Patents Issued in March 7, 2017
-
Patent number: 9590075Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type and a semiconductor layer of a second conductivity type formed thereon. The semiconductor device also includes a body layer extending a first predetermined distance into the semiconductor layer of the second conductivity type and a pair of trenches extending a second predetermined distance into the semiconductor layer of the second conductivity type. Each of the pair of trenches consists essentially of a dielectric material disposed therein and a concentration of doping impurities present in the semiconductor layer of the second conductivity type and a distance between the pair of trenches define an electrical characteristic of the semiconductor device. The semiconductor device further includes a control gate coupled to the semiconductor layer of the second conductivity type and a source region coupled to the semiconductor layer of the second conductivity type.Type: GrantFiled: January 27, 2014Date of Patent: March 7, 2017Assignee: MaxPower Semiconductor, Inc.Inventor: Mohamed N. Darwish
-
Patent number: 9590076Abstract: A method for manufacturing a FinFET device, including providing a substrate; implementing a source/drain doping on the substrate; etching the doped substrate to form a source region and a drain region; forming a fin channel between the source region and the drain region; and forming a gate on the Fin channel. The fin and the gate are formed after the source/drain doping is implemented on the substrate, so that the source/drain doping is done as a doping for a planar device, which ensures the quality of the source/drain coping and improves the property of the FinFET device.Type: GrantFiled: August 1, 2014Date of Patent: March 7, 2017Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Jinbiao Liu, Yao Wang, Guilei Wang, Tao Yang, Qing Liu, Junfeng Li
-
Patent number: 9590077Abstract: A semiconductor structure is provided that contains silicon fins having different heights, while maintaining a reasonable fin height to width ratio for process feasibility. The semiconductor structure includes a first silicon fin of a first height and located on a pedestal portion of a first oxide structure. The structure further includes a second silicon fin of a second height and located on a pedestal portion of a second oxide structure. The first oxide structure and the second oxide structure are interconnected and the second oxide structure has a bottommost surface that is located beneath a bottommost surface of the first oxide structure. Further, the second height of the second silicon fin is greater than the first height of the first silicon fin, yet a topmost surface of the first silicon fin is coplanar with a topmost surface of the second silicon fin.Type: GrantFiled: May 14, 2015Date of Patent: March 7, 2017Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Joel P. de Souza, Ali Khakifirooz, Alexander Reznicek, Dominic J. Schepis
-
Patent number: 9590078Abstract: A semiconductor device fabrication method includes forming a tunnel insulating film on a substrate containing silicon, forming a floating gate on the tunnel insulating film, forming an integral insulating film on the floating gate, and forming a control gate on the integral insulating film. The floating gate is formed on the tunnel insulating film by forming a seed layer containing amorphous silicon on the tunnel insulating film, forming an impurity later containing adsorbed boron or germanium on the seed layer, and forming a cap layer containing silicon on the impurity layer.Type: GrantFiled: March 4, 2013Date of Patent: March 7, 2017Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Hirokazu Ishida, Kenichiro Toratani
-
Patent number: 9590079Abstract: A semiconductor device and method of making such device is presented herein. The method includes disposing a gate layer over a dielectric layer on a substrate and further disposing a cap layer over the gate layer. A first transistor gate is defined having an initial thickness substantially equal to a combined thickness of the cap layer and the gate layer. A first doped region is formed in the substrate adjacent to the first transistor gate. The cap layer is subsequently removed and a second transistor gate is defined having a thickness substantially equal to the thickness of the gate layer. Afterwards, a second doped region is formed in the substrate adjacent to the second transistor gate. The first doped region extends deeper in the substrate than the second doped region, and a final thickness of the first transistor gate is substantially equal to the thickness of the second transistor gate.Type: GrantFiled: June 17, 2015Date of Patent: March 7, 2017Assignee: Cypress Semiconductor CorporationInventors: Chun Chen, Mark Ramsbey, Shenqing Fang
-
