Patents Issued in April 11, 2017
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Patent number: 9620295Abstract: The present invention relates to a dye-sensitized solar cell and a fabrication method thereof. The dye-sensitized solar cell according to the present invention comprises: a transparent substrate; a porous semiconductor layer provided on the transparent substrate and comprising a dye sensitizer; a current collecting electrode provided on the porous semiconductor layer and deposited such that a structure having at least one through-hole on the porous semiconductor layer is formed; a catalyst electrode; and an electrolyte material provided between the transparent substrate and the catalyst electrode.Type: GrantFiled: May 8, 2013Date of Patent: April 11, 2017Assignee: DENTONS US LLPInventor: Tae-Sik Kang
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Patent number: 9620296Abstract: In one embodiment of the invention, a low frequency converter is described that includes a first electrochemical capacitor to charge to an input voltage and a second electrochemical capacitor that is coupled to the first electrochemical capacitor. The second electrochemical capacitor is associated with an output voltage of the low frequency converter. Each electrochemical capacitor may have a capacitance of at least one millifarad (mF) and a switching frequency that is less than one kilohertz.Type: GrantFiled: March 29, 2013Date of Patent: April 11, 2017Assignee: Intel CorporationInventors: Donald S. Gardner, Pavan Kumar
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Patent number: 9620297Abstract: An electrode material for electricity storage devices includes: an active material including at least one of quinone having a halogen group and hydroquinone having a halogen group; and a porous body supporting the active material.Type: GrantFiled: March 4, 2014Date of Patent: April 11, 2017Assignee: TOHOKU UNIVERSITYInventors: Itaru Honma, Satoshi Mitani, Takaaki Tomai
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Patent number: 9620298Abstract: A method of fabricating electrodes having protruding nanofeatures includes growing metal oxide nanofeatures on a metal or metal alloy wire using a heat treatment in an oxidizing environment. An electrically conducting material is deposited on the nanofeatures to form coated nanofeatures. An electrochemically active material (active material) is deposited to form a coating onto the coated nanofeatures to form at least one nanofeatured electrode. An energy storage coaxial cable (ESCC) can be formed from a first nanofeatured electrode and a second nanofeatured electrode, wherein the first nanofeatured electrode is configured as a linear electrode and the second nanofeatured electrode is configured as a tubular electrode, and the ESCC includes an ion porous separator and an electrolyte between the first nanofeatured electrode as an inner electrode and the second nanofeatured electrode as an outer electrode.Type: GrantFiled: October 23, 2014Date of Patent: April 11, 2017Assignee: University of Central Florida Research Foundation, Inc.Inventors: Jayan Thomas, Zenan Yu
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Patent number: 9620299Abstract: A capacitor includes a capacitor element and an electrolyte containing a lactone compound. At least one of a positive electrode and a negative electrode of the capacitor element contains activated carbon Entire surface functional group amount D (meq/g/nm2) in an average sectional area of pores of the activated carbon is calculated at 0.152 or less by the following equation: D=F/S where F represents an entire surface functional group amount per unit weight (meq/g) of the activated carbon, and S represents an area (nm2) of a circle of which diameter is an average diameter of the pores of the activated carbon.Type: GrantFiled: October 22, 2014Date of Patent: April 11, 2017Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventor: Yasuyuki Ito
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Patent number: 9620300Abstract: An electrochemical device comprises an element body 10 in which a pair of a first inner electrode and a second inner electrode are laminated to sandwich a separator layer; an exterior sheet 4 covering the element body; a first lead terminal 18 drawn to an outside of the exterior sheet 4; and a second lead terminal 28 drawn to the outside of the exterior sheet 4. A proof stress of the exterior sheet is 390 to 980 N/mm2 in JIS Z2241, and a hardness of the exterior sheet is 230 to 380 Hv in Vickers hardness (JIS Z2244).Type: GrantFiled: October 15, 2014Date of Patent: April 11, 2017Assignee: TDK CorporationInventor: Yuko Saya
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Patent number: 9620301Abstract: A contact assembly is for an electrical switching apparatus. The electrical switching apparatus includes a housing, a cradle member disposed in the housing, an operating handle extending into the housing, and an operating mechanism coupled to the cradle member. The contact assembly includes: a stationary contact structured to be disposed in the housing; a movable arm including a movable contact structured to engage the stationary contact, the movable arm being structured move between a CLOSED position and an EXTENDED OPEN position; and an extension apparatus structured to be disposed on the housing. When the movable arm is in the EXTENDED OPEN position, the extension apparatus maintains the movable arm in the EXTENDED OPEN position.Type: GrantFiled: December 3, 2014Date of Patent: April 11, 2017Assignee: EATON CORPORATIONInventor: Jeffrey Scott Gibson
