Abstract: Provided is a dye-sensitized solar cell element comprising at least one dye-sensitized solar cell, wherein the dye-sensitized solar cell includes a first base material including a transparent substrate, a second base material which faces the first base material, an annular sealing portion which bonds the first base material and the second base material, and an oxide semiconductor layer which is provided between the first base material and the second base material, wherein the second base material has a flexibility, wherein the second base material includes an annular bonding edge portion which is bonded to the sealing portion and a main body portion in an inner side of the bonding edge portion, and wherein a portion of the main body portion is a convex bending portion which is bent to be convex toward a side opposite to the first base material.

Abstract: Disclosed is a simple, cheaper and green approach for low temperature synthesis of functionalized multilayer fullerene from the pure ghee (clarified butter) to obtain activated multishell graphitized non-porous fullerene in the form of nano-onions (CNOs), for fabricating high performance exohedral type of super capacitors by incorporating suitable transition metal oxide. Further, the approach relates to an exohedral type supercapacitor composite, containing non-porous CNOs and transition metal oxide nanoparticles with enhanced specific capacitance in 0.5 M H2SO4.

Abstract: The present invention provides for two types of wide operating temperature range electrolyte formulations that contain methyl butyrate (MB) and additives have been investigated and compared in Lithium-ion capacitors (LICs), which were consisted of hard carbon (HC)/stabilized lithium metal powder (SLMP) anodes and activated carbon (AC) cathodes. The electrolyte L1 that was 1M LiPF6 in ethylene carbonate (EC)+ethyl methyl carbonate (EMC)+MB (20:20:60 v/v %)+0.1M lithium bis(oxalato)borate (LiBOB) and electrolyte L2 that was 1M LiPF6 in EC+EMC+MB (20:20:60 v/v %)+0.1M lithium difluoro(oxalato)borate (LiDFOB) enabled the LICs to discharge at the temperature as low as ?40° C., which the conventional electrolyte LP30 that was 1 M LiPF6 in EC+dimethyl carbonate (DMC) (50:50 w/w %) could not achieve. At the low temperature of ?40° C., L2 held more than 64% of the discharge capacity at 30° C., while the L1 only had the discharge capacity retention of 30%.

Abstract: An electrode for an energy storage device including a Zn layer or Zn alloy layer, a Ni layer, and a Sn layer or Sn alloy layer formed by plating on a connecting terminal part of a positive electrode composed of Al so that the resistance value at the contacting point is reduced and the voltage of the energy storage device can be effectively supplied without any drop. Accordingly, this electrode can be soldered to a Cu negative electrode, which is composed of metal that is different species from Al, through a Sn layer or a Sn alloy layer so that jointing strength of the Al positive electrode and the Cu negative electrode can be enhanced. The contacting area is increased in comparison with the conventional jointing by spot-welding or conventional fastening by a bolt so that the resistance value at the contacting point is reduced.

Abstract: A separator such as for an electrochemical double layer capacitor includes acicular inorganic particles that are dried to form a porous membrane. Example inorganic particles are calcium silicate particles. A deposition method implementing slurry that includes the acicular inorganic particles and a dispersing medium along with a binder material can be used to form the separator layer directly on electrode materials.

Abstract: Representative embodiments provide a liquid or gel separator utilized to separate and space apart first and second conductors or electrodes of an energy storage device, such as a battery or a supercapacitor. A representative liquid or gel separator comprises a plurality of particles, typically having a size (in any dimension) between about 0.5 to about 50 microns; a first, ionic liquid electrolyte; and a polymer. In another representative embodiment, the plurality of particles comprise diatoms, diatomaceous frustules, and/or diatomaceous fragments or remains. Another representative embodiment further comprises a second electrolyte different from the first electrolyte; the plurality of particles are comprised of silicate glass; the first and second electrolytes comprise zinc tetrafluoroborate salt in 1-ethyl-3-methylimidalzolium tetrafluoroborate ionic liquid; and the polymer comprises polyvinyl alcohol (“PVA”) or polyvinylidene fluoride (“PVFD”).