Patent number: 9590081Abstract: A method of making a graphene base transistor with reduced collector area comprising forming a graphene material layer, forming a collector material, depositing a dielectric, planarizing the dielectric, cleaning and removing the native oxide, transferring a base graphene material layer to the top surface of the graphene material layer, bonding the base graphene material layer, and photostepping and defining a second graphene material layer. A method of making a graphene base transistor with reduced collector area comprising forming an electron injection region, forming an electron collection region, and forming a base region. A graphene base transistor with reduced collector area comprising an electron emitter region, an electron collection region, and a base region.Type: GrantFiled: November 25, 2015Date of Patent: March 7, 2017Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Francis J. Kub, Travis J. Anderson, Andrew D. Koehler
-
Patent number: 9590082Abstract: Device structures and fabrication methods for a heterojunction bipolar transistor. A first base layer is formed on a first device region of a substrate. A first emitter is formed that defines a first junction with the first base layer. A second base layer is formed on a second device region of a substrate. A second emitter is formed that defines a second junction with the second base layer. The first base layer and the second base layer differ in thickness, composition, concentration of an electrically-active dopant, or a combination thereof.Type: GrantFiled: December 10, 2015Date of Patent: March 7, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Vibhor Jain, Qizhi Liu
-
Patent number: 9590083Abstract: An ITC-IGBT and a manufacturing method therefor. The method comprises: providing a heavily doped substrate, forming a GexSi1-x/Si multi-quantum well strained super lattice layer on the surface of the heavily doped substrate, and forming a lightly doped layer on the surface of the GexSi1-x/Si multi-quantum well strained super lattice layer. The GexSi1-x/Si multi-quantum well strained super lattice layer is formed on the surface of the heavily doped substrate through one step, simplifying the production process of the ITC-IGBT.Type: GrantFiled: December 6, 2012Date of Patent: March 7, 2017Assignees: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES, SHANGHAI LIANXING ELECTRONICS CO., LTD, JIANGSU CAS-IGBT TECHNOLOGY CO., LTDInventors: Zhenxing Wu, Yangjun Zhu, Xiaoli Tian, Shuojin Lu
-
Patent number: 9590084Abstract: A device includes a source region, a drain region, and a semiconductor channel connecting the source region to the drain region. The semiconductor channel includes a source-side channel portion adjoining the source region, wherein the source-side channel portion has a first bandgap, and a drain-side channel portion adjoining the drain region. The drain-side channel portion has a second bandgap different from the first bandgap.Type: GrantFiled: November 26, 2014Date of Patent: March 7, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Richard Kenneth Oxland
-
Patent number: 9590085Abstract: A method for fabricating a semiconductor device comprises forming a fin in a layer of III-V compound semiconductor material on a silicon-on-insulator substrate; forming a semiconductor extension on the fin, the semiconductor extension comprising a III-V compound semiconductor material that is different from a material forming the fin in the III-V compound semiconductor layer; forming a dummy gate structure and a spacer across and perpendicular to the fin; forming a source/drain layer on a top surface of the substrate adjacent to the dummy gate structure; planarizing the source/drain layer; removing the dummy gate structure to expose a portion of the semiconductor extension on the fin; removing the exposed portion of the semiconductor extension; etching the semiconductor extension to undercut the spacer; and forming a replacement gate structure in place of the removed dummy gate structure and removed exposed portion of the semiconductor extension.Type: GrantFiled: February 17, 2016Date of Patent: March 7, 2017Assignee: International Business Machines CorporationInventor: Effendi Leobandung
-
Patent number: 9590086Abstract: A method of fabricating a multi-layer epitaxial buffer layer stack for transistors includes depositing a buffer stack on a substrate. A first voided Group IIIA-N layer is deposited on the substrate, and a first essentially void-free Group IIIA-N layer is then deposited on the first voided Group IIIA-N layer. A first high roughness Group IIIA-N layer is deposited on the first essentially void-free Group IIIA-N layer, and a first essentially smooth Group IIIA-N layer is deposited on the first high roughness Group IIIA-N layer. At least one Group IIIA-N surface layer is then deposited on the first essentially smooth Group IIIA-N layer.Type: GrantFiled: April 5, 2016Date of Patent: March 7, 2017Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Qhalid Fareed, Asad Mahmood Haider
-
Patent number: 9590087Abstract: A transistor includes a source, a drain spaced apart from the source, and a heterostructure body having a two-dimensional charge carrier gas channel for connecting the source and the drain. The transistor further includes a semiconductor field plate disposed between the source and the drain. The semiconductor field plate is configured to at least partly counterbalance charges in the drain when the transistor is in an off state in which the channel is interrupted and a blocking voltage is applied to the drain. The counterbalance charge provided by the semiconductor field plate is evenly distributed over a plane or volume of the semiconductor field plate. Various semiconductor field plate configurations and corresponding manufacturing methods are described herein.Type: GrantFiled: November 13, 2014Date of Patent: March 7, 2017Assignee: Infineon Technologies Austria AGInventors: Wolfgang Werner, Frank Kahlmann, Franz Hirler
