Abstract: A length in a third direction of a first connection portion is smaller than a length in the third direction of a first main electrode portion. A length in the third direction of a second connection portion is smaller than a length in the third direction of a second main electrode portion. A thickness in a first direction of an inner layer portion is smaller than each of the length in the third direction of the first connection portion and the length in the third direction of the second connection portion and smaller than each of a gap from a second side surface to the first connection portion in the third direction and a gap from the second side surface to the second connection portion in the third direction. The second side surfaces oppose each other in the third direction perpendicular to the first direction.

Abstract: A multilayer ceramic component includes a multilayer ceramic capacitor including a ceramic body including a plurality of first and second internal electrodes having respective dielectric layers interposed therebetween, and first and second external electrodes respectively including first and second connection portions, and first and second band portions extended from the first and second connection portions, and first and second metal frames respectively including first and second upper horizontal portions, first and second lower horizontal portions, and first and second inclined support portions diagonally connecting the first and second upper horizontal portions and the first and second lower horizontal portions, respectively.

Abstract: A multi-layer ceramic capacitor assembly includes a multi-layer ceramic capacitor comprising a laminate, the laminate having dielectric layers and internal electrodes laminated alternately therein, and external electrodes being electrically connected with the internal electrodes and disposed at end portions of the laminate; and an electrode-forming substrate coupled to the multi-layer ceramic capacitor and having through-holes disposed to correspond to the external electrodes.

Abstract: A laminated ceramic electronic component provided with a component main body formed by alternatively laminating multiple dielectric ceramic layers and multiple internal electrode layers, and external electrodes disposed on the end faces where the internal electrode layers of the component main body are exposed, wherein at least a part of the multiple internal electrode layers exposed on the end faces of the component main body are provided with end-face electrode portions that connect the adjacent internal electrode layers, the connecting portions are present between the end-face electrode portions and the dielectric ceramic layers that contact with the end-face electrode portions, and the external electrodes are disposed so that the end-face electrode portions are covered.

Abstract: A thin film capacitor comprises a base material, a dielectric layer provided on the base material, and an upper electrode layer provided on the dielectric layer. The dielectric layer includes a plurality of columnar crystals that extend along a normal direction with respect to a surface of the upper electrode layer, the columnar crystal has a perovskite crystal structure represented by AyBO3, an element A is at least one of Ba, Ca, Sr, and Pb, an element B is at least one of Ti, Zr, Sn, and Hf, y?0.995 is satisfied, and the dielectric layer contains 0.05 to 2.5 mol of Al per 100 mol of AyBO3.

Abstract: A high-voltage pulse discharge capacitor of an elongated structure comprises a capacitor body. The capacitor body comprises several high-voltage capacitor parallel units and a high-voltage capacitor core pack. The several high-voltage capacitor parallel units are mutually connected in parallel. The high-voltage capacitor parallel units connected in parallel are then connected as a whole with the high-voltage capacitor core pack in parallel. The high-voltage capacitor parallel unit comprises two capacitor core packs. The two capacitor core packs are mutually connected in parallel. The capacitor core packs connected in parallel are wrapped with a PP film and purple copper foil at an outer side integrally. The purple copper foil is connected to axial faces located at a head and a tail of a combination integral of the two capacitor core packs.

Abstract: An electrolytic capacitor includes an anode body, a dielectric layer disposed on the anode body, and a cathode body. An organic polymer attached to the dielectric layer is disposed between the dielectric layer and the cathode body. The organic polymer has one or more groups selected from an acidic group and residues of the acidic group, and at least one of the one or more groups is incorporated into the dielectric layer.

Abstract: An electrolytic capacitor includes an anode body formed with a dielectric layer on a surface thereof, a cathode body formed with a nickel layer on a surface thereof, and a solid electrolyte formed between the anode body and the cathode body. The solid electrolyte contains a conductive polymer. The nickel layer contains a nickel crystal grain whose length in a direction perpendicular to a thickness direction of the nickel layer in a cross section taken in the thickness direction is 50 nm or more.

