Patents Issued in February 7, 2017
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Patent number: 9564249Abstract: Fuel spacers include a perimeter piece and alignment strips extending within the perimeter piece. Alignment strips may have directional variation while still extending in an overall straight line between two contact points on the perimeter piece. Two alignment strips, by their relative positioning and shape, create distinct openings for fuel rods, through which rods may pass and be supported by the spacer on all sides. Alignment strips can be parallel or skew but need not physically intersect or extend at overall right angles to form such surrounding and supporting openings. Shape may be variable, such as a waveform, zig-zag, or saw-tooth. Several layers of alignment strips at any desired angle are useable in spacers, and alignment strips may be varied in length, shape, and number to account for different fuel assembly sizes and features, such as water rods.Type: GrantFiled: March 5, 2013Date of Patent: February 7, 2017Assignee: Global Nuclear Fuel—Americas LLCInventor: Paul E. Cantonwine
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Patent number: 9564250Abstract: A device for turning a container about a turning axis is provided. The device includes a stationary holding member and two bearing members which are spaced apart along the turning axis on each side of a space for receiving a container, and which are capable of being used for bearing on the container while enabling the rotation of the container about the turning axis relative to the bearing members. The device includes a movable holding member that is mounted onto the stationary holding member so as to rotate about the turning axis, at least one bearing member being supported by the movable holding member while being mounted onto the movable holding member so as to rotate about the drive axis, the or each bearing member supported by the movable holding member not rotating about the turning axis relative to the stationary holding member when the movable holding member rotates about the turning axis relative to the stationary holding member.Type: GrantFiled: February 17, 2012Date of Patent: February 7, 2017Assignee: AREVA NPInventor: Luc Bresous
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Patent number: 9564251Abstract: A method of stripping tritium from flowing stream of molten salt includes providing a tritium-separating membrane structure having a porous support, a nanoporous structural metal-ion diffusion barrier layer, and a gas-tight, nonporous palladium-bearing separative layer, directing the flowing stream of molten salt into contact with the palladium-bearing layer so that tritium contained within the molten salt is transported through the tritium-separating membrane structure, and contacting a sweep gas with the porous support for collecting the tritium.Type: GrantFiled: July 17, 2014Date of Patent: February 7, 2017Assignee: UT-Battelle, LLCInventors: David E. Holcomb, Dane F. Wilson
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Patent number: 9564252Abstract: In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer.Type: GrantFiled: February 15, 2012Date of Patent: February 7, 2017Assignee: HS FOILS OYInventors: Esa Kostamo, Jari Kostamo, Marco Mattila, Heikki Johannes Sipilä
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Patent number: 9564253Abstract: The present invention provides a scintillator panel which is provided with a narrow-width barrier rib with high accuracy in a large area, and also has high luminous efficiency and realizes clear image quality. The present invention provides a scintillator panel including a sheet-like substrate, a barrier rib provided on the substrate, and a scintillator layer made of a phosphor filled in cells divided by the barrier rib, wherein a reflecting layer is formed on only one side of the barrier rib.Type: GrantFiled: November 7, 2013Date of Patent: February 7, 2017Assignee: TORAY INDUSTRIES, INC.Inventors: Masaki Okamura, Hiroshi Enomoto, Yuichiro Iguchi
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Patent number: 9564254Abstract: An aluminum (Al) alloy wire, which is an extra fine wire having a wire diameter of 0.5 mm or less, contains, in mass %, Mg at 0.03% to 1.5%, Si at 0.02% to 2.0%, at least one element selected from Cu, Fe, Cr, Mn and Zr at a total of 0.1% to 1.0% and the balance being Al and impurities, and has an electrical conductivity of 40% IACS or more, a tensile strength of 150 MPa or more, and an elongation of 5% or more. By producing the extra fine wire from an Al alloy of a specific composition containing Zr, Mn and other specific elements, though the extra fine wire is extra fine, it has a fine structure with a maximum grain size of 50 ?m or less and is superior in elongation.Type: GrantFiled: April 3, 2012Date of Patent: February 7, 2017Assignees: SUMITOMO ELECTRIC INDUSTRIES, LTD., AUTONETWORKS TECHNOLOGIES, LTD., SUMITOMO WIRING SYSTEMS, LTD.Inventors: Hiroyuki Kobayashi, Yoshihiro Nakai, Taichiro Nishikawa, Yoshiyuki Takaki, Misato Kusakari, Yasuyuki Otsuka