-
Patent number: 9590088Abstract: A current aperture vertical electron transistor (CAVET) with ammonia (NH3) based molecular beam epitaxy (MBE) grown p-type Gallium Nitride (p-GaN) as a current blocking layer (CBL). Specifically, the CAVET features an active buried Magnesium (Mg) doped GaN layer for current blocking purposes. This structure is very advantageous for high power switching applications and for any device that requires a buried active p-GaN layer for its functionality.Type: GrantFiled: December 10, 2014Date of Patent: March 7, 2017Assignee: The Regents of the University of CaliforniaInventors: Srabanti Chowdhury, Ramya Yeluri, Christophe Hurni, Umesh K. Mishra, Ilan Ben-Yaacov
-
Patent number: 9590089Abstract: Nanowire-based gate all-around transistor devices having one or more active nanowires and one or more inactive nanowires are described herein. Methods to fabricate such devices are also described. One or more embodiments of the present invention are directed at approaches for varying the gate width of a transistor structure comprising a nanowire stack having a distinct number of nanowires. The approaches include rendering a certain number of nanowires inactive (i.e. so that current does not flow through the nanowire), by severing the channel region, burying the source and drain regions, or both. Overall, the gate width of nanowire-based structures having a plurality of nanowires may be varied by rendering a certain number of nanowires inactive, while maintaining other nanowires as active.Type: GrantFiled: December 30, 2011Date of Patent: March 7, 2017Assignee: Intel CorporationInventors: Willy Rachmady, Van H. Le, Ravi Pillarisetty, Jack T. Kavalieros, Robert S. Chau, Seung Hoon Sung
-
Patent number: 9590090Abstract: A method of forming a channel of a gate structure is provided. A first epitaxial channel layer is formed within a first trench of the gate structure. A dry etching process is performed on the first epitaxial channel layer to form a second trench. A second epitaxial channel layer is formed within the second trench.Type: GrantFiled: January 8, 2014Date of Patent: March 7, 2017Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Ching-Feng Fu, De-Fang Chen, Chun-Hung Lee, Huan-Just Lin, Hui-Cheng Chang
-
Patent number: 9590091Abstract: According to an embodiment of a semiconductor device, the semiconductor device includes a power device well in a semiconductor substrate, a logic device well in the substrate and spaced apart from the power device well by a separation region of the substrate, and a minority carrier conversion structure including a first doped region of a first conductivity type in the separation region, a second doped region of a second conductivity type in the separation region and a conducting layer connecting the first and second doped regions. The second doped region includes a first part interposed between the first doped region and the power device well and a second part interposed between the first doped region and the logic device well.Type: GrantFiled: August 22, 2014Date of Patent: March 7, 2017Assignee: Infineon Technologies AGInventors: Adrian Finney, Paolo Del Croce, Luca Petruzzi, Norbert Krischke
-
Patent number: 9590092Abstract: A Super Junction Field Effect Transistor (FET) device includes a charge compensation region disposed on a substrate of semiconductor material. The charge compensation region includes a set of strip-shaped P? type columns, a floating ring-shaped P? type column that surrounds the set of strip-shaped P? type columns, and a set of ring-shaped P? type columns that surrounds the floating ring-shaped P? type column. A source metal is disposed above portions of the charge compensation region. The source metal contacts each of the strip-shaped P? type columns and each of the ring-shaped P? type columns. An oxide is disposed between the floating P? type column and the source metal such that the floating P? type column is electrically isolated from the source metal. The device exhibits a breakdown voltage that is 0.2% greater than if the floating P? type column were to contact the source metal.Type: GrantFiled: November 13, 2014Date of Patent: March 7, 2017Assignee: IXYS CorporationInventor: Kyoung Wook Seok
-
Patent number: 9590093Abstract: In general, according to one embodiment, a semiconductor device includes, a first semiconductor region, a plurality of second semiconductor regions, a plurality of third semiconductor regions, a fourth semiconductor region, a fifth semiconductor region, and a gate electrode. The third semiconductor region includes a first portion and a second portion. The first portion is provided between the second semiconductor regions adjacent to each other. An amount of impurity of the second conductivity type in the first portion is greater than an amount of impurity of the first conductivity type in the second semiconductor region contiguous to the first portion. The second portion is arranged with a part of the first semiconductor region. An amount of impurity of the second conductivity type in the second portion is smaller than an amount of impurity of the first conductivity type in the part of the first semiconductor region.Type: GrantFiled: March 9, 2015Date of Patent: March 7, 2017Assignee: Kabushiki Kaisha ToshibaInventors: Syotaro Ono, Hideyuki Ura, Masahiro Shimura, Hiroaki Yamashita
