable lithium ion cells each of which contains a negative electrode; a negative electrode current collector; a positive electrode; a positive electrode current collector; and an electrolyte comprising charge carrying medium, lithium salt and cyclable redox chemical shuttle. The negative electrode has a larger i rreversible first cycle capacity loss than that of the positive electrode, and is driven to a potential above that of the positive electrode if the cell is discharged to a state of cell reversal. The shuttle has an electrochemical potential above the positive electrode maximum normal operating potential, and prevents the negative electrode potential from reaching even higher and more destructive positive values during overdischarge. The current collector has a lithium alloying potential below the negative electrode minimum normal operating potential.

Abstract: The present invention presents three new classes of phase-shifting mask patterns. In optical image forming systems, a mask with phase shifted regions can act as a precision instrument for characterizing imaging. Three new classes of phase-shifting mask patterns have been invented to characterize projection printing tool illumination and phase-shifting mask (PSM) performance. The linear phase grating (LPG) and linear phase ring (LPR) both serve to characterize illumination angular distribution and uniformity. A third new class, the interferometric-probe monitor for phase-shifting masks (IPM-PSM), measures the effective phase, transmittance and edge effects of various phase-shifted mask features. All three patterns allow performance comparison across the field, tool-to-tool, over time, or to intended design.

Abstract: Diagonal corner-to-corner sub-resolution assist features for use in photolithography are described. The diagonal features may be applied to one or a group of main features. Such features may be developed starting by synthesizing a photolithography mask having a first feature aligned along a linear axis and having a corner and a second feature aligned along a linear axis and having a corner, the corners of first and second features being separated from each other by a gap. The features may be developed by determining at least one diagonal line between the corners of the features to bridge the gap between the corners, applying a sub-resolution assist feature along the determined line, and modifying the synthesized photolithography mask to include the sub-resolution assist feature.

Abstract: A mask including a transparent substrate, a semi-transparent layer and a film layer is provided. The transparent substrate at least has a first region, a second region and a third region. The semi-transparent layer covers the second region and the third region of the transparent substrate and exposes the first region. The film layer covers the halftone layer disposed at the third region, to make the transmittance of the third region lower than that of the second region. The halftone layer and the film can be made of phase shift layers, to form a phase shift mask. Besides, several fabrication methods of the mask are also disclosed to form the above-mentioned mask.

Abstract: Lithography masks and methods of manufacture thereof are disclosed. A preferred embodiment includes a method of generating an assist feature of a lithography mask. The method includes providing a layout for a material layer of a semiconductor device, the layout including a pattern for at least one feature of the semiconductor device. The method includes forming an assist feature in the pattern for the at least one feature, wherein the assist feature extends completely through the pattern for the at least one feature.

Abstract: Systems and methods are provided for use in photolithography. In one embodiment, a reticle is provided that comprises a phase shift and transmission control layer, wherein a gap in the phase shift and transmission control layer defines a line. Adjacent to the phase shift and transmission control layer is an optically transparent material, comprising a groove located within the line, wherein the groove comprises a region of reduced thickness in the optically transparent material. The region of reduced thickness serves to shift the phase of light passing through the groove, as compared to light passing through other regions of the optically transparent material. Thus, the reticle has a clear feature comprising light of two different phases.

Abstract: An object of this invention is to properly identify or manage mask blank substrates, mask blanks, and so on. A manufacturing method of a mask blank substrate (10) includes a substrate preparing step of preparing a plate-like substrate with a square main surface (102), and a marker forming step of forming a marker (106a to 106d) for identifying or managing the substrate on each of at least a plurality of end faces among four end faces (104a to 104d) of the substrate. The four end faces are continuous with sides of the main surface, respectively.

Abstract: A combination patterned reflective dichroic filter and optical coating, and method of making the same, is disclosed by starting with a filter substrate, laying down a pattern of dichroic filter material, but stopping short of completing the layers required for the spectral characteristics of the filter. The spectral characteristics are completed by adding a blanket coating of a material such as an anti-reflective material. In an alternative embodiment the blanket coating can be applied prior to addition of the dichroic filter material.

Abstract: An EB exposure method includes dividing drawing layer pattern to be transferred onto drawing layer by EB exposure and underlying pattern to be transferred onto an underlying layer of the drawing layer by the EB exposure respectively into unit regions, setting representative figure in each of the unit regions of the drawing and underlying layers, the representative figure set in each of the unit regions of the drawing layer corresponding to the drawing layer pattern of each of the unit regions of the drawing layer, the representative figure set in each of the unit regions of the underlying layer corresponding to the underlying layer pattern of each of the unit regions of the underlying layer, and obtaining influence of proximity effect of an arbitrary region of the drawing layer pattern, based on the representative figure that corresponds to the drawing and underlying layer patterns.

