Patents Issued in March 28, 2017
  • Patent number: 9608082
    Abstract: A switching device includes an opening disposed in a substrate. A source is disposed adjacent the opening and has a contact surface parallel to sidewalls of the opening. A drain is disposed adjacent the opening and has a contact surface parallel to the sidewalls of the opening. A moveable gate stack includes a channel and a gate. The moveable gate stack is disposed within the opening.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: March 28, 2017
    Assignee: Infineon Technologies AG
    Inventor: Michael Hutzler
  • Patent number: 9608083
    Abstract: A semiconductor device includes a first semiconductor layer formed over a substrate, a second semiconductor layer formed over the first semiconductor layer, a source electrode and a drain electrode formed over the second semiconductor layer, an insulating film formed over the second semiconductor layer, a gate electrode formed over the insulating film, and a protection film covering the insulating film, the protection film being formed by thermal CVD, thermal ALD, or vacuum vapor deposition.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: March 28, 2017
    Assignee: FUJITSU LIMITED
    Inventors: Shirou Ozaki, Masahito Kanamura, Norikazu Nakamura, Toyoo Miyajima, Masayuki Takeda, Keiji Watanabe, Toshihide Kikkawa, Kenji Imanishi, Toshihiro Ohki, Tadahiro Imada
  • Patent number: 9608084
    Abstract: Embodiments of the present disclosure describe apparatuses, methods, and systems of an integrated circuit (IC) device. The IC device includes a diffusion control layer as part of an emitter epitaxial structure. The IC device may utilize a common metallization scheme to simultaneously form an emitter contact and a base contact. Other embodiments may also be described and/or claimed.
    Type: Grant
    Filed: October 29, 2015
    Date of Patent: March 28, 2017
    Assignee: Qorvo US, Inc.
    Inventors: Timothy S. Henderson, Sheila K. Hurtt
  • Patent number: 9608085
    Abstract: A predisposed high electron mobility transistor (HEMT) is disclosed. The predisposed HEMT includes a buffer layer, a HEMT channel layer on the buffer layer, a first HEMT barrier layer over the HEMT channel layer, and a HEMT cap layer on the first HEMT barrier layer. The HEMT cap layer has a drain region, a source region, and a gate region. Further, the HEMT cap layer has a continuous surface on the drain region, the source region, and the gate region. When no external voltage is applied between the source region and the gate region, the gate region either depletes carriers from the HEMT channel layer or provides carriers to the HEMT channel layer, thereby selecting a predisposed state of the predisposed HEMT.
    Type: Grant
    Filed: October 1, 2012
    Date of Patent: March 28, 2017
    Assignee: Cree, Inc.
    Inventor: Christer Hallin
  • Patent number: 9608086
    Abstract: Embodiments of the present invention provide a metal gate structure and method of formation. In the replacement metal gate (RMG) process flow, the gate cut process is performed after the metal gate is formed. This allows for a reduced margin between the end of the gate and an adjacent fin. It enables a thinner sacrificial layer on top of the dummy gate, since the gate cut step is deferred. The thinner sacrificial layer improves device quality by reducing the adverse effect of shadowing during implantation. Furthermore, in this process flow, the work function metal layer is terminated along the semiconductor substrate by a capping layer, which reduces undesirable shifts in threshold voltage that occurred in prior methods and structures.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: March 28, 2017
    Assignee: GLOBAL FOUNDRIES INC.
    Inventors: Andy Chih-Hung Wei, Dae G. Yang, Mariappan Hariharaputhiran, Jing Wan
  • Patent number: 9608087
    Abstract: Semiconductor devices and methods for forming the devices with spacer chamfering. One method includes, for instance: obtaining a wafer with at least one source, at least one drain, and at least one fin; forming at least one sacrificial gate with at least one barrier layer; forming a first set of spacers adjacent to the at least one sacrificial gate; forming at least one second set of spacers adjacent to the first set of spacers; and etching to remove a portion of the first set of spacers above the at least one barrier layer to form a widened opening. An intermediate semiconductor device is also disclosed.