-
Semiconductor device with power transistor cells and lateral transistors and method of manufacturing
Patent number: 9590094Abstract: By thermal oxidation a field oxide layer is formed that lines first and second trenches that extend from a main surface into a semiconductor layer. After the thermal oxidation, field electrodes and trench gate electrodes of power transistor cells are formed in the first and second trenches. A protection cover including a silicon nitride layer is formed that covers a cell area with the first and second trenches. With the protection cover covering the cell area, planar gate electrodes of lateral transistors are formed in a support area of the semiconductor layer.Type: GrantFiled: June 12, 2015Date of Patent: March 7, 2017Assignee: Infineon Technologies AGInventors: Robert Zink, Stefan Decker, Sven Lanzerstorfer -
Patent number: 9590095Abstract: A semiconductor device includes field electrode structures regularly arranged in lines in a cell area and forming a first portion of a regular pattern. Termination structures are formed in an inner edge area surrounding the cell area, wherein at least portions of the termination structures form a second portion of the regular pattern. Cell mesas separate neighboring ones of the field electrode structures from each other in the cell area and include first portions of a drift zone, wherein a voltage applied to a gate electrode controls a current flow through the cell mesas. At least one doped region forms a homojunction with the drift zone in the inner edge area.Type: GrantFiled: August 18, 2015Date of Patent: March 7, 2017Assignee: Infineon Technologies Austria AGInventors: Ralf Siemieniec, Oliver Blank, Franz Hirler, Michael Hutzler, Martin Poelzl
-
Patent number: 9590096Abstract: In one implementation, a vertical field-effect transistor (FET) includes a substrate having a drift region situated over a drain, a body region situated over the drift region and having source diffusions formed therein, a gate trench extending through the body region, and channel regions adjacent the gate trench. The channel regions are spaced apart along the gate trench by respective deep body implants. Each of the deep body implants is situated approximately under at least one of the source diffusions, and has a depth greater than a depth of the gate trench.Type: GrantFiled: November 16, 2015Date of Patent: March 7, 2017Assignee: Infineon Technologies Americas Corp.Inventors: Harsh Naik, Timothy D. Henson, Niraj Ranjan
-
Patent number: 9590097Abstract: Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a body region of semiconductor material having a first conductivity type, a source region of semiconductor material having a second conductivity type within the body region, a junction isolation region of semiconductor material having the second conductivity type, a drain region of semiconductor material having the second conductivity type, and first and second drift regions of semiconductor material having the second conductivity type. The first drift region resides laterally between the drain region and the junction isolation region, the junction isolation region resides laterally between the first drift region and the second drift region, and the second drift region resides laterally between the body region and the junction isolation region.Type: GrantFiled: February 25, 2016Date of Patent: March 7, 2017Assignee: NXP USA, INC.Inventors: Hongning Yang, Daniel J. Blomberg, Xin Lin, Zhihong Zhang, Jiang-Kai Zuo
-
Patent number: 9590098Abstract: A method for producing a semiconductor device includes a first step of forming a first insulating film around the fin-shaped semiconductor layer; a second step of forming a pillar-shaped semiconductor layer and a first dummy gate formed of a first polysilicon; a third step of forming a second dummy gate on sidewalls of the first dummy gate and the pillar-shaped semiconductor layer; a fourth step of forming a fifth insulating film left as a sidewall around the second dummy gate, forming a second diffusion layer in an upper portion of the fin-shaped semiconductor layer and a lower portion of the pillar-shaped semiconductor layer, and forming a metal-semiconductor compound on the second diffusion layer; a fifth step of forming a gate electrode and a gate line; and a sixth step of depositing a second gate insulating film around the pillar-shaped semiconductor layer and on the gate electrode and the gate line, removing a portion of the second gate insulating film on the gate line, depositing a second metal, etchinType: GrantFiled: August 12, 2015Date of Patent: March 7, 2017Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE, LTD.Inventors: Fujio Masuoka, Hiroki Nakamura
-