Abstract: A kill switch including a switch assembly. When the switch assembly moves from a switch first configuration to a switch second configuration with the switch assembly operatively connected to a controller of a tractor, a kill electrical signal is provided to the controller to stop the tractor powering a power take-off thereof. A cord is securable to the switch assembly and to the piece of machinery to extend along a rotary drive shaft between the tractor and the piece of machinery. A switch actuating element extends from the cord, the switch actuating element being removably securable to the switch assembly. In the switch first configuration with the switch actuating element secured to the switch assembly, the switch actuating element maintains the switch assembly in the switch first configuration. When the switch actuating element is removed from the actuating element receiving portion, the switch assembly moves to the switch second configuration.

Abstract: A switch conversion apparatus including an interface device, a mounting plate configured to mount to a toggle switch and including at least one aperture for receiving a toggle arm of a toggle switch, and an actuator plate configured to slidably engage the mounting plate and including at least one aperture for receiving and engaging a toggle arm of a toggle switch when engaged by the interface device so as to transition the state of the switch. Other embodiments of a switch conversion apparatus include one or more mechanical, electrical, and/or pneumatic timers.

Abstract: A membrane switch including a first membrane, a second membrane, a first electrode disposed on the first membrane, a second electrode disposed on the second membrane, and an adhesive layer is provided. The first membrane and the second membrane are combined to each other by the adhesive layer, such that the first electrode faces the second electrode and a gap exists therebetween. At least one air tunnel is formed in the adhesive layer to communicate the gap with an external environment.

Abstract: A contact switch including a rail having slot with a first straight section and a second curved section, a toggle unit inside a housing, the toggle unit including an extension unit that slidably engages the slot and at least one contact, a contact unit in the housing including at least one contact, where the toggle unit moves in the housing such that the contacts on the toggle unit engage at least one contact on the stationary unit in the first straight section and the contacts disengage in the second curved section.

Abstract: A keyswitch device includes a base plate, a membrane circuit board, a light source, and a keyswitch assembly. The membrane circuit board is disposed on the base plate and includes a reflective film layer, a transmissive film layer, and a light guide spacer. The reflective film layer is located on the base plate. The transmissive film layer is located over the reflective film layer. The light guide spacer has an accommodating space. The reflective film layer and the transmissive film layer are respectively located at opposite sides of the light guide spacer. The light source is disposed between the reflective film layer and the transmissive film layer and located in the accommodating space. The keyswitch assembly is disposed on the membrane circuit board.

Abstract: A liquid-cooled heat dissipation apparatus includes a base (10), a telesignaling linkage member (20), a sliding plate (30) and a switch module (40). The telesignaling linkage member (20) is moveably installed on the base (10). The sliding plate (30) is installed corresponding to the telesignaling linkage member (20) and generates a movement along with the telesignaling linkage member (20). The switch module (40) includes a microswitch (41) arranged corresponding to the sliding plate (30) such that the microswitch (41) is operably opened or closed based on the movement of the sliding plate (30). Accordingly, through the opening and closing of the microswitch, the telesignaling monitoring on the functional module state can be achieved.

Abstract: A window switch assembly of a vehicle comprises a base; a rail on the base; and a control member partially received in the rail and slidable in the rail. The rail includes a first rail body extending at a traverse direction, a first end portion and a second end portion communicated with the first rail body. The first end portion includes a first switch and a second switch opposite each other in a longitudinal direction, and the second end portion includes a third switch and a fourth switch opposite each other in the longitudinal direction. The control member selectively contacts the first switch and the second switch to control a first window, and selectively contacts the third switch and the fourth switch to control a second window.

Abstract: Methods for processing signals from a magnetic user interface device having a manual actuator are disclosed. Movements of the actuator may cause relative movement between one or more magnets and one or more corresponding sensors that may each generate signals representing independent magnetic field components detected within each sensor. A field model may be used in the magnetic user interface device to translate magnetic sensor readings during operation to position information, which may then be converted to output signals for transmission to an electronic computing system representing displacement and/or deformation of the actuator. The output signals may be generated in a predetermined format, such as USB format or other computer-interface formats, that can be interpreted by the electronic computing system.