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Patent number: 9620302Abstract: A storage module for a hydraulic stored-energy spring mechanism for operating a high-voltage switch, for example a high-voltage circuit breaker, having a spring element which acts to store energy and having a fluid for transmitting the energy of the spring element, by a moving storage piston, to a piston rod for operating the high-voltage switch, wherein the storage piston projects into the housing which is filled with fluid and the housing forms a pressurized storage reservoir for the fluid. The pressurized storage reservoir is connected to a hydraulic system of the stored-energy spring mechanism by at least one channel element which projects into the pressurized storage reservoir and a pressurized channel which is connected to the channel element. The storage piston closes a subregion of the channel element starting from a specific piston stroke “s”.Type: GrantFiled: June 14, 2013Date of Patent: April 11, 2017Assignee: ABB Schweiz AGInventors: Matthias Schmidt, Thomas Brenneis, Jörg Knospe
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Patent number: 9620303Abstract: Circuit breakers with handles having at least one handle bearing pin that contacts an upper end portion of a moving arm and allows the arm to rotate to “OFF”, “ON” and “TRIP” positions, typically about 90 degrees of rotation.Type: GrantFiled: August 13, 2014Date of Patent: April 11, 2017Assignee: Eaton CorporationInventors: James Gerard Maloney, Daniel Quentin Gates
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Patent number: 9620304Abstract: The present invention relates to an interlock device of a ring main unit, and more particularly, to an interlock device of a ring main unit in which a fuse cover can be closed in interlock with a cable cover. An interlock device of a ring main unit according to an embodiment of the present disclosure may include an interlock frame provided in part of the ring main unit, a cam on part of which an engaging portion is protruded and formed and on the other part of which a slit is formed, rotatably provided within the interlock frame, an operating plate an end of which is coupled to the slit to perform a vertical movement, and a spring an end of which is fixed to part of the cam to store an elastic force due to the movement of the cam.Type: GrantFiled: July 7, 2015Date of Patent: April 11, 2017Assignee: LSIS CO., LTD.Inventor: Dong Sik Lee
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Patent number: 9620305Abstract: A transfer switch and load controller that can be plugged into an existing utility meter socket and electrically positioned between the meter socket and a distribution panel to allow switching between utility power and standby power. The plug-in transfer switch functions to transfer the power supplied to a home between the utility power source and the generator power source upon loss of power from the utility power source. The transfer switch components are contained in an enclosed housing of a meter socket adapter that is mounted directly to the meter socket of a meter housing. The meter socket adapter is prewired to a standby generator such that the standby generator can be connected to a home power system by plugging the meter socket adapter into the meter socket.Type: GrantFiled: July 31, 2014Date of Patent: April 11, 2017Assignee: Briggs & Stratton CorporationInventors: Michael Miller, Gary Gracyalny, David A. Kratz, Richard Gilpatrick, Dean Weigand, Sie Teong Lim, Nicholas Demos
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Patent number: 9620306Abstract: A magnetic keyboard includes a base, a switch circuit board and plural keys. Each key includes a keycap, plural first magnetic elements and plural second magnetic elements. The switch circuit board is disposed on the base. The plural keys are connected with the base. The plural first magnetic elements of each key are fixed on an inner surface of the keycap. The plural second magnetic elements are disposed within the base. The first magnetic elements are partially inserted into the corresponding second magnetic elements. Consequently, the keys are connected with the base, and the function of returning the keycaps to their original positions are achievable.Type: GrantFiled: July 16, 2015Date of Patent: April 11, 2017Assignee: PRIMAX ELECTRONICS LTD.Inventor: Wei-Yung Huang
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Patent number: 9620307Abstract: A keyboard includes plural keys, a membrane key switch module and plural diodes. The plural diodes are disposed on the membrane key switch module, and electrically connected with plural upper contacts or plural lower contacts of the membrane key switch module. Consequently, the keyboard has the function of avoiding the ghosting problem.Type: GrantFiled: September 28, 2015Date of Patent: April 11, 2017Assignee: PRIMAX ELECTRONICS LTD.Inventor: Bo-An Chen
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Patent number: 9620308Abstract: A membrane keyboard equipped with click generating resilient pieces, having multiple keys and an electrically conductive membrane; each of the keys having a base and a cap; the cap sleeves on the base; an inner sidewall of the base is provided with an insertion slot for mounting a click generating resilient piece; a top part of the insertion slot is provided with position limiting wedges; the click generating resilient piece is positioned between the inner sidewall of the base and an outer sidewall of the cap; the cap is provided with a motion transmission element which drives the click generating resilient piece to move up and down in the insertion slot when the cap moves up and down. The clicking sounds generated by the click generating resilient pieces help users determine whether the desired key is pressed or released. Obvious tactile feedback can also be felt when using the keyboard.Type: GrantFiled: February 5, 2016Date of Patent: April 11, 2017Inventor: Yong Li