Patent number: 9590099Abstract: Semiconductor devices are provided including an active layer, a gate structure, a spacer, and a source/drain layer. The active layer is on the substrate and includes germanium. The active layer includes a first region having a first germanium concentration, and a second region on both sides of the first region. The second region has a top surface getting higher from a first portion of the second region adjacent to the first region toward a second portion of the second region far from the first region, and has a second germanium concentration less than the first germanium concentration. The gate structure is formed on the first region of the active layer. The spacer is formed on the second region of the active layer, and contacts a sidewall of the gate structure. The source/drain layer is adjacent to the second region of the active layer.Type: GrantFiled: September 21, 2015Date of Patent: March 7, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Bin Liu, Sun-Min Kim, Shigenobu Maeda
-
Patent number: 9590100Abstract: Semiconductor devices are provided such as, ferroelectric transistors and floating gate transistors, that include an epitaxial perovskite/doped strontium titanate structure formed above a surface of a semiconductor substrate. The epitaxial perovskite/doped strontium titanate structure includes a stack of, in any order, a doped strontium titanate and a perovskite type oxide.Type: GrantFiled: January 13, 2016Date of Patent: March 7, 2017Assignee: International Business Machines CorporationInventors: Catherine A. Dubourdieu, Martin M. Frank, Vijay Narayanan
-
Patent number: 9590101Abstract: A method comprises forming a first fin and a second fin over a substrate, wherein the first fin and the second fin are separated by a trench, applying a first pre-amorphous implantation (PAI) process to the substrate and forming a first PAI region underlying the trench as a result of the first PAI process, depositing a first tensile film layer on sidewalls and a bottom of the trench, converting the first PAI region into a first dislocation plane underlying the trench using a first anneal process and forming an isolation region over the first dislocation plane.Type: GrantFiled: May 23, 2016Date of Patent: March 7, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hsiang Huang, Da-Wen Lin
-
Patent number: 9590102Abstract: A method for manufacturing a semiconductor device includes forming a fin structure including a well layer, an oxide layer disposed over the well layer and a channel layer disposed over the oxide layer. An isolation insulating layer is formed so that the channel layer of the fin structure protrudes from the isolation insulating layer and a part of or an entirety of the oxide layer is embedded in the isolation insulating layer. A gate structure is formed over the fin structure. A recessed portion is formed by etching a part of the fin structure not covered by the gate structure such that the oxide layer is exposed. A recess is formed in the exposed oxide layer. An epitaxial seed layer in the recess in the oxide layer. An epitaxial layer is formed in and above the recessed portion. The epitaxial layer is in contact with the epitaxial seed layer.Type: GrantFiled: April 15, 2015Date of Patent: March 7, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Cheng Ching, Ching-Wei Tsai, Chih-Hao Wang, Wai-Yi Lien
-
Patent number: 9590103Abstract: A semiconductor device includes a substrate having a first region and a second region, a plurality of first gate structures in the first region, the first gate structures being spaced apart from each other by a first distance, a plurality of second gate structures in the second region, the second gate structures being spaced apart from each other by a second distance, a first spacer on sidewalls of the first gate structures, a dielectric layer on the first spacer, a second spacer on sidewalls of the second gate structures, and a third spacer on the second spacer.Type: GrantFiled: January 8, 2016Date of Patent: March 7, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Yoon Hae Kim, Jin Wook Lee, Jong Ki Jung, Myung II Kang, Kwang Yong Yang, Kwan Heum Lee, Byeong Chan Lee
-
Patent number: 9590104Abstract: A method for forming a semiconductor device includes forming a fin structure on a substrate, forming a shallow trench isolation region adjacent the fin structure so that an upper portion of the fin structure is exposed, forming a dummy gate over the exposed fin structure, forming an interlayer dielectric layer around the dummy gate, removing the dummy gate to expose the fin structure, and after removing the dummy gate, introducing a strain into a crystalline structure of the exposed fin structure.Type: GrantFiled: October 25, 2013Date of Patent: March 7, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon Jhy Liaw
-
Patent number: 9590105Abstract: A semiconductor device and methods of formation are provided. The semiconductor device includes a first metal alloy over a first active region of a fin and a second metal alloy over a second active region of the fin. A conductive layer is over a channel region of the fin. A semiconductive layer is over the conductive layer. The conductive layer over the channel region suppresses current leakage and the semiconductive layer over the conductive layer reduces electro flux from a source to a drain, as compared to a channel region that does not have such a conductive layer or a semiconductive layer over a conductive layer. The semiconductor device having the first metal alloy as at least one of the source or drain requires a lower activation temperature than a semiconductor device that does not have a metal alloy as a source or a drain.Type: GrantFiled: April 7, 2014Date of Patent: March 7, 2017Assignees: National Chiao-Tung University, Taiwan Semiconductor Manufacturing Company LimitedInventors: Chao-Hsin Chien, Cheng-Ting Chung, Che-Wei Chen