Abstract: A starting key apparatus of a vehicle includes: a housing including a stopper protrusion at an inner wall of the housing; a starting key rotating part installed in an end of the housing and in which a starting key is inserted; an ignition switch installed at another end of the housing and configured to start an engine; and a connection shaft provided in the housing and configured to connect the starting key rotating part to the starting switch, wherein the connection shaft includes: a shaft body rotated based on a shaft; a blocking lever installed in a cut groove of the shaft body to be rotated based on a hinge shaft; and a spring configured to connect the shaft body to the blocking lever to provide an elastic force to the blocking lever.

Abstract: A circuit breaker system has an SF6 tank having a wall, and an SF6 heating system. The SF6 heating system includes a heater disposed externally of the tank, and a radiator disposed on the wall inside the SF6 tank. The radiator is thermally coupled to the heater via the wall. The heating system is constructed to conduct heat from the heater through the wall to the radiator. The radiator is constructed to radiate the heat to the SF6 in the tank. A circuit breaker system has an SF6 tank having a wall, and a particle trap. The particle trap has a spar extending radially inward from the wall and a wing extending outward from each side of the spar. Each wing is spaced apart from the wall and forms a region having no electric field at the bottom of the tank adjacent the spar.

Abstract: An electronic control unit (1) or an electric actuator (2), respectively, have a switch-off device (4) which includes at least one reed switch (6, 18, 26) and at least one permanent magnet arranged outside the housing (3) and removable from the housing (3). If the permanent magnet (7) is removed from its position of usage at the housing (3), for example in order to perform maintenance of the electronic control unit (1) or of the actuator (2), respectively, the at least one reed switch (6, 18, 26) is opened, as result of which the supply link (8, 10) between the activating terminal (5) and the supply terminals (9, 11) of the control unit are interrupted in order to switch voltage-carrying functional elements of the control unit (1) and/or of the electric actuator (2) to be currentless and thus to effectively prevent an unwanted spark discharge.

Abstract: A controller for confirming the contact status of a latch relay embedded in an electric power meter according to the invention includes a microcomputer unit that is electrically connected to the latch relay for reading and providing the contact switching status information of the latch relay during a power failure, and read the contact switching status information stored during the power failure when a power recovers, and configured to output an opening control signal to the latch relay when the read contact switching status is an open state, and configured to output a closing control signal to the latch relay when the read contact switching status is a closed state; and a non-volatile memory that stores the contact switching status information of the latch relay provided by the microcomputer unit or provides the contact switching status information of the latch relay to the microcomputer unit during a power failure.

Abstract: Circuitry for controlling relay activation timing is described. The circuitry includes voltage zero cross detection circuitry configured to produce a zero cross detection signal indicating a zero cross time of an alternating current (AC) signal. The circuitry also includes current measuring circuitry coupled to voltage zero cross detection circuitry. The current measuring circuitry is configured to produce a current flow detection signal indicating a current flow start time of the AC signal. The circuitry further includes relay circuitry coupled to the current measuring circuitry. The circuitry additionally includes a processor coupled to the voltage zero cross detection circuitry, to the current measuring circuitry, and to the relay circuitry. The processor is configured to determine a relay time error based on the zero cross time and the current flow start time. The processor is also configured to control relay activation signal timing to reduce the relay time error.

Abstract: A microelectromechanical system switch includes a signal input line, a signal output line, a deformable conducting membrane electrically connected to the signal output line and including a contact dimple facing the signal input line, and an actuation electrode. The membrane has a planar round shape, with a radial opening in the direction of the signal input line, narrowing from the periphery towards the center of the membrane, the contact dimple being formed in the central region of the membrane, the actuation electrode has the same shape as the membrane, and the gap between the membrane, facing the actuation electrode, and the actuation electrode is an airgap only.

Abstract: In the present disclosure, a link part is connected to a worm wheel rotated according to rotation of a worm gear and a movement member is connected to the link part, whereby a rotational motion of the worm wheel is changed to a translational motion in a horizontal direction through the link part and the movement member. Thus, although an indicator is positioned on an upper side of a handle insertion part, a position according to movement of a circuit breaker body may be easily indicated, while using a simple structure.