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Patent number: 9564255Abstract: A high-speed transmission cable conductor includes a core material includes mainly copper, and a surface treated layer formed around a surface of the core material. The surface treated layer includes an amorphous layer including a metal element having a higher affinity for oxygen than the copper, and oxygen.Type: GrantFiled: November 27, 2013Date of Patent: February 7, 2017Assignee: HITACHI METALS, LTD.Inventors: Hideyuki Sagawa, Seigi Aoyama, Toru Sumi, Keisuke Fujito, Detian Huang
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Patent number: 9564256Abstract: An electrical power cable for high temperature environments comprises two or more sheathed conductors; each sheathed conductor comprising an electrical conductor, an electrical insulator surrounding the electrical conductor, and a sheath surrounding the electrical insulator; and a bonding material interconnecting the sheaths of the two or more sheathed conductors positioned adjacent to one another to form a cable.Type: GrantFiled: December 19, 2011Date of Patent: February 7, 2017Assignee: Schlumberger Technology CorporationInventors: Gregory H. Manke, Mark Metzger, Melissa Ver Meer, Tricia Lespreance, Wayne Costa, Jason Hozmueller
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Patent number: 9564257Abstract: A Litz wire terminal assembly includes a wire bundle having a plurality of electrically conductive strands extending between a first end and a second end to define a length. Each strand includes an insulative cover having a proximate cover end at the first end and a distal cover end at the second end. The distal cover end is flush with the second end. The Litz wire terminal assembly further includes a ferrule on the wire bundle. The ferrule has a distal ferrule end at the second end of the conductive strands.Type: GrantFiled: December 2, 2014Date of Patent: February 7, 2017Assignee: HAMILTON SUNDSTRAND CORPORATIONInventors: Eric Karlen, John Horowy, Lawrence D. Hughes, Frank Z. Feng
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Patent number: 9564258Abstract: A coated conductor comprises a substrate supporting a ReBCO superconductor adapted to carry current in a superconducting state. The superconductor is characterized in having peaks in critical current (Jc) of at least 0.2 MA/cm2 in a magnetic field of about 1 Tesla when the field is applied normal to the surface of the superconductor and when the field is applied parallel to the surface of the superconductor, and further characterized in that the superconductor includes horizontal defects and columnar defects in a size and an amount sufficient to result in the said critical current response. The conductor is characterized in that the ratio of the height of the peaks in the Jc is in the range from 3:1 with the ratio of the field perpendicular (0 degrees) to the field parallel (+/?90 degrees) to the range from 3:1 with the ratio of the field parallel to the field perpendicular.Type: GrantFiled: October 7, 2013Date of Patent: February 7, 2017Assignee: Superconductor Technologies, Inc.Inventor: Jeong-Uk Huh
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Patent number: 9564259Abstract: A superconductor wire includes: a superconducting laminate that includes: a substrate and an intermediate layer; a superconductor layer, and a metal stabilization layer which are laminated on the substrate; and an insulation coating layer that covers an outer surface of the superconducting laminate and is formed by baking a resin material. Further, a maximum height Rz of at least a part of the outer surface of the superconducting laminate covered with the insulation coating layer is 890 nm or less.Type: GrantFiled: August 14, 2014Date of Patent: February 7, 2017Assignee: FUJIKURA, LTD.Inventor: Masanori Daibo
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Patent number: 9564260Abstract: The present invention provides a method for preparing a silicon dioxide substrate-based graphene transparent conductive film, which comprises: preparing a silicon dioxide substrate on a graphene transparent conductive film, thereby obtaining a silicon dioxide substrate-based graphene transparent conductive film. In the method for preparing a silicon dioxide substrate-based graphene transparent conductive film according to the embodiments of the present invention, the silicon dioxide substrate is prepared on the graphene transparent conductive film, and a graphene transferring step that is difficult to implement in the prior art can be avoided, thus the silicon dioxide substrate-based graphene transparent conductive film can be prepared conveniently, and the cost may be reduced at the same time.Type: GrantFiled: July 29, 2014Date of Patent: February 7, 2017Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventor: Yue Shi
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Patent number: 9564261Abstract: Provided is a color encoding method including providing a composition including a liquid medium and magnetic nanoparticles dispersed in the liquid medium; applying a magnetic field to the composition to align the magnetic nanoparticles; and applying a patterned energy source to the composition to solidify the composition, wherein more than one region of the composition are sequentially solidified with varying magnetic field strength to fix a plurality of color codes.Type: GrantFiled: October 12, 2011Date of Patent: February 7, 2017Assignee: SNU R&DB FOUNDATIONInventors: Sunghoon Kwon, Howon Lee, Junhoi Kim, Hyoki Kim
