Patents Issued in March 31, 2016
  • Publication number: 20160093685
    Abstract: There is provided a flexible display having a plurality of innovations configured to allow bending of a portion or portions to reduce apparent border size and/or utilize the side surface of an assembled flexible display.
    Type: Application
    Filed: September 30, 2014
    Publication date: March 31, 2016
    Inventors: SeYeoul Kwon, HeeSeok Yang, Sangcheon Youn, SungWoo Kim, YoonDong Cho, Saemleenuri Lee
  • Publication number: 20160093686
    Abstract: Semiconductor devices are provided. Each of the semiconductor devices may include a plurality of electrodes. Moreover, each of the semiconductor devices may include a supporting pattern connected to sidewalls of the plurality of electrodes. Related methods of forming semiconductor devices are also provided. For example, the methods may include forming the supporting pattern before forming the plurality of electrodes.
    Type: Application
    Filed: December 8, 2015
    Publication date: March 31, 2016
    Inventors: Junho Yoon, Gyungjin Min, Jaehong Park, Yongmoon Jang, Je-Woo Han
  • Publication number: 20160093687
    Abstract: The present invention provides a method for fabricating a capacitor structure, including the steps of: providing a substrate; forming a first conductive structure and a dielectric structure over the substrate, wherein the first conductive structure is enclosed by the dielectric structure; forming a first trench in the dielectric structure, so that a first surface of the first conductive structure is exposed through the first trench; forming a first capacitor electrode and a capacitor dielectric layer on a bottom and a sidewall of the first trench and on a top surface of the dielectric structure, so that the first capacitor electrode is electrically contacted with the first surface of the first conductive structure; and removing the first capacitor electrode and the capacitor dielectric layer on the top surface of the dielectric structure; forming a second capacitor electrode on a surface of the capacitor dielectric layer. A capacitor structure is also provided.
    Type: Application
    Filed: December 10, 2015
    Publication date: March 31, 2016
    Inventors: Chien-Li Kuo, Kuei-Sheng WU, Ju-Bao ZHANG, Rui-Huang CHENG, Xing-Hua ZHANG, Hong LIAO
  • Publication number: 20160093688
    Abstract: A multilayer source provides charge carriers to a multitier channel connector. The source includes a metal silicide layer on a substrate and a metal nitride layer between the metal silicide layer and the channel. The metal silicide and the metal nitride are processed without an intervening oxide layer between them. In one embodiment, the source further includes a silicon layer between the metal nitride layer and the channel. The silicon layer can also be processed without an intervening oxide layer. Thus, the source does not have an intervening oxide layer from the substrate to the channel.
    Type: Application
    Filed: September 26, 2014
    Publication date: March 31, 2016
    Inventors: John Mark Meldrim, Yushi Hu, Yongjun Jeff Hu, Everett Allen McTeer
  • Publication number: 20160093689
    Abstract: A coated substrate including a thin film of a transition metal dichalcogenide and associated methods are shown. In one example, the substrate is a semiconductor wafer. In one example, the thin film is atomically thin, and the substrate is a number of centimeters in diameter. In one example a crystalline structure of the thin film is substantially 2H hexagonal.
    Type: Application
    Filed: September 30, 2015
    Publication date: March 31, 2016
    Inventors: Aaron S. George, Robert Ionescu, Hamed Hosseini Bay, Mihrimah Ozkan, Cengiz S. Ozkan
  • Publication number: 20160093690
    Abstract: A semiconductor device has a semiconductor body with a first side and a second side that is arranged distant from the first side in a first vertical direction. The semiconductor device has a rectifying junction, a field stop zone of a first conduction type, and a drift zone of a first conduction type arranged between the rectifying junction and the field stop zone. The semiconductor body has a net doping concentration along a line parallel to the first vertical direction. At least one of (a) and (b) applies: (a) the drift zone has, at a first depth, a charge centroid, wherein a distance between the rectifying junction and the charge centroid is less than 37% of the thickness the drift zone has in the first vertical direction; (b) the absolute value of the net doping concentration comprises, along the straight line and inside the drift zone, a local maximum value.