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Patent number: 9620309Abstract: A rotary selector switch prevents accidental rotation to an undesired position. For example, an automobile moving forward at 55 kph may have a rotary selector switch in electrical communication with its transmission. The disclosed switch prevents accidental rotation that would indicate that a REVERSE gear is desired when it is not. Optionally, on override feature may permit users to overpower an otherwise prevented rotation.Type: GrantFiled: February 15, 2013Date of Patent: April 11, 2017Assignee: Kostal of AmericaInventors: Steven R. Hoskins, Michael F. Tefend
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Patent number: 9620310Abstract: An accessory device for a circuit breaker. The device includes a housing having a top wall and a hinge portion. The device also includes a plunger arm that extends from the hinge portion to form a cantilever wherein the plunger arm includes a first surface and a sloped surface. The plunger arm is moveable between an initial position wherein the plunger arm does not activate the first and second switches located in the housing and a deflected position wherein the first and sloped surfaces simultaneously contact the first and second switches, respectively, thereby activating the first and second switches. The plunger arm also includes a plunger portion that is oriented transverse to the plunger arm. A mating surface is formed on the plunger portion that mates with a mating surface of a circuit breaker operating mechanism. Further, the housing, hinge portion, plunger arm, and plunger portion are integrally formed.Type: GrantFiled: September 5, 2014Date of Patent: April 11, 2017Assignee: SIEMENS INDUSTRY, INC.Inventors: Huy Nguyen, Mauricio Rodriguez
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Patent number: 9620311Abstract: A locking assembly for locking a switch is provided. According to a preferred embodiment, a locking member is connected to a support member having a plurality of first grooves, a lower receiving element, a retaining tab, a resilient member and a fastening element. Preferably, the lower receiving element includes a securing socket element having at least a second groove and a third groove. According to a preferred embodiment, the fastening element preferably secures the locking member, the lower receiving element, and the resilient member with a panel to form a locking assembly that automatically locks the switch when the switch is in a selected position.Type: GrantFiled: December 8, 2015Date of Patent: April 11, 2017Assignee: Vornado Air LLCInventors: Glen W. Ediger, Gary P. Israel, Timothy Holub, Jerald W. Ashton, Brian M. Cartwright, Russell Demitras
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Patent number: 9620312Abstract: Embodiments are directed to a watch having a rotatable and translatable input member. In one aspect, the watch includes a housing defining a watch body. The watch may include a crown positioned within an aperture of the housing and a shaft coupled with the crown at a first end of the shaft. To measure input at the crown, the watch may include a tactile dome positioned at a second end of the shaft that is configured to detect translation of the crown and a sensing element positioned within the housing that is configured to detect rotation of the crown.Type: GrantFiled: September 10, 2016Date of Patent: April 11, 2017Assignee: APPLE INC.Inventors: Colin M. Ely, John B. Morrell, Duncan Kerr, Camille Moussette
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Patent number: 9620313Abstract: An object of the present invention is to provide an engine starting device which can prevent rattling of an ignition switch in a coupled state. Provided is an engine starting device including: a housing 2 accommodating a rotational operation shaft 1; and an ignition switch 3 coupled to the housing 2 and configured to be actuated upon application of rotational operation force to the rotational operation shaft 1. The ignition switch 3 is fitted and held in an attachment recess 4 formed in the housing 2, in such a way as to be prevented from falling from the attachment recess 4 by appropriate snap-locking portion 5.Type: GrantFiled: November 29, 2013Date of Patent: April 11, 2017Assignee: ALPHA CORPORATIONInventor: Yusuke Watanabe
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Patent number: 9620314Abstract: Disclosed is a supporting structure of a closing resistor unit for a circuit breaker which connects the closing resistor unit to the fixed portion through the first supporting plate and the second supporting plate to allow the closing resistor unit to move back and forth with respect to the fixed portion through the first supporting plate and to move up and down with respect to the fixed portion through the second supporting plate, whereby the closing resistor unit or its joints may be prevented from being damaged from impact.Type: GrantFiled: July 20, 2015Date of Patent: April 11, 2017Assignee: LSIS CO., LTD.Inventor: Woo Seung Lim