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Patent number: 9564262Abstract: A superconducting magnetic field generating device includes: a superconductor including an outer superconductor formed with a high temperature superconducting material in a cylindrical shape and generating a trapped magnetic field, and an inner superconductor formed with a high temperature superconducting material in a cylindrical shape and coaxially disposed with the outer superconductor on the inner circumferential side; and a cooling device cooling the outer and inner superconductors to a temperature equal to or lower than the superconducting transition temperature, wherein the inner superconductor is formed so that a ratio (Jc?1/Jcz1) of a critical current density (Jc?1) of the inner superconductor in the circumferential direction to a critical current density (Jcz1) of the inner superconductor in the axial direction is closer to 1 than a ratio (Jc?2/Jcz2) of the critical current density (Jc?2) in the circumferential direction to a critical current density (Jcz2) of the outer superconductor of the outer sType: GrantFiled: June 18, 2015Date of Patent: February 7, 2017Assignee: AISIN SEIKI KABUSHIKI KAISHAInventors: Yoshitaka Ito, Yousuke Yanagi, Masaaki Yoshikawa
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Patent number: 9564263Abstract: Disclosed herein are a core assembly for wireless power communication, a power supplying device for wireless power communication having the same, and a method for manufacturing the same. The core assembly for wireless power communication includes: a plate shaped core including concave parts disposed in a main surface thereof and made of a magnetic material; a plurality of winding type coils received in the concave parts and partially overlapping each other; and a circuit board connected to both ends of each of the coils which controls application of a power to the coils.Type: GrantFiled: June 22, 2011Date of Patent: February 7, 2017Assignee: HANRIM POSTECH CO., LTD.Inventors: Yoon-Sang Kuk, Chun-Kil Jung
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Patent number: 9564264Abstract: A low profile power converter structure is provide wherein volume is reduced and power density is increased to approach 1 KW/in3 by at least one of forming an inductor as a body of magnetic material embedded in a substrate formed by a plurality of printed circuit board (PCB) lamina and forming inductor windings of PCB cladding and vias which may be of any desired number of turns and may include inversely coupled windings and which provide a lateral flux path, forming the body of magnetic material from high aspect ratio flakes of magnetic material which are aligned with the inductor magnetic field in an insulating organic binder and hot-pressed and providing a four-layer architecture comprising two layers of PCB lamina including the embedded body of magnetic material, a shield layer and an additional layer of PCB lamina, including cladding for supporting and connecting a switching circuit, a capacitor and the inductor.Type: GrantFiled: February 11, 2014Date of Patent: February 7, 2017Assignee: Virginia Tech Intellectual Properties, Inc.Inventors: Yipeng Su, Qiang Li, Fred C. Lee, Wenli Zhang
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Patent number: 9564265Abstract: Provided is a coil assembly having improved heat resistance for use in a control rod driver, in which the heat resistance of coils is improved to increase the lifespan thereof and the deterioration of the coils and the fall of a control rod are thus securely prevented from occurring due to continuous operations of the control rod driver during an automatic load follow operation, thereby improving the safety and economic feasibility of a nuclear power plant, and a method for manufacturing the same.Type: GrantFiled: July 25, 2013Date of Patent: February 7, 2017Assignee: Korea Hydro & Nuclear Power Co., Ltd.Inventors: Yang Jo Choi, Young Ho Jang, Jae Gon Lee
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Patent number: 9564266Abstract: A power converter magnetics assembly is disclosed. The power converter magnetics assembly can include an interface panel, a magnetic component mounted to the interface panel to form a magnetics subassembly, and a chassis coupled to the magnetics subassembly. The chassis can have a cavity with an opening. The magnetic component can be received within the cavity and the interface panel can be disposed over the opening and secured to the chassis to form an enclosure about the magnetic component.Type: GrantFiled: October 31, 2014Date of Patent: February 7, 2017Assignee: Raytheon CompanyInventors: Boris S. Jacobson, Stephen R. Elkins, Bradley S. Jaworski