    Type: Grant
    Filed: April 8, 2015
    Date of Patent: March 28, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventor: Hui Zang
  • Patent number: 9608088
    Abstract: An integrated circuit includes an extended drain MOS transistor with parallel alternating active gap drift regions and field gap drift regions. The extended drain MOS transistor includes a gate having field plates over the field gap drift regions. The extended drain MOS transistor may be formed in a symmetric nested configuration. A process for forming an integrated circuit containing an extended drain MOS transistor provides parallel alternating active gap drift regions and field gap drift regions with a gate having field plates over the field gap drift regions.
    Type: Grant
    Filed: May 22, 2014
    Date of Patent: March 28, 2017
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Sameer P. Pendharkar, John Lin
  • Patent number: 9608089
    Abstract: Provided is a method of manufacturing a thin-film transistor substrate, the method includes forming a semiconductor pattern layer on a substrate. A first insulating film is formed on the semiconductor pattern layer. A metal pattern layer including a gate electrode and first and second alignment electrodes respectively spaced apart from two sides of the gate electrode is formed on the first insulating film. A cover layer covering the gate electrode is formed. The first and second alignment electrodes are removed. A first doping process is performed by doping the semiconductor pattern layer with a first impurity by using the cover layer as a mask. The cover layer is removed. A second doping process is performed by doping the semiconductor pattern layer with a second impurity having a lower impurity concentration than the first impurity by using the gate electrode as a mask.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: March 28, 2017
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jongyun Kim, Waljun Kim, Junghyun Kim, Kiwan Ahn
  • Patent number: 9608090
    Abstract: A method for fabricating semiconductor device is disclosed. First, a substrate, and a sacrificial mandrel is formed on the substrate, in which the sacrificial mandrel includes a first side and a second side with the indentation. Next, a spacer is formed adjacent to the first side and the second side of the sacrificial mandrel, the sacrificial mandrel is removed, and the spacer is used to remove part of the substrate for forming a fin-shaped structure and a dummy fin-shaped structure.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: March 28, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: En-Chiuan Liou
  • Patent number: 9608091
    Abstract: The improvement of the reliability of a semiconductor device having a split gate type MONOS memory is implemented. An ONO film and a second polysilicon film are sequentially formed so as to fill between a first polysilicon film and a dummy gate electrode. Then, the dummy gate electrode is removed. Then, the top surfaces of the first and second polysilicon films are polished, thereby to form a memory gate electrode formed of the second polysilicon film at the sidewall of a control gate electrode formed of the first polysilicon film via the ONO film. As a result, the memory gate electrode high in perpendicularity of the sidewall, and uniform in film thickness is formed.
    Type: Grant
    Filed: October 23, 2015
    Date of Patent: March 28, 2017
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventor: Tatsuyoshi Mihara
  • Patent number: 9608092
    Abstract: A method for forming a field-effect semiconductor device includes: providing a wafer having a main surface and a first semiconductor layer of a first conductivity type; forming at least two trenches from the main surface partly into the first semiconductor layer so that each of the at least two trenches includes, in a vertical cross-section substantially orthogonal to the main surface, a side wall and a bottom wall, and that a semiconductor mesa is formed between the side walls of the at least two trenches; forming at least two second semiconductor regions of a second conductivity type in the first semiconductor layer so that the bottom wall of each of the at least two trenches adjoins one of the at least two second semiconductor regions; and forming a rectifying junction at the side wall of at least one of the at least two trenches.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: March 28, 2017
    Assignee: Infineon Technologies AG
    Inventors: Jens Konrath, Hans-Joachim Schulze, Roland Rupp, Wolfgang Werner, Frank Pfirsch
  • Patent number: 9608094
    Abstract: A Tunnel Field-Effect Transistor (TFET) device is provided comprising at least one heterosection between the source region and the channel region. The at least one heterosection has a low dielectric constant and thickness below 10 nm. Additionally a pocket region and another heterosection may be added in between the at least one heterosection and the channel region.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: March 28, 2017
    Assignee: IMEC VZW
    Inventors: Anne S. Verhulst, Geoffrey Pourtois, Rita Rooyackers
  • Patent number: 9608095
    Abstract: Concerning a thermoelectric conversion element, it is desired to provide a new spin current to charge current conversion material. A thermoelectric conversion element includes a magnetic layer possessing in-plane magnetization, and an electromotive layer magnetically coupled to the magnetic layer. The electromotive layer is formed of a carbon material, possesses anisotropy of electric conductivity, and further includes an additive.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: March 28, 2017
    Assignee: NEC Corporation
    Inventors: Masahiko Ishida, Akihiro Kirihara, Shigeru Koumoto
  • Patent number: 9608096
    Abstract: Device structure and fabrication methods for a bipolar junction transistor. One or more trench isolation regions are formed in a substrate to define a device region having a first width. A protect layer is formed on a top surface of the one or more trench isolation regions and a top surface of the device region. An opening is formed in the protect layer. The opening is coincides with the top surface of the first device region and has a second width that is less than or equal to the first width of the first device region. A base layer is formed that has a first section on the device region inside the first opening and a second section on the protect layer.