    Type: Application
    Filed: September 30, 2014
    Publication date: March 31, 2016
    Inventors: Elmar Falck, Gerhard Schmidt
  • Publication number: 20160093691
    Abstract: Provided are a semiconductor device and a bidirectional field effect transistor which can easily overcome the tradeoff relation between the high voltage resistance and high speed in the semiconductor device using a polarization super junction, realize both the high voltage resistance and elimination of the occurrence of current collapse, operate at a high speed, and further the loss is low. The semiconductor device comprises a polarization super junction region and a p-electrode contact region. The polarization super junction region comprises an undoped GaN layer 11, an undoped AlxGa1-xN layer 12 with a thickness not smaller than 25 nm and not larger than 47 nm and 0.17?x?0.35, an undoped GaN layer 13 and a p-type GaN layer 14. When the reduced thickness tR is defined as tR=u+v(1+w×10?18) for the thickness u [nm] of the undoped GaN layer 13, the thickness v [nm] and the Mg concentration w [cm?3] of the p-type GaN layer 14, tR?0.864/(x?0.134)+46.0 [nm] is satisfied.
    Type: Application
    Filed: November 18, 2014
    Publication date: March 31, 2016
    Inventors: Shoko ECHIGOYA, Fumihiko NAKAMURA, Shuichi YAGI, Souta MATSUMOTO, Hiroji KAWAI
  • Publication number: 20160093692
    Abstract: A device includes first and second fins defined in a semiconductor substrate and a raised isolation post structure positioned between the first and second fins, wherein an upper surface of the raised isolation post structure is at a level that is approximately equal to or greater than a level corresponding to an upper surface of each of the first and second fins. A first space is defined by a sidewall of the first fin and a first sidewall of the raised isolation post structure, a second space is defined by a sidewall of the second fin and a second sidewall of the raised isolation post structure, and a gate structure is positioned around a portion of each of the first and second fins and around a portion of the raised isolation post structure, wherein at least portions of the gate structure are positioned in the first and second spaces.
    Type: Application
    Filed: December 8, 2015
    Publication date: March 31, 2016
    Inventors: Ruilong Xie, Xiuyu Cai, Kangguo Cheng, Ali Khakifirooz
  • Publication number: 20160093693
    Abstract: A method for forming a semiconductor device includes providing a semiconductor structure, which includes a semiconductor substrate and a first mask layer on the substrate. The first mask layer is used to form a plurality of first trenches that extends into the substrate and extends laterally in a first direction and do not intersect each other. The first trenches are then filled with a fill material. Next, a second mask layer is formed on the semiconductor structure filled with the fill material. The second mask layer is then used to form a second plurality of trenches in the semiconductor substrate that extend laterally in a second direction and do not intersect each other. Each of the second trenches intersects at least one of the first plurality of trenches. Next, the fill material is removed to form a plurality of vertical pillars defined by intersecting first trenches and second trenches.
    Type: Application
    Filed: September 23, 2015
    Publication date: March 31, 2016
    Inventor: ZHONGSHAN HONG
  • Publication number: 20160093694
    Abstract: Apparatuses and methods are disclosed. One such apparatus includes a well having a first type of conductivity formed within a semiconductor structure having a second type of conductivity. A boundary of the well intersects an active area of a tap to the well.
    Type: Application
    Filed: September 30, 2014
    Publication date: March 31, 2016
    Inventor: Michael Smith
  • Publication number: 20160093695
    Abstract: A method of forming a semiconductor structure. The method may include; forming first fins in a pFET region and an nFET region using epitaxial growth, the first fins are a group IV semiconductor; forming a spacer layer on the first fins; removing the spacer layer from a top surface and a first side of the first fins in the nFET region, a portion of the first fins are exposed on the top surface and the first side of the first fins in the nFET region; and forming second fins on the exposed portion of the first fins using epitaxial growth, the second fins are a group IV semiconductor, the second fins have a second pitch between adjacent second fins, the first pitch is equal to the second pitch, the first fins and the second fins have a shared bottom surface.
    Type: Application
    Filed: September 29, 2014
    Publication date: March 31, 2016
    Inventors: Kangguo Cheng, Bruce B. Doris, Pouya Hashemi, Ali Khakifirooz, Alexander Reznicek
  • Publication number: 20160093696
    Abstract: An integrated circuit includes a substrate and at least one component unfavorably sensitive to compressive stress which is arranged at least partially within an active region of the substrate limited by an insulating region. To address compressive stress in the active region, the circuit further includes at least one electrically inactive trench located at least in the insulating region and containing an internal area configured to reduce compressive stress in the active region. The internal area is filled with polysilicon. The polysilicon filled trench may further extend through the insulating region and into the substrate.