Abstract: A tantalum capacitor includes a capacitor body containing tantalum powder, having a rectangular parallelepiped shape, and including a plurality of tantalum wires spaced apart from each other in a long axis direction of the rectangular parallelepiped shape and protruding from one side surface thereof perpendicular to the long axis direction; a conductive layer provided on one side surface of the capacitor body to be spaced apart from the tantalum wires; a sealing part enclosing the tantalum wires, the conductive layer, and the capacitor body and allowing end portions of the tantalum wires and a surface of the conductive layer to be exposed by the sealing part; an anode terminal provided on one side surface of the sealing part; and a cathode terminal provided on one side surface of the sealing part.

Abstract: In a photoelectric conversion element, a conductive layer, a photoelectric conversion layer, and a counter electrode are disposed, and at least the photoelectric conversion layer is filled with an electrolyte. In the photoelectric conversion layer, at least one of a dye formed of a compound having one thiocyanate group and a dye formed of a compound not having a thiocyanate group is adsorbed onto a porous semiconductor layer formed of a semiconductor material. The electrolyte includes at least one of pyrazole and a pyrazole derivative.

Abstract: Electric double layer capacitors (EDLCs) including an alkylating or arylating agent are described herein. The alkylating or arylating reagent comprises a compound of the formula I: R—X??(I) wherein R and X are described herein.

Abstract: Activated carbons having improved volumetric capacitance and double layer capacitors including these activated carbons are described herein.

Abstract: Provided are a method of manufacturing an electrode and a method of manufacturing a capacitor using the electrode. According to an embodiment of the inventive concept, provided is a method of manufacturing an electrode including forming stacked graphene films on a first substrate, separating the graphene films from the first substrate, cutting the graphene films to form graphene electrode parts, and transferring the graphene electrode parts to a second substrate, in which the graphene electrode parts cross a top surface of the second substrate.

Abstract: The present disclosure relates to a structure of a crossbar for a manual motor starter, and particularly, to a structure of a crossbar for a manual motor starter in which a function of an auxiliary lever is performed by a crossbar to thus reduce the number of components and an operational error. The structure of a crossbar for a manual motor starter (MMS) including a crossbar connected to an operating mechanism and an auxiliary contact lever operating an auxiliary contact, wherein a pressing unit is formed in the crossbar to operate the auxiliary contact lever upwardly.

Abstract: A fuse box mounted on a liquid-filled transformer is disclosed. The fuse box may include one or more fuse link assemblies securing one or more fuses within a base fuse box, a fuse holder coupling the one or more fuse link assemblies within the base fuse box, wherein the one or more fuse link assemblies are pulled-up from the fuse holder by hand to remove the one or more fuse link assemblies from the base fuse box. The fuse box may include a retaining ring to fasten the fuse holder to the one or more fuse link assemblies. The fuse box may include a method for servicing a fuse box on a liquid-filled transformer.

Abstract: The present invention relates to an interlock device of a ring main unit, and more particularly, to an interlock device of a ring main unit in which a fuse cover can be closed in interlock with a cable cover. An interlock device of a ring main unit according to an embodiment of the present disclosure may include an interlock frame provided in part of the ring main unit, a cam on part of which an engaging portion is protruded and formed and on the other part of which a slit is formed, rotatably provided within the interlock frame, an operating plate an end of which is coupled to the slit to perform a vertical movement, and a spring an end of which is fixed to part of the cam to store an elastic force due to the movement of the cam.

Abstract: An electronic device, according to one embodiment of the present invention, can comprise: a housing which has an opening part penetrating through the inside and the outside of the electronic device and forms the outside of the electronic device; a key button inserted into the opening part so as to be movable; a sealing member which is disposed such that the sealing member slidably contacts the outer surface of the key button, and prevents communication between the inside and the outside of the electronic device through the inner surface of the opening part and the outer surface of the key button; and a push switch accommodated in the housing and pressed by an inward movement of the key button. Various other embodiments are possible.

Abstract: An electronic device includes a housing and a button. The housing has a first surface and a second surface opposite to the first surface, and defines a mounting hole passing through the first surface and the second surface. The mounting hole has an inner surface. The button is received in the mounting hole, and includes a metallic keycap and an annular buffer member. The keycap has a peripheral side surface, and defines a receiving groove on the peripheral side surface which extends around the peripheral side surface. The buffer member is composed of flexible material, sleeved on the keycap, partially received in the receiving hole, and partially positioned outside of the mounting hole to resist the second surface of the housing.