Abstract: The 3-way disconnector and an earth switch for a gas insulated switchgear includes: a movable portion including a disconnector movable portion and an earth switch movable portion; a disconnector mover and an earth switch mover installed in the disconnector movable portion and the earth switch movable portion so as to be linearly movable; a driving lever rotatably installed between the disconnector mover and the earth switch mover; and a first lever and a second lever rotated by receiving a rotational force of the driving lever, and configured to move the disconnector mover and the earth switch mover, respectively, wherein a driver is protruded at one side of the driving lever, and a driving pin is provided at an end of the driver, and wherein the driving pin is configured to selectively move one of the first and second levers.

Abstract: An electrical switch includes a fixed electrical contact; a movable electrical contact which is moveable relative to thereto between an ON position in contact with and, an OFF position out of contact with, the fixed electrical contact; a contact mover movably coupled to a terminal member moveable relative thereto so as to move the movable electrical contact between the ON and OFF positions; a biasing member coupling the contact mover and the terminal member together such that said biasing member acts upon the contact mover as the contact mover moves the movable electrical contact relative to the fixed electrical contact between the ON and OFF positions; wherein in the ON position, electrical current flows along a path comprising the terminal member, contact mover and movable electrical contact in series, and, an electrical insulation member arranged in series with the biasing member between the contact mover and the terminal member.

Abstract: A method includes assessing a plurality of Titanium plates to determine a grain size for each plate and removing all Titanium plates with an average grain size that is larger than a threshold size from the plurality of Titanium plates. One of the Titanium plates remaining in the plurality of Titanium plates after the removing step is then used to form a cathode for an ion pump.

Abstract: An emitter for an X-ray tube device is configured to irradiate an anode with electrons for X-ray emission. The emitter includes an electron emission portion to be heated by an electric current, a current application leg for supplying the electric current to the electron emission portion, a support leg, a current application leg fixing portion for supporting the current application leg and supplying the electric current to the current application leg, and a support leg fixing portion for supporting the support leg. At least one of materials and shapes are different between the current application leg fixing portion and the support leg fixing portion so that a difference in an amount of thermal deformation between the current application leg and the support leg in a direction vertical to the electron emission portion is reduced when the electron emission portion is heated.

Abstract: In the present invention, a computed tomography system, an X-ray tube used therein and a cathode assembly disposed in the X-ray tube, as well as an associated method of use, is provided that includes a gantry and the X-ray tube coupled to the gantry. The X-ray tube includes the cathode assembly having a pair of emission surfaces for generating an electron beam, where the pair of emission surfaces are disposed in the cathode assembly at angles with respect to one another. The X-ray tube further includes a focusing electrode for focusing the electron beam, an extraction electrode which electrostatically controls the intensity of the electron beam by adjustment of a positive or negative biasing voltage applied to the extraction electrode, a target for generating X-rays when impinged upon by the electron beam and a magnetic focusing assembly located between the cathode assembly and the target for focusing the electron beam towards the target.

Abstract: A control device that controls a spectrometer includes: a specimen image display control section that performs a control process that displays a specimen image acquired by the spectrometer on a display section; and an spectrometer control section that performs a control process that causes the spectrometer to start analysis based on designation of an analysis position within the specimen image that has been performed by a pointing device, and performs a control process that causes the spectrometer to stop the analysis based on cancellation of the designation of the analysis position that has been performed by the pointing device.

