Abstract: An electronic substrate or interposer comprising nanoporous films, such as anodic aluminum oxide, containing vertically etched openings (“vias”) that are filled with a conductive material, forming a high density collection of vertically oriented vias that conduct electricity from one side of the substrate to the other.

Abstract: A capacitor component includes a body including a plurality of dielectric layers having a layered structure and a first internal electrode and a second internal electrode alternately disposed with respective dielectric layers of the plurality of dielectric layers disposed therebetween. A first external electrode is disposed on a first surface and a second surface of the body opposing each other, and is connected to the first internal electrode. A second external electrode is disposed on at least one of a third surface and a fourth surface of the body connecting the first surface to the second surface and opposing each other, and is connected to the second internal electrode. The first internal electrode and the second internal electrode provide a plurality of resonance frequencies. In some examples, each of the first internal electrode and the second internal electrode is divided into a plurality of regions spaced apart from each other.

Abstract: A multilayer ceramic capacitor that includes a laminated body of multiple dielectric layers and internal electrodes laminated alternately therewith. The dielectric layers contain Ba, Sr, Ti, Ca, Zr, Mg, and R, where R represents at least one element of Y, La, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb. When Ti is 100 parts by mol, the dielectric layers contain Sr at 0.5 to 3.0 parts by mol; Ca at 3 to 15 parts by mol; Sr at 0.05 to 3.0 parts by mol; Mg at 0.01 to 0.0 9 parts by mol; and R at 2.5 to 8.4 parts by mol.

Abstract: The purpose of the present invention is to provide a component in which inductors and capacitors necessary for a low-pass filter and the like can be mounted at high density, and to in turn reduce the size of an electronic control unit in which the component is installed. The electronic control unit is characterized in that: the electronic control unit is provided with a laminated capacitor having built-in circuit patterns and dielectric bodies; the circuit patterns comprise a laminated plurality of coil effect generation patterns and inter-layer connection patterns for series connection of the plurality of coil effect generation patterns; and at least some of the plurality of coil effect generation patterns are used as electrodes for the laminated capacitor.

Abstract: A solid electrolytic capacitor includes: an insulating substrate; a capacitor element; a positive electrode lead-out structure; and a negative electrode lead-out structure. The positive electrode lead-out structure includes: a positive electrode terminal formed on the insulating substrate; a first positive electrode connection member formed on the insulating substrate; a second positive electrode connection member electrically connecting the first positive electrode connection member to the positive electrode terminal; and a pillow member configured to electrically connect the capacitor element to the first positive electrode connection member. The first positive electrode connection member has a recessed portion or a through hole. The recessed portion or the through hole overlaps an edge of a bottom surface of the pillow member having a first end of the recessed portion or the through hole disposed outside the edge and a second end of the recessed portion or the through hole disposed inside the edge.

Abstract: A photochemical electrode includes: an electrically conductive layer; and a photoexcitation material layer provided over the electrically conductive layer and including a photoexcitation material, wherein the photoexcitation material layer is one of a first photoexcitation material layer in which a potential of the conduction band minimum decreases from a second surface opposite to a first surface on the side of the electrically conductive layer toward the first surface and a second photoexcitation material layer in which a potential of the valence band maximum decreases from the second surface toward the first surface.

Abstract: The present invention provides a light-transmitting electrode which has high electrical conductivity and high electron blocking performance. The present invention also provides a solar cell which is capable of achieving high energy conversion efficiency at low cost. The present invention provides a method for producing a light-transmitting electrode that has a light-transmitting substrate, a carbon nanotube film which is formed directly or indirectly on the light-transmitting substrate, and a metal oxide film which is formed directly on the carbon nanotube film. This production method includes vapor depositing the metal oxide film, which contains oxygen and a metal element belonging to the group 4, 5 or 6 of the periodic table, on one surface or both surfaces of the carbon nanotube film. The present invention provides a light-transmitting electrode which includes a light-transmitting substrate and a conductive carbon nanotube film that is formed directly or indirectly on the light-transmitting substrate.