-
Patent number: 9590106Abstract: A semiconductor device includes at least one semiconductor fin on an upper surface of a substrate. The at least one semiconductor fin includes a channel region interposed between opposing source/drain regions. A gate stack is on the upper surface of the substrate and wraps around sidewalls and an upper surface of only the channel region. The channel region is a dual channel region including a buried channel portion and a surface channel portion that completely surrounds the buried channel.Type: GrantFiled: March 2, 2016Date of Patent: March 7, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jie Deng, Pranita Kerber, Qiqing C. Ouyang, Alexander Reznicek
-
Patent number: 9590107Abstract: Embodiments of the invention provide methods for forming III-V gate-all-around field effect transistors on silicon substrates that utilize Aspect-Ratio Trapping to reduce or eliminate dislocation defects associated with lattice mismatches. A field dielectric material defining a trench is formed on a crystalline silicon substrate. A channel feature comprising III-V material is subsequently formed inside the trench. Source/drain features are then formed at both ends of the channel feature inside the trench. Lastly, gate dielectric layers and a gate feature are formed surrounding a portion of the channel feature.Type: GrantFiled: June 25, 2015Date of Patent: March 7, 2017Assignee: International Business Machines CorporationInventors: Guy M. Cohen, Sanghoon Lee
-
Patent number: 9590108Abstract: A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.Type: GrantFiled: January 14, 2016Date of Patent: March 7, 2017Assignee: International Business Machines CorporationInventors: John B. Campi, Jr., Robert J. Gauthier, Jr., Rahul Mishra, Souvick Mitra, Mujahid Muhammad
-
Patent number: 9590109Abstract: A semiconductor device that operates at high speed. A semiconductor device with favorable switching characteristics. A highly integrated semiconductor device. A miniaturized semiconductor device. The semiconductor device is formed by: forming a semiconductor film including an opening, on an insulating surface; forming a conductive film over the semiconductor film and in the opening, and removing the conductive film over the semiconductor film to form a conductive pillar in the opening; forming an island-shaped mask over the conductive pillar and the semiconductor film; etching the conductive pillar and the semiconductor film using the mask to form a first electrode and a first semiconductor; forming a gate insulating film on a top surface and a side surface of the first semiconductor; and forming a gate electrode that is in contact with a top surface of the gate insulating film and faces the top surface and the side surface of the first semiconductor.Type: GrantFiled: August 19, 2014Date of Patent: March 7, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hidekazu Miyairi, Kazuya Hanaoka, Suguru Hondo, Shunpei Yamazaki
-
Patent number: 9590110Abstract: A sensor circuit with high sensitivity to ultraviolet light. Ultraviolet light is detected using a transistor containing an oxide semiconductor. When the transistor is irradiated with ultraviolet light or light including ultraviolet light, the drain current of the transistor depends on the intensity of the ultraviolet light. Data on the intensity of ultraviolet light is obtained by measuring the drain current of the transistor. Since the band gap of an oxide semiconductor is wider than that of silicon, the sensitivity to light with a wavelength in the ultraviolet region can be increased. Furthermore, an increase in dark current caused by temperature rise in the sensor circuit can be suppressed, resulting in a wider allowable ambient temperature range of the sensor circuit.Type: GrantFiled: September 4, 2014Date of Patent: March 7, 2017Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventor: Takeshi Osada
-
Patent number: 9590111Abstract: A highly reliable semiconductor device including an oxide semiconductor is provided. The concentration of impurities contained in an oxide semiconductor of a semiconductor device including the oxide semiconductor is reduced. Electrical characteristics of a semiconductor device including an oxide semiconductor are improved. The semiconductor device includes an oxide semiconductor film; a gate electrode layer overlapping with the oxide semiconductor film; a gate insulating film between the oxide semiconductor film and the gate electrode layer; a metal oxide film overlapping with the gate insulating film with the oxide semiconductor film positioned therebetween; and a source electrode layer and a drain electrode layer electrically connected to the oxide semiconductor film. The metal oxide film covers at least a channel region and a side surface of the oxide semiconductor film.Type: GrantFiled: November 4, 2014Date of Patent: March 7, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