Abstract: In a charged particle apparatus with an ion pump, which is a charged particle beam apparatus with an ion pump including a charged particle beam irradiation detecting unit for irradiating a sample with a charged particle beam in a chamber and detecting a secondary charged particle, an image processing unit for forming a secondary charged particle image from a detection signal of the detected secondary charged particle, an output unit for processing at the image processing unit and outputting an image, an ion pump for maintaining the interior of the processing chamber in a vacuum state, a driving power supply unit of the ion pump, and a high voltage cable for connecting the ion pump and the driving power supply unit, the driving power supply unit of the ion pump is structured to include a high voltage power supply circuit unit for operating the ion pump, a load current detection circuit unit for detecting a load current applied to the ion pump, and a canceller circuit unit for reducing low frequency noise appli

Abstract: Provided is a charged particle beam apparatus which includes a charged particle source, a sample table on which a sample is placed, a charged particle beam optical system that includes an objective lens and emits a charged particle beam emitted from the charged particle source onto the sample, a plurality of detectors which detect secondary particles emitted from the sample when being irradiated with the charged particle beam, and a rotation member which magnetically, electrically, or mechanically changes a detected azimuth angle of the secondary particles emitted from the sample.

Abstract: When an electrode (29) such as a grid applied with a negative voltage is installed in front of an objective lens (23), low energy electrons among secondary electrons (25) generated from a sample (24) by an electron beam or the like is reflected by the electrode to come into a detector (22) installed in the sample (24) side, while electrons of higher energy are not detected, since they are not reflected by the electrode. Accordingly, since only the electrons of lower energy of the secondary electrons can be detected by discriminating the secondary electrons by the energy, it is possible to obtain a detection signal, e.g., rich in the information on the surface state of the sample.

Abstract: An object of the present invention is to realize both of the accuracy of measuring the amount of secondary electron emissions and the stability of a charged particle beam image in a charged particle beam device. In a charged particle beam device, extraction of detected signals is started by a first trigger signal, the extraction of the detected signals is completed by a second trigger signal, the detected signals are sampled N times using N (N is a natural number) third trigger signals that equally divide an interval time T between the first trigger signal and the second trigger signal, secondary charged particles are measured by integrating and averaging the signals sampled in respective division times ?T obtained by equally dividing the interval time T, and the division time ?T is controlled in such a manner that the measured number of secondary charged particles becomes larger than the minimum number of charged particles satisfying ergodicity.

Abstract: A method of operating a charged particle beam system, the method comprises extracting a particle beam from a source; performing a first accelerating of the particles of the beam; forming a plurality of particle beamlets from the beam after the performing of the first accelerating; performing a second accelerating of the particles of the beamlets; performing a first decelerating of the particles of the beamlets after the performing of the second accelerating; deflecting the beamlets in a direction oriented transverse to a direction of propagation of the particles of the beamlets after the performing of the first decelerating; performing a second decelerating of the particles of the beamlets after the deflecting of the beamlets; and allowing the particles of the beamlets to be incident on an object surface after the performing of the second decelerating.

Abstract: An imaging system that selectively alternates a first, non-destructive imaging mode and a second, destructive imaging mode to analyze a specimen so as to determine an atomic structure and composition of the specimen is provided. The field ionization mode can be used to acquire first images of ionized atoms of an imaging gas present in a chamber having the specimen disposed therein, and the field evaporation mode can be used to acquire second images of ionized specimen atoms evaporated from a surface of the specimen with the imaging gas remaining in the chamber. The first and second image data can be analyzed in real time, during the specimen analysis, and results can be used to dynamically adjust operating parameters of the imaging system.

Abstract: An ion implantation apparatus and a method for ion implantation provides for implanting multiple substrates simultaneously. The different substrates are on corresponding platens within an ion implantation chamber or they may be positioned on separate substrate holders on a single oversized platen. The substrates and platen or platens, are translatable with respect to an ion beam, the individual substrates are rotatable and the position of the substrates relative to one another in the ion implantation chamber are movable. By rotating, translating and repositioning substrates during the ion implantation process, the entirety of all substrates are implanted by an ion beam even when the ion beam has a relatively small footprint and a relatively short scan length, compared to the diameters of the substrates undergoing implantation.

Abstract: An atmospheric-pressure plasma jet generating device is disclosed, which comprises a housing, a discharge tube, an air inlet, and an outlet. The air inlet is connected to the outlet and the discharge tube. The discharge tube includes an internal electrode, a first dielectric material, and an external electrode. The first dielectric material is placed between the external electrode and the internal electrode, and there are some channels between internal electrode and first dielectric tube. An external power source is electrically connected to the internal electrode and the external electrode to generate a high electric field within the discharge tube. When the working gas flows through the discharge tube from the air inlet, the plasma is generated by the high electric field, and then flows out through the outlet. The present invention can generate non-thermal atmospheric-pressure plasma jet for biomedical processing.