Abstract: Methods for making carbon materials are provided. In at least one specific embodiment, the method can include combining one or more polymer precursors with one or more liquids to produce a mixture. The mixture can be an emulsion, dispersion, or a suspension. The liquid can include hexane, pentane, cyclopentane, benzene, toluene, o-xylene, m-xylene, p-xylene, diethyl ether, ethylmethylketone, dichloromethane, tetrahydrofuran, mineral oils, paraffin oils, vegetable derived oils, or any mixture thereof. The method can also include aging the mixture at a temperature and time sufficient for the polymer precursor to react and form polymer gel particles having a volume average particle size (Dv,50) of the polymer particles in gel form greater than or equal to 1 mm. The method can also include heating the polymer gel particles to produce a carbon material.

Abstract: An ultracapacitor that includes an energy storage cell immersed in an advanced electrolyte system and disposed within a hermetically sealed housing, the cell electrically coupled to a positive contact and a negative contact, wherein the ultracapacitor is configured to output electrical energy within a temperature range between about ?40 degrees Celsius to about 210 degrees Celsius. Methods of fabrication and use are provided.

Abstract: A repairable electrical component includes one or more electrodes and a pliable casing, the one or more electrodes positioned within the pliable casing, wherein the repairable electrical component is configured to self-repair if the repairable electrical component or any part of the repairable component is partially damaged. A method of forming a repairable electrical component includes forming one or more electrodes, the electrodes comprising a core, an intermediate layer of ferromagnetic material and a pyrrole based material defining an outer layer, the outer layer encapsulating the core and ferromagnetic layer, positioning the one or more electrodes within an electrolyte, providing a casing to enclose the one or more electrodes and the electrolyte, the casing formed from a polyurethane material.

Abstract: A process for producing a supercapacitor cell, comprising (a) Assembling a porous cell framework composed of a first conductive foam structure, a second conductive foam structure, and a porous separator, wherein the first and/or second conductive foam structure has a thickness no less than 200 ?m and at least 80% by volume of pores; (b) Preparing a first suspension of an anode active material dispersed in a liquid electrolyte and a second suspension of a cathode active material (e.g. graphene sheets) dispersed in a liquid electrolyte; and (c) Injecting the first suspension into pores of the first conductive foam structure to form an anode and injecting second suspension into pores of the second conductive foam structure to form a cathode, wherein the anode active material or the cathode active material constitutes an electrode active material loading >10 mg/cm2, preferably >15 mg/cm2, more preferably >20 mg/cm2.

Abstract: A transfer assembly is for a switching assembly of an electrical enclosure. The switching assembly includes an electrical switching apparatus having an operating handle structured to move from an OFF position to an ON position. The transfer assembly includes a driving handle; a first shaft member coupled to the driving handle; a second shaft member structured to be coupled to the operating handle; and a transmission assembly having a first component and a second component, the first component being coupled to the first shaft member, the second component being coupled to the second shaft member. The transfer assembly is structured to move from a FIRST position to a SECOND position. When the transfer assembly moves from the FIRST position to the SECOND position, the first component drives the second component, thereby causing the second shaft member to move the operating handle from the OFF position to the ON position.

Abstract: A barrier includes a cover and an attachment apparatus and is usable with an electrical interruption device. The attachment apparatus includes a number of attachment structures that are situated on the cover and that are each structured to be engaged with at least one of the housing of the electrical interruption device and a number of terminal assemblies of the electrical interruption device. The cover is configured to overlie at least a portion of the electrical interruption device and to resist the entry of a probe of known dimensions into electrical contact with components that are electrified even when the electrical interruption device is in an OFF condition.

Abstract: A superconducting arcing induction type DC circuit breaker includes a superconducting fault current limiter and an arcing induction type DC circuit breaker connected in series to each other. The arcing induction type DC circuit breaker includes an induction member that has a through-hole, is continuously formed in a 360-degree direction, and has a certain shape and thickness, and an induction needle that protrudes from an inner surface of the induction member toward a center of the induction member. A contact point where an anode and a cathode, which are mechanical contacts, approach from opposite directions and come into contact with each other is formed in the through-hole of the induction member, and the anode and the cathode are separated in a direction far away from each other.

Abstract: A system for switching gases appearing after a short-circuit switching procedure in electrical service devices, particularly in low-voltage power switches, includes a switching gas cooling assembly and particle capture arrangement. Downstream of the flow path of switching gases issuing from at least one switching chamber outlet window, the switching gas cooling assembly is arranged in a blow-out chamber. In the space behind the at least one switching chamber outlet window and prior to entry of the switching gases into the switching gas cooling assembly, there is arranged a flow element around which the switching gases can flow and which has a cross section which corresponds to or is greater than the cross section of the switching chamber outlet window. The flow elements act as the particle capture arrangement and thus as a protection device for the switching gas cooling arrangement.