    Type: Grant
    Filed: October 2, 2015
    Date of Patent: March 28, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Renata Camillo-Castillo, Qizhi Liu, Vibhor Jain, James W. Adkisson, David L. Harame
  • Patent number: 9608097
    Abstract: The present invention provides a lateral IGBT transistor comprising a bipolar transistor and an IGFET. The lateral IGBT comprises a low resistive connection between the drain of the IGFET and the base of the bipolar transistor, and an isolating layer arranged between the IGFET and the bipolar transistor. The novel structure provides a device which is immune to latch and gives high gain and reliability. The structure can be realized with standard CMOS technology available at foundries.
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: March 28, 2017
    Assignee: K.EKLUND INNOVATION
    Inventor: Klas-Hakan Eklund
  • Patent number: 9608098
    Abstract: One embodiment of the present invention relates to a silicon-controlled-rectifier (SCR). The SCR includes a longitudinal silicon fin extending between an anode and a cathode and including a junction region there between. One or more first transverse fins traverses the longitudinal fin at one or more respective tapping points positioned between the anode and the junction region. Other devices and methods are also disclosed.
    Type: Grant
    Filed: February 5, 2015
    Date of Patent: March 28, 2017
    Assignee: Intel Deutschland GmbH
    Inventors: Mayank Shrivastava, Christian Russ, Harald Gossner
  • Patent number: 9608099
    Abstract: A method for forming a nanowire device comprises forming a fin on a substrate, depositing a first layer of insulator material on the substrate, etching to remove portions of the first layer of insulator material to reduce a thickness of the first layer of insulator material, epitaxially growing a first layer of semiconductor material on exposed sidewall portions of the fin, depositing a second layer of insulator material on the first layer of insulator material, etching to remove portions of the second layer of insulator material to reduce a thickness of the second layer of insulator material, and etching to remove portions of the first layer of semiconductor material to expose portions of the fin and form a first nanowire and a second nanowire.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: March 28, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Wilfried E. Haensch, Effendi Leobandung, Tenko Yamashita
  • Patent number: 9608100
    Abstract: According to example embodiments, a high electron mobility transistor (HEMT) includes: stack including a buffer layer, a channel layer containing a two dimensional electron gas (2DEG) channel, and a channel supply layer sequentially stacked on each other, the stack defining a first hole and a second hole that are spaced apart from each other. A first electrode, a second electrode, and third electrode are spaced apart from each other along a first surface of the channel supply layer. A first pad is on the buffer layer and extends through the first hole of the stack to the first electrode. A second pad is on the buffer layer and extends through the second hole of the stack to the second electrode. A third pad is under the stack and electrically connected to the third electrode.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: March 28, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyuk-soon Choi, Jong-seob Kim, Jai-kwang Shin, Jae-joon Oh, Jong-bong Ha, In-jun Hwang
  • Patent number: 9608101
    Abstract: The present invention concerns semiconductor devices comprising a source electrode, a drain electrode and a semiconducting layer consisting of a single or double 2-dimensional layer(s) made from one of the following materials: MoS2, MoSe2, WS2, WSe2, MoTe2 or WTe2. Replacing a stack by only one or two 2-dimensional layer(s) of MoS2, MoSe2, WS2, or WSe2, MoTe2 or WTe2 provides an enhanced electrostatic control, low power dissipation, direct band gap and tunability.