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Patent number: 9564267Abstract: A magnetic element includes a bobbin assembly, at least one pancake winding assembly, a winding coil assembly and a magnetic core assembly. The bobbin assembly includes plural bobbin units. The plural bobbin units are detachably coupled with each other. Each bobbin unit includes a main body, a coupling structure and at least one engaging structure. The main body includes an external surface, a channel and a first winding section. The coupling structure is disposed on the external surface of the main body. The engaging structure of the bobbin unit is engaged with the engaging structure of an adjacent bobbin unit. The pancake winding assembly is disposed around the main body and coupled with the corresponding coupling structure. The winding coil assembly is wound around the first winding section. The magnetic core assembly is partially accommodated within the channel of the bobbin unit.Type: GrantFiled: January 22, 2015Date of Patent: February 7, 2017Assignee: DELTA ELECTRONICS, INC.Inventors: Hua-Sheng Lin, Hsin-Wei Tsai, Yu-Liang Hung, Ming-Cheng Lee
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Patent number: 9564268Abstract: A resonant transformer connected between a ground terminal and elevated terminal draws current from the earth's electric field through a primary winding of the transformer. An impulse generator applies a high voltage impulse to the primary winding of the resonant transformer to cause current to flow from the ground terminal through the primary winding. The flow of current through the primary winding of the resonant transformer induces a current in the secondary winding, which may be converted and filtered to a usable form, e.g. 60 Hz AC or DC.Type: GrantFiled: October 8, 2014Date of Patent: February 7, 2017Assignee: Earth Energies, Inc.Inventors: John Dinwiddie, Terry L. Wright, David R. Ames
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Patent number: 9564269Abstract: A fast-mounting capacitor is composed of a capacitor (1) and a plug-in sheet (10). A fixed rod (22) extends from the lower end of the shell of the capacitor (1). The fixed rod (22) has a fixed slot (18). The plug-in sheet (10) includes an insulating strip (11) provided above. Plastic elastic clamps (12) and a connection part (13) are connected to the lower part of the insulating strip (11). Fixing clamping strips (17) are provided on the inner wall of the capacitor mounting hole (15). The capacitor can be plugged in conveniently, and can effectively serve as an insulator, therefore it can prevent conducting leakage of electricity to the box of electrical equipment so as to cause accident when abnormal leakage occurs to the capacitor.Type: GrantFiled: September 25, 2012Date of Patent: February 7, 2017Assignees: SHANGHAI HAOYE ELECTRIC CO., LTD, SHANGHAI HAOYE CAPACITORS CO., LTDInventors: Zikui Zhang, Feng Xu, Hao Pan
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Patent number: 9564270Abstract: A thin film capacitor is provided with a lower electrode layer, a dielectric layer arranged on the lower electrode layer, and an upper electrode layer formed on the dielectric layer. An insulator patch material, circular when projected from above, is formed at a boundary of the dielectric layer and the upper electrode layer of the thin film capacitor of this invention. The circular insulator patch improves a withstand voltage, by reducing accumulation of charges.Type: GrantFiled: December 19, 2014Date of Patent: February 7, 2017Assignee: TDK CORPORATIONInventors: Junji Aotani, Yoshihiko Yano, Yasunobu Oikawa
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Patent number: 9564271Abstract: A stacked ceramic capacitor that includes a ceramic body formed by stacking dielectric ceramic layers and internal electrodes mainly composed of Ni; and an external electrode formed on an outer surface of ceramic body. The dielectric ceramic layers are formed by using a dielectric ceramic composition that includes a main ingredient expressed by (KaNabLicM2d)(NbwTaxMgyM4z)O3, where M2 is at least one of Ca, Sr and Ba, M4 is at least one of Zr, Hf and Sn, and a, b, c, d, w, x, y, and z satisfy predetermined relationships; and includes 2 to 15 molar parts of Mn with respect to 100 molar parts of a total content of Nb, Ta, Mg, and M4.Type: GrantFiled: September 15, 2015Date of Patent: February 7, 2017Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Koichi Banno, Shoichiro Suzuki, Masaru Miyayama, Yuji Noguchi
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Patent number: 9564272Abstract: A method for manufacturing a Z-directed component for insertion into a mounting hole in a printed circuit board according to one example embodiment includes simultaneously extruding a plurality of materials according to the structure of the Z-directed component to form an extruded object and forming the Z-directed component from the extruded object. In one embodiment, the extruded object is divided into individual Z-directed components. In one embodiment, the timing of extrusion between predetermined sections of one of the materials is varied in order to stagger the sections in the extruded object.Type: GrantFiled: December 18, 2014Date of Patent: February 7, 2017Assignee: Lexmark International, Inc.Inventors: Keith Bryan Hardin, Zachary Charles Nathan Kratzer, Qing Zhang