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Patent number: 9620315Abstract: Provided is a gas circuit breaker that can reduce control energy smaller than that in previous double motion systems and an excessive force applied to a moveable pin to achieve a highly reliable double motion system. A gas circuit breaker has a double motion mechanism unit including a driving-side connecting rod, a driven-side connecting rod, a lever to connect the rods, and a guide to define the motion of the driving-side and driven-side connecting rods. A moveable pin extends through a first grooved cam of the driving-side conencting rod, a second grooved cam of the guide, and a third grooved cam of the lever. The driving-side connecting rod operates to move the moveable pin inside the grooved cams. Thus, the lever is rotated, the driven-side connecting rod is driven opposite to the driving-side connecting rod, and the driven-side arcing contact is driven opposite to the driving-side arcing contact.Type: GrantFiled: May 26, 2014Date of Patent: April 11, 2017Assignee: Hitachi, Ltd.Inventors: Masanao Terada, Hajime Urai, Katsuhiko Shiraishi, Yoichi Oshita, Hiroaki Hashimoto, Noriyuki Yaginuma
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Patent number: 9620316Abstract: The disclosure relates to a pole part of a circuit-breaker arrangement having an insulation housing for accommodating a vacuum interrupter containing a pair of corresponding electrical switching contacts, wherein a fixed upper electrical contact is connected to an upper electrical terminal molded or assembled in the insulation housing and a movable lower electrical contact is connected to the insulating housing by a support plate of the insulation housing via a flexible conductor that includes a first end for attaching the flexible conductor to the lower electrical terminal and a second end for attaching the flexible conductor to the movable lower electrical contact. The second end of the flexible conductor is provided with an inside thread which is screwed to an outside thread arranged on the distal end of the movable lower electrical contact.Type: GrantFiled: December 20, 2013Date of Patent: April 11, 2017Assignee: ABB Schweiz AGInventors: Dietmar Gentsch, Manfred Sauer
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Patent number: 9620317Abstract: A switch having a spring-biased actuator button that moves in an axial direction is mounted in a hermetically sealed cavity defined in a one-piece housing, which also houses a tripping magnet and restricts the tripping magnet to linear movement along the axis of the actuator button.Type: GrantFiled: January 19, 2016Date of Patent: April 11, 2017Assignee: A-T Controls, Inc.Inventors: Steven Hacker, Mark E Peters
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Patent number: 9620318Abstract: A circuit protection device includes a substrate with first and second electrodes connected to the circuit to be protected. The circuit protection device also includes a heater element. A sensing element facilitates an electrical connection between the first and second electrodes. A flux material is provided around the sensing element. In a preferred embodiment, the flux contains a first component that is a polar material and a second component that is a non-polar material. A spring element exerts a force on the sensing element. The sensing element resists the force applied by the spring element. Upon detection of an activation, or fault, condition, the sensing element loses resilience and no longer resists the force exerted by the spring element, resulting in the spring element severing the electrical connection between the first and second electrodes. The flux allows the spring element to sever the electrical connection without dragging the sensing element.Type: GrantFiled: August 6, 2012Date of Patent: April 11, 2017Assignee: Littlefuse, Inc.Inventors: Martyn A. Matthiesen, Jianhua Chen, Matthew P. Galla, Anthony Vranicar, Wayne Montoya, Christopher Pasma
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Patent number: 9620319Abstract: An exemplary coil actuator for an associated switching device which can be actuated during its operation from an open position to a closed position to allow a current to flow therethrough and from the closed position to the open position to interrupt such flowing from flowing therethrough. The coil actuator includes a coil electromagnet arranged to move between a rest position and an actuating position, wherein movement from the rest position to the actuating position is suitable to cause the actuation of the switching device; and an electronic component arranged to count an operation time which is indicative of the duration of the actuation of the switching device.Type: GrantFiled: April 4, 2014Date of Patent: April 11, 2017Assignee: ABB SCHWEIZ AGInventors: Fabio Mannino, Gabriele Valentino De Natale
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Patent number: 9620320Abstract: The contact device includes an armature, a driver, a fixed contact, a movable contact, a contact spring, and a card. The driver drives the armature. The movable contact is to be in contact with and separate from the fixed contact. The contact spring is for holding the movable contact so as to allow the movable contact to be in contact with and separate from the fixed contact. The card interconnects the armature and the contact spring. The card is made of resilient material and fixed to each of the armature and the contact spring.Type: GrantFiled: May 12, 2015Date of Patent: April 11, 2017Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventors: Chiharu Nakahara, Kazuhisa Kinoshita