    Type: Grant
    Filed: January 4, 2012
    Date of Patent: March 28, 2017
    Assignee: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
    Inventors: Andras Kis, Branimir Radisavljevic
  • Patent number: 9608102
    Abstract: Gallium nitride material devices and methods associated with the same. In some embodiments, the devices may be transistors which include a conductive structure connected to a source electrode. The conductive structure may form a source field plate which can be formed over a dielectric material and can extend in the direction of the gate electrode of the transistor. The source field plate may reduce the electrical field (e.g., peak electrical field and/or integrated electrical field) in the region of the device between the gate electrode and the drain electrode which can lead to a number of advantages including reduced gate-drain feedback capacitance, reduced surface electron concentration, increased breakdown voltage, and improved device reliability. These advantages enable the gallium nitride material transistors to operate at high drain efficiencies and/or high output powers. The devices can be used in RF power applications, amongst others.
    Type: Grant
    Filed: November 30, 2006
    Date of Patent: March 28, 2017
    Assignee: Infineon Technologies Americas Corp.
    Inventors: Jerry Wayne Johnson, Sameer Singhal, Allen W. Hanson, Robert Joseph Therrien
  • Patent number: 9608103
    Abstract: A method for forming a high electron mobility transistor (HEMT) device with a plurality of alternating layers of one or more undoped gallium nitride (GaN) layers and one or more carbon doped gallium nitride layers (c-GaN), and an HEMT device formed by the method is disclosed. In one embodiment, the method includes forming a channel layer stack on a substrate, the channel layer stack having a plurality of alternating layers of one or more undoped gallium nitride (GaN) layers and one or more carbon doped gallium nitride layers (c-GaN). The method further includes forming a barrier layer on the channel layer stack. In one embodiment, the channel layer stack is formed by growing each of the one or more undoped gallium nitride (GaN) layers in growth conditions that suppress the incorporation of carbon in gallium nitride, and growing each of the one or more carbon doped gallium nitride (c-GaN) layers in growth conditions that promote the incorporation of carbon in gallium nitride.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: March 28, 2017
    Assignee: Toshiba Corporation
    Inventors: Jeffrey Craig Ramer, Karl Knieriem
  • Patent number: 9608104
    Abstract: A silicon carbide semiconductor device includes: a vertical MOSFET having: a semiconductor substrate including a high-concentration impurity layer and a drift layer; a base region; a source region; a trench gate structure; a source electrode; and a drain electrode. The base region has a high-concentration base region and a low-concentration base region having a second conductivity type with an impurity concentration lower than the high-concentration base region, which are stacked each other. Each of the high-concentration base region and the low-concentration base region contacts a side surface of the trench.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: March 28, 2017
    Assignee: DENSO CORPORATION
    Inventors: Yuichi Takeuchi, Naohiro Suzuki, Jun Morimoto, Narumasa Soejima
  • Patent number: 9608105
    Abstract: The density of a transistor array is increased by forming one or more deep trench isolation structures in a semiconductor material. The deep trench isolation structures laterally surround the transistors in the array. The deep trench isolation structures limit the lateral diffusion of dopants and the lateral movement of charge carriers.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: March 28, 2017
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Takehito Tamura, Binghua Hu, Sameer Pendharkar, Guru Mathur
  • Patent number: 9608106
    Abstract: A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes a first junction region formed at the bottom of a vertical pillar, a bit line formed below the first junction region, and an insulation film formed below the bit line. As a result, the 4F2-sized semiconductor device is provided and the bit line is configured in the form of a laminated structure of a conductive layer and a polysilicon layer, so that bit line resistance is reduced. In addition, the semiconductor device reduces ohmic contact resistance by forming silicide between the conductive layer and the polysilicon layer, and includes an insulation film at a position between the semiconductor substrate and the bit line, resulting in reduction of bit line capacitance. Therefore, the sensing margin of the semiconductor device is increased and the data retention time is also increased.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: March 28, 2017
    Assignee: SK HYNIX INC.
    Inventors: Tae Su Jang, Min Soo Yoo
  • Patent number: 9608107
    Abstract: A semiconductor device is provided. The device may include a semiconductor layer; and a doped well disposed in the semiconductor layer and having a first conductivity type. The device may also include a drain region, a source region, and a body region, where the source and body regions may operate in different voltages. Further, the device may include a first doped region having a second conductivity type, the first doped region disposed between the source region and the doped well; and a second doped region having the first conductivity type and disposed under the source region. The device may include a third doped region having the second conductivity type and disposed in the doped well; and a fourth doped region disposed above the third doped region, the fourth doped region having the first conductivity type. Additionally, the device may include a gate and a field plate.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: March 28, 2017
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Tsung-Hsiung Lee, Shin-Cheng Lin
  • Patent number: 9608108
    Abstract: A semiconductor substrate has a main surface with an n type offset region having a trench portion formed of a plurality of trenches extending in a direction from an n+ drain region toward an n+ source region. The plurality of trenches each have a conducting layer therein extending in the main surface in the direction from the n+ drain region toward the n+ source region.