Abstract: A control circuit for an electric leakage circuit breaker, capable of preventing an error in determining an electric leakage generation due to an offset voltage of an input amplifier, including, a zero phase current transformer configured to detect a zero phase current on a circuit as a leakage detection signal, a filter circuit section configured to remove a high frequency noise included in the leakage detection signal, an input amplifier configured to a voltage formed by a current of the leakage detection signal and an impedance of the filter circuit section, and includes a pair of transistors, a base current generator commonly connected to the bases of the pair of transistors and configured to supply the same amount of base current to the pair of transistors, and a trip determination circuit section configured to determine whether to output a trip control signal.

Abstract: A base element and at least one switching element are included in an operator control device which may be disposed in a vehicle. By closing at least one electrical contact, the switching element is moveable from a first position into a second position relative to the base element. The operator control device can also include at least one pushbutton switch moveable relative to the base element between a position of rest and at least one activation position. The operator control device can further include at least one restoring element, formed of silicone and supported on the base element and on the pushbutton switch, which can be elastically deformed by moving the pushbutton switch from the position of rest into the activation position. Using the restoring element, the pushbutton switch can be moved from the activation position into the position of rest by relaxing the restoring element.

Abstract: A dome-shaped push switch includes a sheet and a conducting layer disposed at a low surface of the sheet. The sheet has a pressing portion arching upward. The conducting layer is disposed at a lower surface of the sheet. The conductivity of the sheet is greater than that of the sheet. The pressing portion includes at least one through hole penetrating through the pressing portion. The through hole has a side wall, the side wall sequentially has a shear surface and a tear surface from bottom up, and a fillet is provided between the shear surface and a lower surface of the pressing portion.

Abstract: A touch control keyboard includes a plurality of keycaps, a plurality of touch key parts, a plurality pairs of conductive distributions, a first circuit board, and a second circuit board. An upper part of each keycap includes a touch key part having a coupling capacitor. The touch key parts and the pair of conductive distributions and the first circuit board are electrically connected. The first circuit board detects the coupling capacitors of the touch key parts by using the pair of conductive distributions to generate a first key signal. The second circuit board detects keystrokes of the keycaps to generate a second key signal.

Abstract: A rotating switch contact apparatus has an apparatus housing; a contact housing; a housing bearing provided in the contact apparatus housing, the housing being rotatably mounted in the bearing; and a contact bridge mounted in the housing, rotating with the latter and having, at each end, a stationary mating contact receptacle, receptacles protruding from housing openings so the receptacles engage stationary mating contacts during contact housing rotation and may produce electrical contact between stationary mating contacts via the contact bridge. At least one spring terminal is arranged between the housing and bridge, which is resiliently mounted in the housing approximately perpendicular to the apparatus rotational plane.

Abstract: An input device has a first electrode, a second electrode, and a third electrode. The second electrode opposes to the first electrode while being spaced apart therefrom. The third electrode is spaced apart from the first electrode and rotatably or slidably provided relative to the second electrode. By the third electrode being brought into contact with or spaced apart from the second electrode, an electrical state between the first electrode and the second electrode changes. Based on this electrical change, a rotary manipulation or a slide manipulation is detected.

Abstract: An rotary switch operating apparatus has a drive shaft and a first and a second drive element, the first drive element having a rotationally fixed coupling to the drive shaft, and the second drive element being rotatably mounted on the first drive element. The apparatus includes a spring coupling the first and the second drive element together with a spring action, a lock limiting rotational movements of the second drive element in a first rotation direction and a second rotation direction, opposite the first, and a releaser for canceling rotational movement limitation of the second drive element in pre-specified rotation positions of the first drive element. Latches bearing against the drive elements' guide sections are provided, the first drive element guide section having release sections as releasers and the second drive element guide section having two latch stops as locks. The latches can both lock and release the spring-operated movement of the second drive element.

Abstract: An operating device includes: an operating section that rotates about a predetermined axis; and a shaft part to move integrally with the operating section. The shaft part has a first end and a second end projected in directions opposite from each other along the axis. A guide regulates movement of the shaft part in a radial direction. A first regulation part specifies a position of the shaft part in a thrust direction by contacting the first end of the shaft part. A second regulation part is press-contacted to the second end, such that the first end of the shaft part is made to contact the first regulation part. A locking part is arranged integrally with the second regulation part, and restricts the shaft part from separating from the guide, by contacting the second end.