Abstract: A method for processing substrate in a chamber, which has at least one plasma generating source, a reactive gas source for providing reactive gas into the interior region of the chamber, and a non-reactive gas source for providing non-reactive gas into the interior region, is provided. The method includes performing a mixed-mode pulsing (MMP) preparation phase, including flowing reactive gas into the interior region and forming a first plasma to process the substrate that is disposed on a work piece holder. The method further includes performing a MMP reactive phase, including flowing at least non-reactive gas into the interior region, and forming a second plasma to process the substrate, the second plasma is formed with a reactive gas flow during the MMP reactive phase that is less than a reactive gas flow during the MMP preparation phase. Perform the method steps a plurality of times.

Abstract: The present invention provides a plasma processing method that uses a plasma processing apparatus including a plasma processing chamber in which a sample is plasma processed, a first radio-frequency power supply that supplies a first radio-frequency power for generating plasma, and a second radio-frequency power supply that supplies a second radio-frequency power to a sample stage on which the sample is mounted, wherein the plasma processing method includes the steps of modulating the first radio-frequency power by a first pulse; and controlling a plasma dissociation state to create a desired dissociation state by gradually controlling a duty ratio of the first pulse as a plasma processing time elapses.

Abstract: A voltage sensor of a substrate processing system including a multi-divider circuit, a clamping circuit and first and second outputs. The multi-divider circuit receives a RF signal indicative of a RF voltage at a substrate. The multi-divider circuit includes dividers of respective channels and outputting first and second reduced voltages based on the received RF signal. The reduced voltages are less than the RF voltage. The clamping circuit clamps the first reduced voltage to a first predetermined voltage when the RF voltage is greater than a second predetermined voltage or the first reduced voltage is greater than a third predetermined voltage. While the received RF signal is in first and second voltage ranges, the first and second outputs output output signals based respectively on the first and second reduced voltages. The first predetermined voltage is based on a maximum value of the first voltage range.

Abstract: Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition (“ALD”) fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.

Abstract: Using the intensity ratio of peaks on a standard mass spectrum of the target compound and peaks with the same m/z on the measured mass spectrum near the retention time of said compound, a scale factor waveform close to the chromatogram shape based on the target compound alone is computed, and m/z candidates for quantitation are extracted based on the correlation between the measured mass chromatogram of the target compound and the scale factor waveform. Furthermore, an intensity ratio is determined with reference to the m/z peaks showing the greatest scale factor on the measured mass spectrum at the measurement time point showing the greatest scale factor in the scale factor waveform, and m/z candidates for quantitation/confirmation are narrowed down based on whether they fall within an allowable range based on peak intensity ratio on the standard mass spectrum.

Abstract: A mass spectrometer including an ionization source including an ESI probe (201), an ESI power source (24), a corona needle (202) and an APCI power source (24); an ionization condition storage section (41) for storing a plurality of ionization conditions related to the liquid sample, set by an analysis operator, with the ionization conditions differing from each other in the value of the ESI voltage or/and the value of the APCI voltage; a mass spectrometry executer (43) for conducting a mass spectrometry for an ion generated from the liquid sample using each of the plurality of ionization conditions; and a mass spectrometry result selector (44) for selecting, for each of the one or plurality of components, a mass spectrometry result in which the ion is detected with a suitable level of intensity for an analysis, from the mass spectrometry results respectively obtained for the plurality of ionization conditions.

Abstract: Provided herein are capillaries for use in an electrophoretic separations. The capillaries can comprise an elongated tubular wall defining a path for fluid flow from an inlet to a tapered outlet; and a decoupler junction positioned within the elongated tubular wall upstream of the tapered outlet. The decoupler junction can comprise a plurality of microchannels penetrating through the elongated tubular wall and an ion-permeable polymer coating the plurality of microchannels. Also provided are sheathless interfaces for coupling capillary electrophoresis (CE) with mass spectrometry that employ these capillaries.