-
Patent number: 9590112Abstract: An object is to provide a semiconductor device including an oxide semiconductor, which has stable electric characteristics and high reliability. In a transistor including an oxide semiconductor film, the oxide semiconductor film is subjected to dehydration or dehydrogenation performed by heat treatment. In addition, as a gate insulating film in contact with the oxide semiconductor film, an insulating film containing oxygen, preferably, a gate insulating film including a region containing oxygen with a higher proportion than the stoichiometric composition is used. Thus, oxygen is supplied from the gate insulating film to the oxide semiconductor film. Further, a metal oxide film is used as part of the gate insulating film, whereby reincorporation of an impurity such as hydrogen or water into the oxide semiconductor is suppressed.Type: GrantFiled: November 17, 2014Date of Patent: March 7, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
-
Patent number: 9590113Abstract: The present invention generally relates to TFTs and methods for fabricating TFTs. For either back channel etch TFTs or for etch stop TFTs, multiple layers for the passivation layer or the etch stop layers permits a very dense capping layer to be formed over a less dense back channel protection layer. The capping layer can be sufficiently dense so that few pin holes are present and thus, hydrogen may not pass through to the semiconductor layer. As such, hydrogen containing precursors may be used for the capping layer deposition.Type: GrantFiled: March 4, 2014Date of Patent: March 7, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Dong-kil Yim, Tae Kyung Won, Seon-Mee Cho, John M. White
-
Patent number: 9590114Abstract: A semiconductor device is provided, comprising a substrate with a first insulating film formed thereon, and a transistor formed on the first insulating film. The transistor at least comprises an oxide semiconductor layer formed on the first insulating film, a first gate insulation film formed on the oxide semiconductor layer, a gate electrode formed above the first gate insulation film, and spacers formed on the oxide semiconductor layer. The spacers at least cover the sidewalls of the first gate insulation film and the sidewalls of the gate electrode. The gate electrode has a gate width and the first gate insulation film has a first width, wherein the gate width is different from the first width.Type: GrantFiled: October 2, 2015Date of Patent: March 7, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventor: Yu-Cheng Tung
-
Patent number: 9590115Abstract: A semiconductor device includes a first conductor, a second conductor, a first insulator, a second insulator, a third insulator, a semiconductor, and an electron trap layer. The semiconductor includes a channel formation region. The electron trap layer overlaps with the channel formation region with the second insulator interposed therebetween. The first conductor overlaps with the channel formation region with the first insulator interposed therebetween. The second conductor overlaps with the electron trap layer with the third insulator interposed therebetween. The second conductor does not overlap with the channel formation region.Type: GrantFiled: November 16, 2015Date of Patent: March 7, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Tetsuhiro Tanaka, Daisuke Matsubayashi, Kazuki Tanemura
-
Patent number: 9590117Abstract: A nonvolatile semiconductor memory device includes a charge storage layer on a first insulating film, a second insulating film which is provided on the charge storage layer, formed of layers, and a control gate electrode on the second insulating film. The second insulating film includes a bottom layer (A) provided just above the charge storage layer, a top layer (C) provided just below the control gate electrode, and a middle layer (B) provided between the bottom layer (A) and the top layer (C). The middle layer (B) has higher barrier height and lower dielectric constant than both the bottom layer (A) and the top layer (C). The average coordination number of the middle layer (B) is smaller than both the average coordination number of the top layer (C) and the average coordination number of the bottom layer (A).Type: GrantFiled: May 31, 2016Date of Patent: March 7, 2017Assignee: KABUSHIKI KAISHA TOSHIBAInventor: Naoki Yasuda
-
Patent number: 9590118Abstract: The present disclosure provides, in a first aspect, a semiconductor device structure, including an SOI substrate comprising a semiconductor base substrate, a buried insulating structure formed on the semiconductor base substrate and a semiconductor film formed on the buried insulating structure, wherein the buried insulating structure comprises a multilayer stack having a nitride layer interposed between two oxide layers. The semiconductor device structure further includes a semiconductor device formed in and above an active region of the SOI substrate, and a back bias contact which is electrically connected to the semiconductor base substrate below the semiconductor device.Type: GrantFiled: September 14, 2015Date of Patent: March 7, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Elliot John Smith, Sven Beyer, Nigel Chan, Jan Hoentschel