    Type: Grant
    Filed: August 25, 2015
    Date of Patent: March 28, 2017
    Assignee: Renesas Electronics Corporation
    Inventors: Mikio Tsujiuchi, Kouji Tanaka, Yasuki Yoshihisa, Shunji Kubo
  • Patent number: 9608109
    Abstract: An n-channel DEMOS device a pwell finger defining a length and a width direction formed within a doped surface layer. A first nwell is on one side of the pwell finger including a source and a second nwell on an opposite side of the pwell finger includes a drain. A gate stack is over a channel region the pwell finger between the source and drain. A field dielectric layer is on the surface layer defining a first active area including a first active area boundary along the width direction (WD boundary) that has the channel region therein. A first p-type layer is outside the first active area at least a first minimum distance from the WD boundary and a second p-type layer is doped less and is closer to the WD boundary than the first minimum distance.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: March 28, 2017
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Chin-Yu Tsai, Imran Khan, Shaoping Tang
  • Patent number: 9608110
    Abstract: The present disclosure provides methods of forming a semiconductor circuit element and a semiconductor circuit element, wherein the semiconductor circuit element includes a first semiconductor device with a first gate structure disposed over a first active region of a semiconductor substrate and a second semiconductor device with a second gate structure disposed over a second active region of the semiconductor substrate, the first gate structure comprising a ferroelectric material buried into the first active region before a gate electrode material is formed on the ferroelectric material and the second gate structure comprising a high-k material different from the ferroelectric material.
    Type: Grant
    Filed: July 29, 2015
    Date of Patent: March 28, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Peter Baars, Carsten Grass
  • Patent number: 9608111
    Abstract: Some embodiments include transistor constructions having a first insulative structure lining a recess within a base. A first conductive structure lines an interior of the first insulative structure, and a ferroelectric structure lines an interior of the first conductive structure. A second conductive structure is within a lower region of the ferroelectric structure, and the second conductive structure has an uppermost surface beneath an uppermost surface of the first conductive structure. A second insulative structure is over the second conductive structure and within the ferroelectric structure. A pair of source/drain regions are adjacent an upper region of the first insulative structure and are on opposing sides of the first insulative structure from one another.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: March 28, 2017
    Assignee: Micro Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 9608112
    Abstract: The present disclosure provides, in accordance with some illustrative embodiments, a method of forming a semiconductor device, the method including providing an SOI substrate with an active semiconductor layer disposed on a buried insulating material layer, which is in turn formed on a base substrate material, forming a gate structure on the active semiconductor layer in an active region of the SOI substrate, partially exposing the base substrate for forming at least one bulk exposed region after the gate structure is formed, and forming a contact structure for contacting the at least one bulk exposed region.
    Type: Grant
    Filed: August 3, 2015
    Date of Patent: March 28, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Elliot John Smith, Sven Beyer, Tom Hasche, Jan Hoentschel
  • Patent number: 9608113
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a gate stack over the semiconductor substrate. The semiconductor device structure also includes a sealing structure over a sidewall of the gate stack, and a width ratio of the sealing structure to the gate stack is in a range from about 0.05 to about 0.7. The semiconductor device structure further includes an etch stop layer over the semiconductor substrate, the gate stack, and the sealing structure. The etch stop layer is in contact with the sealing structure.
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: March 28, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Che-Cheng Chang, Yi-Jen Chen, Yung-Jung Chang
  • Patent number: 9608114
    Abstract: A semiconductor device includes a buffer layer on a substrate, the buffer layer having a lattice constant different from that of the substrate, a fin structure upwardly protruding from the buffer layer, a gate electrode crossing over the fin structure, a cladding layer at a side of the fin structure and covering a top surface and sidewalls of the fin structure, and an interfacial layer between the cladding layer and the fin structure, the interfacial layer including a same element as the buffer layer.