    Type: Application
    Filed: November 30, 2015
    Publication date: March 31, 2016
    Applicant: STMicroelectronics (Rousset) SAS
    Inventors: Guilhem Bouton, Pascal Fornara, Christian Rivero
  • Publication number: 20160093697
    Abstract: A finFET with a quantum well having a conformal epitaxial well on a {100} crystallographic orientated fin. The structure may include a fin having a {100} crystallographic orientation; a conformal well covering the fin; and a conformal barrier covering the conformal well.
    Type: Application
    Filed: October 5, 2015
    Publication date: March 31, 2016
    Inventors: Marc A. Bergendahl, James J. Demarest, Hong He, Seth L. Knupp, Raghavasimhan Sreenivasan, Sean Teehan, Allan W. Upham, Chih-Chao Yang
  • Publication number: 20160093698
    Abstract: The method for doping a GaN-base semiconductor to fabricate a p-n junction includes a first step consisting in providing a substrate including a GaN-base semiconductor material layer covered by a silicon-base mask. The method includes a second step of performing implantation of impurities in the mask so as to transfer additional dopant impurities of Si type by diffusion from the mask to the semiconductor material layer to form an n-type area adjacent to a p-type area. Configured heat treatment is then performed to activate the dopant impurities and the additional dopant impurities.
    Type: Application
    Filed: September 16, 2015
    Publication date: March 31, 2016
    Applicant: COMMISSARIAT Á L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Claire AGRAFFEIL
  • Publication number: 20160093699
    Abstract: The present application discloses a semiconductor device comprising a crystalline substrate having a first region and a second region, a nuclei structure on the first region, a first crystalline buffer layer on the nuclei structure, a void between the second region and the first crystalline buffer layer, a second crystalline buffer layer on the first crystalline buffer layer, an intermediate layer located between the first crystalline buffer layer and the second crystalline buffer layer, and a semiconductor device layer on the second crystalline buffer layer.
    Type: Application
    Filed: September 26, 2014
    Publication date: March 31, 2016
    Inventors: Heng-Kuang LIN, Ya-Yu YANG
  • Publication number: 20160093700
    Abstract: A semiconductor structure is provided by a process in which two aspect ratio trapping processes are employed. The structure includes a semiconductor substrate portion of a first semiconductor material having a first lattice constant. A plurality of first semiconductor-containing pillar structures of a second semiconductor material having a second lattice constant that is greater than the first lattice constant extend upwards from a surface of the semiconductor substrate portion. A plurality of second semiconductor-containing pillar structures of a third semiconductor material having a third lattice constant that is greater than the first lattice constant extend upwards from another surface of the semiconductor substrate portion. A spacer separates each first semiconductor-containing pillar structure from each second semiconductor-containing pillar structure. Each second semiconductor-containing pillar structure has a width that is different from a width of each first semiconductor-containing pillar structure.
    Type: Application
    Filed: September 29, 2014
    Publication date: March 31, 2016
    Inventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Alexander Reznicek
  • Publication number: 20160093701
    Abstract: A semiconductor device includes a substrate and a p-doped layer including a doped III-V material on the substrate. An n-type layer is formed on or in the p-doped layer. The n-type layer includes ZnO on the p-doped layer to form an electronic device.
    Type: Application
    Filed: September 30, 2014
    Publication date: March 31, 2016
    Inventors: Joel P. DeSouza, Keith E. Fogel, Jeehwan Kim, Ko-Tao Lee, Devendra K. Sadana
  • Publication number: 20160093702
    Abstract: An ohmic contact to a semiconductor layer including a heterostructure barrier layer and a metal layer adjacent to the heterostructure barrier layer is provided. The heterostructure barrier layer can form a two dimensional free carrier gas for the contact at a heterointerface of the heterostructure barrier layer and the semiconductor layer. The metal layer is configured to form a contact with the two dimensional free carrier gas.
    Type: Application
    Filed: December 1, 2015
    Publication date: March 31, 2016
    Applicant: Sensor Electronic Technology, Inc.
    Inventors: Remigijus Gaska, Michael Shur
  • Publication number: 20160093703
    Abstract: A semiconductor device includes: a semiconductor layer; a first electrode that is in ohmic contact with part of the semiconductor layer; an insulating film that is formed over from the semiconductor layer to the first electrode and has an opening area on an inner side of a first edge of the first electrode; a second electrode that is located at a position different from the first electrode and is formed on at least one of the insulating film and the semiconductor layer; and a third electrode that is made of an identical component with a component of the second electrode and is formed on the first electrode through the opening area and is also formed over from the first electrode to an inner side of the first edge on the insulating film.