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Patent number: 9564273Abstract: A tunable capacitor includes a first electrode and a second electrode, each being formed of a conductive material. The tunable capacitor further includes a third electrode between the first electrode and the second electrode, and a dielectric material interposed between the first electrode and the third electrode, and between the second electrode and the third electrode. The third electrode is movable relative to the first electrode and the second electrode by a stepper motor, to adjust and tune a capacitance of the tunable capacitor.Type: GrantFiled: June 2, 2015Date of Patent: February 7, 2017Assignee: MCV TECHNOLOGIES, INC.Inventors: Edward C. Liang, Georgiy Kolomichenko
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Patent number: 9564274Abstract: A photoelectric conversion element, having: an electrically-conductive support; a photoconductor layer having a semiconductor fine-particle layer adsorbed a dye; a charge transfer layer containing an electrolyte; and a counter electrode; which are provided on one side of the support in this order, in which the dye has at least one terdentate ligand having at least one acidic group; at least one ligand coordinating to a metal atom M has an sp2 carbon atom; a cyclic group binds to the sp2 carbon atom; a specific substituent R is substituted at an atom of ?- or ?-position to the atom of the cyclic group directly binding to the sp2 carbon atom; and with the metal atom M, an atom G1 of the ?- or ?-position, and an atom G2 of the substituent R, an angle ? (?MG1G2) is 150° or less.Type: GrantFiled: June 11, 2014Date of Patent: February 7, 2017Assignee: FUJIFILM CorporationInventors: Yukio Tani, Katsumi Kobayashi, Kimiatsu Nomura
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Patent number: 9564275Abstract: Supercapacitor structures are provided which include, for example: one or more layers of supercapacitors; and one or more contact tabs. The one or more contact tabs electrically contact and extend outward from the supercapacitor structure to facilitate electrical connection to the supercapacitor structure, and the one or more contact tabs include a multi-contact tab. The multi-contact tab is configured and sized with multiple contact locations which are disposed external to the supercapacitor structure. Various supercapacitor structures are provided, including one supercapacitor structure with a shared C-shaped current collector, and another supercapacitor structure with stacked supercapacitors. One or more additional multi-contact tabs may also extend from the supercapacitor structure(s) and distribute the same or a different capacitor voltage than the multi-contact tab.Type: GrantFiled: September 30, 2013Date of Patent: February 7, 2017Assignee: THE PAPER BATTERY CO.Inventors: Shreefal Mehta, Anthony Sudano, Dave Rich, Renato Friello
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Patent number: 9564276Abstract: A cable switch comprising a first base member of a band shape provided with a conductor on an inner surface and a second base member facing the first base member, and including a flat positive electrode and a negative electrode, the positive electrode being provided on one side of an inner surface thereof and the negative electrode being provided on another side of the inner surface, a gap being formed between the positive electrode and the negative electrode for separating and insulating the positive electrode and the negative electrode from each other.Type: GrantFiled: February 24, 2015Date of Patent: February 7, 2017Assignee: FOSTER ELECTRIC CO., LTD.Inventors: Kenta Yujima, Gao Wei, Yoshikazu Okazaki
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Patent number: 9564277Abstract: Systems and devices are described herein for reducing a phantom load. The system may include a device for connection to a power source and a transformer or machine, wherein the device is configured to disconnect the transformer or machine from the power source under a predetermined load condition. The device may include a contactor, a current detector, a timer, and a controller. Portions of the current detector, timer, or controller may be implemented in a microcontroller.Type: GrantFiled: February 21, 2014Date of Patent: February 7, 2017Assignee: International Electrical Saving & Development, LLCInventors: Paul M. Cruz, Thomas J. McKenzie, Daniel B. Brunning
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Patent number: 9564278Abstract: A switch may comprise a metal plate. A eutectic alloy may be proximate to the metal plate. An insulating material may be proximate to the insulating material. The insulating material may include a recess in the insulating material adjacent the eutectic alloy. A lead may be fixed in place by the insulating material. A first end of the lead is exposed from the insulating material by the recess.Type: GrantFiled: August 14, 2014Date of Patent: February 7, 2017Assignee: Goodrich CorporationInventor: David Harrington