Abstract: A luminous keyboard includes a lateral-emitting type illumination element, a light guide panel, a sensing circuit pattern, a light-transmissible substrate, a supporting plate, and plural keys. When one of the keys is moved toward the sensing circuit pattern, the sensing circuit pattern generates a corresponding non-contact key signal. The lateral-emitting type illumination element is used for providing a light beam to the light guide panel. Consequently, the light beam can be diffused to the whole light guide panel. The light guide panel has plural light-guiding dots for collecting and scattering the light beam. The light-transmissible substrate is arranged between the light guide panel and the plural keys, and has plural light diffusion structures corresponding to the plural keys. The light beam scattered upwardly by each light-guiding dot is sequentially transmitted through the corresponding light diffusion structure and the supporting plate and directed to the corresponding key.

Abstract: A tactile button device suitable to be sterilized is provided. The tactile button device comprises at least one receptacle that is adapted to be at least partly filled with a material and being configured such that the material filled into the receptacle is at least partly displaced when subjected to a pressure, at least one duct connected to the receptacle and allowing the pressure exerted to the material to be transmitted, a connector connected to the at least one duct and connectable to a detection device, such that the pressure on the material is transmitted to the detection device.

Abstract: A vertical keyboard, which is used with key top pressing direction set to a substantially horizontal direction, includes a housing having opening portions into which the key tops are fitted. A lower internal surface of the opening portion is inclined with respect to a direction perpendicular to the surface of the housing, in a downward direction from the keyboard interior toward the keyboard surface side. This can reduce adhesion or accumulation of dust or dirt in a space between the lower internal surface of the opening portion and the lower internal surface of the key top.

Abstract: The embodiments discussed herein relate to electrical switches. Specifically, the embodiments include a pivoting switch that translates a rotational movement of a portion of the pivoting switch into a linear movement for toggling a button. The pivoting switch can include a pin that extends into a bracket in order to define and limit a rotational movement of the pivoting switch. The pivoting switch can further include a switch cavity that can force a knob of the button to move with the pivoting switch. The embodiments can further include an electrical switch having a welded cover plate. The welded cover plate can include arms that extend across and are welded to one or more surfaces of the electrical switch. The welded cover plate provides a more secure retaining mechanism for the electrical switch in order to reduce bending of certain portions of the electrical switch when the electrical switch is toggled.

Abstract: The device 10 includes a liquid filled bellows activated battery composed of two non Miscible fluids 14, 15 flowing through a channel 13 containing two electrodes 16, 17 of different metals. One of the fluids 14 is an electrolyte while the second 15 one is electrically non conducting. At rest the two electrodes 16, 17 are in the non conductive fluid 15. When the electrical device is actuated, manually or by an external force, the fluids surrounding the electrodes 16, 17 are replaced by the electrolyte 14 thus generating an electrical voltage between the two electrodes. The electrical current can be used to temporarily generate light or supply energy to another device. When the actuation mechanism is released, the electrodes 16, 17 are surrounded by the non conductive fluids 15 again and the electrical current is stopped.

Abstract: A low voltage switch pole which comprises an insulating casing having lateral walls and a front and a rear wall and defining an internal space with a contact area and an arc extinguishing area, a fixed contact assembly and a movable contact assembly being positioned in said contact area, said movable contact assembly being movable between a closed position in which it is into contact with said fixed contact assembly and an open position in which it is spaced apart from said fixed contact assembly, an arc chamber comprising a plurality of substantially parallel metallic plates inserted into an enclosure made of insulating material being positioned in said arc extinguishing area; the switch pole further comprises an insulating wall which is positioned in said internal space between said contact area and said arc extinguishing area and partially separates said contact area from said arc extinguishing area, a channel connecting said contact area to said arc extinguishing area being provided in said insulating wal

Abstract: The present invention relates to a switching device with at least one contact point and an arc blow device associated with the contact point, where the arc blow device comprises at least one blow magnet for generating a magnetic blow field, and where the blow field is of such nature that a switch arc developing when the contact point opens is blown out from the contact point.