Abstract: A high- or medium-voltage circuit breaker, in which a movable contact (1) is moved in sliding in order to separate stationary contacts (11, 12) from its sliding surface (2). In accordance with the invention, the stationary contacts (11, 12) have switching portions (9) that separate from the movable contact more or less simultaneously as a result of a setback (19) in the movable contact (1), thereby causing two simultaneous switching arcs to appear (14, 15), which arcs are extinguished much more quickly than a single arc, before the current is transferred to the conventional arcing contacts (5). This disposition enables the stationary contacts (11, 12) and their environment to be less exposed to damage.

Abstract: A method of controlling positive and negative contactors in a high voltage electrical system includes sensing current flowing through each contactor prior to opening of the contactor and/or after closing of the contactor. A negative contactor weighted value is computed based at least partially on the sensed current flowing through the negative contactor during opening and/or closing. A positive contactor weighted value is computed based at least partially on the sensed current flowing through the positive contactor during opening and/or closing. The order of opening and/or closing of the contactors is determined utilizing at least one of the negative contactor weighted value and the positive contactor weighted value.

Abstract: An electromagnetic relay including: a base unit that includes a slit having a first wall part and a second wall part, and a first projection projecting from the first wall part of the slit; a terminal that is press-fitted into the slit, and includes a second projection at a position opposite to the first projection; and a preventer that prevents deviation of the second projection against the first projection when the terminal is press-fitted into the slit.

Abstract: A microelectromechanical system switch includes a signal input line, a signal output line, a deformable conducting membrane electrically connected to the signal output line and including a contact dimple facing the signal input line, and an actuation electrode. The membrane has a planar round shape, with a radial opening in the direction of the signal input line, narrowing from the periphery towards the center of the membrane, the contact dimple being formed in the central region of the membrane, the actuation electrode has the same shape as the membrane, and the gap between the membrane, facing the actuation electrode, and the actuation electrode is an airgap only.

Abstract: A circuit interrupting device for use with a electrical power distribution system includes a housing containing a circuit interrupting mechanism. A battery tube is positioned in the housing. A battery assembly is configured to be inserted into the battery tube. The battery assembly includes a battery assembly body having a first end and a second end. A battery is positioned in the battery assembly body. The battery assembly is configured such that both a positive contact and a negative contact are exposed from the second end of the battery assembly body. In some embodiments, the battery assembly includes a keyed portion mates with the battery tube to ensure alignment of the battery assembly in the battery tube.

Abstract: A gas inlet suitable in particular for use in an ion thruster includes a housing which is made of a gas-tight ceramics material, and an insert which is arranged in the housing and is made of a porous ceramics material. The geometry and pore structure of the insert are such that the insert forms a desired flow resistance for a gas stream flowing through the insert.

Abstract: A housing, a substrate accommodated in the housing, a needle electrode for generating ions through discharging, which is held by the substrate such that a tip end portion protrudes outside the housing, an insulating sealing portion insulating and sealing the substrate in the housing, and an electrode protection portion for protecting the needle electrode outside the housing are included. The housing is provided with an opening portion through which a side of the tip end portion of the needle electrode is inserted and which is sealed with the insulating sealing portion. The electrode protection portion has a first protection portion and a second protection portion which are provided to protrude from the housing relative to the tip end portion of the needle electrode and opposed to each other at a distance from each other on opposing sides of the needle electrode.

Abstract: Heat dissipation of a target is enhanced in a transmissive X-ray generating apparatus where an anode member constitutes a part of a container. An anode member configured to hold a target is divided into an outer anode member, which is configured to hold the target and is connected to a container, and an inner anode member, which is joined to an insulating tube and is closer to an electron emitting portion than the outer anode member is. The outer circumferential surface of the inner anode member is joined to the outer anode member via a joining member. Heat generated by the electron emitting portion is dissipated mainly from the inner anode member via the insulating tube, or directly, to an insulating liquid.

Abstract: A particle beam system includes a particle source to produce a first beam of charged particles. The particle beam system also includes a multiple beam producer to produce a plurality of partial beams from a first incident beam of charged particles. The partial beams are spaced apart spatially in a direction perpendicular to a propagation direction of the partial beams. The plurality of partial beams includes at least a first partial beam and a second partial beam. The particle beam system further includes an objective to focus incident partial beams in a first plane so that a first region, on which the first partial beam is incident in the first plane, is separated from a second region, on which a second partial beam is incident. The particle beam system also a detector system including a plurality of detection regions and a projective system.