    Type: Application
    Filed: September 14, 2015
    Publication date: March 31, 2016
    Inventors: Tsutomu Ina, Tohru Oka
  • Publication number: 20160093704
    Abstract: Embodiments of the present invention provide improved methods of contact formation. A self aligned contact scheme with reduced lithography requirements is disclosed. This reduces the risk of shorts between source/drains and gates, while providing improved circuit density. Cavities are formed adjacent to the gates, and a fill metal is deposited in the cavities to form contact strips. A patterning mask is then used to form smaller contacts by performing a partial metal recess of the contact strips.
    Type: Application
    Filed: December 9, 2015
    Publication date: March 31, 2016
    Inventors: Mark A. Zaleski, Andy Chih-Hung Wei, Jason E. Stephens, Tuhin Guha Neogi, Guillaume Bouche
  • Publication number: 20160093705
    Abstract: A method of forming an integrated circuit device includes forming a gate stack covering a middle portion of a semiconductor fin, forming a gate spacer layer over the gate stack and the semiconductor fin, and patterning the gate spacer layer. The resulting spacers include a gate spacer on a sidewall of the gate stack, and a fin spacer on a sidewall of an end portion of the semiconductor fin. The fin spacer is then etched. When the etching is finished, a height of the fin spacer is smaller than about a half of the height of the semiconductor fin.
    Type: Application
    Filed: December 7, 2015
    Publication date: March 31, 2016
    Inventors: Jam-Wem Lee, Tsung-Che Tsai, Yi-Feng Chang
  • Publication number: 20160093706
    Abstract: A method of forming a transistor having a gate electrode includes forming a sacrificial layer over a semiconductor substrate, forming a patterning layer over the sacrificial layer, patterning the patterning layer to form patterned structures, forming spacers adjacent to sidewalls of the patterned structures, removing the patterned structures, etching through the sacrificial layer using the spacers as an etching mask and etching into the semiconductor substrate, thereby forming trenches in the semiconductor substrate, and filling a conductive material in the trenches in the semiconductor substrate to form the gate electrode.
    Type: Application
    Filed: September 25, 2015
    Publication date: March 31, 2016
    Inventors: Philip Christoph Brandt, Francisco Javier Santos Rodriguez, Andre Rainer Stegner
  • Publication number: 20160093707
    Abstract: A non-volatile memory device includes a semiconductor substrate, a well region situated on the semiconductor substrate, a floating gate situated on the well region, a floating gate channel region, a control gate situated on both sides of the floating gate, a control gate channel region, and an ion implantation area for regulating a program threshold voltage integrally formed between an area underneath of the floating gate and the control gate and a foreside of the well region, wherein a doping concentration of the ion implantation area for regulating a program threshold voltage is greater than a doping concentration of the well region. Therefore, the non-volatile memory device of examples integrally forms an ion implantation area for regulating a program threshold voltage irrespective of a channel region of a floating gate and a control gate so as to guarantee durability of a non-volatile memory device.
    Type: Application
    Filed: September 11, 2015
    Publication date: March 31, 2016
    Applicant: MAGNACHIP SEMICONDUCTOR, LTD.
    Inventors: Doo Yeol Ryu, Jeong Ho Cho, Kyung Ho Lee
  • Publication number: 20160093708
    Abstract: Memory cells having conductive nanodots between a charge storage material and a control gate are useful in non-volatile memory devices and electronic systems.
    Type: Application
    Filed: November 30, 2015
    Publication date: March 31, 2016
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Nirmal Ramaswamy
  • Publication number: 20160093709
    Abstract: Some embodiments include transistor-containing constructions having gate material within an opening in a semiconductor material and spaced from the semiconductor material by gate dielectric material. The opening has a wide lower region beneath a narrow upper region. A saddle region of the gate dielectric material extends outwardly from a bottom of the opening and is along the semiconductor material beneath the opening. A saddle region of the gate material extends outwardly from the bottom of the opening and is along the gate dielectric material beneath the opening. Source/drain regions are within the semiconductor material along sides of the gate material. Some embodiments include memory arrays.
    Type: Application
    Filed: December 10, 2015
    Publication date: March 31, 2016
    Inventors: Deepak Pandey, Haitao Liu
  • Publication number: 20160093710
    Abstract: A semiconductor device includes a junction region on both sides of a trench in a semiconductor substrate, a first gate electrode with a first workfunction buried in the trench, and a second gate electrode formed of a polycide layer having a second workfunction overlapping with the junction region at an upper part of the first gate electrode.