Abstract: An electrophotographic imaging member comprises a substrate, an electrophotographic imaging layer and an overcoat layer comprising a cross-linkable polymer and a hole transport material, wherein the overcoat layer provides at least one of solvent resistance and hydrocarbon resistance to the electrophotographic imaging layer.

Abstract: Branched polyarylene ether polymers comprising a plurality of branch points, each branch point being of the formula wherein each Ar is an aryl moiety or an alkylaryl moiety, provided that when Ar is an alkylaryl moiety at least three of the repeating groups are bonded to an aryl portion thereof through the oxygen atoms in the repeating groups, each x, independently of the others, is an integer of 3 or greater, each m, independently of the others, is an integer of 0 or 1, each D, independently of the others, is either (a) another branch point, (b) a terminal group, or (c) of a defined formula. Also disclosed are imaging members containing these polymers.

Abstract: A toner is provided including a binder resin; a release agent; a colorant; and a fatty acid amide compound, wherein the binder resin includes: an amorphous polyester (A) having a softening point of from 70 to 140° C.; an amorphous polyester (B) having a softening point of from 120 to 190° C.; and a crystalline polyester (C), and wherein the following relationship is satisfied: TmC<Tm(Asp), wherein TmC represents a softening point of the crystalline polyester (C) and Tm (Asp) represents a softening point of the fatty acid amide compound; and a developer and an image forming apparatus using the toner.

Abstract: By using an intaglio plate for holding a pattern formed by a developing agent, a transfer device for transferring patterns developed on the intaglio plate to a transfer object medium, and a baking chamber for eliminating an electrode layer after transfer or heightening resistance thereof, the patterns developed on the intaglio plate are transferred onto the electrode layer disposed at the opposite side of the transfer object medium, and then heated in the baking chamber, whereby the electrode layer is eliminated or heightened in resistance.

Abstract: An object of the present invention is to provide a black paste composition suitable for use in laser direct imaging devices employing a light source emitting a laser having a maximum wavelength of 350 to 420 nm, useful in forming a high-definition black matrix pattern efficiently, and superior in storage stability, a black matrix pattern formed by using the composition, a plasma display having the pattern, and a method of forming the black matrix pattern by using the composition. An alkali development-type black paste composition of the present invention comprises (A) a carboxyl group-containing resin, (B) a glass frit, (C) a black pigment, (D) a compound having at least one radically polymerizable unsaturated group in its molecule, and (E-1) an oxime-based photopolymerization initiator represented by the following general formula (I).

Abstract: Disclosed is a composition of a negative-type photosensitive polyimide which is solvent soluble, which is excellent in adhesiveness, heat resistance, mechanical properties and in flexibility, which shows characteristics of alkali-soluble highly sensitive negative-type photoresist upon irradiation with light, The composition according to the present invention comprises a photo radical initiator and a solvent-soluble polyimide which shows negative-type photosensitivity in the presence of the photo radical initiator.

Abstract: A positive resist composition that includes a base material component (A) that contains an acid-dissociable, dissolution-inhibiting group and exhibits increased alkali solubility under the action of acid, and an acid generator component (B) that generates acid upon exposure, wherein the base material component (A) contains a compound (A1), in which either a portion of, or all of, the hydrogen atoms of phenolic hydroxyl groups within a polyhydric phenol compound with a molecular weight of 300 to 2,500 represented by a general formula (I) shown below have been substituted with at least one group selected from the group consisting of acid-dissociable, dissolution-inhibiting groups represented by a general formula (II) shown below and acid-dissociable, dissolution-inhibiting groups represented by a general formula (III) shown below.

Abstract: A positive working resist composition comprises a specific resin. The specific resin comprises: a repeating unit having a first specific group; and a repeating unit having a second specific group, the first specific group being different from the second specific group; and a specific structure in an end terminal of the resin. The specific resin decomposes by action of an acid to increase its solubility in an alkaline developer.

Abstract: Methods for carrying out lithography with a carbon dioxide development system are described. This invention involves methods for preferential removal of the darkfield region of conventional chemically amplified positive tone resists. The carbon dioxide development systems include one or more derivatizing agents, which may be an onium salt or a neutral compound.

Abstract: A method and apparatus for reduction and prevention of residue formation and removal of residues formed in an immersion lithography tool. The apparatus including incorporation of a cleaning mechanism within the immersion head of an immersion lithographic system or including a cleaning mechanism in a cleaning station of an immersion lithographic system.