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Patent number: 9564279Abstract: An electromagnetic switch includes a pair of fixed contacts disposed and fixed in a contact housing case with a predetermined distance therebetween; a movable contact disposed in the contact housing case so as to contact and separate from the pair of fixed contacts; and an electromagnet unit which brings the movable contact into and out of contact with the pair of fixed contacts. The electromagnet unit has a magnetic yoke enclosing an exciting coil, a movable plunger having a contact pole surface facing the contact pole surface of the magnetic yoke, and a linking shaft which links the movable plunger and the movable contact, and magnetic paths through which a holding force is generated by external magnetic fluxes generated by a flowing current when the movable contact contacts the pair of fixed contacts, are formed on the contact pole surface of the magnetic yoke.Type: GrantFiled: April 2, 2015Date of Patent: February 7, 2017Assignees: FUJI ELECTRIC FA COMPONENTS & SYSTEMS CO., LTD., FUJI ELECTRIC CO., LTD.Inventors: Yasuhiro Naka, Kenji Suzuki, Masayoshi Sakata
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Patent number: 9564280Abstract: An interlock assembly for a circuit breaker prevents inadvertent installation or removal of the circuit breaker from a circuit breaker panel while current is flowing. The interlock assembly cooperates with the circuit breaker panel to physically prevent the circuit breaker from being inserted into the circuit breaker panel until the circuit breaker is put into a tripped state. Likewise, the interlock assembly cooperates with the circuit breaker panel to physically prevent the circuit breaker from being taken out of the circuit breaker panel until the circuit breaker is put into a tripped state. This ensures that the circuit breaker will not be inadvertently installed or removed from the circuit breaker panel while current can immediately flow or is flowing through the circuit breaker.Type: GrantFiled: August 1, 2014Date of Patent: February 7, 2017Assignee: Schneider Electric USA, Inc.Inventor: Chad R. Mittlestadt
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Patent number: 9564281Abstract: A fuse end cap for providing an electrical connection between a fuse and an electrical conductor. The fuse end cap may include a mounting cuff defining a first cavity that is adapted to receive a fuse body. The mounting cuff may be configured to be mounted to the fuse body by friction fit, for example. The fuse end cap may further include a terminal defining a second cavity adapted to receive a conductor. The terminal may be configured to be crimped about the conductor to retain the conductor within the second cavity.Type: GrantFiled: March 27, 2013Date of Patent: February 7, 2017Assignee: Littelfuse, Inc.Inventors: Daniel R. Gilman, Thomas M. Novak, Nathan C. Siegwald
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Patent number: 9564282Abstract: A UV light and socket assembly having a pin and hole arrangement with a central pin and corresponding hole with peripheral pins and corresponding holes arranged approximately 120 degrees from each other from the central pin and opening. The light and socket assembly including a locating projection and corresponding locating opening that receives the projection that is positioned so as to be aligned with one of the peripheral pin and openings and the central pin and opening.Type: GrantFiled: June 22, 2015Date of Patent: February 7, 2017Assignee: Caldesso, LLCInventor: Bui Hoang
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Patent number: 9564283Abstract: In an electron irradiation system, a gas-tight housing encloses a cathode region and an irradiation region, which communicate through at least an aperture. In the cathode region, there is arranged a high-voltage cathode for emitting an electron beam. In the irradiation region, there is an irradiation site arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.Type: GrantFiled: June 14, 2012Date of Patent: February 7, 2017Assignee: EXCILLUM ABInventors: Oscar Hemberg, Tomi Tuohimaa, Per Takman
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Patent number: 9564284Abstract: An anode with a linear main direction of extent for an x-ray device, has an anode body and a focal track layer, which is connected to the anode body in a material-bonding manner on a focal track layer volume portion of the anode body. At least one cooling channel for the cooling of the anode body and the focal track layer is arranged in the interior of the anode body and at least the focal track layer volume portion is formed of a material with at least a basic matrix of refractory metal. The focal track layer volume portion extends as far as to the cooling channel.Type: GrantFiled: August 2, 2012Date of Patent: February 7, 2017Assignee: Plansee SEInventors: Stefan Gerzoskovitz, Hannes Lorenz, JĂĽrgen Schatte, Hannes Wagner, Andreas Wucherpfennig
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Patent number: 9564285Abstract: A plasma processing system having at least a plasma processing chamber for performing plasma processing of a substrate and utilizing at least a first processing state and a second processing state. Plasma is present above the center region of the substrate during the first processing stale to perform plasma processing of at least the center region during the first processing state. Plasma is absent above the center region of the substrate but present adjacent to the bevel edge region during the second processing state to at least perform plasma processing of the bevel edge region during the second processing state. During the second processing state, the upper electrode is in an RF floating state and the substrate is disposed on the lower electrode surface.Type: GrantFiled: July 15, 2013Date of Patent: February 7, 2017Assignee: Lam Research CorporationInventors: Andreas Fischer, John Holland