    Type: Application
    Filed: December 8, 2015
    Publication date: March 31, 2016
    Inventor: Young Doo JEONG
  • Publication number: 20160093711
    Abstract: Devices with lightly-doped semiconductor channels (e.g., FinFETs) need mid-gap (˜4.6-4.7 eV) work-function layers, preferably with low resistivity and a wide process window, in the gate stack. Tantalum carbide (TaC) has a mid-gap work function that is insensitive to thickness. TaC can be deposited with good adhesion on high-k materials or on optional metal-nitride cap layers. TaC can also serve as the fill metal, or it can be used with other fills such as tungsten (W) or aluminum (Al). The TaC may be sputtered from a TaC target, deposited by ALD or CVD using TaCl4 and TMA, or produced by methane treatment of deposited Ta. Al may be added to tune the threshold voltage.
    Type: Application
    Filed: June 25, 2014
    Publication date: March 31, 2016
    Inventors: Zhendong Hong, Paul Besser, Kisik Choi, Amol Joshi, Olov Karlsson, Susie Tzeng
  • Publication number: 20160093712
    Abstract: A semiconductor device and a method for manufacturing the same. The method includes steps hereinafter. A substrate is provided with a first dielectric layer thereon. The first dielectric layer is provided with a trench. Then, a metal layer is formed to fill the trench and to cover the surface of the first dielectric layer. The metal layer is partially removed so that a remaining portion of the metal layer covers the first dielectric layer. A treatment process is performed to transform the remaining portion of the metal layer into a passivation layer on the top portion and a gate metal layer on the bottom portion. A chemical-mechanical polishing process is performed until the first dielectric layer is exposed so that a remaining portion of the passivation layer remains in the trench.
    Type: Application
    Filed: October 16, 2014
    Publication date: March 31, 2016
    Inventors: SHIH-CHANG TSAI, TZU-CHIN TSENG, HSIAO-TING LIN, CHANG-YIH CHEN, SAM LAI
  • Publication number: 20160093713
    Abstract: A transistor device includes a semiconductor substrate and a gate structure positioned above a surface of the semiconductor substrate. The gate structure includes a high-k gate insulation layer positioned above the surface of the semiconductor substrate and at least one work-function adjusting layer of material positioned above the high-k gate insulation layer, wherein an upper surface of the at least one work-function adjusting layer of material has a stepped profile when viewed in cross-section taken in a gate-width direction of the transistor device. The gate structure further includes a layer of conductive material positioned on the stepped upper surface of the at least one work-function adjusting layer of material.
    Type: Application
    Filed: December 9, 2015
    Publication date: March 31, 2016
    Inventors: Ruilong Xie, Xiuyu Cai, Andy C. Wei, Qi Zhang, Ajey Poovannummoottil Jacob, Michael Hargrove
  • Publication number: 20160093714
    Abstract: A method for fabricating a semiconductor device using a high-temperature ion implantation process includes providing a substrate including a plurality of fins. In some examples, a mask material is deposited and patterned to expose a group of fins of the plurality of fins and a test structure. By way of example, a first ion implantation may be performed, at a first temperature, through the group of fins and the test structure. Additionally, a second ion implantation may be performed, at a second temperature greater than the first temperature, through the group of fins and the test structure. In various examples, an interstitial cluster is formed within the group of fins and within the test structure. In some embodiments, an anneal process is performed, where the anneal process serves to remove the interstitial cluster from the group of fins and form at least one dislocation loop within the test structure.
    Type: Application
    Filed: September 30, 2014
    Publication date: March 31, 2016
    Inventors: Tsan-Chun Wang, Chun Hsiung Tsai, Ziwei Fang
  • Publication number: 20160093715
    Abstract: A structure and method for implementation of dummy gate structures within multi-gate device structures includes a semiconductor device including an isolation region that separates a first and second active region. The first active region is adjacent to a first side of the isolation region and the second active region is adjacent to a second side of the isolation region. A device including a source, a drain, and a gate is formed within the first active region. One of the source and drain regions are disposed adjacent to the isolation region. A dummy gate is formed at least partially over the isolation region and adjacent to the one of the source and drain regions. In various examples, the gate includes a first dielectric layer having a first thickness and the dummy gate includes a second dielectric layer having a second thickness greater than the first thickness.
    Type: Application
    Filed: September 29, 2014
    Publication date: March 31, 2016
    Inventors: Chia-Chu Liu, Kuei-Shun Chen, Chiang Mu-Chi, Chao-Cheng Chen
  • Publication number: 20160093716
    Abstract: To provide a manufacturing method of a semiconductor device including a memory cell having a higher reliability. First and second stacked structures in a memory cell formation region are formed so as to have a larger height than a third stacked structure in a transistor formation region, and then an interlayer insulating layer is formed so as to cover these stacked structures and then polished.