    Type: Grant
    Filed: January 7, 2016
    Date of Patent: March 28, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dongwoo Kim, Seung Hun Lee, Sunjung Kim, Hyun Jung Lee, Bonyoung Koo
  • Patent number: 9608115
    Abstract: FinFET and fabrication method thereof. The FinFET fabrication method includes providing a semiconductor substrate; forming a plurality of trenches in the semiconductor substrate, forming a buffer layer on the semiconductor substrate by filling the trenches and covering the semiconductor substrate, and forming a fin body by etching the buffer layer. The FinFET fabrication method may further includes forming a insulation layer on the buffer layer around the fin body; forming a channel layer on the surface of the fin body; forming a gate structure across the fin body; forming source/drain regions in the channel layer on two sides of the gate structure; and forming an electrode layer on the source/drain regions.
    Type: Grant
    Filed: July 25, 2016
    Date of Patent: March 28, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventor: Deyuan Xiao
  • Patent number: 9608116
    Abstract: A device includes isolation regions extending into a semiconductor substrate, with a substrate strip between opposite portions of the isolation regions having a first width. A source/drain region has a portion overlapping the substrate strip, wherein an upper portion of the source/drain region has a second width greater than the first width. The upper portion of the source/drain region has substantially vertical sidewalls. A source/drain silicide region has inner sidewalls contacting the vertical sidewalls of the source/drain region.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: March 28, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng Ching, Ching-Wei Tsai, Chi-Wen Liu, Chih-Hao Wang, Ying-Keung Leung
  • Patent number: 9608117
    Abstract: A semiconductor device includes an active fin structure extending in a first direction, the active fin structure including protruding portions divided by a recess, a plurality of gate structures extending in a second direction crossing the first direction and covering the protruding portions of the active fin structure, a first epitaxial pattern in a lower portion of the recess between the gate structures, a second epitaxial pattern on a portion of the first epitaxial pattern, the second epitaxial pattern contacting a sidewall of the recess, and a third epitaxial pattern on the first and second epitaxial patterns, the third epitaxial pattern filling the recess.
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: March 28, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-Bum Kim, Nam Kyu Kim, Hyun-Ho Noh, Dong-Chan Suh, Byeong-Chan Lee, Su-Jin Jung, Jin-Yeong Joe, Bon-Young Koo
  • Patent number: 9608118
    Abstract: An array substrate, a display device and a method of producing the array substrate are provided, and the array substrate includes a substrate and a thin film field effect transistor and a data line formed on the substrate, and the thin film field effect transistor includes a gate electrode, an active layer, a source electrode and a drain electrode, a gate insulating layer is formed between the gate electrode and the active layer, and the array substrate includes: a protection layer formed between the gate insulating layer and the data line and being in direct contact with the data line; and the protection layer is provided on the same layer with and has the same material with the active layer.
    Type: Grant
    Filed: December 3, 2013
    Date of Patent: March 28, 2017
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Xiangyang Xu, Lei Du, Sheng Wang
  • Patent number: 9608119
    Abstract: Methods for fabricating semiconductor-metal-on-insulator (SMOI) structures include forming an acceptor wafer including an insulator material on a first semiconductor substrate, forming a donor wafer including a conductive material and an amorphous silicon material on a second semiconductor substrate, and bonding the amorphous silicon material of the donor wafer to the insulator material of the acceptor wafer. SMOI structures formed from such methods are also disclosed, as are semiconductor devices including such SMOI structures.
    Type: Grant
    Filed: March 2, 2010
    Date of Patent: March 28, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Ming Zhang, Andrew M. Bayless, John K. Zahurak
  • Patent number: 9608120
    Abstract: A semiconductor device including a substrate, at least one gate electrode, at least two silicon oxide layers comprising a first silicon oxide layer and a second silicon oxide layer, wherein the first silicon oxide layer is nearer to the substrate than the second silicon oxide layer, and wherein a thickness of the first silicon oxide layer is greater than or equal to a thickness of the second silicon oxide layer, and a semiconductor layer disposed between at least a portion of the first silicon oxide layer and at least a portion of the second silicon oxide layer. Also, an image pick-up device and a radiation imaging device including the semiconductor device.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: March 28, 2017
    Assignee: SONY CORPORATION
    Inventor: Yasuhiro Yamada
  • Patent number: 9608121
    Abstract: To reduce defects in an oxide semiconductor film in a semiconductor device. To improve electrical characteristics of and reliability in the semiconductor device including an oxide semiconductor film. A method for manufacturing a semiconductor device includes the steps of forming a gate electrode and a gate insulating film over a substrate, forming an oxide semiconductor film over the gate insulating film, forming a pair of electrodes over the oxide semiconductor film, forming a first oxide insulating film over the oxide semiconductor film and the pair of electrodes by a plasma CVD method in which a film formation temperature is 280° C. or higher and 400° C. or lower, forming a second oxide insulating film over the first oxide insulating film, and performing heat treatment at a temperature of 150° C. to 400° C. inclusive, preferably 300° C. to 400° C. inclusive, further preferably 320° C. to 370° C. inclusive.