Abstract: A gas exhaust diffuser for a circuit breaker, comprising a first casing extending longitudinally along a principal axis with an open end to allow gas to enter and a closed end, and a second casing coaxial to the first casing, extending along the principal axis, with at least one outlet to allow gas to escape, the closed end of the first casing being arranged in the second casing and the first casing having at least two radial openings near its closed end to provide a fluid communication between the first and second casing. A plurality of incurved elements are positioned radially in the second casing at the at least one radial opening to create a rotation of an entering exhaust flow in a plan perpendicular to the principal axis, thereby generating a substantially helicoidally-shaped exhaust flow path in the second casing.

Abstract: One embodiment of the present disclosure includes an electronic device. The electronic device includes an enclosure and a button connected to the enclosure and movable relative thereto. The button includes a button cap defining a user input surface, a first magnetic element operably associated with one of the button cap or the enclosure, and a coil operably associated with the other of the button cap or the enclosure. Movement of the button cap relative to the enclosure, such as due to a user input force, causes the first magnetic element to induce a current in the coil and the induced current is correlated to a user input to the button cap.

Abstract: A shape memory circuit breaker includes a shape memory substrate having first and second opposed substrate ends. The shape memory substrate is configured to transition from a strained conductive configuration to a fractured non-conductive configuration. An isolation housing is coupled with the shape memory substrate. The isolation housing includes first and second anchors coupled near the first and second substrate ends. A brace extends between the first and second anchors, and the brace statically positions the first and second anchors and the respective first and second substrate ends. The shape memory substrate is configured to transition from the strained conductive configuration to the fractured non-conductive configuration at or above a specified temperature range corresponding to a specified overload current range or voltage range, and the first substrate end fractures from the second substrate end at or above the specified temperature range resulting in an open circuit.

Abstract: A switch assembly includes a switch unit having first and second conductive plates, and a switch control unit having a sliding member and a locking member. The sliding member has a closed cycle guide groove, and the locking member has a locking portion to slide in the guide groove. When the locking portion is engaged in a first locking site of the guide groove, the first and second conductive plates are stabilized in their electrically disconnected state. When the locking portion is engaged in a second locking site of the guide groove, the first and second conductive plates are stabilized in their electrically connected state.

Abstract: A rivet-type contact of the present invention has a head part made of a contact material, and a leg part narrower than the head part in width and configured to be deformed at fixation. The leg part includes a flange part larger than the leg part in diameter, in an end part of the side of the head part, the flange part is embedded in the head part such that a lower end surface of the flange part and a lower end surface of the head part become approximately flat, and a length (l) between an endmost part of the flange part and a starting point of the leg part satisfies l<L with respect to a length (L) between an endmost part of the head part and the starting point of the leg part. Specifically, it is favorable that l satisfies 0.5 L?l?0.9 L with respect to L.

Abstract: A load center includes an arc fault circuit interrupter comprising a plurality of contacts, an operating mechanism for separating the contacts, and an arc fault trip mechanism to generate a trip signal in the event of an arc fault detection. The load center also includes a neutral link electrically connected to the arc fault trip mechanism and the plurality of contacts. The load center further includes a mounting rail operatively coupled to the arc fault circuit interrupter, the arc fault circuit interrupter directly supported by the mounting rail. The load center yet further includes a neutral busbar and a plug-in neutral conductor electrically connecting the mounting rail to the neutral busbar.

Abstract: The present invention relates to a molded case circuit breaker, in which a locking member is formed at an inner side of a lever and an anti-rotation member is formed at an upper like. Accordingly, the locking member can be brought into contact with the anti-rotation member even though a handle is rotated to an OFF position even in a fused state between a fixed contactor and a movable contactor, thereby preventing a rotation of the handle to the OFF position.

Abstract: The present invention discloses an adjustable electromagnetic release. A magnetic yoke is fixed on a bracket. A conductor passes through the bracket and the magnetic yoke and is mounted on the bracket. A shaft is mounted on the top of the bracket and is above the conductor. A push rod is mounted on the shaft and rotates with the shaft about the bracket. An armature is fixed on the push rod, the armature and the magnetic yoke are spaced apart. Adjusting mechanisms are mounted on the shaft. The adjusting mechanisms are mounted between the push rod and the bracket and on both sides of the push rod. A torsion spring is surrounded on the shaft and is within the adjusting mechanism. The adjusting mechanism contacts with the push rod. An adjusting rod is provided with a plurality of adjusting surfaces which contact with the adjusting mechanism. The adjusting rod is able to move along the longitudinal direction.