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Patent number: 9564286Abstract: Provided is a method of forming a thin film of a semiconductor device. The method includes forming a precursor layer on a surface of a substrate by supplying a precursor gas into a chamber, discharging the precursor gas remaining in the chamber to an outside of the chamber by supplying a purge gas into the chamber, supplying a reactant gas into the chamber, generating plasma based on the reactant gas, forming a thin film by a chemical reaction between plasma and the precursor layer and radiating extreme ultraviolet (EUV) light into the chamber, and discharging the reactant gas and the plasma remaining in the chamber by supplying a purge gas into the chamber.Type: GrantFiled: August 14, 2014Date of Patent: February 7, 2017Assignees: Samsung Electronics Co., Ltd., The Board of Trustees of the Leland Stanford Junior UniversityInventors: Sam Hyung Sam Kim, Andrei Teodor Iancu, Friedrich B. Prinz, Michael C. Langston, Peter Schindler, Ki-Hyun Kim, Stephen P. Walch, Takane Usui
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Patent number: 9564287Abstract: A substrate processing method uses a substrate processing apparatus including a chamber for accommodating a substrate, a lower electrode to mount the substrate, a first RF power applying unit for applying an RF power for plasma generation into the chamber, and a second RF power applying unit for applying an RF power for bias to the lower electrode. The RF power for plasma generation is controlled to be intermittently changed by changing an output of the first RF power applying unit at a predetermined timing. If no plasma state or an afterglow state exists in the chamber by a control of the first RF power applying unit, an output of the second RF power applying unit is controlled to be in an OFF state or decreased below an output of the second RF power applying unit when the output of the first RF power applying unit is a set output.Type: GrantFiled: September 25, 2013Date of Patent: February 7, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Takeshi Ohse, Shinji Himori, Jun Abe, Norikazu Yamada
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Patent number: 9564288Abstract: A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.Type: GrantFiled: October 29, 2013Date of Patent: February 7, 2017Assignee: Hitachi High-Technologies CorporationInventors: Yusuke Ominami, Shinsuke Kawanishi, Hiroyuki Suzuki
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Patent number: 9564289Abstract: An ion implanter includes a high-voltage power supply, a control unit that generates a command signal controlling an output voltage of the high-voltage power supply, an electrode unit to which the output voltage is applied, and a measurement unit that measures an actual voltage applied to the electrode unit. The control unit includes a first generation section that generates a first command signal for allowing the high-voltage power supply to output a target voltage, a second generation section that generates a second command signal for complementing the first command signal so that the actual voltage measured by the measurement unit becomes or close to the target voltage, and a command section that brings to the high-voltage power supply a synthetics command signal which is produced by synthesizing the first command signal and the second command signal.Type: GrantFiled: July 7, 2015Date of Patent: February 7, 2017Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.Inventors: Tadanobu Kagawa, Toshio Yumiyama, Takeshi Kurose
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Patent number: 9564290Abstract: A system for detecting particles in a gas stream comprises a Faraday collector separating charged particles into positive and negative streams to be detected. The Faraday collector includes a plurality of interdigitated wires, with a first plurality of wires charged with a positive potential and a second plurality of wires charged with a negative potential to separate particles in the gas stream into the positive and negative streams.Type: GrantFiled: November 18, 2014Date of Patent: February 7, 2017Assignee: Hamilton Sundstrand CorporationInventor: David E. Burchfield
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Patent number: 9564291Abstract: A charged-particle beam microscope is provided for imaging a sample. The microscope has a stage to hold a sample and a charged-particle beam column to direct a charged-particle beam onto the sample. The charged-particle beam column includes a charged-particle beam source to generate a charged-particle beam, and charged-particle beam optics to converge the charged-particle beam onto the sample. The microscope also has a light beam column to direct a light beam onto the sample. The light beam column includes a light beam source to generate a light beam, and light-beam optics to converge the light beam onto the sample. One or more detectors are provided to detect charged-particle and light radiation emanating from the sample to generate an image. A controller to analyze the detected charged-particle radiation and detected light radiation to generate an image of the sample.Type: GrantFiled: June 17, 2015Date of Patent: February 7, 2017Assignee: Mochii, Inc.Inventors: Christopher Su-Yan Own, Matthew Francis Murfitt