Abstract: Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.

Abstract: According to one aspect of the present invention, a stage mechanism includes a movable stage disposed in a vacuum atmosphere and mounting a heat source, a first heat pipe connected to the heat source, a movable mechanism configured to move according to the movement of the first heat pipe caused by the movement of the stage, by using a portion of the first heat pipe, and a cooling mechanism configured to cool the first heat pipe through the movable mechanism.

Abstract: Provided is a charged particle beam apparatus which includes a charged particle source, a sample table on which a sample is placed, a charged particle beam optical system that includes an objective lens and emits a charged particle beam emitted from the charged particle source onto the sample, a plurality of detectors which detect secondary particles emitted from the sample when being irradiated with the charged particle beam, and a rotation member which magnetically, electrically, or mechanically changes a detected azimuth angle of the secondary particles emitted from the sample.

Abstract: Mask-modulated spectra are incident to a sensor and are summed during a frame time. After the frame time, a compressed spectrum is read out based on the sum and decompressed to obtain spectra for some or all specimen locations. The mask-modulated spectrum that are summed are associated with different modulations produced by a common mask.

Abstract: A plasma processing device includes: a chamber; a flat-plate-shaped first electrode; a first high frequency power supply; a helical second electrode disposed outside the chamber and disposed to face the first electrode with a quartz plate forming an upper lid of the chamber therebetween; and a gas introducing unit, in which a second high frequency power supply and a third high frequency power supply are configured to be electrically connected to the second electrode, the second high frequency power supply being configured to apply an AC voltage of a second frequency to the second electrode, the third high frequency power supply being configured to apply an AC voltage of a third frequency to the second electrode, and the third frequency being higher than the second frequency; and two types of AC voltages are configured to be simultaneously applied.

Abstract: An ion beam etching device includes a grid provided between a treatment chamber and a plasma generation chamber, and for forming an ion beam by drawing ions from the plasma generation chamber; a gas introduction unit for introducing discharge gas into the plasma generation chamber; an exhaust for exhausting the treatment chamber; a substrate holder; a control unit to receive a measurement result of an in-plane film thickness distribution before the substrate is processed; and an electromagnetic coil provided outside of the plasma generation chamber in a ceiling portion opposite to the grid of the plasma generation chamber. The electromagnetic coil includes an outer coil provided on an outer circumference of the ceiling portion and an inner coil provided on an inner circumference of the ceiling portion, and the control unit controls the currents applied to the outer coil and the inner coil in accordance with the measurement result.

Abstract: A plasma processing method including: a film formation step of forming a silicon-containing film on a surface of a member inside a chamber by plasma of a silicon-containing gas and a reducing gas; a plasma processing step of plasma-processing a workpiece carried into the chamber by plasma of a processing gas after the silicon-containing film is formed on the surface of the member; and a removal step of removing the silicon-containing film from the surface of the member by plasma of a fluorine-containing gas after the plasma-processed workpiece is carried out of the chamber.

Abstract: An antenna and a substrate treating process utilizing the same are provided. The antenna may extend along an imaginary baseline having predetermined curvature and comprise a section where the distance between the baseline and intersection point between the antenna and a vertical line perpendicular to the baseline changes depending on a position on the baseline.

Abstract: A VHF Z-coil semiconductor processing plasma source uses Inductively Coupled Plasma (ICP) and has a Z-shaped coil wound about a chamber in two interconnected turns. High frequency RF electric power of from 40 MHz to 120 MHz is supplied by a power source to the coil. A process gas introduced into the chamber is energized by the coil and generates plasma ions of high density suitable for semiconductor dry etching.