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Patent number: 9620321Abstract: Described is a fuse for an electrical circuit, comprising two contact arms, each having at least one connecting pin for inserting into a hole of a printed circuit board, and a spring which connects the two contact arms in an electrically conductive manner. According to this disclosure, it is provided that the spring is fastened to at least one of the two contact arms by means of a fastening means that loses its strength at a trigger temperature of the fuse, wherein the fuse is formed in such a manner that by inserting the connecting pins into holes of a printed circuit board, the spring is loaded such that the spring lifts from the at least one contact arm by spring force as soon as the fastening means loses its strength due to overheating. Moreover, a printed circuit board comprising such a fuse is described.Type: GrantFiled: August 12, 2015Date of Patent: April 11, 2017Assignee: BorgWarner Ludwigsburg GmbHInventors: Michael Störzinger, Bernd Halbrock, Sisay Tadele, Norbert Ernst
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Patent number: 9620322Abstract: An arc suppressor fixable to a fusible element to suppress electrical arcs and prevent the spread of electric arc “burn-back.” The arc suppressor includes first and second inner members comprised of pre-cured silicone rubber, and first and second outer members comprised of an arc suppressing material (e.g., melamine). The inner and outer members form a sandwich around a portion of the fusible element, wherein the first inner member is located adjacent to a first surface of the fusible element and the second inner member is located adjacent to an opposing second surface of the fusible element. The first outer member is located adjacent to the first inner member and the second outer member is located adjacent to the second inner member. Mechanical fasteners tightly engage together the first and second inner members, the fusible element, and the first and second outer members.Type: GrantFiled: April 14, 2014Date of Patent: April 11, 2017Assignee: Mersen USA Newburyport-MA, LLCInventor: Robert M. Burge
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Patent number: 9620323Abstract: A vacuum tube includes a filament and two pairs of a grid and an anode. The filament is tensioned linearly and emits thermoelectrons. Both of the anodes are formed on a same face on a planar substrate. The filament is arranged parallel to the planar substrate at a position facing both of the anodes. Each of the grids is arranged, such that the grid faces the anode of a same pair at a first predetermined distance from the anode and has a second predetermined distance from the filament, between the anode and the filament. The vacuum tube further includes an intermediate filament fixing part fixing the filament at a position corresponding to an intermediate point between the anodes of the two pairs.Type: GrantFiled: December 22, 2016Date of Patent: April 11, 2017Assignees: NORITAKE ITRON CORPORATION, NORITAKE CO., LIMITED, KORG INC.Inventors: Kazunori Tatsuda, Tadami Maeda, Misa Yamanaka, Fumio Mieda
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Patent number: 9620324Abstract: A sealed cold cathode X-ray tube for use in small X-ray source devices is provided. In one embodiment, a sealed cold cathode X-ray tube includes an elongate member, a cathode emitter, and an anode.Type: GrantFiled: February 14, 2014Date of Patent: April 11, 2017Assignees: Golden Engineering, Inc., Los Alamos National Security, LLCInventors: Phillip Golden, Scott A. Watson, Timothy Knowles
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Patent number: 9620325Abstract: CT Devices and methods thereof are disclosed. The CT device comprises an electron beam generation unit, a circular reflection target (9) and a circular detector array. The electron beam generation unit comprises an electron gun (7), a deflection scanning unit and a restrictor (16), wherein the electron gun (7) generates electron beams, the deflection scanning unit deflects the electron beams with a deflection direction varying as time so as to implement a circular scanning, and the restrictor (16) has a plurality of circularly distributed holes, and wherein when the electron beams scan along the circularly distributed holes, a plurality of electron beams that are distributed circularly are output. The circular reflection target (9) is disposed to be coaxial with the circularly distributed electron beams, wherein the circularly distributed electron beams bombard the circular reflection target (9) to generate X-rays that intersect the axis of the circularly distributed electron beams.Type: GrantFiled: October 31, 2013Date of Patent: April 11, 2017Assignees: Tsinghua University, Nuctech Company LimitedInventors: Kejun Kang, Chuanxiang Tang, Ziran Zhao, Zhe Zhang
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Patent number: 9620326Abstract: An apparatus for extending the useful life of an ion source, comprising an arc chamber containing a plurality of cathodes to be used sequentially and a plurality of repellers to protect cathodes when not in use. The arc chamber includes an arc chamber housing defining a reaction cavity, gas injection openings, a plurality of cathodes, and at least one repeller element. A method for extending the useful life of an ion source includes providing power to a first cathode of an arc chamber in an ion source, operating the first cathode, detecting a failure or degradation in performance of the first cathode, energizing a second cathode, and continuing operation of the arc chamber with the second cathode.Type: GrantFiled: December 22, 2014Date of Patent: April 11, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chin-Tsung Lin, Hsiao-Yin Hsieh, Chi-Hao Huang, Hong-Shing Chou, Yeh-Chieh Wang