    Type: Application
    Filed: October 7, 2015
    Publication date: March 31, 2016
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventors: Eiji TSUKUDA, Kozo KATAYAMA, Kenichiro SONODA, Tatsuya KUNIKIYO
  • Publication number: 20160093717
    Abstract: A transistor includes a substrate having an active region defined by an isolation layer; a first trench defined in the active region and a second trench defined in the isolation layer; a fin region formed under the first trench; and a buried gate electrode covering sidewalls of the fin region and filling the first and second trenches. The buried gate electrode includes a first work function layer formed on the sidewalls of the fin region; a second work function layer formed on sidewalls of the first trench and the second trench; a third work function layer positioned over the fin region and contacting the second work function layer; and a low resistance layer contacting the third work function layer and partially filling the first and second trenches.
    Type: Application
    Filed: December 10, 2015
    Publication date: March 31, 2016
    Inventor: Tae-Kyung OH
  • Publication number: 20160093718
    Abstract: A method is provided for fabricating transistors. The method includes providing a semiconductor substrate. The substrate has a gate film and a mask film formed on a top surface. The mask film contains implanted carbon ions. The method further includes forming a mask layer by etching the mask film and then forming a gate layer by etching through the gate film using the mask layer as a mask until the substrate is exposed. The method also includes forming a first sidewall containing implanted carbon ions on the side surface of the gate layer and the mask layer; forming a stress layer in the substrate on both sides of the gate layer and the first side-wall; and forming a source region on one side of the gate layer and the first sidewall and a drain region on the other side of the gate layer and the first side wall.
    Type: Application
    Filed: September 25, 2015
    Publication date: March 31, 2016
    Inventors: QIUHUA HAN, JIE CHEN
  • Publication number: 20160093719
    Abstract: According to one embodiment, a semiconductor device includes: a first semiconductor region; a second semiconductor region selectively provided on the first semiconductor region; a third semiconductor region selectively provided on the second semiconductor region; a first electrode provided on the third semiconductor region and connected to the third semiconductor region; a second electrode electrically connected to the first semiconductor region; a third electrode provide via an insulating film on the first semiconductor region, the second semiconductor region, and the third semiconductor region; and a fourth electrode provided on the second electrode side of the third electrode, the fourth electrode being provided via the insulating film on the first semiconductor region. The insulating film has three or more regions between the fourth electrode and the first semiconductor region.
    Type: Application
    Filed: March 5, 2015
    Publication date: March 31, 2016
    Inventors: Kenya Kobayashi, Toshifumi Nishiguchi
  • Publication number: 20160093720
    Abstract: A method for producing a semiconductor structure, as well as a semiconductor structure, that uses a partial removal of an insulating layer around a semiconductor fin, and subsequently epitaxially growing an additional semiconductor material in the exposed regions, while maintaining the shape of the fin with the insulating layer.
    Type: Application
    Filed: September 29, 2014
    Publication date: March 31, 2016
    Inventors: Michael P. Chudzik, Brian J. Greene, Eric C. T. Harley, Judson R. Holt, Yue Ke, Rishikesh Krishnan, Renee T. Mo, Yinxiao Yang
  • Publication number: 20160093721
    Abstract: A transistor including an oxide semiconductor, which has good on-state characteristics, and a high-performance semiconductor device including a transistor capable of high-speed response and high-speed operation. In the transistor including an oxide semiconductor, oxygen-defect-inducing factors are introduced (added) into an oxide semiconductor layer, whereby the resistance of a source and drain regions are selectively reduced. Oxygen-defect-inducing factors are introduced into the oxide semiconductor layer, whereby oxygen defects serving as donors can be effectively formed in the oxide semiconductor layer. The introduced oxygen-defect-inducing factors are one or more selected from titanium, tungsten, and molybdenum, and are introduced by an ion implantation method.
    Type: Application
    Filed: December 10, 2015
    Publication date: March 31, 2016
    Inventors: Shunpei YAMAZAKI, Junichi KOEZUKA
  • Publication number: 20160093722
    Abstract: A bipolar transistor comprises a semiconductor body including a collector region and a base region arranged on top of the collector region. The base region has a first crystalline structure and is at least partly doped with dopants of a first doping type. The collector region is laterally enclosed by a trench isolation and is doped with dopants of a second doping type. The transistor further comprises a conductive base contact layer laterally enclosing the base region which is doped with dopants of the first doping type. The base contact layer comprises a part with the first crystalline structure and a part with a second crystalline structure, wherein the part with the second crystalline structure laterally encloses the part with the first crystalline structure. The transistor further comprises an emitter region arranged on the base region.