Abstract: A gas supply structure for an inductively coupled plasma (ICP) processing apparatus that includes a main container 10 that houses a substrate to be processed S to perform plasma processing, a substrate mounting unit 20 on which the substrate to be processed S is mounted in the main container 10, an exhaust system 30 that discharges gas from inside of the main container 10, one or more dielectric windows 100 that form an upper window of the main container 10, and one or more RF antennas 40 which are installed to correspond to the dielectric windows 100 outside the main container 10 and to which RF power is applied to form induced electric field in the main container 10, comprising a first diffusion plate 210 that firstly diffuses the processing gas and is connected with a processing gas supplying pipe 300, and a second diffusion plate 220 that diffuses the processing gas diffused by the first diffusion plate 210 into the main container 10 and is installed under the first diffusion plate 210, wherein the second

Abstract: A stage includes a plate having a top surface on which a substrate is to be placed and a bottom surface; a plurality of first tubes each extending toward different regions of the bottom surface and providing opening ends facing the bottom surface; a partition wall defining a plurality of spaces surrounding the respective first tubes, the spaces forming a plurality of flow passages through which a heat exchange medium discharged from the first tubes flows; and a plurality of second tubes connected to the partition wall to communicate with the respective flow passages. The stage further includes a plurality of adjusting mechanisms provided in the respective flow passages. Each of the adjusting mechanisms is configured to be deformed depending on the temperature of the heat exchange medium in the corresponding flow passage to adjust the conductance of the flow passage in. accordance with the temperature.

Abstract: Embodiments of the invention generally relate to an anode for a semiconductor processing chamber. More specifically, embodiments described herein relate to a process kit including a shield serving as an anode in a physical deposition chamber. The shield has a cylindrical band, the cylindrical band having a top and a bottom, the cylindrical band sized to encircle a sputtering surface of a sputtering target disposed adjacent the top and a substrate support disposed at the bottom, the cylindrical band having an interior surface. A texture is disposed on the interior surface. The texture has a plurality of features. A shaded area is disposed in the feature wherein the shaded area is not visible to the sputtering target. A small anode surface is disposed in the shaded area.

Abstract: A two-dimensional anode array or two-dimensional multi-channel anode includes a substrate, a number of conductive regions on the substrate, and a number of electrical conductors through the substrate, each connected to one of the conductive regions for receiving and readout of the signal from the photodetector or photomultiplier.

Abstract: Methods and systems for delivering a liquid sample to an ion source for the generation of ions and subsequent analysis by mass spectrometry are provided herein. In accordance with various aspects of the present teachings, MS-based systems and methods are provided in which a desorption solvent utilized in a sampling interface to desorb one or more analyte species from an SPME device is fluidly coupled to an ion source for ionizing the one or more analyte species desorbed into the desorption solvent for subsequent mass spectrometric analysis (e.g., without a liquid chromatography (LC) column between the sampling interface and the ion source).

Abstract: A mass spectrometer vacuum interface can include a skimmer apparatus having a skimmer aperture and an internal surface. A method of operating the mass spectrometer vacuum interface can include establishing an outwardly directed flow along the internal surface of the skimmer apparatus.

Abstract: A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that enhance the performance of the design over comparable instruments. An efficient ion source enables relatively low power consumption without sacrificing measurement resolution. Variable geometry mechanical filters allow for variable resolution. An onboard ion pump removes the need for an external pumping source. A magnet and magnetic yoke produce magnetic field regions with different flux densities to run the ion pump and a magnetic sector mass analyzer. An onboard digital controller and power conversion circuit inside the vacuum chamber allows a large degree of flexibility over the operation of the mass spectrometer while eliminating the need for high-voltage electrical feedthroughs. The miniature mass spectrometer senses fractions of a percentage of inlet gas and returns mass spectra data to a computer.

Abstract: A method for manufacturing a substrate wafer 100 includes providing a device wafer (110) having a first side (111) and a second side (112); subjecting the device wafer (110) to a first high temperature process for reducing the oxygen content of the device wafer (110) at least in a region (112a) at the second side (112); bonding the second side (112) of the device wafer (110) to a first side (121) of a carrier wafer (120) to form a substrate wafer (100); processing the first side (101) of the substrate wafer (100) to reduce the thickness of the device wafer (110); subjecting the substrate wafer (100) to a second high temperature process for reducing the oxygen content at least of the device wafer (110); and at least partially integrating at least one semiconductor component (140) into the device wafer (110) after the second high temperature process.

Abstract: Embodiments of methods for treating dielectric layers are provided herein. In some embodiments, a method of treating a dielectric layer disposed on a substrate supported in a process chamber includes: (a) exposing the dielectric layer to an active radical species formed in a plasma for a first period of time; (b) heating the dielectric layer to a peak temperature of about 900 degrees Celsius to about 1200 degrees Celsius; and (c) maintaining the peak temperature for a second period of time of about 1 second to about 20 seconds.