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Patent number: 9620327Abstract: A combined scanning and focusing magnet for an ion implantation system is provided. The combined scanning and focusing magnet has a yoke having a high magnetic permeability. The yoke defines a hole configured to pass an ion beam therethrough. One or more scanner coils operably are coupled to the yoke and configured to generate a time-varying predominantly dipole magnetic field when electrically coupled to a power supply. One or more focusing coils are operably coupled to the yoke and configured to generate a predominantly multipole magnetic field, wherein the predominantly multipole magnetic field is one of static or time-varying.Type: GrantFiled: December 22, 2015Date of Patent: April 11, 2017Assignee: Axcelis Technologies, Inc.Inventor: Edward C. Eisner
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Patent number: 9620328Abstract: A multipole device for influencing a charged particle beam propagating along an optical axis is described. The multipole device includes: an electrostatic deflector with at least two deflector electrodes for deflecting the charged particle beam by a deflection angle, wherein the deflector electrodes extend over a first length along the optical axis; and an electrostatic corrector comprising at least four corrector electrodes to compensate for an aberration of the charged particle beam, wherein the corrector electrodes extend over a second length along the optical axis, which is shorter than the first length.Type: GrantFiled: November 20, 2015Date of Patent: April 11, 2017Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventor: Benjamin John Cook
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Patent number: 9620329Abstract: An electrostatic multipole device for influencing a charged particle beam propagating along an optical axis is described. The multipole device includes a first electrical contact, a second electrical contact, and a high-resistance layer which extends at least partially around the optical axis and is configured to allow a current flow between the first electrical contact and the second electrical contact, wherein the first electrical contact contacts the high-resistance layer at a first circumferential position and is configured to provide a first potential to the first circumferential position, and wherein the second electrical contact contacts the high-resistance layer at a second circumferential position at an angular distance from the first circumferential position and is configured to provide a second potential to the second circumferential position. Further, an electrostatic multipole arrangement including two or more such multipole devices and a charged particle beam device are described.Type: GrantFiled: November 20, 2015Date of Patent: April 11, 2017Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventors: Benjamin John Cook, Dieter Winkler
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Patent number: 9620330Abstract: A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S1} of a set {Sn}, gathering data from a first collection of sparsely distributed sampling points {P1} of set {Pn}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}, and an image of the specimen is assembled using the set {Pn} as input to an integrative mathematical reconstruction procedure.Type: GrantFiled: June 18, 2015Date of Patent: April 11, 2017Assignee: FEI CompanyInventors: Pavel Poto{hacek over (c)}ek, Cornelis Sander Kooijman, Hendrik Nicolaas Slingerland, Gerard Nicolaas Anne van Veen, Faysal Boughorbel
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Patent number: 9620331Abstract: The system described herein relates to analyzing an object using a charged particle beam device generating a beam of charged particles and to the charged particle beam device for analyzing the object. A part of an image of the object corresponding to a volume unit surface of a volume unit is segmented into an area having a first color level and a second color level as well corresponding area fractions are determined. A plurality of particles with color levels are identified by comparing the color levels with the information stored in a database. By comparing the color levels, it is possible to identify the potential particles, for example minerals, which may be included in the volume unit.Type: GrantFiled: November 19, 2015Date of Patent: April 11, 2017Assignees: Carl Zeiss Microscopy Ltd., Carl Zeiss X-ray Microscopy, Inc.Inventors: Sreenivas Bhattiprolu, Edward Hill
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Patent number: 9620332Abstract: The present application discloses methods, systems and devices for using charged particle beam tools to inspect and perform lithography on a substrate using a combination of vectoring to move a beam to features to be imaged, and raster scanning to obtain an image of the feature(s). The inventors have discovered that it is highly advantageous to use an extra step, a fast raster scan to image the substrate at a lower resolution, to determine which features receive priority for inspection; this extra step can reduce total inspection time, enhance inspection results, and improve beam alignment and manufacturing yield. Using multiple beam-producing columns, with multiple control computers local to the columns, provides various synergies. Preferably, miniature, non-magnetic, electrostatically-driven columns are used.Type: GrantFiled: May 4, 2015Date of Patent: April 11, 2017Assignee: Multibeam CorporationInventors: David K. Lam, Kevin M. Monahan, Enden David Liu, Cong Tran, Theodore A. Prescop