Abstract: In order to remove from a substrate having a concavo-convex pattern formed on a surface of the substrate, a solid material with which a concave portion of the concavo-convex pattern is filled and which is formed by evaporating a solvent in a sublimable substance solution containing a sublimable substance that sublimates at a temperature equal to or higher than a first temperature, and an impurity that evaporates at a temperature equal to or higher than a second temperature that is higher than the first temperature, the prevent invention provides a substrate processing apparatus and a substrate processing method which heat the substrate to a temperature equal to or higher than the second temperature.

Abstract: An etching fault is suppressed by use of an etching gas containing iodine heptafluoride. Provided is an attached substance removing method of removing an attached substance containing an iodine oxide attached to a component included in a chamber or a surface of a pipe connected with the chamber by use of a cleaning gas containing a fluorine-containing gas. Also provided is a dry etching method, including the steps of supplying an etching gas containing an iodine-containing gas into a chamber to perform etching on a surface of a substrate; and after the etching is performed on the surface of the substrate, removing an attached substance containing an iodine oxide attached to a component included in the chamber or a surface of a pipe connected with the chamber by use of a cleaning gas containing a fluorine-containing gas.

Abstract: A maximum height, that corresponds to a width of a pattern formed on a front surface of a substrate to be processed, is searched among a plurality of maximum heights each being a maximum value of a height of a pattern having a particular width when pattern collapse does not occur. Thereafter, it is determined that whether or not a height of the pattern is greater than the maximum height. In a case where the height of the pattern is greater than the maximum height, a hydrophobizing agent is supplied to the substrate such that a hydrophobized region is formed on a whole tip-side region in a lateral surface of the pattern, and a non-hydrophobized region remains on at least a portion of a root-side region in the lateral surface of the pattern. Thereafter the substrate is dried.

Abstract: A wax removal method uniformly removes wax adhering to a wafer surface and reduces the problems of re-adhesion of particles and filter clogging of a cleaning bath during cleaning. The method uses cleaning liquid which contains microbubbles.

Abstract: A technique capable of forming a film at the bottom of a deep hole having a high aspect ratio. A method of manufacturing a semiconductor device, including: (a) loading a substrate having a hole into a transfer space via a substrate loading/unloading port; (b) moving the substrate to a processing space; (c) forming a precursor in the hole by simultaneously supplying a first process gas to the substrate in the processing space and an inert gas into the transfer space with the processing space spatially connected to the transfer space and maintaining a difference between a first inner pressure of the processing space and a first inner pressure of the transfer space within a predetermined range; and (d) forming a thin film in the hole after performing (b).

Abstract: A technique capable of forming a side wall of a gate electrode having high resistance-to-etching and low leakage current is provided. A method of manufacturing a semiconductor device according to the technique includes: (a) loading a substrate into a processing space in a process vessel, the substrate having thereon a gate electrode and an insulating film formed on a side surface of the gate electrode as a side wall; and (b) forming an etching-resistant film containing carbon and nitrogen on a surface of the insulating film by supplying a carbon-containing gas into the processing space.

Abstract: A method for forming a metal oxide layer on a wafer. In some embodiments, the method includes forming a layer of a metal oxyhalide on a wafer followed by an anneal of the wafer which removes halogens from the layer to form a layer of metal oxide. A semiconductor device may be formed from the wafer.

Abstract: The present disclosure relates to a method and apparatus for performing a plasma enhanced ALD (PEALD) process that provides for improved step coverage. The process introduces a precursor gas into a processing chamber comprising a semiconductor workpiece. The first gas is ionized to form a plurality of ionized precursor molecules. A bias voltage is subsequently applied to the workpiece. The bias voltage attracts the ionized precursor molecules to the workpiece, so as to provide anisotropic coverage of the workpiece with the precursor gas. A reactant gas is introduced into the processing chamber. A plasma is subsequently ignited from the reactant gas, causing the reactant gas to react with the ionized precursor molecules that have been deposited onto the substrate to form a deposited layer on the workpiece.