-
Patent number: 9590119Abstract: A device comprises a semiconductor substrate having first and second implant regions and an electrode above and between the first and second implant regions of a first dopant type. A contact structure is in direct contact with the first and second implant regions and the electrode. A third implant region has a second dopant type different from the first dopant type. A bulk contact is provided on the third implant.Type: GrantFiled: January 13, 2012Date of Patent: March 7, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Chung-Hui Chen
-
Patent number: 9590120Abstract: A capacitor structure is described. A capacitor structure including a substrate; a source/drain region formed in the substrate to form an active area having an active area width; and a plurality of gates formed above the substrate. The source/drain region having a reflection symmetry. Each of the plurality of gates having a gate width. The gate width is configured to be less than said active area width. And, the plurality of gates are formed to have reflection symmetry.Type: GrantFiled: March 30, 2016Date of Patent: March 7, 2017Assignee: TDK CorporationInventors: Rien Gahlsdorf, Jianwen Bao
-
Patent number: 9590121Abstract: An optoelectronic device includes a first electrode and a second electrode facing each other, a photoelectric conversion layer between the first electrode and the second electrode, and a buffer layer between at least one of the photoelectric conversion layer and the first electrode, and the photoelectric conversion layer and the second electrode, the buffer layer including one of MoOx1 (2.58?x1<3.0), ZnOx2 (1.0?x2<2.0), TiOx3 (1.5?x3<2.0), VOx4 (1.5?x4<2.0), TaOx5 (1.0?x5<2.5), WOx6 (2.0<x6<3.0), and a combination thereof.Type: GrantFiled: June 19, 2015Date of Patent: March 7, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Seong Heon Kim, Dongjin Yun, Sung Heo, Kyu Sik Kim, Satoh Ryuichi, Gyeongsu Park, Hyung-Ik Lee
-
Patent number: 9590122Abstract: An imaging device is disclosed. The imaging device has a housing, a detector positioned within the housing and has a field of view encompassing one or more target area within the housing to be imaged, a wide-angle lens operatively coupled to the detector, and a support positioned at the target area and configured to receive one or more test component. The wide-angle lens is operatively coupled to the detector such that the detector receives image data of the target area through the wide-angle lens.Type: GrantFiled: May 17, 2013Date of Patent: March 7, 2017Assignee: Siemens Healthcare Diagnostics Inc.Inventor: Paul Murray
-
Patent number: 9590123Abstract: A solar cell supporting layer stack for mechanically supporting a solar cell is described. The solar cell includes: a rigid foam layer; one or more skin layers disposed adjacent to said rigid foam layer; and wherein said rigid foam layer and said one or more skin layers capable of providing mechanical support to said solar cell when said supporting layer stack is disposed adjacent to said solar cell.Type: GrantFiled: October 12, 2012Date of Patent: March 7, 2017Assignee: GIGA SOLAR FPCInventor: Thomas G. Hood
-
Patent number: 9590124Abstract: A photoelectric conversion device including a transparent substrate, a first electrode, at least a photoelectric conversion layer and a second electrode is provided. The first electrode is located on the transparent substrate. The transparent substrate means that at least some parts of the substrate area are transparent. At least a photoelectric conversion layer is located on the first electrode, wherein the optical light transmittance of the photoelectric conversion layer in at least a portion of the visible spectrum is higher than 20%. The second electrode is located on the photoelectric conversion layer.Type: GrantFiled: June 29, 2012Date of Patent: March 7, 2017Inventor: Hung-Ta Liu
-
Patent number: 9590126Abstract: The present invention relates to a solar cell assembly that includes a solar cell attached to a bonding pad and a cooling substrate, wherein the bonding pad is attached to a surface of the cooling substrate by a thermally conductive adhesive and electrically contacted to the bonding pad and cooling substrate by a bonding wire. Alternatively, the bonding pad is attached to a surface of the cooling substrate by a thermally and electrically conductive adhesive.Type: GrantFiled: February 23, 2011Date of Patent: March 7, 2017Assignee: Soitec Solar GmbHInventors: Martin Ziegler, Sascha Van Riesen
-
Patent number: 9590127Abstract: An image sensor cell formed inside and on top of a substrate of a first conductivity type, including: a read region of the second conductivity type; and, adjacent to the read region, a storage region of the first conductivity type topped with a first insulated gate electrode. The first electrode is arranged to receive, in a first operating mode, a first voltage causing the inversion of the conductivity type of the storage region, so that the storage region behaves as an extension of the read region, and, in a second operating mode, a second voltage causing no inversion of the storage region.Type: GrantFiled: July 18, 2014Date of Patent: March 7, 2017Assignee: STMicroelectronics (Crolles 2) SASInventor: Francois Roy