Abstract: A circuit protection device including a housing having a top section mounted to a bottom section, a first arc barrier extending from the bottom section, a second arc barrier extending from the top section, the top and bottom sections mounted together to define a cavity between the first arc barrier separated a distance from the second arc barrier, a first terminal and a second terminal secured to the bottom section, and a fuse element comprising a body of metallic material arranged in one of a plurality of geometric configurations mounted within the top section and the bottom section of the housing, extending through the first arc barrier and the second arc barrier and connected to the first and second terminals, wherein the first and second arc barriers resist arcing upon activation of the fuse and the fuse element melts upon occurrence of an overcurrent condition.

Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

Abstract: A method of forming nanotubes may comprise applying a photoresist to a metal substrate, selectively exposing a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation, removing the second portion of the photoresist from the metal substrate exposing a first portion of the metal substrate, exposing the first portion of the metal substrate to an etchant removing the first portion of the photoresist exposing a second portion of the metal substrate, and growing carbon nanotubes on the second portion of the metal substrate.

Abstract: The present invention provides a plasma generating device comprising a high voltage driving device, an insulated substrate, and two electrode units. The present invention further provides a manufacturing method of a plasma generating device comprising the following steps of: (1) preparing an insulated substrate with a first surface and a second surface; (2) preparing two electrode units which respectively dispose one electrode unit on the first surface and the second surface, and (3) connecting the electrode with the high voltage driving device. Compared to the prior arts, the present invention provides a simpler process to manufacture the micro plasma generating device without using delicate facilities or machine tools. The present invention has advantages of lower cost and simpler manufacturing processes.

Abstract: Systems and methods exposing a sample of atoms to an electromagnetic (EM) field. The EM includes one or more frequencies. The EM field is configured to promote at least a subset of the sample of atoms to one or more excited states based at least upon the one or more frequencies. The one or more excited states are low-lying, metastable states. Furthermore, the subset of the sample of atoms is ionized based at least upon the subset of the sample of atoms being at the one or more excited states.

Abstract: A cathode head can include: a first electron emitter filament having a first size; a first grid pair defining walls of a first filament slot having the first filament therein, each grid member of the first grid pair being electronically coupled to different voltage sources; a second electron emitter filament; and a second grid pair defining walls of a second filament slot having the first electron emitter therein, each grid member of the second grid pair being electronically coupled to different voltage sources. The first grid pair can have a first and second grid members; and the second grid pair can have the second grid member and a third grid member. The first grid member and third grid member are electronically coupled to the same voltage source and the second grid member being electronically coupled to a different voltage source.

Abstract: The present invention is a shielded anode having an anode with a surface facing an electron beam and a shield configured to encompass the anode surface. The shield has at least one aperture and an internal surface facing the anode surface. The shield internal surface and anode surface are separated by a gap in the range of 1 mm to 10 mm. The shield of the present invention is fabricated from a material, such as graphite, that is substantially transmissive to X-ray photons.

Abstract: In a charged particle beam device including an objective lens that focuses a charged particle beam; a first deflector that deflects the charged particle beam to emit the charged particle beam to a sample from a direction different from an ideal optical axis of the objective lens; and a second deflector that deflects a charged particle emitted from the sample, a charged particle focusing lens to focus the charged particle emitted from the sample is disposed between the sample and the second deflector and strengths of the objective lens and the charged particle focusing lens are controlled, according to deflection conditions of the first deflector.

Abstract: The device includes a beam source for generating an electron beam, a beam guiding tube passed through an objective lens, an objective lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, a control electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen, a deflection system including a plurality of deflection units situated along the optical axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the objective lens, and a detection unit to capture secondary electron (SE) and backscattered electrons (BSE).