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Patent number: 9564292Abstract: An ion beam measuring device includes: a mask that is used for shaping an original ion beam into a measuring ion beam including a y beam part elongated in a y direction that is perpendicular to a traveling direction of the ion beam and an x beam part elongated in an x direction that is perpendicular to the traveling direction and the y direction; a detection unit that is configured to detect an x-direction position of the y beam part and a y-direction position of the x beam part; and a beam angle calculating unit that is configured to calculate an x-direction beam angle using the x-direction position and a y-direction beam angle using the y-direction position.Type: GrantFiled: June 25, 2014Date of Patent: February 7, 2017Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.Inventors: Noriyasu Ido, Kouji Inada, Kazuhiro Watanabe
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Patent number: 9564293Abstract: A charged particle beam writing apparatus includes a buffer memory including a memory region capable of contemporarily storing writing data for data processing regions, wherein writing data including data files is temporarily stored for each of the data processing regions, a dividing unit to divide the memory region of the buffer memory into a first region being large and a second region being small, a specifying unit to specify the memory region such that a data file being large is preferentially stored in the first region and a data file being small is stored at least in the second region, concerning the data files for each of the data processing regions included in the writing data, and a data processing unit to read data files corresponding to each of the data processing regions from the buffer memory, and to perform data processing using the read data files.Type: GrantFiled: February 11, 2014Date of Patent: February 7, 2017Assignee: NuFlare Technology, Inc.Inventors: Jun Yashima, Yasuo Kato
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Patent number: 9564294Abstract: According to one embodiment of the present invention, a plasma treatment apparatus comprises: a chamber having an inner space in which processes for an object to be treated are performed; and an antenna which is arranged to cover the side part of the chamber, and which forms electric fields in said inner space to generate plasma from the source gas supplied in the inner space. The antenna includes a helical antenna which is formed into a helical shape from one side of the chamber toward the other side of the chamber along a first rotation direction, and which has a current flowing in the first rotation direction; an extension antenna which is connected to one end of the helical antenna positioned at said one side of the chamber, and which has a current flowing in the direction opposite to the first rotation direction; and a connection antenna for interconnecting the extension antenna and the helical antenna.Type: GrantFiled: October 26, 2009Date of Patent: February 7, 2017Assignee: EUGENE TECHNOLOGY CO., LTD.Inventors: Sang Ho Woo, Il Kwang Yang, Byung Gyu Song
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Patent number: 9564295Abstract: A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.Type: GrantFiled: August 17, 2015Date of Patent: February 7, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dong-soo Lee, Sung-ho Jang, Byeong-hee Kim, Doug-yong Sung, Dong-ok Shin
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Patent number: 9564296Abstract: A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.Type: GrantFiled: March 8, 2016Date of Patent: February 7, 2017Assignee: Applied Materials, Inc.Inventors: Satoru Kobayashi, Soonam Park, Dmitry Lubomirsky, Hideo Sugai
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Patent number: 9564297Abstract: In a plasma reactor for processing a workpiece, an electron beam is employed as the plasma source, and a remote radical source is incorporated with the process chamber.Type: GrantFiled: June 18, 2014Date of Patent: February 7, 2017Assignee: Applied Materials, Inc.Inventors: Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Ying Zhang, Kenneth S. Collins, Hamid Tavassoli, Kartik Ramaswamy, Steven Lane
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Patent number: 9564298Abstract: A semiconductor manufacturing apparatus may include a chamber accommodating a substrate to be processed, a first electrode providing electric field in the chamber and a second electrode opposing to the first electrode, and a first power transmitting rod connected to one of the first electrode and the second electrode. A conductive stress attenuating unit may be formed in the first power transmitting rod. Methods of manufacturing semiconductor devices using the semiconductor manufacturing apparatus are also disclosed.Type: GrantFiled: November 18, 2014Date of Patent: February 7, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-hee Lee, Su-ho Lee, Won-hyuk Jang, Jae-beom Park, Ik-soo Kim, Myoung-woon Kim