    Type: Application
    Filed: September 21, 2015
    Publication date: March 31, 2016
    Inventors: Armin Tilke, Claus Dahl, Dmitri A. Tschumakow
  • Publication number: 20160093723
    Abstract: The present invention provides a lateral IGBT transistor comprising a bipolar transistor and an IG-FET. The lateral IGBT comprises a low resistive connection between the drain of the IGFET and the base of the bipolar transistor, and an isolating layer arranged between the IG-FET and the bipolar transistor. The novel structure provides a device which is immune to latch and gives high gain and reliability. The structure can be realized with standard CMOS technology available at foundries.
    Type: Application
    Filed: May 12, 2014
    Publication date: March 31, 2016
    Inventor: Klas-Hakan EKLUND
  • Publication number: 20160093724
    Abstract: A semiconductor device includes a semiconductor mesa having source zones separated from each other along a longitudinal axis of the semiconductor mesa and at least one body zone forming first pn junctions with the source zones and a second pn junction with a drift zone. Electrode structures are on opposite sides of the semiconductor mesa, at least one of which includes a gate electrode configured to control a charge carrier flow through the at least one body zone. First portions of the at least one body zone are formed between the source zones and separation regions. In the separation regions, at least one of (i) a capacitive coupling between the gate electrode and the semiconductor mesa and (ii) a conductivity of majority charge carriers of the drift zone is lower than outside of the separation region.
    Type: Application
    Filed: December 9, 2015
    Publication date: March 31, 2016
    Inventors: Roman Baburske, Matteo Dainese, Peter Lechner, Hans-Joachim Schulze, Johannes Georg Laven
  • Publication number: 20160093725
    Abstract: In the reverse-conducting IGBT according to the present invention, an n-type buffer layer surrounds a p-type collector layer. A p-type separation layer surrounds an n-type cathode layer. The n-type buffer layer separates the p-type collector layer and the p-type separation layer from each other. The p-type separation layer separates the n-type cathode layer and the n-type buffer layer from each other. Therefore, the present invention makes it possible to reduce snapback.
    Type: Application
    Filed: December 10, 2015
    Publication date: March 31, 2016
    Applicant: Mitsubishi Electric Corporation
    Inventor: Tetsuo TAKAHASHI
  • Publication number: 20160093726
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a fin structure formed on a substrate; a gate stack formed over the fin structure; source/drain regions over the substrate and disposed on opposing sides of the gate stack; a channel region defined in the fin structure and underlying the gate stack, wherein the channel region is un-doped; and a buried isolation layer disposed vertically between the channel region and the substrate, wherein the buried isolation layer includes a compound semiconductor oxide.
    Type: Application
    Filed: September 29, 2014
    Publication date: March 31, 2016
    Inventors: Kuo-Cheng Ching, Guan-Lin Chen
  • Publication number: 20160093727
    Abstract: A structure including a plurality of fins etched from a semiconductor substrate, a gate electrode above and perpendicular to the plurality of fins, a pair of sidewall spacers disposed on opposing sides of the gate electrode, a gap fill material above the semiconductor substrate and between the plurality of fins, the gap fill material is directly below the gate electrode and directly below the pair of sidewall spacers, wherein the gate electrode separates the gap fill material from each of the plurality of fins, and an epitaxially grown region above a portion of the plurality of fins not covered by the gate electrode, the EPI region separates the gap fill material from each of the plurality of fins.
    Type: Application
    Filed: December 9, 2015
    Publication date: March 31, 2016
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz, Charles W. Koburger, III
  • Publication number: 20160093728
    Abstract: A semiconductor device comprises a semiconductor body. The semiconductor body comprises insulated gate field effect transistor cells. At least one of the insulated gate field effect transistor cells comprises a source zone of a first conductivity type, a body zone of a second, complementary conductivity type, a drift zone of the first conductivity type, and a trench gate structure extending into the semiconductor body through the body zone along a vertical direction. The trench gate structure comprises a gate electrode separated from the semiconductor body by a trench dielectric. The trench dielectric comprises a source dielectric part interposed between the gate electrode and the source zone and a gate dielectric part interposed between the gate electrode and the body zone. The ratio of a maximum thickness of the source dielectric part along a lateral direction and the minimum thickness of the gate dielectric part along the lateral direction is at least 1.5.