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Patent number: 9620333Abstract: A charged particle beam apparatus automatically prepares a sample piece from a sample and includes a charged particle beam irradiation optical system that irradiates a charged particle beam to a sample placed on a movable sample stage. A sample piece transferring unit holds and transfers a sample piece separated and extracted from the sample, and a holder support holds a sample piece holder to which the sample piece is transferred. A computer controls a position of an object based on a template prepared from an image of the object acquired by irradition with the charged particle beam and position information acquired from the image of the object. The sample piece transferring unit includes a needle that transfers the sample piece separated and extrated from the sample, and a needle actuting mechanism that actuates the needle.Type: GrantFiled: August 24, 2015Date of Patent: April 11, 2017Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Satoshi Tomimatsu, Makoto Sato, Atsushi Uemoto, Tatsuya Asahata, Yo Yamamoto
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Patent number: 9620334Abstract: A method for achieving an etch rate is described. The method includes receiving a calculated variable associated with processing a work piece in a plasma chamber. The method further includes propagating the calculated variable through a model to generate a value of the calculated variable at an output of the model, identifying a calculated processing rate associated with the value, and identifying based on the calculated processing rate a pre-determined processing rate. The method also includes identifying a pre-determined variable to be achieved at the output based on the pre-determined processing rate and identifying a characteristics associated with a real and imaginary portions of the pre-determined variable. The method includes controlling variable circuit components to achieve the characteristics to further achieve the pre-determined variable.Type: GrantFiled: January 10, 2014Date of Patent: April 11, 2017Assignee: Lam Research CorporationInventors: Bradford J. Lyndaker, John C. Valcore, Jr., Alexei Marakhtanov, Seyed Jafar Jafarian-Tehrani, Zhigang Chen
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Patent number: 9620335Abstract: A processing apparatus may include a plasma source coupled to a plasma chamber to generate a plasma in the plasma chamber, an extraction plate having an aperture disposed along a side of the plasma chamber; a deflection electrode disposed proximate the aperture and configured to define a pair of plasma menisci when the plasma is present in the plasma chamber; and a deflection electrode power supply to apply a bias voltage to the deflection electrode with respect to the plasma, wherein a first bias voltage applied to the deflection electrode is configured to generate a first angle of incidence for ions extracted through the aperture from the plasma, and a second bias voltage applied to the deflection electrode is configured to generate a second angle of incidence of ions extracted through the aperture from the plasma, the second angle of incidence being different from the first angle of incidence.Type: GrantFiled: March 9, 2016Date of Patent: April 11, 2017Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Costel Biloiu, Nini Munoz, Ludovic Godet, Anthony Renau
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Patent number: 9620336Abstract: A dry etching apparatus plasma processes a wafer held by a carrier having a frame and an holding sheet. A electrode unit of a stage includes an electrostatic chuck. Adjacent to an upper surface of the electrostatic chuck, a first electrostatic attraction electrode and a second electrostatic attraction electrode are incorporated. The first electrostatic attraction electrode is of unipolar type and electrostatically attracts the wafer via the holding sheet. The second electrostatic electrode is of bipolar type and electrostatically attracts the frame via the holding sheet as well as a holding sheet between the wafer and the frame. Both of plasma processing performance and electrostatic attraction performance are improved.Type: GrantFiled: October 27, 2014Date of Patent: April 11, 2017Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTDInventor: Shogo Okita
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Patent number: 9620337Abstract: Systems and methods for determining a malfunctioning device in a plasma system, are described. One of the methods includes receiving an indication whether plasma is generated within a plasma chamber of the plasma system. The plasma system includes a processing portion and a power delivery portion. The method further includes determining whether the plasma system operates within constraints in response to receiving the indication that the plasma is generated, determining a value of a variable at an output of the power delivery portion when the processing portion is decoupled from the power delivery portion, and comparing the determined value with a pre-recorded value of the variable. The method includes determining whether the determined value is outside a range of the pre-recorded value and determining that the malfunctioning device within the power delivery portion upon determining that the determined value is outside the range of the pre-recorded value.Type: GrantFiled: February 19, 2014Date of Patent: April 11, 2017Assignee: Lam Research CorporationInventors: John C. Valcore, Jr., Bradford J. Lyndaker, Arthur Sato
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Patent number: 9620338Abstract: A system, a method, and a program for predicting a processing shape formed by a plasma process, including databases for apparatus condition, incident ion, incident radical, actual measurement, material property and surface reaction, as well as a trajectory calculation unit, and a surface shape calculation unit. The trajectory calculation unit calculates the trajectories of the respective ions incident on the surface of the substrate based on information and data obtained from the databases and from measurement data from an on-wafer monitoring sensor. Based on the calculation result by the trajectory calculation unit, the surface shape calculation unit calculates the change of the shape by referring to the data stored in the material property and surface reaction DB.Type: GrantFiled: March 11, 2011Date of Patent: April 11, 2017Assignees: MIZUHO INFORMATION & RESEARCH INSTITUTE, INC., TOHOKU TECHNOARCH CO., LTD.Inventors: Seiji Samukawa, Kohei Ono, Takuya Iwasaki