    Type: Grant
    Filed: January 14, 2014
    Date of Patent: March 28, 2017
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junichi Koezuka, Yukinori Shima, Suzunosuke Hiraishi, Kenichi Okazaki
  • Patent number: 9608122
    Abstract: A highly reliable semiconductor device with stable electrical characteristics and a method for manufacturing the semiconductor device are provided. A separation layer is formed between a source electrode and a drain electrode. The separation layer is formed using a material having a high insulating property. The separation layer between the source electrode and the drain electrode can reduce a difference in level of each of the source electrode and the drain electrode, which can improve coverage with a layer formed over the source electrode and the drain electrode. The separation layer between the source electrode and the drain electrode can prevent an unintended electrical short circuit of the source electrode and the drain electrode. The separation layer can be formed by introducing oxygen to a conductive layer.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: March 28, 2017
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 9608123
    Abstract: In a semiconductor device including a transistor in which an oxide semiconductor layer, a gate insulating layer, and a gate electrode layer on side surfaces of which sidewall insulating layers are provided are stacked in this order, a source electrode layer and a drain electrode layer are provided in contact with the oxide semiconductor layer and the sidewall insulating layers. In a process for manufacturing the semiconductor device, a conductive layer and an interlayer insulating layer are stacked to cover the oxide semiconductor layer, the sidewall insulating layers, and the gate electrode layer. Then, parts of the interlayer insulating layer and the conductive layer over the gate electrode layer are removed by a chemical mechanical polishing method, so that a source electrode layer and a drain electrode layer are formed. Before formation of the gate insulating layer, cleaning treatment is performed on the oxide semiconductor layer.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: March 28, 2017
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yuji Egi, Hideomi Suzawa, Shinya Sasagawa
  • Patent number: 9608124
    Abstract: Provided is a transistor which has favorable transistor characteristics and includes an oxide semiconductor, and a highly reliable semiconductor device which includes the transistor including the oxide semiconductor. In the semiconductor device including the transistor in which an oxide semiconductor film, a gate insulating film, and a gate electrode are stacked in this order, a sidewall insulating film is formed along side surfaces and a top surface of the gate electrode, and the oxide semiconductor film is subjected to etching treatment so as to have a cross shape having different lengths in the channel length direction or to have a larger length than a source electrode and a drain electrode in the channel width direction. Further, the source electrode and the drain electrode are formed in contact with the oxide semiconductor film.
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: March 28, 2017
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 9608125
    Abstract: The present disclosure provides a display substrate, its testing method and its manufacturing method. A first testing terminal is connected to a gate electrode of a first TFT, a second testing terminal is connected to a source electrode of the first TFT and a drain electrode of a second TFT, a third testing terminal is connected to a gate electrode of the second TFT, and a fourth testing terminal is connected to a drain electrode of the first TFT and a source electrode of the second TFT.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: March 28, 2017
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Zhenfei Cai, Jian Chen, Chaohuan Hsu, Zhengwei Chen
  • Patent number: 9608126
    Abstract: A semiconductor device and a method of fabricating the same, the semiconductor device includes a substrate, an interconnect structure, and an oxide semiconductor structure. The substrate has a first region and a second region. The interconnect structure is disposed on the substrate, in the first region. The oxide semiconductor structure is disposed over a hydrogen blocking layer, in the second region of the substrate.