    Type: Application
    Filed: September 29, 2015
    Publication date: March 31, 2016
    Inventors: Stefan Decker, Sven Lanzerstorfer, Thorsten Meyer, Robert Zink
  • Publication number: 20160093729
    Abstract: A transistor includes source region and drain regions, a channel region, a drift region, a gate, a dummy gate, a gate dielectric layer and an interconnection line. The source and drain regions of a first conductivity type are in a substrate. The channel region of a second conductivity type is in the substrate and surrounds the source region. The drift region of the first conductivity type is beneath the drain region and extends toward the channel region. The gate is over the substrate and overlapped with the channel region and the drift region. The dummy gate is over the drift region and laterally adjacent to the gate. The gate dielectric layer is between the gate and the substrate and between the dummy gate and the drift region. The interconnection line is electrically connected to the dummy gate and configured to provide a voltage potential thereto.
    Type: Application
    Filed: September 29, 2014
    Publication date: March 31, 2016
    Inventors: Jhong-Sheng WANG, Jiaw-Ren SHIH
  • Publication number: 20160093730
    Abstract: An LDMOS (Laterally-Diffused Metal Oxide Semiconductor) device has a substrate, which includes a first doped region, a second doped region, and a shallow trench isolation (STI) region disposed in the second doped region. The first doped region and the second doped region are adjacent and have different conductivity types. The device also has a gate structure disposed on the substrate; the gate structure substantially does not overlap the second doped region.
    Type: Application
    Filed: August 28, 2015
    Publication date: March 31, 2016
    Inventor: YONG LI
  • Publication number: 20160093731
    Abstract: A method of manufacturing a semiconductor device including a transistor comprises forming field plate trenches in a main surface of a semiconductor substrate, a drift zone being defined between adjacent field plate trenches, forming a field dielectric layer in the field plate trenches, thereafter, forming gate trenches in the main surface of the semiconductor substrate, a channel region being defined between adjacent gate trenches, and forming a conductive material in at least some of the field plate trenches and in at least some of the gate trenches. The method further comprising forming a source region and forming a drain region in the main surface of the semiconductor substrate.
    Type: Application
    Filed: September 29, 2015
    Publication date: March 31, 2016
    Inventors: Andreas Meiser, Till Schloesser
  • Publication number: 20160093732
    Abstract: A non-floating vertical transistor includes a substrate and a protuberant structure extending from the substrate. A segregating pillar is inside the protuberant structure. A pair of segregated bit-lines which are segregated by the segregating pillar is disposed in the substrate and in the protuberant structure and adjacent to the bottom of the segregating pillar. A gate oxide layer is attached to the sidewall of the protuberant structure. A word-line is adjacent to the gate oxide layer so that the gate oxide layer is sandwiched between the word-line and a doped deposition layer.
    Type: Application
    Filed: May 4, 2015
    Publication date: March 31, 2016
    Inventor: Tzung-Han Lee
  • Publication number: 20160093733
    Abstract: A SiC MOSFET device having low specific on resistance is described. The device has N+, P-well and JFET regions extended in one direction (Y-direction) and P+ and source contacts extended in an orthogonal direction (X-direction). The polysilicon gate of the device covers the JFET region and is terminated over the P-well region to minimize electric field at the polysilicon gate edge. In use, current flows vertically from the drain contact at the bottom of the structure into the JFET region and then laterally in the X direction through the accumulation region and through the MOSFET channels into the adjacent N+ region. The current flowing out of the channel then flows along the N+ region in the Y-direction and is collected by the source contacts and the final metal. Methods of making the device are also described.
    Type: Application
    Filed: December 9, 2015
    Publication date: March 31, 2016
    Inventors: Sujit BANERJEE, Kevin MATOCHA, Kiran CHATTY
  • Publication number: 20160093734
    Abstract: A semiconductor device for high power application in which a novel semiconductor material having high mass productivity is provided. An oxide semiconductor film is formed, and then, first heat treatment is performed on the exposed oxide semiconductor film in order to reduce impurities such as moisture or hydrogen in the oxide semiconductor film. Next, in order to further reduce impurities such as moisture or hydrogen in the oxide semiconductor film, oxygen is added to the oxide semiconductor film by an ion implantation method, an ion doping method, or the like, and after that, second heat treatment is performed on the exposed oxide semiconductor film.
    Type: Application
    Filed: December 3, 2015
    Publication date: March 31, 2016
    Inventors: Shunpei YAMAZAKI, Junichiro SAKATA, Hiroki OHARA