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Patent number: 9620339Abstract: Embodiments of a sputter source for semiconductor process chambers are provided herein. In some embodiments, a sputter source for a semiconductor process chamber may include: a target comprising a magnetic material to be deposited on a substrate, the magnetic material including a front surface where material is to be sputtered and an opposing back surface; and an outer magnet disposed proximate a back surface of the target and arranged symmetrically with respect to a central axis of the target, wherein the target has an annular groove formed in the back surface of the target disposed proximate the outer magnet to reduce a magnetic permeability of a region of the target proximate the outer magnet, wherein the groove is an unfilled v-shaped groove having an inner angle greater than 90 degrees.Type: GrantFiled: March 15, 2013Date of Patent: April 11, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Anantha K. Subramani, Tza-Jing Gung, Prashanth Kothnur, Hanbing Wu
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Patent number: 9620340Abstract: This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load's impedance rises rapidly. The voltage boost can thereby cause more rapid current ramping after a decrease in power delivery to the load which results from the load impedance rise. In particular, the snubber can comprise a combination of a unidirectional switch, a voltage multiplier, and a current limiter. In some cases, these components can be a diode, voltage doubler, and an inductor, respectively.Type: GrantFiled: February 29, 2016Date of Patent: April 11, 2017Assignee: Advanced Energy Industries, Inc.Inventor: Kenneth W. Finley
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Patent number: 9620341Abstract: A system for inspecting a sample including a detector, either a photomultiplier tube or an electron-bombarded image sensor, that is positioned to receive light from the sample. The detector includes a semiconductor photocathode and a photodiode. Notably, the photodiode includes a p-doped semiconductor layer, an n-doped semiconductor layer formed on a first surface of the p-doped semiconductor layer to form a diode, and a pure boron layer formed on a second surface of the p-doped semiconductor layer. The semiconductor photocathode includes silicon, and further includes a pure boron coating on at least one surface.Type: GrantFiled: June 22, 2016Date of Patent: April 11, 2017Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, David L. Brown, John Fielden
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Patent number: 9620342Abstract: Systems and methods are provided for interlacing ramped mass spectrometer parameter values during data acquisition. Ions from a sample are acquired within a cycle time, Ct, using a mass spectrometer. Within each Ct, two or more scans of the acquired ions are performed using two or more ramped values for a parameter of the mass spectrometer. When it is determined that scans for a desired range of ramped parameter values cannot be performed within Ct, the desired range of ramped values is divided into at least two interlaced groups of ramped values. The mass spectrometer is instructed to perform scans for each of the interlaced groups within two or more cycle times. Spectra from the scans for each of the at least two interlaced groups are combined. The ramped parameter values of the combined spectra have the desired range and the desired effective step size.Type: GrantFiled: November 21, 2013Date of Patent: April 11, 2017Assignee: DH Technologies Development Pte. Ltd.Inventor: David Michael Cox
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Patent number: 9620343Abstract: A system includes a first aerosolization device (e.g., a nebulizer and a spray chamber/desolvation device in fluid communication with the nebulizer) configured to furnish a first aerosol, and a second aerosolization device (e.g., a second nebulizer and a second spray chamber/desolvation device in fluid communication with the second nebulizer) configured to furnish a second aerosol. The first aerosolization device is balanced with the second aerosolization device. The system also includes an output coupled with the first aerosolization device and the second aerosolization device. The output is configured to supply at least one of the first aerosol or the second aerosol (e.g., to a torch). The system further includes a selection device coupling the first aerosolization device and the second aerosolization device to the output. The selection device is configured to selectively provide at least one of the first aerosol or the second aerosol to the output.Type: GrantFiled: December 10, 2014Date of Patent: April 11, 2017Assignee: Elemental Scientific, Inc.Inventor: Paul Field
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Patent number: 9620344Abstract: The invention generally relates to systems and methods for mass spectrometry analysis of microorganisms in samples.Type: GrantFiled: April 21, 2014Date of Patent: April 11, 2017Assignee: Purdue Research FoundationInventors: Robert Graham Cooks, Ahmed Mohamed Hamid, Alan Keith Jarmusch, Zheng Ouyang