    Type: Grant
    Filed: November 27, 2015
    Date of Patent: March 28, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Fu Hsu, Chun-Yuan Wu, Xu Yang Shen, Zhibiao Zhou, Qinggang Xing
  • Patent number: 9608127
    Abstract: Embodiments of the disclosed technology provide an amorphous oxide thin film transistor (TFT), a method for preparing an amorphous oxide TFT, and a display panel. The amorphous oxide thin film transistor includes: a gate electrode, a gate insulating layer, a semiconductor active layer, a source electrode and a drain electrode. The semiconductor active layer comprises a channel layer and an ohmic contact layer, and the channel layer has a greater content of oxygen than the ohmic contact layer; the channel layer contacts the gate insulating layer, and the ohmic contact layer comprises two separated ohmic contact regions, one of which contacts the source electrode and the other of which contacts the drain electrode.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: March 28, 2017
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Xiaodi Liu, Li Sun, Haijing Chen
  • Patent number: 9608128
    Abstract: A method for producing a body (1) consisting of doped semiconductor material having a defined mean free path length (lambda n) for free charge carriers (CP), and a mean free path length (lambda r) for the free charge carriers (CP) which is smaller than the defined mean free path length (lambda n) is disclosed. An epitactic crystal layer (20) consisting of doped semiconductor material is produced on a substrate crystal (10) consisting of semiconductor material having the defined mean free path length (lambda n), said crystal layer having, at least locally, a mean free path length (lambda r) for the free charge carriers (CP) which is smaller than the defined mean free path length (lambda n). The body (1) can also be produced by joining two crystal bodies (10?, 10?) consisting of doped semiconductor material.
    Type: Grant
    Filed: March 20, 2003
    Date of Patent: March 28, 2017
    Assignee: Infineon Technologies AG
    Inventors: Veli Kartal, Hans-Joachim Schulze
  • Patent number: 9608129
    Abstract: A semiconductor device includes a substrate, a well region of a first-conductivity type disposed in the substrate, a first impurity region of a second-conductivity type and having a plurality of branches disposed in the well region, a second impurity region of the first-conductivity type and having a plurality of branches, and a third impurity region of the first-conductivity type disposed in the well region. The second-conductivity type is opposite to the first-conductivity type. A portion of the first impurity region overlaps a portion of the third impurity region. The plurality of branches of the second impurity region are disposed in the third impurity region, and a portion of the third impurity region is disposed between the first impurity region and the second impurity region.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: March 28, 2017
    Assignee: Macronix International Co., Ltd.
    Inventors: Yu-Jui Chang, Cheng-Chi Lin
  • Patent number: 9608130
    Abstract: Semiconductor devices are described that include a capacitor integrated therein. In an implementation, the semiconductor devices include a substrate. The substrate includes multiple capacitor regions, such as a first capacitor region and a second capacitor region that are adjacent to one another. Each capacitor region includes trenches that are formed within the substrate. A metal-insulator-metal capacitor is formed within the trenches and at least partially over the substrate. The trenches disposed within the first capacitor region are at least substantially perpendicular to the trenches disposed within the second capacitor region.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: March 28, 2017
    Assignee: Maxim Integrated Products, Inc.
    Inventors: Khanh Tran, Joseph P. Ellul, Edward M. Godshalk, Kiyoko Ikeuchi, Anuranjan Srivastava
  • Patent number: 9608131
    Abstract: A silicon solar cell has doped amorphous silicon contacts formed on a tunnel silicon oxide layer on a surface of a silicon substrate. High temperature processing is unnecessary in fabricating the solar cell.
    Type: Grant
    Filed: August 5, 2016
    Date of Patent: March 28, 2017
    Assignee: SunPower Corporation
    Inventor: Peter John Cousins
  • Patent number: 9608132
    Abstract: An optical sensor arrangement (10) comprises a light sensor (11) that is connected to a summation node (13) and is designed for generating a sensor current (S2), a current source (S2) connected to the summation node (13) and designed to provide a source current (S3), and an integrator (21) that is coupled to the summation node (13) and is designed for generating a first value (VP1) of an integrator signal (S6) by integrating during a first phase (P1) and for generating a second value (VP2) of the integrator signal (S6) by integrating during a second phase (P2). The optical sensor arrangement (10) comprises a sum and hold circuit (31) that is coupled to the integrator (21) and is designed to generate an analog output signal (S7) as a function of a difference of the first value (VP1) and the second value (VP2) of the integrator signal (S6).
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: March 28, 2017
    Assignee: AMS AG
    Inventors: Josef Kriebernegg, Christian Mautner, Herbert Lenhard, Manfred Lueger