Abstract: With conventional optical axis adjustment, a charged particle beam will not be perpendicularly incident to a sample, affecting the measurements of a pattern being observed. Highly precise measurement and correction of a microscopic inclination angle are difficult. Therefore, in the present invention, in a state where a charged particle beam is irradiated toward a sample, a correction of the inclination of the charged particle beam toward the sample is performed on the basis of secondary electron scanning image information from a reflector plate. From the secondary electron scanning image information, a deviation vector for charged particle beam deflectors is adjusted, causing the charged particle beam to be perpendicularly incident to the sample. At least two stages of charged particle beam deflectors are provided.

Abstract: An ion implanter comprising a process chamber, a FOUP and a temperature treating assembly and a method using the same are provided. A workpiece can be implanted according to a recipe of an ion implantation in the process chamber. The FOUP can transfer a workpiece toward and away from the process chamber. The temperature treating assembly comprises a vacuum chamber, a heating module and a cooling module. The vacuum chamber communicates with the process chamber and has a heating space and a cooling space next to the heating space. The heating module is mounted on the vacuum chamber from a side of the heating space for heating the workpiece located in the heating space to a first temperature. The cooling module is mounted in the cooling space for cooling the workpiece located in the cooling space to a second temperature different from the first temperature.

Abstract: The purpose of the present invention is to provide a charged particle beam device and a sample holder for the charged particle beam device by which it is possible to form various environments, and perform in-situ observation and analysis without removing a sample from the charged particle beam device. In the present invention, inserting a detachable reverse side entry portion from a side facing a sample holding means, said portion being provided with a function for changing the state of a sample attached to the sample holding means, makes it possible to observe/analyze changes in the sample by a different process without removing the sample from the charged particle beam device by combining a reverse side entry portion having a different function with the sample holding means. The reverse side entry portion comprises two parts, and a tip thereof, which is one of the parts, is removable.

Abstract: An embodiment of the invention relates to a SEM enabling a surface analysis of a sample at a high throughput. The SEM has an electron gun, an irradiation unit, and a detector. The detector, as a first structure, includes an MCP, an anode, and a dynode. The dynode is set at a potential higher than a potential of an output face of the MCP and the anode is set at a potential higher than that of the dynode. The anode is disposed on the dynode side with respect to an intermediate position between the output face of the MCP and the dynode. The anode has an aperture for letting electrons from the output face of the MCP pass toward the dynode.

Abstract: The present disclosure provides a monitoring device including: a filtering section that extracts and outputs at least one of a high frequency component or a low frequency component of a beam current received from a detection output section of an ion implantation device; and a computation section that computes at least one of a value corresponding to a content ratio of the high frequency component in the beam current, or a value corresponding to a content ratio of the low frequency component in the beam current.

Abstract: An apparatus for plasma treating a powder and/or granules is provided herein. The apparatus includes a plasma generator, the plasma generator configured to alter the surface characteristics of the powder and/or granules, a gas injector in fluid communication with the plasma generator, the gas injector injecting air into the powder and/or granules while the powder and/or granules is being treated with plasma so as to aerate the powder and/or granules prior to and/or during plasma treatment and a reaction portion housing the plasma generator, the powder and/or granules treated by the plasma within the reaction portion.

Abstract: Devices and methods for monitoring a discharge in a plasma process are provided. An example method includes detecting at least a first signal path of at least one plasma supply signal within at least a first time range within at least one period of the plasma supply signal, detecting at least a second signal path of the at least one plasma supply signal within at least a second time range which is at the point corresponding to the first time range in at least one other period of the plasma supply signal, and generating an identification signal if the second signal path deviates by at least a distance from the first signal path. The distance has a minimum time difference and a minimum signal amplitude difference. The method enables to identify arcs in a very reliable and very rapid manner.

Abstract: A vacuum processing apparatus with excellent processing uniformity and capable of effectively performing routine and non-routine maintenance even when an object to be processed has an increased diameter is provided. In the vacuum processing apparatus having a vacuum transfer chamber, this apparatus comprises a lower vessel having a cylindrical shape, a sample stage unit including a sample stage and a ring-shaped sample stage base having support beams disposed axisymmetric with respect to a central axis of the sample stage, an upper vessel having a cylindrical shape, and a moving mechanism which is fixed to the sample stage base and is capable to move the sample stage unit movable in a vertical direction and in a horizontal direction.